CN213401099U - Positioning and clamping mechanism of wafer film thickness detection equipment - Google Patents
Positioning and clamping mechanism of wafer film thickness detection equipment Download PDFInfo
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- CN213401099U CN213401099U CN202021982015.XU CN202021982015U CN213401099U CN 213401099 U CN213401099 U CN 213401099U CN 202021982015 U CN202021982015 U CN 202021982015U CN 213401099 U CN213401099 U CN 213401099U
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- fixing plate
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Abstract
The utility model relates to a wafer membrane check out test set technical field, concretely relates to wafer film thickness check out test set's location fixture, including main part mechanism, main part mechanism includes the shell, the inside of shell is done through the bearing and is inserted and is equipped with elevating system, elevating system includes head rod, gear, first servo motor, belt pulley, the fixed surface cover of head rod has connected the gear, the back of head rod is fixed with first servo motor, the belt pulley has been cup jointed on the surface of head rod, the inside of shell is inserted and is equipped with the centre gripping subassembly. The utility model discloses be provided with third connecting rod and fourth connecting rod, cooperation fifth connecting rod and second fixed plate make the centre gripping more convenient, through the rebound of third connecting rod, make two sets of rubber cushions closed, with wafer membrane centre gripping, the manipulator structure of comparing is simpler, and the maintenance cost is low, and hoisting device's work efficiency makes the convenience more of centre gripping wafer membrane.
Description
Technical Field
The utility model relates to a wafer membrane check out test set technical field specifically is a wafer membrane thickness check out test set's location fixture.
Background
The wafer is a silicon wafer used for manufacturing a silicon semiconductor integrated circuit, the raw material of the wafer is silicon, high-purity polycrystalline silicon is dissolved and then doped into a silicon crystal seed crystal, then the silicon crystal seed crystal is slowly pulled out to form cylindrical monocrystalline silicon, a silicon crystal bar is ground, polished and sliced to form a silicon wafer, namely a wafer, the current domestic wafer production line mainly takes eight inches and twelve inches, the thickness of the wafer film needs to be measured in the production process of the wafer, and the wafer needs to be clamped during measurement, so that a positioning clamping mechanism of wafer film thickness detection equipment is needed.
The fixture of thick check out test set of present wafer film, mostly be mechanical clamping jaw, its is with high costs, it is all more troublesome to maintain the maintenance, inconvenient use, need make its centre gripping more accurate to the wafer location in the centre gripping, and the lift of clamping jaw goes up and down through the hydraulic stem mostly in the use, the hydraulic stem is also with high costs, and the hydraulic stem still needs regularly to change oil in the use, for this reason we have proposed a thick check out test set's of wafer film location fixture and have solved above-mentioned problem.
Disclosure of Invention
An object of the utility model is to provide a thick check out test set's of wafer membrane location fixture to the inconvenient use and the unsafe problem of hydraulic stem lift that propose in solving above-mentioned background art.
In order to achieve the above object, the utility model provides a following technical scheme: a positioning and clamping mechanism of wafer film thickness detection equipment comprises a main body mechanism, wherein the main body mechanism comprises a shell, a lifting mechanism is inserted into the shell through a bearing, the lifting mechanism comprises a first connecting rod, a gear, a first servo motor and a belt pulley, the gear is fixedly sleeved on the surface of the first connecting rod, the first servo motor is fixed on the back surface of the first connecting rod, the belt pulley is sleeved on the surface of the first connecting rod, a clamping assembly is inserted into the shell, the clamping assembly comprises a first fixing plate, a second connecting rod, a second servo motor, a third connecting rod, a fourth connecting rod, a fifth connecting rod, a second fixing plate, a sixth connecting rod, a spring, a seventh connecting rod, a rubber pad, an eighth connecting rod, a ninth connecting rod, a third fixing plate, a fixing block and a tenth connecting rod, the second connecting rod is inserted into the first fixing plate, a second servo motor is fixed at the top end of the second connecting rod, a third connecting rod is inserted in the second connecting rod, a fourth connecting rod is fixed at the bottom end of the third connecting rod, fifth connecting rods are hinged at two sides of the fourth connecting rod, a second fixing plate is fixed at the outer side of the fifth connecting rod, a sixth connecting rod is fixed at the bottom end of the second fixing plate, and the surface of the sixth connecting rod is sleeved with a spring, the surface of the sixth connecting rod is sleeved with a seventh connecting rod, a rubber pad is fixed at the bottom end of the seventh connecting rod, an eighth connecting rod is fixed at one side of the second fixing plate close to the shell, the top end of the eighth connecting rod is hinged with a ninth connecting rod, the top end of the ninth connecting rod is fixed with a third fixing plate, and a fixed block is inserted in the third fixed plate, and a tenth connecting rod is fixed on the upper surface of the third fixed plate.
