CN213536505U - Multi-station full-automatic feeding and discharging type micro electronic manufacturing machine - Google Patents
Multi-station full-automatic feeding and discharging type micro electronic manufacturing machine Download PDFInfo
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- CN213536505U CN213536505U CN202022393853.XU CN202022393853U CN213536505U CN 213536505 U CN213536505 U CN 213536505U CN 202022393853 U CN202022393853 U CN 202022393853U CN 213536505 U CN213536505 U CN 213536505U
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Abstract
The utility model discloses a multi-station full-automatic feeding and discharging type micro-electronic manufacturing machine, which comprises a manufacturing machine main body, wherein the manufacturing machine main body comprises a base, a controller and an exposure component, the micro-electronic manufacturing machine also comprises two rows of processing stations arranged at intervals in parallel, a carrying mechanical arm and a feeding and discharging mechanical arm, the two rows of processing stations are arranged at the top of the base, each row of processing stations comprises a plurality of processing stations which can run between the two rows of processing stations and can grasp product workpieces with different materials by switching a mechanical clamping jaw or a vacuum chuck through a rotary driving mechanism, the micro-electronic manufacturing machine is also provided with the feeding and discharging mechanical arm, two X-axis linear driving mechanisms are respectively connected with a feeding clamping jaw and a discharging clamping jaw in a transmission way, the feeding and discharging of the products can be realized through the arrangement of the feeding clamping jaw and the discharging clamping jaw, and the carrying mechanical arm is matched, therefore, automatic production is realized, the labor cost is reduced, and the production efficiency is improved.
Description
Technical Field
The utility model relates to a microelectronics makes the field, concretely relates to unloading formula microelectronic fabrication machine in multistation is full-automatic.
Background
In the microelectronics industry, optical treatment, such as curing, is often required to be performed on a product, and an exposure assembly is adopted to irradiate the product in the curing process, wherein the exposure assembly comprises an optical device, an installation chamber and a controlled exposure chamber, and the product to be processed is placed below the controlled exposure chamber; at present common processing mode is to progressively carry the product of treating to make to the microelectronic manufacturing machine department through the transmission band, goes to place the processing station by the manual work again on, and the product is taken off by the manual work again after finishing handling and is placed on the product work or material rest, and it is long waiting time in the middle of not only, and consumes manual operation, and under efficiency was low relatively, intelligent degree was lower relatively.
Therefore, how to solve the defects of the prior art is a subject of the present invention.
Disclosure of Invention
In order to solve the problem, the utility model discloses a multistation full-automatic unloading formula micro-electronics is made machine.
In order to achieve the above purpose, the utility model provides a following technical scheme: a multi-station full-automatic feeding and discharging type micro-electronic manufacturing machine comprises a manufacturing machine main body, wherein the manufacturing machine main body comprises a base, a controller and an exposure assembly, the micro-electronic manufacturing machine further comprises two rows of processing stations, a carrying mechanical arm and a feeding and discharging mechanical arm which are arranged in parallel at intervals, the two rows of processing stations are arranged at the top of the base, each row of processing stations comprises a plurality of processing stations, the processing stations are located on the same straight line, and the exposure assembly matched with the processing stations is arranged right above the manufacturing machine main body and corresponds to the processing stations;
the carrying manipulator is arranged between two rows of processing stations and comprises a linear driving mechanism, a lifting driving mechanism, a horizontal displacement driving mechanism and a rotary driving mechanism, wherein the linear driving mechanism is horizontally fixed on the base, the lifting driving mechanism is vertically arranged, the bottom end of the lifting driving mechanism is in transmission connection with the linear driving mechanism and is driven by the linear driving mechanism to move along the direction parallel to the straight line of each row of processing stations, the horizontal displacement driving mechanism is horizontally arranged, the horizontal displacement driving mechanism is in transmission connection with the lifting driving mechanism and is driven by the lifting driving mechanism to move along the vertical direction, the rotary driving mechanism is in transmission connection with the horizontal displacement driving mechanism and is driven by the horizontal displacement driving mechanism to move horizontally, one end of the rotary driving mechanism is in transmission connection with a mechanical clamping jaw, the other end of the vacuum cup is connected with a vacuum chuck in a transmission way;
the feeding and discharging manipulator is arranged on the side part of the machining station and comprises a lifting shaft fixed at the top of the base, a first X-axis linear driving mechanism and a second X-axis linear driving mechanism, the first X-axis linear driving mechanism and the second X-axis linear driving mechanism are in transmission connection with the lifting shaft and driven by the lifting shaft to move along the vertical direction, the first X-axis linear driving mechanism is in transmission connection with a feeding clamping jaw, and the second X-axis linear driving mechanism is in transmission connection with a discharging clamping jaw;
the motion ranges of the mechanical clamping jaws and the vacuum chuck cover the regions where all processing stations are located and the motion region of the loading and unloading manipulator;
and the signal output end of the controller is electrically connected with the carrying manipulator and the feeding and discharging manipulator.
