CN210089659U

CN210089659U - Spherical mirror sagittal height testing tool

Info

Publication number: CN210089659U
Application number: CN201921046119.7U
Authority: CN
Inventors: 王善明
Original assignee: Dalian Baisi Photoelectric Technology Co Ltd
Current assignee: Dalian Baisi Photoelectric Technology Co Ltd
Priority date: 2019-07-05
Filing date: 2019-07-05
Publication date: 2020-02-18
Anticipated expiration: 2029-07-05

Abstract

The utility model discloses a spherical mirror rise testing tool, including workstation and gear, the internally mounted of workstation has the lead screw, and the end department of lead screw is provided with the lantern ring, and the bottom of the lantern ring is connected with the gag lever post simultaneously, the last fixed surface of lantern ring has the one end of connecting plate, and the other end of connecting plate is connected with the connecting rod, and the intermediate position of connecting rod is provided with the extrusion spring simultaneously to the end department of connecting rod is fixed with the stripper plate, the gear is located the intermediate position of lead screw, and the outside of gear is connected with the pinion rack, and the avris of pinion rack is fixed with the backup pad simultaneously, the one end of backup pad is passed through limiting plate and workstation interconnect, and the other end of backup pad is fixed with puts the. This spherical mirror rise testing tool is convenient for fix the optics sphere, has reduced measuring error, and the stripper plate adopts the rubber material, reduces the wearing and tearing to the sphere, avoids the sphere to receive the damage, has strengthened the practicality of device.

Description

Spherical mirror sagittal height testing tool

Technical Field

The utility model relates to a monocrystalline silicon polished wafer heat treatment process technical field specifically is a spherical mirror rise testing tool.

Background

The rise of needs carrying out after finishing at processing of monocrystalline silicon polished wafer is measured, and optics sphere part is measured before the use, can improve the precision of using, reduces the error of optics sphere, and along with the continuous development of scientific and technological, the function of testing tool is more and more comprehensive, and current testing tool has following problem nevertheless:

1. in the testing process, the conditions of dislocation and infirm fixation are easy to occur, and the testing result is easy to deviate;

2. in the testing process, the difficulty of fixing the optical spherical surface is high, and the spherical surface is easily abraded.

Aiming at the problems, innovative design is urgently needed on the basis of the original spherical mirror rise testing tool.

SUMMERY OF THE UTILITY MODEL

An object of the utility model is to provide a spherical mirror rise testing tool to propose current spherical mirror rise testing tool in solving above-mentioned background art, be not convenient for fix the optics sphere, measuring error appears easily, and cause the problem of wearing and tearing to the sphere easily.

In order to achieve the above object, the utility model provides a following technical scheme: the utility model provides a spherical mirror rise test tool, includes workstation and gear, the internally mounted of workstation has the lead screw, and the end department of lead screw is provided with the lantern ring, and the bottom of the lantern ring is connected with the gag lever post simultaneously, the last fixed surface of lantern ring has the one end of connecting plate, and the other end of connecting plate is connected with the connecting rod, and the intermediate position of connecting rod is provided with the extrusion spring simultaneously to the end department of connecting rod is fixed with the stripper plate, the gear is located the intermediate position of lead screw, and the outside of gear is connected with the pinion rack, and the avris of pinion rack is fixed with the backup pad simultaneously, the one end of backup pad is passed through limiting plate and workstation interconnect, and the other end of backup pad.

Preferably, the surface of the screw rod is provided with 2 sections of threads, the directions of the 2 sections of threads are opposite, and the screw rod is in threaded connection with the lantern ring.

Preferably, the connecting plate and the workbench form a sliding installation structure, the connecting plate and the extrusion plate form a telescopic installation structure, and the extrusion plate is made of rubber.

Preferably, the gear and the toothed plate are in meshed connection, and the toothed plate and the supporting plate are integrally arranged.

Preferably, the supporting plate and the limiting plate form a lifting installation structure, and the supporting plate is nested and installed on the outer side of the limiting plate.

Preferably, the middle position of the object placing plate is arranged in an arc shape, and the object placing plate is symmetrically arranged relative to the axis of the workbench.

