CN107585562B - A kind of graphite boat clamping device and three axis conveying robots - Google Patents
A kind of graphite boat clamping device and three axis conveying robots Download PDFInfo
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- CN107585562B CN107585562B CN201710841848.0A CN201710841848A CN107585562B CN 107585562 B CN107585562 B CN 107585562B CN 201710841848 A CN201710841848 A CN 201710841848A CN 107585562 B CN107585562 B CN 107585562B
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Abstract
The invention discloses a kind of graphite boat clamping devices, including installation base plate and two groups of clamp assemblies, two groups of clamp assemblies are divided into the installation base plate both ends, the installation base plate both ends correspondence is equipped with the transhipment actuator that the clamp assemblies are moved along installation base plate length direction, the clamp assemblies include connector, a pair of of clamping jaw and a pair of of clamping actuator, a pair of clamping actuator connects one to one with a pair of clamping jaw, a pair of clamping actuator is installed on the connector, and the transhipment actuator is connected with the connector.The advantages that present invention has compact-sized reliable, easy to operate, high-efficient, high degree of automation, does not influence graphite boat service life.
Description
Technical field
The present invention relates to horizontal rheotaxial growth furnace more particularly to a kind of graphite boat clamping devices and three axis handling machineries
Hand.
Background technique
Currently, it is to be manually operated entirely that the graphite boat of horizontal rheotaxial growth furnace, which pushes away boat system up and down, i.e., artificially pass through hand
Two gloves on casing move out graphite boat from loadlock is intracavitary, are placed into glove box, then be transported to manually out of glove box
It pushes away on boat quartz rake.Fully loaded graphite boat quality weight, length dimension is big, and space is limited in glove box, causes manual handling inadequate
It is convenient, large labor intensity and low efficiency.Meanwhile manually in the intracavitary drawing boat of loadlock, exists between graphite boat and supporting plate and rub mill, shadow
Graphite boat service life is rung, it is unstable to also result in graphite boat motion process.
Summary of the invention
The technical problem to be solved by the present invention is to overcome the deficiencies in the prior art, provide a kind of compact-sized reliable, operation
Convenient, high-efficient, high degree of automation does not influence the graphite boat clamping device of service life.
The present invention further provides a kind of three axis conveying robots containing above-mentioned graphite boat clamp structure.
In order to solve the above technical problems, the invention adopts the following technical scheme:
A kind of graphite boat clamping device, including installation base plate and two groups of clamp assemblies, two groups of clamp assemblies are divided into described
Installation base plate both ends, corresponding be equipped in the installation base plate both ends move turning for the clamp assemblies along installation base plate length direction
Actuator is transported, the clamp assemblies include connector, a pair of of clamping jaw and a pair of of clamping actuator, a pair of clamping actuator
It connects one to one with a pair of clamping jaw, a pair of clamping actuator is installed on the connector, the transhipment driving
Part is connected with the connector.
As a further improvement of the above technical scheme: the clamping actuator is clamping cylinder, the clamping actuator
Cylinder body be installed on the connector, piston rod is fixedly connected with the clamping jaw.
As a further improvement of the above technical scheme: the transhipment actuator is transhipment cylinder, the transhipment actuator
Cylinder body be installed on the installation base plate, piston rod is connected with the connector.
As a further improvement of the above technical scheme: each positioned opposite to the clamping actuator, two pieces transhipment driving
Part is arranged in the same direction.
As a further improvement of the above technical scheme: the clamping jaw is C font clamping jaw, and clamping jaw top and the clamping are driven
Moving part is connected, and lower part is stairstepping.
A kind of three axis conveying robots, the interior support frame including above-mentioned graphite boat clamping device and in glove box
Frame, the inner support frame are equipped with two column X-axis transmission mechanisms, are equipped with Y-axis transmission mechanism between the two column X-axis transmission mechanisms,
The Y-axis transmission mechanism is equipped with Z-axis transmission mechanism, the installation base plate company of the Z-axis transmission mechanism and graphite boat clamping device
It connects, the installation base plate and the X-axis transmission mechanism are arranged in parallel.
