CN213480998U - Novel heat preservation and insulation device on scientific research type high-temperature diffusion furnace - Google Patents
Novel heat preservation and insulation device on scientific research type high-temperature diffusion furnace Download PDFInfo
- Publication number
- CN213480998U CN213480998U CN202022698556.6U CN202022698556U CN213480998U CN 213480998 U CN213480998 U CN 213480998U CN 202022698556 U CN202022698556 U CN 202022698556U CN 213480998 U CN213480998 U CN 213480998U
- Authority
- CN
- China
- Prior art keywords
- groups
- sets
- heat preservation
- type high
- side wall
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Images
Landscapes
- Furnace Housings, Linings, Walls, And Ceilings (AREA)
Abstract
The utility model relates to a diffusion furnace technical field just discloses a novel heat preservation and insulation on scientific research type high temperature diffusion furnace device, including the base, the top of base is provided with the rim, the bottom wall of rim and the top wall fixed connection of base, and the rectangular hole has been seted up to the preceding lateral wall face of rim, and the rotary trough has all been seted up at both ends about the rectangular hole corresponds the position wall on the rim, and the inside of two sets of rotary troughs all is provided with the roof, and the inside of rim is provided with two sets of sealing doors, and two sets of sealing doors all are hollow square form. The utility model discloses in, this novel heat preservation and insulation on scientific research type high temperature diffusion furnace device, the triangular groove has all been seted up to the upper and lower both ends wall of two sets of sealing door, and the inside upper and lower both sides wall of rectangular hole inside all has the inside of rotary groove and rotary groove to be provided with the roof on the furnace frame, so when sealing door is closed the furnace frame, the spring can support the roof, makes roof and triangular groove laminating, makes the upper and lower both sides wall of two sets of sealing door also closely laminate with the furnace frame, has reached the effect that improves the leakproofness.
Description
Technical Field
The utility model relates to a diffusion furnace technical field especially relates to a novel heat preservation on scientific research type high temperature diffusion furnace is thermal-insulated device.
Background
The diffusion furnace is one of important process equipment of a front process of a semiconductor production line, is used for diffusion, oxidation, annealing, alloying, sintering and other processes in industries such as large-scale integrated circuits, discrete devices, power electronics, photoelectric devices, optical fibers and the like, and has two types, namely a vertical diffusion furnace and a horizontal diffusion furnace. The vertical diffusion furnace is characterized in that the quartz boat is vertical to the horizontal plane, so that the transmission of the silicon wafer by the mechanical arm is facilitated, and the consistency of the in-chip process parameters is better. The horizontal diffusion furnace is characterized in that the quartz boat is parallel to the horizontal plane, one process furnace tube can be 4 or more than 4, the average furnace tube occupies smaller area, and the process parameters among the plates are better than those of the vertical diffusion furnace.
In the existing diffusion furnace on the market, a furnace frame is closed through a sealing door, but the sealing door is usually formed by installing tough articles such as rubber on the side wall, so that the sealing effect is improved, but the articles are easily melted under the condition of high temperature, the sealing effect cannot be achieved, and the cost is wasted. Therefore, a novel heat preservation and insulation device on a scientific research type high-temperature diffusion furnace is provided.
SUMMERY OF THE UTILITY MODEL
The utility model mainly solves the technical problems existing in the prior art and provides a novel heat preservation and insulation device on a scientific research type high-temperature diffusion furnace.
In order to achieve the purpose, the utility model adopts the following technical scheme that a novel heat preservation and insulation device on a scientific research type high-temperature diffusion furnace comprises a base, wherein the top of the base is provided with a furnace frame, the bottom wall surface of the furnace frame is fixedly connected with the top wall surface of the base, the front side wall surface of the furnace frame is provided with a rectangular hole, the upper end and the lower end of the wall surface at the position corresponding to the rectangular hole on the furnace frame are respectively provided with a rotary groove, the inner parts of the two groups of rotary grooves are respectively provided with a top plate, the inner part of the furnace frame is provided with two groups of sealing doors which are both in a hollow rectangular shape, one end of the front side wall surfaces of the two groups of sealing doors approaching to each other is fixedly provided with a handle, the right side wall surface of the sealing door close to the left side is provided with a plurality of groups of sawtooth grooves, the left side wall surface of, the left end and the right end of the upper side wall surface and the lower side wall surface of the two groups of sealing doors are fixedly provided with rotating shafts.
Preferably, hinges are arranged inside the two groups of rotary grooves, and the two groups of hinges respectively and movably connect the two groups of top plates with the front side wall surfaces of the corresponding positions on the two groups of rotary grooves.