Preferably, the surface of the third connecting rod is provided with threads, the inside of the second connecting rod is provided with threads matched with the third connecting rod, and the third connecting rod is inserted in the second connecting rod.
Preferably, the top end of the spring is fixedly connected with the second fixing plate, and the bottom end of the spring is fixedly connected with the seventh connecting rod.
Preferably, sliding blocks are arranged on two sides of the third fixing plate, sliding grooves matched with the sliding blocks are formed in the shell, and the sliding blocks are inserted into the sliding grooves of the shell.
Preferably, the fixed block is of an annular structure, a second connecting rod is fixed to the top end of the fixed block, an annular sliding groove is formed in the third fixed plate, and the fixed block is inserted into the third fixed plate.
Preferably, the surface of the tenth connecting rod is provided with teeth matched with a gear, and the gear is meshed with the tenth connecting rod.
Compared with the prior art, the beneficial effects of the utility model are that:
(1) the device is provided with a third connecting rod and a fourth connecting rod, the clamping is more convenient by matching with a fifth connecting rod and a second fixing plate, two groups of rubber pads are closed by upward movement of the third connecting rod, and a wafer film is clamped;
(2) the device is provided with head rod and gear, and cooperation first servo motor and belt pulley make the device go up and down more convenient, through the rotation of head rod, make the tenth connecting rod rise, accomplish the lift of device, traditional hydraulic pressure lift of comparing need not change oil, and the maintenance cost is lower, and hoisting device's work efficiency makes more convenient that goes up and down.
Description of the drawings:
in order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, it is obvious that the drawings in the following description are only some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to these drawings without creative efforts.
FIG. 1 is a schematic front view of the structure of the present invention;
FIG. 2 is an enlarged schematic view of the structure at A in FIG. 1 according to the present invention;
FIG. 3 is a schematic side view of the structure of the present invention;
fig. 4 is a schematic front sectional view of the structure of the present invention during operation.
In the figure: 1. a main body mechanism; 110. a housing; 2. a lifting mechanism; 210. a first connecting rod; 220. a gear; 230. a first servo motor; 240. a belt pulley; 3. a clamping assembly; 310. a first fixing plate; 320. a second connecting rod; 330. a second servo motor; 340. a third connecting rod; 350. a fourth connecting rod; 360. a fifth connecting rod; 370. a second fixing plate; 380. a sixth connecting rod; 390. a spring; 3100. a seventh connecting rod; 3110. a rubber pad; 3120. an eighth connecting rod; 3130. a ninth connecting rod; 3140. a third fixing plate; 3150. a fixed block; 3160. a tenth connecting rod.
The specific implementation mode is as follows:
the technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.
Referring to fig. 1-4, the present invention provides an embodiment: a positioning clamping mechanism of a wafer film thickness detection device comprises a main body mechanism 1, wherein the main body mechanism 1 comprises a shell 110, a lifting mechanism 2 is inserted into the shell 110 through a bearing, the lifting mechanism 2 comprises a first connecting rod 210, a gear 220, a first servo motor 230 and a belt pulley 240, the gear 220 is fixedly sleeved on the surface of the first connecting rod 210, the first servo motor 230 is fixed on the back surface of the first connecting rod 210, the belt pulley 240 is sleeved on the surface of the first connecting rod 210, a clamping component 3 is inserted into the shell 110, and the clamping component 3 comprises a first fixing plate 310, a second connecting rod 320, a second servo motor 330, a third connecting rod 340, a fourth connecting rod 350, a fifth connecting rod 360, a second fixing plate 370, a sixth connecting rod 380, a spring 390, a seventh connecting rod, a rubber pad 3110, an eighth connecting rod 3120, a ninth connecting rod 3130, a third 3140, a 3100, a third connecting rod 3140, a third connecting rod, A fixing block 3150 and a tenth connecting rod 3160, wherein the second connecting rod 320 is inserted into the first fixing plate 310, the top end of the second connecting rod 320 is fixed with a second servo motor 330, the third connecting rod 340 is inserted into the second connecting rod 320, the bottom end of the third connecting rod 340 is fixed with a fourth connecting rod 350, two sides of the fourth connecting rod 350 are hinged with fifth connecting rods 360, the outer side of the fifth connecting rod 360 is