As a further improvement of the above technical scheme: the X-axis transmission mechanism is X-axis electric cylinders, the X-axis transmission of two column
First motor deceleration thermomechanical components are equipped between mechanism, the first motor deceleration thermomechanical components two sides are respectively equipped with one group of shaft coupling group
Part, the coupling assembly are connect with ipsilateral X-axis electric cylinders, and the Y-axis transmission mechanism is Y-axis electric cylinders, Y-axis electric cylinders end and X
The sliding block of axis electric cylinders is connected, and the Z-axis transmission mechanism is Z axis electric cylinders, and Z axis electric cylinders are connected with the sliding block of Y-axis electric cylinders, the installation
Substrate is connected with the sliding block of the Z axis electric cylinders.
Compared with the prior art, the advantages of the present invention are as follows: graphite boat clamping device disclosed by the invention, including two groups of folders
Hold component, two groups of clamp assemblies respectively clamp it from the rear and front end of graphite boat, clamp assemblies include a pair of of clamping jaw and
A pair clamps actuator, and a pair of of clamping jaw can be close to each other by it at left and right sides of graphite boat under the action of a pair clamps actuator
It clamps, fix, transhipment actuator is respectively configured in two groups of clamp assemblies, and transhipment actuator can be driven by connector and clamp driving
Part, clamping jaw and graphite boat are integrally moved along installation base plate length direction, so as to be transferred to hand for the self-supported lock of graphite boat is intracavitary
In casing, compact overall structure, convenient in the intracavitary narrow spatial operation of loadlock, high degree of automation is high-efficient, carries
Journey graphite boat will not rub with pallet, avoid influencing graphite boat service life.
Three axis conveying robot disclosed by the invention, including above-mentioned graphite boat clamping device, thus equally have above-mentioned excellent
Point.Meanwhile X-axis transmission mechanism can drive Y-axis transmission mechanism, Z-axis transmission mechanism and graphite boat clamping device whole in glove box
It inside moves along the x axis, Y-axis transmission mechanism can drive Z-axis transmission mechanism, graphite boat clamping device mobile in Y direction, Z axis
Transmission mechanism can drive graphite boat clamping device mobile in Z-direction, and then real graphite boat clamping device is in glove box
Graphite boat can be accurately and rapidly carried on quartz rake by three-dimensional space motion, graphite boat clamping device.
Detailed description of the invention
Fig. 1 is the schematic view of the front view of graphite boat clamping device of the present invention.
Fig. 2 is the side structure schematic view of graphite boat clamping device of the present invention.
Fig. 3 is the schematic perspective view of three axis conveying robots of the invention.
Fig. 4 is the schematic perspective view after three axis conveying robots removal inner support frame of the invention.
Structural schematic diagram when Fig. 5 is the use state of three axis conveying robots of the invention.
Each label indicates in figure: 1, installation base plate；2, clamp assemblies；21, connector；22, clamping jaw；23, actuator is clamped；
3, actuator is transported；4, glove box；5, inner support frame；6, X-axis transmission mechanism；61, first motor deceleration thermomechanical components；62, shaft coupling
Device assembly；7, Y-axis transmission mechanism；8, Z-axis transmission mechanism；9, sliding block；10, graphite boat；101, boat body；102, slide plate；20, it loads
Lock chamber；30, quartz rake.
Specific embodiment
Below in conjunction with Figure of description and specific embodiment, invention is further described in detail.
Fig. 1 is to Fig. 2 shows a kind of embodiment of graphite boat clamping device of the present invention, the graphite boat clamping machines of the present embodiment
Structure, including installation base plate 1 and two groups of clamp assemblies 2, two groups of clamp assemblies 2 are divided into 1 both ends of installation base plate, and 1 liang of installation base plate
End is corresponding to be equipped with the transhipment actuator 3 that clamp assemblies 2 are moved along 1 length direction of installation base plate, and clamp assemblies 2 include connector
21, a pair of of clamping jaw 22 and a pair of of clamping actuator 23, a pair clamp actuator 23 and connect one to one with a pair of of clamping jaw 22, and one
It is installed on connector 21 to actuator 23 is clamped, transhipment actuator 3 is connected with connector 21.
The graphite boat clamping device, including two groups of clamp assemblies 2, two groups of clamp assemblies 2 are respectively from the front and back of graphite boat 10
Both ends clamp it, and clamp assemblies 2 include a pair of of clamping jaw 22 and a pair of of clamping actuator 23, and a pair of of clamping jaw 22 can be in a pair
Close to each other at left and right sides of graphite boat 10 under the action of clamping actuator 23 to be clamped, fixed, two groups of clamp assemblies 2 divide
Actuator 3 Pei Zhi not be transported, transhipment actuator 3 can be driven by connector 21 and clamp actuator 23, clamping jaw 22 and graphite boat 10
It is whole to move (or back-and-forth motion) along 1 length direction of installation base plate, so as to be transferred in the self-supported lock chamber 20 of graphite boat 10
In glove box 4, compact overall structure, convenient for narrow spatial operation in loadlock chamber 20, high degree of automation is high-efficient,
Handling process graphite boat 10 will not rub with pallet, avoid influencing 10 service life of graphite boat.