Preferably, the inner bottom wall surfaces of the two groups of rotary grooves are fixedly provided with springs, and the top wall surfaces of the two groups of springs are fixedly connected with the rear ends of the approaching side wall surfaces of the two groups of top plates respectively.
Preferably, the two groups of sealing doors are internally provided with heat insulation layers, and the two groups of sealing doors are internally provided with partition frames.
Preferably, the two groups of the partition frames respectively partition the heat insulation layers inside the two groups of the sealing doors outside the corresponding group of the partition frames, and the heat insulation layers are filled inside the two groups of the partition frames.
Preferably, two groups of sealing doors are movably arranged in the rectangular groove on the furnace frame by the plurality of groups of rotating shafts respectively.
Advantageous effects
The utility model provides a novel heat preservation and insulation device on scientific research type high temperature diffusion furnace. The method has the following beneficial effects:
(1) the heat preservation and insulation device on the novel scientific research type high-temperature diffusion furnace is characterized in that one end, far away from each other, of each of two groups of sealing doors is movably arranged in a furnace frame through a rotating shaft, when the two groups of sealing doors rotate towards one side, close to each other, around the corresponding rotating shaft respectively, one side wall surface, close to each other, of each of the two groups of sealing doors is mutually attached, one side wall surface, close to each other, of each of the two groups of sealing doors is respectively provided with a sawtooth groove and a sawtooth, the contact area between the two groups of sealing doors is increased through the sawtooth grooves and the sawtooth, the sealing performance between the two groups of sealing doors is improved, the upper end wall surface and the lower end wall surface of each of the two groups of sealing doors are respectively provided with a triangular groove, the upper side wall surface and the lower side wall surface in a rectangular hole in the furnace frame are respectively provided with a rotating groove, a top plate is arranged in the rotating, the effect of improving the sealing performance is achieved.
(2) This novel heat preservation heat-proof device on scientific research type high temperature diffusion furnace is being drawn when two sets of sealing door, and when rotatory to the one end of keeping away from mutually, the spring can support the roof, makes the roof rotatory around the hinge, extends to the outside of rotary trough, and when sealing door closed once more, the top wall of roof can promote sealing door, has reached the effect of applying the buffering to sealing door.
(3) This novel heat preservation heat-proof device on scientific research type high temperature diffusion furnace, the inside of sealing door is provided with insulating layer and heat preservation, and insulating layer and heat preservation separate through the bulkhead, and when the inside furnace body of furnace frame started working, because the inside temperature of furnace frame carries out certain completely isolated because of the existence of insulating layer, makes the outside that the inside temperature of furnace frame can be conducted the furnace frame completely, through the heat preservation, keeps warm to the furnace frame, makes the inside heat of furnace frame be difficult to run off.
Drawings
FIG. 1 is a front view of a heat preservation and insulation device on a scientific research type high temperature diffusion furnace of the present invention;
FIG. 2 is a partial sectional view of the furnace frame of the present invention;
FIG. 3 is an enlarged view of the point A in FIG. 2 according to the present invention;
fig. 4 is a front view of the sealing door of the present invention.
Illustration of the drawings:
1 base, 2 furnace frames, 3 rotary grooves, 4 top plates, 5 hinges, 6 springs, 7 sealing doors, 8 handles, 9 hot layers, 10 partition frames, 11 heat preservation layers, 12 sawtooth grooves, 13 sawteeth, 14 triangular grooves and 15 rotary shafts.
Detailed Description
The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.
Example (b): as shown in figures 1-4, a novel heat preservation and insulation device on a scientific research type high-temperature diffusion furnace comprises a base 1, wherein the base 1 is cuboid, a furnace frame 2 is arranged on the top of the base 1, the bottom wall surface of the furnace frame 2 is fixedly connected with the top wall surface of the base 1, a diffusion furnace is arranged inside the furnace frame 2, a rectangular hole is arranged on the front side wall surface of the furnace frame 2, rotary grooves 3 are respectively arranged at the upper end and the lower end of the wall surface at the corresponding position of the rectangular hole on the furnace frame 2, top plates 4 are respectively arranged inside two groups of rotary grooves 3, hinges 5 are respectively arranged inside two groups of rotary grooves 3, both hinges 5 are of the prior art, the two groups of hinges 5 are not repeated, two groups of hinges 5 respectively movably connect the two groups of top plates 4 with the front side wall surfaces at the corresponding positions on the two groups of rotary grooves 3, springs 6 are respectively fixedly arranged on the inner bottom wall surfaces of the two groups of rotary grooves 3, the top wall, two groups of sealing doors 7 are arranged inside the furnace frame 2, the two groups of sealing doors 7 are both hollow rectangular bodies, handles 8 are fixedly arranged at the approaching ends of the front side wall surfaces of the two groups of sealing doors 7, heat insulation layers 9 are arranged inside the two groups of sealing doors 7, partition frames 10 are arranged inside the two groups of sealing doors 7, the two groups of partition frames 10 are both hollow rectangular bodies, the heat insulation layers 9 inside the two groups of sealing doors 7 are respectively partitioned outside the corresponding group of partition frames 10 by the two groups of partition frames 10, heat insulation layers 11 are filled inside the two groups of partition frames 10, a plurality of groups of sawtooth grooves 12 are arranged on the right side wall surface close to the left sealing door 7, a plurality of groups of sawtooth teeth 13 are arranged on the left side wall surface close to the right sealing door 7, the plurality of groups of sawtooth grooves 12 and the plurality of groups of sawtooth teeth 13 are mutually meshed, triangular grooves 14 are arranged on the upper side wall surface and the lower side wall surface of the two groups, the two groups of sealing doors 7 are respectively and movably arranged inside the rectangular groove on the furnace frame 2 by a plurality of groups of rotating shafts 15.
