CN213480663U - Automatic supply device for Freon of photoetching machine air conditioner - Google Patents
Automatic supply device for Freon of photoetching machine air conditioner Download PDFInfo
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- CN213480663U CN213480663U CN202022678102.2U CN202022678102U CN213480663U CN 213480663 U CN213480663 U CN 213480663U CN 202022678102 U CN202022678102 U CN 202022678102U CN 213480663 U CN213480663 U CN 213480663U
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Abstract
The utility model discloses an automatic supply device of air conditioner Freon of lithography machine, which comprises a box body, wherein a Freon storage tank is arranged in the box body, an outlet of the Freon storage tank is connected with a supply pipeline, one end of the supply pipeline extends out of the box body and is provided with a quick joint which is in quick butt joint with a supply port of the air conditioner of the lithography machine; the supply pipeline is provided with an electromagnetic valve, a pressure sensor and a one-way valve, the box body is internally provided with a controller in conductive connection with the electromagnetic valve and the pressure sensor and a power supply for supplying power to the controller, and the pressure measuring sensor on the Freon pipeline of the air conditioner of the photoetching machine is in conductive connection with the controller. The automatic supply device can automatically supply Freon according to the pressure of the Freon pipeline of the air conditioner.
Description
Technical Field
The utility model relates to an automatic supply device and automatic supply method of photoetching machine air conditioner freon belongs to semiconductor photoetching machine's air conditioner freon supply technical field.
Background
A lithography machine is a necessary device in chip production; the photoetching environment of the photoetching machine is relatively strict, the constant temperature and the constant humidity are required for the external environment, and the temperature inside the photoetching machine also needs to meet the requirement. And because the service life of the photoetching machine is longer, for some photoetching machines which are older in factory, the air conditioner of the old photoetching machine still uses Freon, and in the long-term use process, the Freon can possibly leak, so that the effect of the air conditioner is reduced, the temperature in the photoetching machine can be increased, and the photoetching quality is reduced.
SUMMERY OF THE UTILITY MODEL
The utility model discloses the technical problem that will solve is: the automatic supply device of the air conditioner Freon of the photoetching machine can automatically supply Freon according to the pressure of a Freon pipeline of the air conditioner.
In order to solve the technical problem, the technical scheme of the utility model is that: an automatic supply device for Freon of an air conditioner of a lithography machine comprises a box body, wherein a Freon storage tank is arranged inside the box body, an outlet of the Freon storage tank is connected with a supply pipeline, one end of the supply pipeline extends out of the box body and is provided with a quick connector which is in quick butt joint with a supply port of the air conditioner of the lithography machine; the supply pipeline is provided with an electromagnetic valve, a pressure sensor and a one-way valve, the box body is internally provided with a controller in conductive connection with the electromagnetic valve and the pressure sensor and a power supply for supplying power to the controller, and the pressure measuring sensor on the Freon pipeline of the air conditioner of the photoetching machine is in conductive connection with the controller.
As a preferable scheme, the number of the freon storage tanks is two, the supply pipelines are respectively connected with the outlets of the two freon storage tanks through the sub-supply pipelines, and the number of the electromagnetic valves is two and is respectively arranged on the sub-supply pipelines.
As a preferred scheme, the box is a closed box, a freon gas leakage alarm for testing freon concentration in the box is arranged in the box, and an air suction port is further arranged on the side wall of the box and connected with an air suction pipeline system.
Preferably, the suction pipeline system comprises a suction pump, a suction port of the suction pump is communicated with the suction port through a first suction pipeline, and an exhaust port of the suction pump is connected with an exhaust pipeline which is connected with the waste gas storage tank.
As a preferred scheme, still be connected with the second suction pipeline on the suction pipeline, the second suction pipeline with deposit photoetching machine air conditioner deposits the cavity intercommunication, all be provided with the solenoid valve on second suction pipeline and the first suction pipeline, the air conditioner is deposited and is also provided with freon gas in the cavity and reveal the alarm.