The specific work process of the graphite boat clamping device are as follows: two groups of transhipment actuators 3 drive two groups of clamp assemblies 2 to protrude into
In loadlock chamber 20, keep relatively wide distance to avoid graphite boat 10 between each pair of clamping jaw 22, when the clamp assemblies 2 of rear side move
It is each right to the slide plate 102 of 10 rear side of graphite boat, when the clamp assemblies 2 of front side are moved at the slide plate 102 of 10 front side of graphite boat
Clamping actuator 23 drives each pair of clamping jaw 22 close to each other, and clamping jaw 22 is made to protrude into the gap between slide plate 102 and pallet, thus will
Graphite boat 10 is reliably clamped fixation, and then two groups of transhipment actuators 3, which drive in two groups of self-supported lock chambers 20 of clamp assemblies 2, moves back
Out, the process that graphite boat 10 is carried to glove box 4 from loadlock chamber 20 is completed.
As further preferred technical solution, in the present embodiment, clamping actuator 23 is clamping cylinder, clamps actuator
23 cylinder body is installed on connector 21, and piston rod is fixedly connected with clamping jaw 22.That is, the flexible fortune of the piston rod of clamping cylinder
It is dynamic, and then drive clamping jaw 22 close to each other or separate, structure is simple, reliable；Specifically, connector 21 can be plate.
Further, in the present embodiment, transhipment actuator 3 is transhipment cylinder, and the cylinder body of transhipment actuator 3 is installed on
It fills on substrate 1, piston rod is connected with connector 21.That is, the piston rod stretching motion of transhipment cylinder, and then with follower link
21, clamping cylinder and 22 entirety of clamping jaw move forward and backward, and structure is simple, reliable.
Further, in the present embodiment, each positioned opposite to actuator 23 is clamped, two pieces transports actuator 3 along same
Direction arrangement.When each to clamping the air inlet simultaneously of actuator 23 or when being vented simultaneously, each pair of clamping jaw 22 be then close to each other or mutual original
Reason；When two pieces is transported the air inlet simultaneously of actuator 3 or is vented simultaneously, two groups of clamp assemblies 2 is driven to transport backward forward or simultaneously simultaneously
It is dynamic, the structure of the pressure control part of each actuator can be simplified.
Further, in the present embodiment, clamping jaw 22 is C font clamping jaw, and 22 top of clamping jaw is connected with actuator 23 is clamped,
Lower part is stairstepping.C font clamping jaw can preferably be matched with the structure of graphite boat 10；The lower part of clamping jaw 22 uses stairstepping, just
In clamping position.
Fig. 3 to Fig. 5 shows a kind of embodiment of three axis conveying robots of the invention, the three axis handling machineries of the present embodiment
Hand, the inner support frame 5 including above-mentioned graphite boat clamping device and in glove box 4, inner support frame 5 are equipped with two column X
Shaft transmission 6, Y-axis transmission mechanism 7 is equipped between two column X-axis transmission mechanisms 6, and Y-axis transmission mechanism 7 is equipped with Z-axis transmission machine
Structure 8, Z-axis transmission mechanism 8 are connect with the installation base plate 1 of graphite boat clamping device, the cloth parallel with X-axis transmission mechanism 6 of installation base plate 1
It sets.
The three axis conveying robot, including above-mentioned graphite boat clamping device, thus equally have the above advantages.Meanwhile X-axis
Transmission mechanism 6 can drive Y-axis transmission mechanism 7, Z-axis transmission mechanism 8 and graphite boat clamping device entirety in glove box 4 along X-axis
Direction is mobile, and Y-axis transmission mechanism 7 can drive Z-axis transmission mechanism 8, graphite boat clamping device mobile in Y direction, Z-axis transmission machine
Structure 8 can drive graphite boat clamping device mobile in Z-direction, and then three-dimensional of the real graphite boat clamping device in glove box 4
Graphite boat 10 can be accurately and rapidly carried on quartz rake 30 by spatial movement, graphite boat clamping device.