The utility model discloses a theory of operation:
when in use, the ends of the two groups of sealing doors 7 far away are movably arranged in the furnace frame 2 through the rotating shaft 15, when the two groups of sealing doors 7 respectively rotate around the corresponding rotating shafts 15 to the approaching side, the approaching side wall surfaces of the two groups of sealing doors 7 are mutually attached, the approaching side wall surfaces of the two groups of sealing doors 7 are respectively provided with a sawtooth groove 12 and a sawtooth 13, the contact area between the two groups of sealing doors 7 is increased through the sawtooth grooves 12 and the sawteeth 13, the sealing performance between the two groups of sealing doors 7 is improved, the upper and lower end wall surfaces of the two groups of sealing doors 7 are respectively provided with a triangular groove 14, the upper and lower side wall surfaces inside the rectangular hole on the furnace frame 2 are respectively provided with a rotating groove 3, the inside of the rotating groove 3 is provided with a top plate 4, therefore, when the sealing doors 7 close the furnace frame 2, the springs 6 will abut against the top plate 4, so that the top plate 4 is attached to the triangular groove 14, and the upper and lower side wall surfaces of the two sealing doors 7 are also closely attached to the furnace frame 2.
When the two groups of sealing doors 7 are pulled and rotate towards the end far away from each other, the spring 6 abuts against the top plate 4 to enable the top plate 4 to rotate around the hinge 5 and extend to the outside of the rotary groove 3, and when the sealing doors 7 are closed again, the top wall surface of the top plate 4 pushes the sealing doors 7 to buffer the sealing doors 7.
The inside of sealing door 7 is provided with insulating layer 9 and heat preservation 11, and insulating layer 9 and heat preservation 11 separate through bulkhead 10, and when the inside furnace body of furnace frame 2 began to work, because the inside temperature of 2 inside of furnace frames of existence of insulating layer 9 carries out certain completely isolated, makes the inside temperature of 2 inside of furnace frames conduct the outside of furnace frame 2 completely, through heat preservation 11, keeps warm to furnace frame 2, makes the inside heat of furnace frame 2 be difficult to run off.
Finally, it should be noted that the above embodiments are merely representative examples of the present invention. Obviously, the present invention is not limited to the above-described embodiments, and many modifications are possible. Any simple modification, equivalent change and modification made to the above embodiments according to the technical spirit of the present invention should be considered as belonging to the protection scope of the present invention.
Claims (6)
1. The utility model provides a novel heat preservation and insulation on scientific research type high temperature diffusion furnace device, includes base (1), its characterized in that: the top of the base (1) is provided with a furnace frame (2), the bottom wall surface of the furnace frame (2) is fixedly connected with the top wall surface of the base (1), the front side wall surface of the furnace frame (2) is provided with a rectangular hole, the upper end and the lower end of the wall surface at the corresponding position of the rectangular hole on the furnace frame (2) are respectively provided with a rotary groove (3), the inner parts of the two groups of rotary grooves (3) are respectively provided with a top plate (4), the inner part of the furnace frame (2) is provided with two groups of sealing doors (7), the two groups of sealing doors (7) are both in a hollow rectangular shape, one ends of the front side wall surfaces of the two groups of sealing doors (7) approaching each other are respectively and fixedly provided with a handle (8), the right side wall surface close to the left side of the sealing door (7) is provided with a plurality of sawtooth grooves (12), the left side wall surface close to the right side of the sealing door (7) is provided with a plurality of sawtooth grooves (13, the left end and the right end of the upper side wall surface and the lower side wall surface of the two groups of sealing doors (7) are fixedly provided with rotating shafts (15).