After the technical scheme is adopted, the utility model discloses an effect is: the automatic supply device comprises a box body, a Freon storage tank is arranged in the box body, an outlet of the Freon storage tank is connected with a supply pipeline, and one end of the supply pipeline extends out of the box body and is provided with a quick connector which is in quick butt joint with a supply port of the photoetching machine air conditioner; be provided with solenoid valve, manometer and check valve on the supply line, be provided with the controller with solenoid valve and pressure sensor conductive connection in the box and for the power of controller power supply, the pressure measurement sensor on the freon pipeline of lithography machine air conditioner with controller conductive connection, consequently, this automatic supply device possesses following advantage: 1. the whole automatic supply device is integrated in a box body and then is connected with a supply port through a quick connector, so that the automatic supply device is very conveniently fixed on a rack of a photoetching machine; 2. this automatic supply device can realize automatic supply, only need controller and pressure measurement sensor to carry out signal connection, just can come automatic supply through the pressure in the control freon pipeline, and pressure sensor on the supply pipeline can detect the pressure on the supply pipeline to obtain the freon volume in the freon storage tank, can indicate when the pressure in the freon storage tank reduces to change, consequently this automatic supply device can supply for the photoetching machine air conditioner automatically, it is relatively simple to reform transform.
And because the number of the Freon storage tanks is two, the supply pipeline is respectively connected with the outlets of the two Freon storage tanks through the sub-supply pipeline, the number of the electromagnetic valves is two and is respectively arranged on the sub-supply pipeline, the two Freon storage tanks can be used for replacement and simultaneously guarantee supply, and the automatic supply time is longer.
And because the box body is a closed box body, the box body is internally provided with a Freon gas leakage alarm used for testing the Freon concentration in the box body, the side wall of the box body is also provided with an air extraction opening, and the air extraction opening is connected with an air extraction pipeline system, so that in the long-term use process, once the condition of Freon leakage in the box body occurs, gas can be extracted by using the air extraction pipeline system, and the gas is treated in a centralized way, thereby reducing pollution.
And because still be connected with the second suction pipeline on the suction pipeline, the second suction pipeline with deposit photoetching machine air conditioner deposits the cavity intercommunication, all be provided with the solenoid valve on second suction pipeline and the first suction pipeline, also be provided with freon gas in the cavity and reveal the alarm in the air conditioner, this kind of structure can further carry out the control and the processing of freon leakage to the cavity is deposited to the air conditioner, reduces the pollution.
In addition, the utility model also discloses an automatic supply method of the freon of the air conditioner of the photoetching machine, the automatic supply method uses the automatic supply device, and the automatic supply method takes the internal pressure tested by the pressure measuring sensor on the freon pipeline as the basis of automatic supply;
A. when the internal pressure of the Freon pipeline is lower than a supply critical value, the controller controls the electromagnetic valve on the supply pipeline to be opened, and the Freon in the Freon storage tank is supplied to the Freon pipeline through the supply pipeline;
B. when a pressure measuring sensor on the Freon pipeline detects that the internal pressure of the Freon pipeline reaches a specified pressure value, the controller controls the electromagnetic valve to be closed to stop supplying;
C. when the pressure sensor on the supply pipeline detects that the pressure on the supply pipeline is lower than the supply critical value in the working state A, the controller closes the electromagnetic valve and prompts the replacement of the Freon storage tank;
D. when the pressure measuring sensor detects that the rising rate of the internal pressure of the pressure measuring sensor is lower than the lowest boosting rate in the working state A, the controller controls the electromagnetic valve to be closed, and meanwhile, the photoetching machine is prompted to have serious air conditioner leakage.
Preferably, the automatic supply method further comprises a treatment method of evacuating the leaked Freon and discharging the leaked Freon for centralized treatment;
set up a freon gas in the box and reveal the alarm, when the freon gas reveals that the inside freon concentration of alarm detection box rises to appointed concentration, open the air suction of suction pump in with the box this moment, collect in discharging the appointed waste gas holding vessel with gaseous freon.