Compared with the prior art, the beneficial effects of the utility model are that: the sphere lens rise testing tool is convenient for fixing the optical sphere, reduces the measurement error, does not wear the sphere and enhances the practicability of the device;

1. in the measuring process, the optical spherical surface is placed above the object placing plate, the spherical surface is supported by the arc-shaped object placing plate, the placing stability of the spherical surface can be improved, then the object placing plate and the extrusion plate are driven to move simultaneously by the rotation of the screw rod, when the upper surface of the object placing plate and the workbench are in the same straight line, the screw rod is rotated to the maximum extent, and the extrusion plate extrudes the spherical surface at the moment, so that the mounting stability of the spherical surface is improved;

2. the stripper plate can outwards move through extrusion spring at the in-process that removes to this can reduce the pressure to the sphere, and the stripper plate adopts the rubber material, reduces the wearing and tearing to the sphere, avoids the sphere to receive the damage.

Drawings

FIG. 1 is a schematic view of the overall front structure of the present invention;

FIG. 2 is a schematic view of the overall side structure of the present invention;

FIG. 3 is a schematic view of the connection structure of the limiting plate and the supporting plate of the present invention;

fig. 4 is a schematic view of the connection structure between the collar and the stop rod of the present invention.

In the figure: 1. a work table; 2. a screw rod; 3. a collar; 4. a limiting rod; 5. a connecting plate; 6. a connecting rod; 7. a compression spring; 8. a pressing plate; 9. a gear; 10. a toothed plate; 11. a limiting plate; 12. a support plate; 13. an object placing plate.

Detailed Description

The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.

Referring to fig. 1-4, the present invention provides a technical solution: a spherical mirror rise test tool comprises a workbench 1, a lead screw 2, a sleeve ring 3, a limiting rod 4, a connecting plate 5, a connecting rod 6, an extrusion spring 7, an extrusion plate 8, a gear 9, a toothed plate 10, a limiting plate 11, a supporting plate 12 and a storage plate 13, wherein the lead screw 2 is installed inside the workbench 1, the sleeve ring 3 is arranged at the end of the lead screw 2, the bottom of the sleeve ring 3 is connected with the limiting rod 4, one end of the connecting plate 5 is fixed on the upper surface of the sleeve ring 3, the other end of the connecting plate 5 is connected with the connecting rod 6, the extrusion spring 7 is arranged at the middle position of the connecting rod 6, the extrusion plate 8 is fixed at the end of the connecting rod 6, the gear 9 is located at the middle position of the lead screw 2, the toothed plate 10 is connected to the outer side of the gear 9, the supporting plate 12 is fixed on the lateral side of the toothed plate 10, and the other end of the supporting plate 12 is fixed with an object placing plate 13;

2 sections of threads are arranged on the surface of the screw rod 2, the directions of the 2 sections of threads are opposite, meanwhile, the screw rod 2 is in threaded connection with the lantern rings 3, and when the screw rod 2 rotates, the 2 lantern rings 3 above the screw rod can move in opposite directions;

the connecting plate 5 and the workbench 1 form a sliding installation structure, the connecting plate 5 and the extrusion plate 8 form a telescopic installation structure, meanwhile, the extrusion plate 8 is made of rubber, when the screw rod 2 rotates, the bottom of the lantern ring 3 can slide above the screw rod 2 under the action of the limiting rod 4 and drive the connecting plate 5 to move, after the extrusion plate 8 is pressed by a spherical surface, the extrusion plate can move outside the connecting plate 5 through the connecting rod 6 and is driven by the extrusion spring 7 to recover the original position, and the extrusion plate 8 made of rubber can reduce the abrasion to the spherical surface;

the gear 9 and the toothed plate 10 are in meshed connection, the toothed plate 10 and the supporting plate 12 are integrally arranged, the supporting plate 12 and the limiting plate 11 form a lifting installation structure, the supporting plate 12 is nested and installed on the outer side of the limiting plate 11, the screw rod 2 drives the lantern ring 3 to slide and simultaneously can drive the gear 9 to rotate, and the gear 9 rotates and can drive the supporting plate 12 to move upwards through the toothed plate 10;

put the intermediate position of thing board 13 and adopt the arc setting, and put the axial symmetry setting of thing board 13 about workstation 1, the stability that the sphere was placed can be improved in the arc setting, reduces the probability that drops.