Furthermore, two rows of processing stations are arranged on a lifting platform, the bottom of the lifting platform is in transmission connection with a vertical driving mechanism, the vertical driving mechanism is fixed on the base, and the lifting platform is driven by the vertical driving mechanism to move in the vertical direction.
Furthermore, the exposure component comprises an optical device, an installation chamber and a controlled exposure chamber, the optical device is installed in the installation chamber, the controlled exposure chamber is arranged below the installation chamber, the controlled exposure chamber is right opposite to the processing station, a longitudinal driving mechanism is further installed on the manufacturing machine main body, and the exposure component is in transmission connection with the longitudinal driving mechanism and is driven by the longitudinal driving mechanism to move along the vertical direction.
Furthermore, a protective cover is arranged at the top of the base and is a transparent or semitransparent cover.
Furthermore, an electric heating piece is arranged in the processing station.
Furthermore, a material rack to be processed and a finished product rack are respectively arranged on the base and below the feeding clamping jaw and the discharging clamping jaw corresponding to the feeding and discharging manipulator.
Compared with the prior art, the utility model has the advantages of as follows: the utility model discloses a microelectronic manufacturing machine is provided with two and is listed as processing station, be provided with the transport manipulator between this two processing station, it can be in two operation between processing station, and can switch mechanical clamping jaw or vacuum chuck in order to snatch the product work piece of different materials through rotary driving mechanism, still be provided with and go up unloading manipulator, it includes two telescopic X axle linear driving mechanism, two X axle linear driving mechanism transmission respectively are connected with material loading clamping jaw and unloading clamping jaw, can realize the material loading and the unloading of product through setting up of material loading clamping jaw and unloading clamping jaw, and the transport manipulator of arranging uses and can will wait to process the automatic transport of product to processing station, realize automated production with this, in order to reduce the human cost, and the production efficiency is improved.
Drawings
Fig. 1 is a perspective view of the present invention;
fig. 2 is a perspective view of another perspective of the present invention;
FIG. 3 is a simplified schematic diagram of the present invention;
fig. 4 is a simplified left-side view of fig. 1 according to the present invention.
List of reference numerals: 100 a machine body, 101 a base, 102 a controller, 103 an exposure assembly, 104 a longitudinal driving mechanism, 105 a protective cover, 131 an optical device, 132 a mounting chamber, 133 a controlled exposure chamber, 200 a processing station, 300 a carrying mechanical hand, 301 a linear driving mechanism, 302 a lifting driving mechanism, 303 a horizontal displacement driving mechanism, 304 a rotary driving mechanism, 305 a mechanical clamping jaw, 306 a vacuum chuck, 400 a loading and unloading mechanical hand, 401 a lifting shaft, 402 a first x-axis linear driving mechanism, 403 a second x-axis linear driving mechanism, 404 a loading mechanical hand, 405 a loading mechanical hand, 500 a lifting platform and 501 a vertical driving mechanism.
Detailed Description
In order to make the technical problem, technical solution and advantageous effects to be solved by the present invention more clearly understood, the following description is given in conjunction with the accompanying drawings and embodiments to illustrate the present invention in further detail. It should be understood that the specific embodiments described herein are merely illustrative of the invention and are not intended to limit the invention.
It will be understood that when an element is referred to as being "secured to" or "disposed on" another element, it can be directly on the other element or be indirectly on the other element. When an element is referred to as being "connected to" another element, it can be directly connected to the other element or be indirectly connected to the other element.
It will be understood that the terms "length," "width," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," and the like are used in an orientation or positional relationship indicated in the drawings for convenience in describing the invention and to simplify the description, and are not intended to indicate or imply that the device or element so referred to must have a particular orientation, be constructed and operated in a particular orientation, and thus should not be construed as limiting the invention.
Furthermore, the terms "first", "second" and "first" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of the present invention, "a plurality" means two or more unless specifically limited otherwise.
