CN213357730U - Substrate transverse moving clamping mechanism for film coating - Google Patents
Substrate transverse moving clamping mechanism for film coating Download PDFInfo
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- CN213357730U CN213357730U CN202020751108.5U CN202020751108U CN213357730U CN 213357730 U CN213357730 U CN 213357730U CN 202020751108 U CN202020751108 U CN 202020751108U CN 213357730 U CN213357730 U CN 213357730U
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Abstract
The utility model relates to the technical field of film preparation, in particular to a substrate transverse moving clamping mechanism for film coating, which comprises a vacuum cylinder and two sets of arm-holding mechanisms, wherein the vacuum cylinder is connected with and drives the two sets of arm-holding mechanisms to clamp and open so as to clamp or loosen a substrate; the arm embracing mechanism comprises a pushing component, a connecting rod, a rotating shaft and an arm embracing mechanism, wherein the pushing component is in transmission fit with the vacuum cylinder, the vacuum cylinder can linearly move up and down, the pushing component can linearly move left and right under the driving of the vacuum cylinder, the pushing component is connected with the rotating shaft through the connecting rod, the rotating shaft can rotate under the driving of the pushing component, and the arm embracing mechanism is fixedly connected with the rotating shaft to enable the arm embracing to rotate under the driving of the rotating shaft; the clamping of the base plate is realized by the opposite rotation of the arms of the two sets of arm-holding mechanisms, and the loosening of the base plate is realized by the opposite rotation of the arms of the two sets of arm-holding mechanisms. The utility model has the advantages that: simple and reasonable structure, small occupied space, reduced cost, simplified action flow and high automation degree and precision.
Description
Technical Field
The utility model belongs to the technical field of the film preparation technique and specifically relates to a base plate sideslip clamping mechanism for coating film.
Background
An automatic continuous vacuum coating equipment is becoming one of the trends in the development of coating equipment. One of the keys to realizing the automatic continuous operation of the vacuum coating equipment is the automation of the substrate loading and unloading mode. The design of the substrate automatic loading and unloading mechanism of the vacuum coating equipment needs to consider the compatibility with the coating process of the coating chamber and other front and back processes, and also considers the performance stability and the cost factor.
In the process of loading and unloading the substrate, the substrate needs to be clamped so as to ensure the safety of loading and unloading. At present, the clamping mechanism is usually realized through an automatic clamping device, but the existing clamping mechanism has the defects that the occupied space is large, the cost is correspondingly increased, the other design difficulty is insufficient output force, the substrate cannot be clamped, particularly for the large-area substrate, the weight of the substrate is large, and danger is easy to occur in clamping, loading and unloading.
Disclosure of Invention
The utility model aims at providing a base plate sideslip clamping mechanism for coating film according to above-mentioned prior art is not enough, carries out the rotation type through two armful arm mechanisms of single cylinder drive and presss from both sides tightly to the base plate, when guaranteeing base plate clamping stability, saves occupation space, reduce cost.
The utility model discloses the purpose is realized accomplishing by following technical scheme:
a substrate transverse moving clamping mechanism for coating is used for clamping a substrate, and is characterized in that: the clamping mechanism comprises a vacuum cylinder and two sets of arm-holding mechanisms, wherein the vacuum cylinder is connected with and drives the two sets of arm-holding mechanisms to clamp and open so as to clamp or loosen a substrate; the arm embracing mechanism comprises a pushing component, a connecting rod, a rotating shaft and an arm embracing mechanism, wherein the pushing component is in transmission fit with the vacuum cylinder, the vacuum cylinder can linearly move up and down, the pushing component can linearly move left and right under the driving of the vacuum cylinder, the pushing component is connected with the rotating shaft through the connecting rod, the rotating shaft can rotate under the driving of the pushing component, and the arm embracing mechanism is fixedly connected with the rotating shaft to enable the arm embracing to rotate under the driving of the rotating shaft; the two sets of the arm-embracing mechanisms are used for realizing the clamping of the substrate in a way that the arms rotate oppositely, and the two sets of the arm-embracing mechanisms are used for realizing the back-to-back rotation of the arms to loosen the substrate.
When the arms of the two arm holding mechanisms rotate in opposite directions, the clamping parts on the two arms rotate oppositely, and the relative distance between the clamping parts and the clamping parts meets the requirement of clamping the substrate from two sides.
The vacuum cylinder is provided with a cam follower, the pushing component is provided with a groove matched and matched with the cam follower, the groove is obliquely arranged relative to the movement direction of the vacuum cylinder, the cam follower is inserted in the groove, the cam follower and the groove form sliding fit, and the vacuum cylinder realizes that the power of the vertical linear movement of the vacuum cylinder is converted into the left-right linear movement of the pushing component through the fit between the cam follower and the groove.
Two the recess on the pushing component is V font contained angle and arranges.
The pushing component is provided with a cam follower, the cam follower is in transmission fit with the connecting rod, and the pushing component converts the power of the left-right linear motion of the pushing component into the rotation of the rotating shaft through the transmission fit between the cam follower and the connecting rod.