The working principle is as follows: when the sphere sagittal height testing tool is used, as shown in figures 1-4, a sphere to be tested is placed above the object placing plate 13, then the screw rod 2 is manually rotated, when the screw rod 2 is rotated, the screw rod can drive the lantern ring 3 and the gear 9 to rotate, and the bottom of the lantern ring 3 is limited by the limiting rod 4, so when the screw rod 2 rotates, the lantern ring 3 can drive the extrusion plate 8 to slide outwards through the connecting plate 5, meanwhile, the gear 9 rotates to drive the toothed plate 10 and the supporting plate 12 to move upwards, so that the sphere to be tested can be driven to move, when the sphere is contacted with the extrusion plate 8 in the moving process, the extrusion plate 8 can slide towards the position of the connecting plate 5 through the connecting rod 6, at the moment, the extrusion spring 7 plays a repulsive force and can extrude the sphere by driving the extrusion plate 8, the sphere is prevented from falling off, the object placing plate 13 continuously moves upwards, when lead screw 2 rotated to furthest, put the collinear setting of upper surface department of thing board 13 and workstation 1, can judge the diameter of sphere through the contact point of measuring stripper plate 8 and sphere and the distance of putting between the thing board 13 bottom this moment to accomplish the test to the sphere, because stripper plate 8 adopts rubber material, consequently can reduce the wearing and tearing to the sphere, avoid the sphere to appear the condition of damaging.

It should be finally noted that the above only serves to illustrate the technical solution of the present invention, and not to limit the scope of the present invention, and that simple modifications or equivalent replacements performed by those skilled in the art to the technical solution of the present invention do not depart from the spirit and scope of the technical solution of the present invention.

Claims

1. The utility model provides a spherical mirror sagittal height testing tool, includes workstation (1) and gear (9), its characterized in that: a screw rod (2) is arranged in the workbench (1), a lantern ring (3) is arranged at the end of the screw rod (2), meanwhile, the bottom of the lantern ring (3) is connected with a limiting rod (4), one end of a connecting plate (5) is fixed on the upper surface of the lantern ring (3), the other end of the connecting plate (5) is connected with a connecting rod (6), meanwhile, an extrusion spring (7) is arranged at the middle position of the connecting rod (6), and the end of the connecting rod (6) is fixed with an extrusion plate (8), the gear (9) is positioned in the middle of the screw rod (2), the outer side of the gear (9) is connected with a toothed plate (10), meanwhile, the side of the toothed plate (10) is fixed with a supporting plate (12), one end of the supporting plate (12) is connected with the workbench (1) through a limiting plate (11), and the other end of the supporting plate (12) is fixed with a storage plate (13).

2. A spherical mirror height test tool according to claim 1, wherein: the surface of lead screw (2) is provided with 2 sections of screw threads, and the direction of 2 sections of screw threads is opposite, and lead screw (2) and lantern ring (3) are threaded connection simultaneously.

3. A spherical mirror height test tool according to claim 1, wherein: connecting plate (5) and workstation (1) constitute the slidable mounting structure, and connecting plate (5) and stripper plate (8) constitute flexible mounting structure, and stripper plate (8) adopt the rubber material simultaneously.

4. A spherical mirror height test tool according to claim 1, wherein: the gear (9) is in meshed connection with the toothed plate (10), and the toothed plate (10) and the supporting plate (12) are integrally arranged.

5. A spherical mirror height test tool according to claim 1, wherein: the supporting plate (12) and the limiting plate (11) form a lifting installation structure, and the supporting plate (12) is nested and installed on the outer side of the limiting plate (11).

6. A spherical mirror height test tool according to claim 1, wherein: the middle position of the object placing plate (13) is arranged in an arc shape, and the object placing plate (13) is symmetrically arranged relative to the axis of the workbench (1).