Preferably, the processing method further comprises a processing method for processing freon leaked from an air conditioner storage chamber of the photoetching machine, a freon gas leakage alarm is also arranged in the air conditioner storage chamber and is communicated with the suction pump by using a second suction pipeline, when the freon gas leakage alarm in the air conditioner storage chamber detects that the concentration of freon in the air conditioner storage chamber is increased to a specified concentration, the suction pump is started to suck air in the air conditioner storage chamber, and gaseous freon is discharged to a specified waste gas storage tank to be collected.
After the technical scheme is adopted, the utility model discloses an effect is: the automatic supply device takes the internal pressure tested by the pressure measuring sensor on the Freon pipeline as the basis of automatic supply to automatically supply, and stops supplying when the supply pressure reaches a set value; when the pressure sensor on the supply pipeline detects that the pressure on the supply pipeline is lower than the supply critical value in the working state A, the controller closes the electromagnetic valve and prompts the replacement of the Freon storage tank; when the pressure measuring sensor detects that the rising rate of the internal pressure is lower than the lowest boosting rate in the working state A, the controller controls the electromagnetic valve to be closed, and simultaneously prompts the photoetching machine to have serious air conditioner leakage, so that the automatic supply device can be suitable for various conditions of Freon.
And because the automatic supply method also comprises a treatment method for carrying out evacuation and discharge centralized treatment on the leaked Freon, the pollution caused by the leakage of the Freon can be avoided.
Drawings
The present invention will be further explained with reference to the drawings and examples.
Fig. 1 is a perspective view of an embodiment of the present invention;
FIG. 2 is a perspective view of the embodiment of the present invention with the case cover hidden;
fig. 3 is a schematic front view of an embodiment of the invention;
in the drawings: 1. a box body; 2. a supply line; 3. a pressure sensor; 4. a one-way valve; 5. a power source; 6. a controller; 7. a freon storage tank; 8. a freon gas leakage alarm; 9. a branch supply line; 10. an electromagnetic valve; 11. a quick coupling; 12. a first suction line; 13. a second suction line; 14. an air pump; 15. an exhaust gas storage tank; 16. an air extraction opening; 17. an exhaust duct.
Detailed Description
The present invention will be described in further detail with reference to the following examples.
As shown in fig. 1 to 3, an automatic replenishment device for air conditioning freon of a lithography machine comprises a box body 1, wherein the box body 1 is provided with a box door capable of being opened and closed, the box body 1 is wholly of a closed structure, and the box body 1 can be conveniently fixed outside equipment of the lithography machine. A Freon storage tank 7 is arranged in the box body 1, an outlet of the Freon storage tank 7 is connected with a supply pipeline 2, one end of the supply pipeline 2 extends out of the box body 1 and is provided with a quick joint 11 which is in quick butt joint with a supply port of an air conditioner of the photoetching machine; the supply pipeline 2 is provided with an electromagnetic valve 10, a pressure sensor 3 and a one-way valve 4, a controller 6 which is in conductive connection with the electromagnetic valve 10 and the pressure sensor 3 and a power supply 5 which supplies power to the controller 6 are arranged in the box body 1, and a pressure measuring sensor on a Freon pipeline of the photoetching machine air conditioner is in conductive connection with the controller 6.
In this embodiment, the number of the freon storage tanks 7 is two, the supply lines 2 are respectively connected with the outlets of the two freon storage tanks 7 through the sub-supply lines 9, and the number of the electromagnetic valves 10 is two and respectively arranged on the sub-supply lines 9.
The box 1 is a closed box 1, a freon gas leakage alarm 8 for testing freon concentration in the box 1 is arranged in the box 1, an air suction opening 16 is further arranged on the side wall of the box 1, and the air suction opening 16 is connected with an air suction pipeline system.