fixed with a second fixing plate 370, the bottom end of the second fixing plate 370 is fixed with a sixth connecting rod 380, the surface of the sixth connecting rod 380 is sleeved with a spring 390, the surface of the sixth connecting rod 380 is sleeved with a seventh connecting rod 3100, the bottom end of the seventh connecting rod 3100 is fixed with a rubber pad 3110, the side of the second fixing plate 370 close to the housing 110 is fixed with an eighth connecting rod 3120, the top end of the eighth connecting rod 3120 is hinged with a ninth connecting rod 3130, the top end of the ninth connecting rod 3130 is fixed with a third fixing plate 31, a fixing block 3150 is inserted into the third fixing plate 3140, and a tenth connecting rod 3160 is fixed to the upper surface of the third fixing plate 3140;
furthermore, the surface of the third connecting rod 340 is provided with threads, the inside of the second connecting rod 320 is provided with threads matched with the third connecting rod 340, and the third connecting rod 340 is inserted inside the second connecting rod 320, so that the third connecting rod 340 can rotate and move downwards when the second connecting rod 320 rotates;
furthermore, the top end of the spring 390 is fixedly connected with the second fixing plate 370, and the bottom end of the spring 390 is fixedly connected with the seventh connecting rod 3100, so that the two groups of seventh connecting rods 3100 can be tightly attached under the elastic force of the spring 390 to clamp the crystal;
furthermore, sliding blocks are arranged on two sides of the third fixing plate 3140, sliding grooves matched with the sliding blocks are formed in the shell 110, and the sliding blocks are inserted into the sliding grooves of the shell 110, so that the sliding blocks limit the third fixing plate 3140, the third fixing plate 3140 can vertically move up and down, the third fixing plate 3140 cannot be loosened, and the first connecting rod 210 and the tenth connecting rod 3160 cannot be dislocated;
further, the fixing block 3150 is an annular structure, the second connecting rod 320 is fixed at the top end of the fixing block 3150, an annular sliding groove is formed in the third fixing plate 3140, and the fixing block 3150 is inserted into the third fixing plate 3140, so that the fixing block 3150 limits the second connecting rod 320, and the second connecting rod 320 cannot move up and down when rotating;
further, the surface of the tenth coupling rod 3160 is provided with teeth adapted to the gear 220, and the gear 220 is engaged with the tenth coupling rod 3160, so that the gear 220 can move the tenth coupling rod 3160 upward when rotating.
The working principle is as follows: when the device works, the second servo motor 330 is started, the second servo motor 330 is fixedly connected with the second connecting rod 320, the second connecting rod 320 is enabled to rotate, the third connecting rod 340 is in threaded connection with the second connecting rod 320, the ninth connecting rod 3130 limits the third connecting rod 340, the third connecting rod 340 is enabled to move upwards, the second fixing plate 370 is enabled to be closed, the spring 390 is enabled to be compressed, two groups of rubber pads 3110 are tightly attached to each other under the elastic action of the spring 390, a groove which is smaller than a round crystal body is formed in the bottom of each rubber pad 3110, the round crystal body is conveniently positioned and clamped, as shown in fig. 4, the tenth connecting rod 3160 can limit the third fixing plate 3140, and the third fixing plate 3140 is prevented from rotating together with the second connecting rod 320.
Start first servo motor 230, first servo motor 230 and head rod 210 fixed connection, make head rod 210 rotate, connect through belt pulley 240 between two sets of head rods 210, head rod 210 rotates, make another group head rod 210 also rotate, gear 220 and head rod 210 fixed socket joint, make gear 220 rotate, gear 220 meshes with tenth connecting rod 3160 mutually, make tenth connecting rod 3160 rise or descend, as shown in fig. 4, the above is that the utility model discloses a whole theory of operation.
It is obvious to a person skilled in the art that the invention is not restricted to details of the above-described exemplary embodiments, but that it can be implemented in other specific forms without departing from the spirit or essential characteristics of the invention. The present embodiments are therefore to be considered in all respects as illustrative and not restrictive, the scope of the invention being indicated by the appended claims rather than by the foregoing description, and all changes which come within the meaning and range of equivalency of the claims are therefore intended to be embraced therein. Any reference sign in a claim should not be construed as limiting the claim concerned.