Example (b): referring to fig. 1-4, a multi-station full-automatic loading and unloading type micro-electronic manufacturing machine comprises a manufacturing machine main body 100, wherein the manufacturing machine main body 100 comprises a base 101, a controller 102 and an exposure component 103, the controller 102 adopts a PLC controller, the exposure component 103 adopts an existing structure and comprises an optical device 131, a mounting chamber 132 and a controlled exposure chamber 133, the optical device 131 is mounted in the mounting chamber 132, the controlled exposure chamber 133 is arranged below the mounting chamber 132, the controlled exposure chamber 133 is opposite to a processing station 200, and a workpiece to be processed is placed on the processing station 200 and exposed and cured under the controlled exposure chamber 133 in a working state;
the main body 100 of the manufacturing machine is also provided with a longitudinal driving mechanism 104, the exposure component 103 is in transmission connection with the longitudinal driving mechanism 104 and is driven by the longitudinal driving mechanism 104 to move along the vertical direction, the longitudinal driving mechanism 104 adopts a lifting cylinder, a controlled exposure chamber 133 of the exposure component 103 is fixedly connected with a push rod of the lifting cylinder and is driven by the lifting cylinder to move along the vertical direction, the internal elements of the controlled exposure chamber 133 generally have service life and need to be replaced when reaching certain working times, and when needing to be replaced, the exposure chamber 133 can be lifted upwards through the longitudinal driving mechanism 104 to be replaced;
the microelectronic manufacturing machine further comprises two rows of processing stations 200 arranged in parallel at intervals, a carrying manipulator 300 and a loading and unloading manipulator 400, wherein the two rows of processing stations 200 are arranged at the top of the base 101, each row of processing stations 200 comprises a plurality of processing stations 200, the processing stations 200 are located on the same straight line, and an exposure assembly 103 matched with the processing stations is arranged on the main body 100 of the manufacturing machine and right above the main body 100 of the manufacturing machine corresponding to the processing stations 200; a placing groove for accommodating a workpiece to be machined is formed in the machining station 200, and the workpiece is placed in the placing groove of the machining station 200 in a working state;
the carrying manipulator 300 is arranged between two rows of processing stations 200, the carrying manipulator 300 comprises a linear driving mechanism 301, a lifting driving mechanism 302, a horizontal displacement driving mechanism 303 and a rotary driving mechanism 304, the linear driving mechanism 301 is horizontally fixed on the base 101, the lifting driving mechanism 302 is vertically arranged, the bottom end of the lifting driving mechanism 302 is in transmission connection with the linear driving mechanism 301 and is driven by the linear driving mechanism 301 to move along the direction parallel to the straight line of each row of processing stations 200, the horizontal displacement driving mechanism 303 is horizontally arranged, the horizontal displacement driving mechanism 303 is in transmission connection with the lifting driving mechanism 302 and is driven by the lifting driving mechanism 302 to move along the vertical direction, the rotary driving mechanism 304 is in transmission connection with the horizontal displacement driving mechanism 303 and is driven by the horizontal displacement driving mechanism 303 to make horizontal displacement, one end of the rotary driving mechanism 304 is in transmission connection with a mechanical clamping jaw 305, the other end is connected with a vacuum chuck 306 in a transmission way; the linear driving mechanism 301, the lifting driving mechanism 302 and the horizontal displacement driving mechanism 303 all adopt the existing ball screw linear module driven by a servo motor, the linear driving mechanism 301 is used for driving the mechanical clamping jaw 305 and the vacuum chuck 306 to move between two parallel rows of processing stations 200, the lifting driving mechanism 302 is used for driving the mechanical clamping jaw 305 and the vacuum chuck 306 to do lifting movement, and the horizontal displacement driving mechanism 303 is used for driving the horizontal displacement driving mechanism 303 to do extending or retracting movement;
the rotary driving mechanism 304 adopts a worm and gear speed reducing mechanism driven by a servo motor, one end of a rotating shaft of the worm and gear speed reducing mechanism is fixedly connected with a mechanical clamping jaw 305 through a support, the other end of the rotating shaft of the worm and gear speed reducing mechanism is fixedly connected with a vacuum chuck 306 through a support, the mechanical clamping jaw 305 adopts a pneumatic clamping jaw which is matched with the vacuum chuck 306 for use and is used for grabbing different types of parts, the vacuum chuck 306 is mainly used for sucking parts with smooth surfaces, and the mechanical clamping jaw 305 is used for grabbing parts which are difficult to adsorb;