The utility model has the advantages that: the structure is simple and reasonable, the occupied space is small, the cost is reduced, the action flow is simplified, and the automation degree and the precision are high; the substrate can be stably and effectively clamped, and the safety of the substrate in the writing process is ensured; the motion stroke of the arm holding end is small, the rotary clamping can be matched with the avoidance of the substrate handover mechanism, the action mechanism is saved, and the carrying efficiency is improved.
Drawings
Fig. 1 is a schematic structural view of the present invention;
FIG. 2 is an exploded view of the present invention;
fig. 3 is a schematic view of the clamping state of the arm of the present invention;
fig. 4 is a schematic view of the open state of the arm.
Detailed Description
The features of the present invention and other related features are described in further detail below by way of example in conjunction with the accompanying drawings to facilitate understanding by those skilled in the art:
as shown in fig. 1-4, the labels 1-7 are respectively shown as: the device comprises a vacuum cylinder 1, a cam follower 2, a pushing component 3, a cam follower 4, a connecting rod 5, a rotating shaft 6 and an arm 7.
Example (b): the substrate transverse moving clamping mechanism for coating in the embodiment is used for clamping the substrate in the substrate loading and unloading process, and ensures the safety and stability of the substrate in the loading and unloading process.
As shown in fig. 1 and fig. 2, the traverse clamping mechanism for coating in this embodiment includes a vacuum cylinder 1, and the vacuum cylinder 1 is used as a power component of the whole mechanism to provide power for the movement of the mechanism. Cam followers 2 are respectively arranged on two symmetrical sides of the vacuum cylinder 1, and the cam followers 2 are used as transmission parts between the vacuum cylinder 1 and the pushing part 3. The two cam followers 2 are respectively embedded in grooves arranged on the two pushing components 3, and the cam followers 2 and the grooves form sliding fit, namely the cam followers 2 can slide along the groove body direction of the grooves. Referring to fig. 1 and 2, while the vacuum cylinder 1 moves linearly up and down during operation, the cam follower 2 disposed on the vacuum cylinder 1 moves linearly up and down along with the vacuum cylinder 1, and slides in the groove along with the movement of the cam follower 2, so that the pushing member 3 moves linearly left and right by transmission. As shown in fig. 2, the two pushing members 3 are identical in structure and symmetrically arranged, and the groove body directions of the grooves on the two pushing members 3 form a V-shaped included angle arrangement, so that the two pushing members 3 perform relative movement, and the synchronism of the two pushing members 3 during movement, especially the consistency of the movement strokes of the two pushing members 3, can be further ensured.
As shown in fig. 1 and 2, a cam follower 4 is provided at a lower portion of each pushing member 3, and the cam follower 4 is also movable in accordance with the left and right linear movement of the pushing member 3. One side of the cam follower 4 is provided with a connecting rod 5, the connecting rod 5 is provided with a socket, and the socket is matched with the outer contour shape and size of the cam follower 4, so that when the cam follower 4 moves linearly left and right along with the pushing component 3, the connecting rod 5 can be stressed by the transmission of the cam follower 4. The rotating shaft 6 is connected below the connecting rod 5, and the rotating shaft 6 and the connecting rod 5 form a shaft hole fit, so that when the connecting rod 5 is stressed, the rotating shaft 6 can be driven to rotate. The rotating shaft 6 is connected and fixed with the arm 7, so that the arm 7 body can rotate under the driving action.
As shown in fig. 1 and 3, the substrate traverse clamping mechanism for plating in the present embodiment has the following actions in the clamped state: the vacuum cylinder 1 moves linearly downward (as shown by the arrow direction at the position of the vacuum cylinder 1 in fig. 3), the two cam followers 2 respectively slide downward along the corresponding grooves on the pushing members 3 and drive the two pushing members 3 to move back to back towards both sides (as shown by the arrow directions of the pushing members 3 on the left and right sides in fig. 3); the cam followers 4 on the two cam followers 2 transmit power to the rotating shaft 6 to rotate through the connecting rod 5, and at this time, the two embracing arms 7 rotate in opposite directions (as shown by arrow directions at positions of the two embracing arms 7 in fig. 3) under the driving of the rotating shaft 6 until the two clamping parts are opposite, so that the substrate can be rotationally clamped from two sides of the substrate. The distance between the clamping parts on the two holding arms 7 is matched with the width of the substrate, so that the requirement of effective stable clamping is met. After the substrate is clamped, the transverse moving clamping mechanism in the embodiment can transversely move under the action of the guide rail to realize the conveying of the substrate; in the conveying process, the vacuum cylinder 1 used for providing clamping force always keeps working, so that the two holding arms 7 always clamp the substrate, and the stability and the safety of the substrate in the conveying process are ensured.