The suction pipeline system comprises a suction pump 14, a suction port of the suction pump 14 is communicated with a suction port 16 through a first suction pipeline 12, an exhaust port of the suction pump is connected with an exhaust pipeline 17, and the exhaust pipeline 17 is connected with an exhaust gas storage tank 15. Still be connected with second suction pipeline 13 on the suction pipeline, second suction pipeline 13 with deposit photoetching machine air conditioner deposits the chamber intercommunication, all be provided with solenoid valve 10 on second suction pipeline 13 and the first suction pipeline 12, the air conditioner is deposited and is also provided with freon gas in the chamber and reveal alarm 8. Wherein the freon gas leakage alarm 8 can be the freon gas leakage alarm 8 that Shandong such as special security equipment Limited sold, wherein control can adopt PLC or singlechip to control.
In addition, the utility model also discloses an automatic supply method of the freon of the air conditioner of the photoetching machine, the automatic supply method uses the automatic supply device, and the automatic supply method takes the internal pressure tested by the pressure measuring sensor on the freon pipeline as the basis of automatic supply;
A. when the internal pressure of the Freon pipeline is lower than a supply critical value, the controller 6 controls the electromagnetic valve 10 on the supply pipeline 2 to be opened, and the Freon in the Freon storage tank 7 is supplied to the Freon pipeline through the supply pipeline 2; the replenishment critical value can be set according to the actual refrigeration effect of the air conditioner of the photoetching machine, and generally, the refrigeration effect of the air conditioner of the photoetching machine cannot meet the use requirement of the photoetching machine when the replenishment critical value is lower than the replenishment critical value.
B. When a pressure sensor on the Freon pipeline detects that the internal pressure of the Freon pipeline reaches a specified pressure value, the controller 6 controls the electromagnetic valve 10 to close and stop supplying; the specified pressure value is also the allowable maximum pressure of the air conditioner of the photoetching machine;
C. when the pressure sensor 3 on the supply pipeline detects that the pressure on the supply pipeline is lower than the supply critical value in the working state A, the controller 6 closes the electromagnetic valve 10 and prompts the replacement of the Freon storage tank 7; the pressure sensor 3 is used for detecting the pressure during the supply of the supply pipeline, namely directly detecting the pressure of the Freon storage tank 7, and when the pressure is lower, the pressure sensor proves that the amount of Freon in the Freon storage tank 7 is less and the Freon needs to be replaced.
D. When the pressure measuring sensor detects that the rising rate of the internal pressure of the pressure measuring sensor is lower than the lowest boosting rate in the working state A, the controller 6 controls the electromagnetic valve 10 to be closed, meanwhile, the photoetching machine air conditioner is prompted to leak seriously, and the Freon pipeline of the photoetching machine air conditioner needs to be overhauled and maintained in time at the moment.
Preferably, the automatic supply method further comprises a treatment method of evacuating the leaked Freon and discharging the leaked Freon for centralized treatment;
set up a freon gas in box 1 and reveal alarm 8, when freon gas reveals alarm 8 and detects that the freon concentration of box 1 inside rises to appointed concentration, open the air suction of suction pump in with box 1 this moment, discharge the freon of gaseous state and collect in appointed waste gas holding vessel 15. The processing method also comprises a processing method for processing the Freon leaked from the air conditioner storage chamber of the photoetching machine, a Freon gas leakage alarm 8 is also arranged in the air conditioner storage chamber and is communicated with the suction pump by using a second suction pipeline 13, when the Freon gas leakage alarm 8 in the air conditioner storage chamber detects that the concentration of the Freon in the air conditioner storage chamber is increased to a specified concentration, the suction pump is started to suck the air in the air conditioner storage chamber, and the gaseous Freon is discharged into a specified waste gas storage tank 15 to be collected. The freon in the waste gas storage tank 15 can be sent to a professional recovery mechanism or a factory for centralized treatment or recovery.
The gas circuit system, the actuating devices such as the servo motor and the like, the gear transmission mechanism and the screw and nut mechanism mentioned in the embodiment are all the conventional technologies at present, the specific structures and principles of the cylinder, the motor and other transmission mechanisms and other designs are disclosed in detail in the fifth edition of the mechanical design manual printed for the twenty-eighth edition in the fifth edition of Beijing in 4 months of 2008, and belong to the prior art, the structure of the gas circuit system belongs to the prior art, the structure of the gas circuit system is clearly clarified, the vacuum element, the gas circuit and the program control are disclosed in detail in the modern practical pneumatic technology 3 rd edition SMC training teaching material published by the mechanical industry publisher in 08 months and 01 days of 2008, the gas circuit structure in the embodiment is also the prior art, and the control and the travel switch of the motor are also described in detail in the book of Motor drive and speed regulation published by the chemical industry publisher in 07 months and 01 days of 2015, therefore, the circuit and the gas circuit connection are clear.