the loading and unloading manipulator 400 is arranged at the side part of the processing station 200, the loading and unloading manipulator 400 comprises a lifting shaft 401 fixed at the top of the base 101, a first X-axis linear driving mechanism 402 and a second X-axis linear driving mechanism 403, the first X-axis linear driving mechanism 402 and the second X-axis linear driving mechanism 403 are in transmission connection with the lifting shaft 401 and driven by the lifting shaft 401 to move along the vertical direction, a loading clamping jaw 404 is in transmission connection with the first X-axis linear driving mechanism 402, and a unloading clamping jaw 405 is in transmission connection with the second X-axis linear driving mechanism 403; the lifting shaft 401, the first X-axis linear driving mechanism 402 and the second X-axis linear driving mechanism 403 also adopt a ball screw linear module driven by a servo motor, the feeding clamping jaw 404 and the discharging clamping jaw 405 both adopt pneumatic clamping jaws for grabbing parts, the lifting shaft 401 is used for driving the feeding clamping jaw 404 and the discharging clamping jaw 405 to move in the up-and-down direction, the first X-axis linear driving mechanism 402 is used for driving the feeding clamping jaw 404 to move in an extending or retracting manner, and the second X-axis linear driving mechanism 403 is used for driving the discharging clamping jaw 405 to move in an extending or retracting manner;
the movement range of the mechanical clamping jaw 305 and the vacuum chuck 306 covers all the areas where the processing stations 200 are located and the movement area of the loading and unloading robot 400; that is, the motion strokes of the mechanical clamping jaw 305 and the vacuum chuck 306 cover the motion strokes of the feeding clamping jaw 404 and the blanking clamping jaw 405 of the feeding and blanking manipulator 400, and the two can be overlapped;
the signal output end of the controller 102 is electrically connected with the servo motor of the carrying manipulator 300 and the servo motor of the loading and unloading manipulator 400, and is used for controlling the movement of the carrying manipulator and the loading and unloading manipulator, and the control and connection mode is the prior art;
a to-be-processed material rack and a finished product rack are respectively arranged on the base 101 and below the feeding clamping jaw 404 and the discharging clamping jaw 405 of the feeding and discharging manipulator 400, the to-be-processed material rack and the finished product rack are both arranged on the side portion of the feeding and discharging manipulator 400, in a working state, a workpiece to be processed on the to-be-processed material rack is taken out by the feeding clamping jaw 404 of the feeding and discharging manipulator 400 and then transferred to the side portion of the processing station 200, then the workpiece to be processed on the feeding clamping jaw 404 is taken out by the mechanical clamping jaw 305 of the carrying manipulator 300 and then transferred to the processing station 200 one by one, during discharging, the workpiece on the processing station 200 is taken out and put on the to-be-processed material rack by the mechanical clamping jaw 305 or the vacuum chuck 306 of the carrying manipulator 300, and the workpiece on the carrying manipulator 300 is taken;
two processing stations 200 all set up on a elevating platform 500, the bottom transmission of this elevating platform 500 is connected with vertical actuating mechanism 501, this vertical actuating mechanism 501 is fixed in on the base 101, elevating platform 500 is driven by vertical actuating mechanism 501 and is followed vertical direction motion, vertical actuating mechanism 501 adopts the lift cylinder, elevating platform 500 drives the work of placing on the processing station 200 at elevating platform 500 top through vertical actuating mechanism 501 and carries out the up-and-down motion to adjust the distance between work piece and the controlled exposure room 133.
The top of the base 101 is provided with a protective cover 105. the protective cover 105 is a transparent or translucent cover, and the protective cover 105 can protect on the one hand and can be used to see the working conditions inside the main body 100 of the manufacturing machine through the transparent or translucent cover on the other hand.
An electric heating sheet is arranged in the processing station 200, and when some workpieces needing to be heated are processed, the workpieces can be heated through the electric heating sheet.
The technical means disclosed by the scheme of the present invention is not limited to the technical means disclosed by the above embodiments, but also includes the technical scheme formed by the arbitrary combination of the above technical features. It should be noted that, for those skilled in the art, without departing from the principle of the present invention, several improvements and modifications can be made, and these improvements and modifications are also considered as the protection scope of the present invention.