As shown in fig. 1 and 4, the substrate traverse clamping mechanism for plating in the present embodiment has the following actions in the open state: the vacuum cylinder 1 moves linearly upwards (as shown by the arrow direction at the position of the vacuum cylinder 1 in fig. 4), the two cam followers 2 respectively slide upwards along the corresponding grooves on the pushing members 3 and drive the two pushing members 3 to move towards each other (as shown by the arrow directions of the pushing members 3 at the left and right sides in fig. 4); the cam followers 4 on the two cam followers 2 transmit power to the rotating shaft 6 to rotate through the connecting rod 5, and at this time, the two holding arms 7 rotate back to back under the driving of the rotating shaft 6 (as shown by the arrow directions at the positions of the two holding arms 7 in fig. 4) and can release the substrate. The opening of the arm 7 must be performed after the substrate is transferred, for example, the substrate is transferred by using the traverse clamping mechanism in this embodiment, the substrate is clamped and transferred to the next station, a mechanism on the station clamps or loads the substrate, and the arm 7 can be opened only after the substrate is transferred, that is, the substrate is stably clamped or loaded, so as to ensure that the substrate is always in a safe and stable state during the transfer process of loading and unloading.
As shown in fig. 3 and 4, in the embodiment, the substrate traversing clamping mechanism for coating drives the two arm grippers 7 to work through one vacuum cylinder 1, so that the occupied space is small, the automatic arrangement of a coating process is facilitated, and the cost is reduced. Meanwhile, the two embracing arms 7 can be effectively matched with the base plate to be rotationally clamped, so that the moving stroke range of the embracing arms in a space range is extremely small, the action process is simplified, avoidance of the embracing arms when the embracing arms are jointed with the mechanism on the next station is facilitated, mutual conflict of the two mechanisms when the embracing arms are jointed is avoided, and the carrying efficiency is improved.
Although the conception and the embodiments of the present invention have been described in detail with reference to the drawings, those skilled in the art will recognize that various changes and modifications can be made therein without departing from the scope of the appended claims, and therefore, the description thereof is not repeated herein.
Claims (4)
1. A substrate transverse moving clamping mechanism for coating is used for clamping a substrate, and is characterized in that: the clamping mechanism comprises a vacuum cylinder and two sets of arm-holding mechanisms, wherein the vacuum cylinder is connected with and drives the two sets of arm-holding mechanisms to clamp and open so as to clamp or loosen a substrate; the arm embracing mechanism comprises a pushing component, a connecting rod, a rotating shaft and an arm embracing mechanism, wherein the pushing component is in transmission fit with the vacuum cylinder, the vacuum cylinder can linearly move up and down, the pushing component can linearly move left and right under the driving of the vacuum cylinder, the pushing component is connected with the rotating shaft through the connecting rod, the rotating shaft can rotate under the driving of the pushing component, and the arm embracing mechanism is fixedly connected with the rotating shaft to enable the arm embracing to rotate under the driving of the rotating shaft; the two sets of the arm-embracing mechanisms are used for realizing the clamping of the substrate in a way that the arms rotate oppositely, and the two sets of the arm-embracing mechanisms are used for realizing the back-to-back rotation of the arms to loosen the substrate.
2. The substrate traverse clamping mechanism for coating as claimed in claim 1, wherein: the vacuum cylinder is provided with a cam follower, the pushing component is provided with a groove matched and matched with the cam follower, the groove is obliquely arranged relative to the movement direction of the vacuum cylinder, the cam follower is inserted in the groove, the cam follower and the groove form sliding fit, and the vacuum cylinder realizes that the power of the vertical linear movement of the vacuum cylinder is converted into the left-right linear movement of the pushing component through the fit between the cam follower and the groove.
3. The substrate traverse clamping mechanism for coating as claimed in claim 2, wherein: two the recess on the pushing component is V font contained angle and arranges.
4. The substrate traverse clamping mechanism for coating as claimed in claim 1, wherein: the pushing component is provided with a cam follower, the cam follower is in transmission fit with the connecting rod, and the pushing component converts the power of the left-right linear motion of the pushing component into the rotation of the rotating shaft through the transmission fit between the cam follower and the connecting rod.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202020751108.5U CN213357730U (en) | 2020-05-09 | 2020-05-09 | Substrate transverse moving clamping mechanism for film coating |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202020751108.5U CN213357730U (en) | 2020-05-09 | 2020-05-09 | Substrate transverse moving clamping mechanism for film coating |
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| Publication Number | Publication Date |
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| CN213357730U true CN213357730U (en) | 2021-06-04 |
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| CN202020751108.5U Active CN213357730U (en) | 2020-05-09 | 2020-05-09 | Substrate transverse moving clamping mechanism for film coating |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111378948A (en) * | 2020-05-09 | 2020-07-07 | 光驰科技(上海)有限公司 | Substrate transverse moving clamping mechanism for film coating |
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2020
- 2020-05-09 CN CN202020751108.5U patent/CN213357730U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111378948A (en) * | 2020-05-09 | 2020-07-07 | 光驰科技(上海)有限公司 | Substrate transverse moving clamping mechanism for film coating |
| CN111378948B (en) * | 2020-05-09 | 2024-06-28 | 光驰科技(上海)有限公司 | Substrate transverse moving clamping mechanism for coating film |
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