2. The novel heat preservation and insulation device on scientific research type high-temperature diffusion furnace according to claim 1, characterized in that: hinges (5) are arranged inside the two sets of rotary grooves (3), and the two sets of hinges (5) are respectively movably connected with the front side wall surfaces of the two sets of top plates (4) and the two sets of rotary grooves (3) at corresponding positions.
3. The novel heat preservation and insulation device on scientific research type high-temperature diffusion furnace according to claim 1, characterized in that: the springs (6) are fixedly mounted on the inner bottom wall surfaces of the two sets of rotary grooves (3), and the top wall surfaces of the two sets of springs (6) are fixedly connected with the rear ends of the side wall surfaces approaching to each other on the two sets of top plates (4) respectively.
4. The novel heat preservation and insulation device on scientific research type high-temperature diffusion furnace according to claim 1, characterized in that: the inside of two sets of sealing door (7) all is provided with insulating layer (9), and the inside of two sets of sealing door (7) all is provided with bulkhead (10).
5. The novel heat preservation and insulation device on scientific research type high-temperature diffusion furnace according to claim 4, characterized in that: the two groups of the partition frames (10) respectively separate the heat insulation layers (9) inside the two groups of the sealing doors (7) outside the corresponding group of the partition frames (10), and the heat insulation layers (11) are filled inside the two groups of the partition frames (10).
6. The novel heat preservation and insulation device on scientific research type high-temperature diffusion furnace according to claim 1, characterized in that: the two groups of sealing doors (7) are respectively and movably arranged in the rectangular groove on the furnace frame (2) by the rotating shafts (15).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202022698556.6U CN213480998U (en) | 2020-11-20 | 2020-11-20 | Novel heat preservation and insulation device on scientific research type high-temperature diffusion furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202022698556.6U CN213480998U (en) | 2020-11-20 | 2020-11-20 | Novel heat preservation and insulation device on scientific research type high-temperature diffusion furnace |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN213480998U true CN213480998U (en) | 2021-06-18 |
Family
ID=76355874
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202022698556.6U Expired - Fee Related CN213480998U (en) | 2020-11-20 | 2020-11-20 | Novel heat preservation and insulation device on scientific research type high-temperature diffusion furnace |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN213480998U (en) |
-
2020
- 2020-11-20 CN CN202022698556.6U patent/CN213480998U/en not_active Expired - Fee Related
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN105679936A (en) | Lead-free perovskite film, and preparation method and application thereof | |
| CN204779922U (en) | Ingot furnace with side heater elevating gear | |
| CN103276369A (en) | PECVD (plasma enhanced chemical vapor deposition) film coating system | |
| CN110438474A (en) | Slide glass unit | |
| CN213480998U (en) | Novel heat preservation and insulation device on scientific research type high-temperature diffusion furnace | |
| CN203284464U (en) | PECVD (plasma enhanced chemical vapor deposition) film coating system | |
| CN114574681A (en) | Uniform heat treatment process and heat treatment equipment | |
| CN103193032B (en) | Vacuum pumpin layer cold-accumulating box after double-deck suit | |
| CN210390103U (en) | Device for stretching polyimide film in longitudinal and transverse biaxial orientation manner | |
| CN209718859U (en) | The bearing fixture and laminating apparatus of photovoltaic module | |
| CN207365679U (en) | A kind of lithium battery Quick drying box | |
| CN110739369A (en) | solar cell panel laminating device | |
| CN215038595U (en) | Internal fixing device is used in processing of canning pottery glazing | |
| CN211709013U (en) | Rotation type burnishing machine base is used in aluminum plate polishing | |
| CN210223934U (en) | Vacuum transfer table | |
| CN208199765U (en) | A kind of glass turnover mechanism | |
| CN208520128U (en) | Transfer formula drying device | |
| CN217306468U (en) | Positioning mechanism is used in production of power semiconductor chip | |
| CN113277718A (en) | Annealing furnace for quartz glass production and processing | |
| CN204656878U (en) | A kind of photovoltaic module adhesive tape encapsulation lubricant applicator | |
| CN217298098U (en) | Single crystal silicon furnace convenient to overhaul and used for processing semiconductor wafer | |
| CN214380789U (en) | Photovoltaic board convenient to it is clean | |
| CN211838625U (en) | Mobile phone shell five-coating five-baking automatic coating device | |
| CN214728917U (en) | Transfer support for monocrystalline silicon wafers | |
| CN214126763U (en) | Crisp processing of black golden is with cooling rapidly setting device |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20210618 Termination date: 20211120 |