The above-mentioned embodiments are only descriptions of the preferred embodiments of the present invention, and are not intended to limit the scope of the present invention, and all modifications and changes made by the technical solution of the present invention should fall within the protection scope defined by the claims of the present invention on the basis of not departing from the spirit of the present invention.
Claims (5)
1. The utility model provides an automatic supply device of photoetching machine air conditioner freon which characterized in that: the box body is internally provided with a Freon storage tank, an outlet of the Freon storage tank is connected with a supply pipeline, one end of the supply pipeline extends out of the box body and is provided with a quick connector which is in quick butt joint with a supply port of an air conditioner of a photoetching machine; the supply pipeline is provided with an electromagnetic valve, a pressure sensor and a one-way valve, the box body is internally provided with a controller in conductive connection with the electromagnetic valve and the pressure sensor and a power supply for supplying power to the controller, and the pressure measuring sensor on the Freon pipeline of the air conditioner of the photoetching machine is in conductive connection with the controller.
2. An automatic freon supplying apparatus for lithography machine air conditioner as claimed in claim 1, wherein: the number of freon storage tanks is two, and the supply line is connected with the export of two freon storage tanks through dividing the supply line respectively, the number of solenoid valve is two and sets up respectively on dividing the supply line.
3. An automatic freon supplying apparatus for lithography machine air conditioner as claimed in claim 2, wherein: the box is the confined box, be provided with the freon gas leakage alarm that is used for testing freon concentration in the box, still be provided with the extraction opening on the lateral wall of box, the extraction opening is connected air extraction pipeline system.
4. An automatic freon supplying apparatus for lithography machine air conditioner as claimed in claim 3, wherein: the air pumping pipeline system comprises an air pumping pump, a pumping port of the air pumping pump is communicated with an air pumping port through a first pumping pipeline, an exhaust port of the pumping pump is connected with an exhaust pipeline, and the exhaust pipeline is connected with a waste gas storage tank.
5. An automatic freon supplying apparatus for lithography machine air conditioner as claimed in claim 4, wherein: still be connected with the second suction pipeline on the suction line, the second suction pipeline with deposit photoetching machine air conditioner deposits the cavity intercommunication, all be provided with the solenoid valve on second suction pipeline and the first suction pipeline, the air conditioner is deposited and is also provided with the freon gas in the cavity and reveal the alarm.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202022678102.2U CN213480663U (en) | 2020-11-18 | 2020-11-18 | Automatic supply device for Freon of photoetching machine air conditioner |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202022678102.2U CN213480663U (en) | 2020-11-18 | 2020-11-18 | Automatic supply device for Freon of photoetching machine air conditioner |
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| CN213480663U true CN213480663U (en) | 2021-06-18 |
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| CN202022678102.2U Active CN213480663U (en) | 2020-11-18 | 2020-11-18 | Automatic supply device for Freon of photoetching machine air conditioner |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112229114A (en) * | 2020-11-18 | 2021-01-15 | 江苏晋誉达半导体股份有限公司 | Automatic supply device and automatic supply method for Freon of photoetching machine air conditioner |
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2020
- 2020-11-18 CN CN202022678102.2U patent/CN213480663U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112229114A (en) * | 2020-11-18 | 2021-01-15 | 江苏晋誉达半导体股份有限公司 | Automatic supply device and automatic supply method for Freon of photoetching machine air conditioner |
| CN112229114B (en) * | 2020-11-18 | 2024-03-22 | 江苏晋誉达半导体股份有限公司 | Automatic replenishment device and automatic replenishment method for freon of air conditioner of photoetching machine |
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