CN213459635U - Flat-plate type high-field asymmetric waveform ion mobility spectrometer with focusing characteristic - Google Patents

Flat-plate type high-field asymmetric waveform ion mobility spectrometer with focusing characteristic Download PDF

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CN213459635U
CN213459635U CN202022435573.0U CN202022435573U CN213459635U CN 213459635 U CN213459635 U CN 213459635U CN 202022435573 U CN202022435573 U CN 202022435573U CN 213459635 U CN213459635 U CN 213459635U
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polar plate
mobility spectrometer
ion mobility
migration
ion
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邢志刚
袁仲云
贺晶晶
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Shenzhen Speed Electronics Co ltd
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Shenzhen Speed Electronics Co ltd
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Abstract

The utility model provides a flat asymmetric waveform ion mobility spectrometer in high field with focusing characteristic includes in proper order: an ion source; the migration zone comprises a lower polar plate and an upper polar plate which are arranged at intervals up and down, a ground electrode connected with the lower polar plate and a radio frequency power supply connected with the upper polar plate; the detection area comprises a Faraday cylinder, a deflection voltage source and a weak current detection circuit, wherein the deflection voltage source and the weak current detection circuit are connected with the Faraday cylinder; the gap between the upper polar plate and the lower polar plate is in the shape of a semicircle and a horizontal channel, and the semicircle is uniformly positioned on the lower polar plate. The utility model discloses improved the structure of migration district among the asymmetric waveform ion mobility spectrometer in high field, combined together cylinder type migration district and plate migration district, made the ion migration district when possessing little gas flow channel clearance, had the function of ion focusing, can improve the resolution and the sensitivity of the asymmetric waveform ion mobility spectrometer in high field. Meanwhile, the problem that a small gas flow channel gap cylindrical migration area is difficult to process is solved.

Description

Flat-plate type high-field asymmetric waveform ion mobility spectrometer with focusing characteristic
Technical Field
The utility model relates to an ion mobility spectrometer field especially relates to a make migration zone have high field asymmetric waveform ion mobility spectrometer who has focusing characteristic flat migration zone of plate migration zone and cylindrical migration zone advantage concurrently.
Background
At present, the migration region in the high-field asymmetric waveform ion mobility spectrometer is roughly divided into two types, one is a flat plate type structure, and the other is a cylindrical structure. The flat plate type migration area is processed by adopting an MEMS process, a PCB process and the like. Due to the structural characteristics of the flat-plate type migration zone, the flow channel gap in the migration zone can be processed to be very small, usually in the micrometer scale. The cylindrical migration area is often machined by machining or the like. The cylindrical transition region is difficult to be machined into a transition region with a small gap because of the high coaxiality of the two electrodes and the machining process characteristics. The flow channel gap in the cylindrical migration zone is typically on the order of millimeters. However, according to the related literature, the cylindrical transition region has been widely used because it has an ion focusing effect.
However, the large gap gas flow channel of the cylindrical mobility region can cause serious ion loss, and in order to obtain a large ion signal intensity, a high gas flow rate must be used, so that the sensitivity and the resolution of the high-field asymmetric waveform ion mobility spectrometer are significantly reduced. Meanwhile, the flat plate type migration region cannot realize the function of ion focusing. Therefore, it is an urgent problem to reduce the flow channel gap in the cylindrical migration region as much as possible to improve the sensitivity and resolution of the instrument.
SUMMERY OF THE UTILITY MODEL
The utility model aims at providing a make migration zone have the high-field asymmetric waveform ion mobility spectrometer of flat migration zone of focusing characteristic concurrently with flat migration zone and the advantage of cylinder type migration zone.
Specifically, the utility model provides a flat asymmetric waveform ion mobility spectrometer of high field with focusing characteristic includes in proper order:
an ion source for inputting a sample gas;
the migration zone is used for realizing ionization of the sample gas and migration under the action of an electric field and comprises a lower polar plate and an upper polar plate which are arranged at intervals up and down, a ground electrode connected with the lower polar plate and a radio frequency power supply connected with the upper polar plate;
the detection area is used for identifying ion types and comprises a Faraday cylinder, a deflection voltage source and a weak current detection circuit, wherein the deflection voltage source and the weak current detection circuit are connected with the Faraday cylinder;
the gap between the upper polar plate and the lower polar plate is in the shape of a semicircle and a horizontal channel, and the semicircle is uniformly positioned on the lower polar plate.
In an embodiment of the present invention, the distance between the upper plate and the lower plate is 0-10 cm.
In one embodiment of the present invention, the radian of the semicircular shape in the upper plate and the lower plate is less than or equal to 180 degrees.
In one embodiment of the present invention, the semicircular shapes in the upper plate and the lower plate are concentric circles.
In one embodiment of the present invention, the junction of the semicircular shape and the horizontal channel shape adopts an arrangement of a lower electrode-insulating material-shielding electrode-insulating layer-spacing gap-insulating layer-shielding electrode-insulating layer-upper electrode.
The utility model discloses improved the structure of migration district among the asymmetric waveform ion mobility spectrometer in high field, combined together cylinder type migration district and plate migration district, made the ion migration district when possessing little gas flow channel clearance, had the function of ion focusing, can improve the resolution and the sensitivity of the asymmetric waveform ion mobility spectrometer in high field. Meanwhile, the problem that a small gas flow channel gap cylindrical migration area is difficult to process is solved.
Drawings
Fig. 1 is a schematic structural diagram of an ion mobility spectrometer according to an embodiment of the present invention;
fig. 2 is a schematic view illustrating a fastening state of an upper electrode and a lower electrode according to an embodiment of the present invention;
fig. 3 is a schematic structural view of a junction between a semicircular shape and a horizontal channel shape according to an embodiment of the present invention.
Detailed Description
The detailed structure and implementation process of the present solution are described in detail below with reference to specific embodiments and the accompanying drawings.
As shown in fig. 1 and 2, in one embodiment of the present invention, a flat-type high-field asymmetric waveform ion mobility spectrometer with focusing characteristics is disclosed, which comprises:
an ion source 2 for inputting a sample gas 1;
the migration zone 3 is used for realizing ionization of the sample gas 1 and migration under the action of an electric field and comprises a lower polar plate 5 and an upper polar plate 4 which are arranged at intervals up and down, a ground electrode 6 connected with the lower polar plate 5 and a radio frequency power supply 7 connected with the upper polar plate 4; the spacing distance between the lower polar plate 5 and the upper polar plate 4 is the gap of electronic transition, the spacing shape between the upper polar plate 4 and the lower polar plate 5 is alternately arranged at intervals along the airflow flowing direction by adopting a semicircular shape and a horizontal channel shape, and the semicircular shapes are uniformly positioned on the lower polar plate 5. That is, the channel of the electron transition is connected with a semicircular shape after being connected with a section of horizontal channel shape, and then the channels are sequentially arranged.
The detection area 8 is used for identifying ion species and comprises a Faraday cylinder, a deflection voltage source 11 connected with the Faraday deflection electrode 9, a Faraday sensitive electrode 10, a deflection voltage source 13 connected with the Faraday sensitive electrode 10, and a deflection voltage source 11 connected with a ground electrode 12.
The upper polar plate 4 and the lower polar plate 5 are isolated by an insulating film with a certain thickness, the thickness of the insulating film can be 100um, 200um and the like, the insulating film does not influence the spacing distance between the upper polar plate and the lower polar plate, and finally the two polar plates are compressed. The processing can be carried out by machining or MEMS technology.
The spacing distance between the upper polar plate 4 and the lower polar plate 5 is 0-10 cm. Meanwhile, the radian of the semicircular shapes of the upper polar plate 4 and the lower polar plate 5 is less than or equal to 180 degrees. And the semicircular shapes in the upper polar plate 4 and the lower polar plate 5 are concentric circles, the difference is only the spacing distance between the two, and in the migration zone 3, the semicircular shapes on the upper polar plate 4 and the lower polar plate 5 are concentric, so that the spacing distance between the horizontal channel shape and the semicircular shape can be ensured to be the same.
The utility model discloses improved the structure of migration district among the asymmetric waveform ion mobility spectrometer in high field, combined together cylinder type migration district and plate migration district, made the ion migration district when possessing little gas flow channel clearance, had the function of ion focusing, can improve the resolution and the sensitivity of the asymmetric waveform ion mobility spectrometer in high field. Meanwhile, the problem that a small gas flow channel gap cylindrical migration area is difficult to process is solved.
As shown in fig. 3, further, the junction of the semicircular shape and the horizontal channel shape adopts an arrangement structure of the lower electrode 5, the insulating layer 15, the shielding electrode 14, the insulating layer 15, the spacing gap, the insulating layer 15, the shielding electrode 14, the insulating layer 15, and the upper electrode 4. After the structure is adopted, only a focusing function can be realized on certain ions, and a defocusing effect does not exist.
Thus, it should be appreciated by those skilled in the art that while a number of exemplary embodiments of the invention have been shown and described in detail herein, many other variations and modifications can be made, consistent with the principles of the invention, which are directly determined or derived from the disclosure herein, without departing from the spirit and scope of the invention. Accordingly, the scope of the present invention should be understood and interpreted to cover all such other variations or modifications.