Claims (6)
1. The utility model provides a location fixture of wafer film thickness check out test set, includes main part mechanism (1), its characterized in that: the main body mechanism (1) comprises a shell (110), the inside of the shell (110) is provided with a lifting mechanism (2) through a bearing seat, the lifting mechanism (2) comprises a first connecting rod (210), a gear (220), a first servo motor (230) and a belt pulley (240), the gear (220) is sleeved on the surface of the first connecting rod (210), a first servo motor (230) is fixed on the back surface of the first connecting rod (210), the belt pulley (240) is sleeved on the surface of the first connecting rod (210), a clamping assembly (3) is inserted in the inside of the shell (110), the clamping assembly (3) comprises a first fixing plate (310), a second connecting rod (320), a second servo motor (330), a third connecting rod (340), a fourth connecting rod (350), a fifth connecting rod (360), a second fixing plate (370), a sixth connecting rod (380), A spring (390), a seventh connecting rod (3100), a rubber pad (3110), an eighth connecting rod (3120), a ninth connecting rod (3130), a third fixing plate (3140), a fixing block (3150), and a tenth connecting rod (3160), wherein a second connecting rod (320) is inserted into the first fixing plate (310), a second servo motor (330) is fixed to the top end of the second connecting rod (320), a third connecting rod (340) is inserted into the second connecting rod (320), a fourth connecting rod (350) is fixed to the bottom end of the third connecting rod (340), fifth connecting rods (360) are hinged to both sides of the fourth connecting rod (350), a second fixing plate (370) is fixed to the outer side of the fifth connecting rod (360), a sixth connecting rod (380) is fixed to the bottom end of the second fixing plate (370), and the spring (390) is sleeved on the surface of the sixth connecting rod (380), the surface of sixth connecting rod (380) has cup jointed seventh connecting rod (3100), and the bottom mounting of seventh connecting rod (3100) has rubber pad (3110), one side that second fixed plate (370) are close to shell (110) is fixed with eighth connecting rod (3120), and the top of eighth connecting rod (3120) articulates there is ninth connecting rod (3130), the top of ninth connecting rod (3130) is fixed with third fixed plate (3140), and the inside of third fixed plate (3140) is inserted and is equipped with fixed block (3150), the upper surface mounting of third fixed plate (3140) has tenth connecting rod (3160).
2. The positioning and clamping mechanism of wafer film thickness detecting equipment as claimed in claim 1, wherein: the surface of the third connecting rod (340) is provided with threads, the inside of the second connecting rod (320) is provided with threads matched with the third connecting rod (340), and the third connecting rod (340) is inserted in the second connecting rod (320).
3. The positioning and clamping mechanism of wafer film thickness detecting equipment as claimed in claim 1, wherein: the top end of the spring (390) is fixedly connected with the second fixing plate (370), and the bottom end of the spring (390) is fixedly connected with the seventh connecting rod (3100).
4. The positioning and clamping mechanism of wafer film thickness detecting equipment as claimed in claim 1, wherein: the two sides of the third fixing plate (3140) are provided with sliding blocks, sliding grooves matched with the sliding blocks are formed in the shell (110), and the sliding blocks are inserted into the sliding grooves of the shell (110).
5. The positioning and clamping mechanism of wafer film thickness detecting equipment as claimed in claim 1, wherein: the fixing block (3150) is of an annular structure, a second connecting rod (320) is fixed to the top end of the fixing block (3150), an annular sliding groove is formed in the third fixing plate (3140), and the fixing block (3150) is inserted into the third fixing plate (3140).
6. The positioning and clamping mechanism of wafer film thickness detecting equipment as claimed in claim 1, wherein: the surface of the tenth connecting rod (3160) is provided with teeth matched with the gear (220), and the gear (220) is meshed with the tenth connecting rod (3160).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202021982015.XU CN213401099U (en) | 2020-09-11 | 2020-09-11 | Positioning and clamping mechanism of wafer film thickness detection equipment |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202021982015.XU CN213401099U (en) | 2020-09-11 | 2020-09-11 | Positioning and clamping mechanism of wafer film thickness detection equipment |
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| Publication Number | Publication Date |
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| CN213401099U true CN213401099U (en) | 2021-06-08 |
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| CN202021982015.XU Active CN213401099U (en) | 2020-09-11 | 2020-09-11 | Positioning and clamping mechanism of wafer film thickness detection equipment |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116978856A (en) * | 2023-09-25 | 2023-10-31 | 泓浒(苏州)半导体科技有限公司 | Double-arm clean type semiconductor wafer overturning clamp and control method thereof |
-
2020
- 2020-09-11 CN CN202021982015.XU patent/CN213401099U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116978856A (en) * | 2023-09-25 | 2023-10-31 | 泓浒(苏州)半导体科技有限公司 | Double-arm clean type semiconductor wafer overturning clamp and control method thereof |
| CN116978856B (en) * | 2023-09-25 | 2023-11-24 | 泓浒(苏州)半导体科技有限公司 | Double-arm clean type semiconductor wafer overturning clamp and control method thereof |
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