Claims (6)
1. The utility model provides a unloading formula microelectronic manufacturing machine in multistation full-automatic, includes makes quick-witted main part (100), and this makes quick-witted main part (100) including base (101), controller (102) and exposure subassembly (103), its characterized in that: the microelectronic manufacturing machine further comprises two rows of processing stations (200) arranged in parallel at intervals, a carrying manipulator (300) and a loading and unloading manipulator (400), wherein the two rows of processing stations (200) are arranged at the top of the base (101), each row of processing stations (200) comprises a plurality of processing stations (200), the processing stations (200) are all located on the same straight line, and an exposure assembly (103) matched with the processing stations (200) is arranged right above the manufacturing machine main body (100) corresponding to the processing stations (200);
the carrying manipulator (300) is arranged between two rows of processing stations (200), the carrying manipulator (300) comprises a linear driving mechanism (301), a lifting driving mechanism (302), a horizontal displacement driving mechanism (303) and a rotary driving mechanism (304), the linear driving mechanism (301) is horizontally fixed on the base (101), the lifting driving mechanism (302) is vertically arranged, the bottom end of the lifting driving mechanism (302) is in transmission connection with the linear driving mechanism (301), the linear driving mechanism (301) drives the linear driving mechanism (301) to move in the direction parallel to the straight line of each row of processing stations (200), the horizontal displacement driving mechanism (303) is horizontally arranged, the horizontal displacement driving mechanism (303) is in transmission connection with the lifting driving mechanism (302) and is driven by the lifting driving mechanism (302) to move in the vertical direction, the rotary driving mechanism (304) is in transmission connection with the horizontal displacement driving mechanism (303) and is driven by the horizontal displacement driving mechanism (303) to perform horizontal displacement, one end of the rotary driving mechanism (304) is in transmission connection with a mechanical clamping jaw (305), and the other end of the rotary driving mechanism is in transmission connection with a vacuum chuck (306);
the feeding and discharging manipulator (400) is arranged on the side portion of the machining station (200), the feeding and discharging manipulator (400) comprises a lifting shaft (401) fixed to the top of a base (101), a first X-axis linear driving mechanism (402) and a second X-axis linear driving mechanism (403), the first X-axis linear driving mechanism (402) and the second X-axis linear driving mechanism (403) are in transmission connection with the lifting shaft (401) and are driven by the lifting shaft (401) to move in the vertical direction, a feeding clamping jaw (404) is in transmission connection with the first X-axis linear driving mechanism (402), and a discharging clamping jaw (405) is in transmission connection with the second X-axis linear driving mechanism (403);
the motion ranges of the mechanical clamping jaws (305) and the vacuum chucks (306) cover the regions of all processing stations (200) and the motion region of the loading and unloading manipulator (400);
and the signal output end of the controller (102) is electrically connected with the carrying manipulator (300) and the feeding and discharging manipulator (400).
2. The multi-station full-automatic feeding and discharging type micro-electronic manufacturing machine as claimed in claim 1, wherein: two are listed as processing station (200) all set up on a elevating platform (500), and the bottom transmission of this elevating platform (500) is connected with vertical actuating mechanism (501), and this vertical actuating mechanism (501) are fixed in on base (101), elevating platform (500) by vertical actuating mechanism (501) drive is along vertical direction motion.
3. The multi-station full-automatic feeding and discharging type micro-electronic manufacturing machine as claimed in claim 1, wherein: the exposure component (103) comprises an optical device (131), an installation chamber (132) and a controlled exposure chamber (133), the optical device (131) is installed in the installation chamber (132), the controlled exposure chamber (133) is arranged below the installation chamber (132), the controlled exposure chamber (133) is right opposite to the processing station (200), a longitudinal driving mechanism (104) is further installed on the maker main body (100), and the exposure component (103) is in transmission connection with the longitudinal driving mechanism (104) and is driven by the longitudinal driving mechanism (104) to move along the vertical direction.
4. The multi-station full-automatic feeding and discharging type micro-electronic manufacturing machine as claimed in claim 1, wherein: the top of base (101) is provided with a protection casing (105), protection casing (105) are transparent or translucent cover.
5. The multi-station full-automatic feeding and discharging type micro-electronic manufacturing machine as claimed in claim 1, wherein: an electric heating piece is arranged in the processing station (200).
6. The multi-station full-automatic feeding and discharging type micro-electronic manufacturing machine as claimed in claim 1, wherein: and a to-be-processed material rack and a finished product rack are respectively arranged on the base (101) and below the loading clamping jaw (404) and the unloading clamping jaw (405) corresponding to the loading and unloading manipulator (400).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202022393853.XU CN213536505U (en) | 2020-10-23 | 2020-10-23 | Multi-station full-automatic feeding and discharging type micro electronic manufacturing machine |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202022393853.XU CN213536505U (en) | 2020-10-23 | 2020-10-23 | Multi-station full-automatic feeding and discharging type micro electronic manufacturing machine |
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| Publication Number | Publication Date |
|---|---|
| CN213536505U true CN213536505U (en) | 2021-06-25 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202022393853.XU Active CN213536505U (en) | 2020-10-23 | 2020-10-23 | Multi-station full-automatic feeding and discharging type micro electronic manufacturing machine |
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| Country | Link |
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| CN (1) | CN213536505U (en) |
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- 2020-10-23 CN CN202022393853.XU patent/CN213536505U/en active Active
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