Claims (5)

1. A flat-plate type high-field asymmetric waveform ion mobility spectrometer with focusing characteristics sequentially comprises:
an ion source for inputting a sample gas;
the migration zone is used for realizing ionization of the sample gas and migration under the action of an electric field and comprises a lower polar plate and an upper polar plate which are arranged at intervals up and down, a ground electrode connected with the lower polar plate and a radio frequency power supply connected with the upper polar plate;
the detection area is used for identifying ion types and comprises a Faraday cylinder, a deflection voltage source and a weak current detection circuit, wherein the deflection voltage source and the weak current detection circuit are connected with the Faraday cylinder; the method is characterized in that:
the gap between the upper polar plate and the lower polar plate is in the shape of a semicircle and a horizontal channel, and the semicircle is uniformly positioned on the lower polar plate.
2. An ion mobility spectrometer according to claim 1, characterised in that:
the spacing distance between the upper polar plate and the lower polar plate is 0-10 cm.
3. An ion mobility spectrometer according to claim 2, characterised in that:
the radian of the semicircular shape in the upper polar plate and the lower polar plate is less than or equal to 180 degrees.
4. An ion mobility spectrometer according to claim 3 characterised in that:
the semicircular shapes of the upper polar plate and the lower polar plate are concentric circles.
5. The ion mobility spectrometer of claim 4, wherein:
the joint of the semicircular shape and the horizontal channel shape adopts an arrangement structure of a lower electrode, an insulating material, a shielding electrode, an insulating layer, a spacing gap, an insulating layer, a shielding electrode, an insulating layer and an upper electrode.
CN202022435573.0U 2020-10-28 2020-10-28 Flat-plate type high-field asymmetric waveform ion mobility spectrometer with focusing characteristic Active CN213459635U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202022435573.0U CN213459635U (en) 2020-10-28 2020-10-28 Flat-plate type high-field asymmetric waveform ion mobility spectrometer with focusing characteristic

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202022435573.0U CN213459635U (en) 2020-10-28 2020-10-28 Flat-plate type high-field asymmetric waveform ion mobility spectrometer with focusing characteristic

Publications (1)

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CN213459635U true CN213459635U (en) 2021-06-15

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