As further preferred technical solution, in the present embodiment, X-axis transmission mechanism 6 is X-axis electric cylinders, the transmission of two column X-axis
First motor deceleration thermomechanical components 61 are equipped between mechanism 6,61 two sides of first motor deceleration thermomechanical components are respectively equipped with one group of shaft coupling
Component 62, coupling assembly 62 are connect with ipsilateral X-axis electric cylinders, and Y-axis transmission mechanism 7 is Y-axis electric cylinders, Y-axis electric cylinders end and X-axis
The sliding blocks 9 of electric cylinders is connected, and Z-axis transmission mechanism 8 is Z axis electric cylinders, and Z axis electric cylinders are connected with the sliding block 9 of Y-axis electric cylinders, installation base plate 1 and
The sliding block 9 of Z axis electric cylinders is connected.When work, first motor deceleration thermomechanical components 61 drive two column X by the coupling assembly 62 of two sides
The sliding block 9 of the work of axis electric cylinders, X-axis electric cylinders drives Y-axis electric cylinders to move in the X-axis direction；Y-axis electric cylinders decelerating through motor thermomechanical components (because
Its principle is similar to conventional electric cylinders) it works, the sliding block 9 of Y-axis electric cylinders drives Z-axis transmission mechanism 8 to move along the y axis；Z axis electricity
Decelerating through motor thermomechanical components (because its principle is similar to conventional electric cylinders) work of cylinder, the sliding block 9 of Z axis electric cylinders drive graphite boat clamping
Mechanism is moved along Z-direction.Each transmission mechanism uses electric cylinders, and stable drive, speed control be accurate, accurate positioning, occupied space
It is few.
Although the present invention has been disclosed as a preferred embodiment, however, it is not intended to limit the invention.It is any to be familiar with ability
The technical staff in domain, without deviating from the scope of the technical scheme of the present invention, all using the technology contents pair of the disclosure above
Technical solution of the present invention makes many possible changes and modifications or equivalent example modified to equivalent change.Therefore, all
Without departing from the content of technical solution of the present invention, according to the present invention technical spirit any simple modification made to the above embodiment,
Equivalent variations and modification, all shall fall within the protection scope of the technical scheme of the invention.
Claims (7)
1. a kind of graphite boat clamping device, it is characterised in that: including installation base plate (1) and two groups of clamp assemblies (2), two groups of clampings
Component (2) is divided into the installation base plate (1) both ends, and installation base plate (1) both ends are corresponding to be equipped with along installation base plate (1) length
The transhipment actuator (3) of the mobile clamp assemblies (2) in direction is spent, the clamp assemblies (2) include connector (21), a pair of of folder
Pawl (22) and a pair of of clamping actuator (23), a pair of clamping actuator (23) and a pair of clamping jaw (22) correspond
Connection, a pair of clamping actuator (23) are installed on the connector (21), the transhipment actuator (3) and the connection
Part (21) is connected, and two groups of transhipment actuators (3) drive two groups of clamp assemblies (2) to protrude into loadlock chamber (20), keeps each to folder
The distance between pawl (22) is greater than the width of boat body (101), when the clamp assemblies (2) of rear side move on rear side of graphite boat (10)
It is each that clamping is driven at slide plate (102), when the clamp assemblies (2) of front side are moved at the slide plate (102) on front side of graphite boat (10)
Part (23) drives each pair of clamping jaw (22) close to each other, and the gap for protruding into clamping jaw (22) between slide plate (102) and pallet is by graphite
Boat (10) is fixedly clamped, and then two groups of transhipment actuators (3), which drive in the self-supported lock chamber (20) of two groups of clamp assemblies (2), exits.
2. graphite boat clamping device according to claim 1, it is characterised in that: the clamping actuator (23) is to clamp gas
Cylinder, the cylinder body for clamping actuator (23) are installed on the connector (21), piston rod and the clamping jaw (22) fixed company
It connects.
3. graphite boat clamping device according to claim 2, it is characterised in that: the transhipment actuator (3) is transhipment gas
The cylinder body of cylinder, transhipment actuator (3) is installed on the installation base plate (1), and piston rod is connected with the connector (21).
4. graphite boat clamping device according to claim 3, it is characterised in that: each opposite to the clamping actuator (23)
Arrangement, two pieces transhipment actuator (3) are arranged in the same direction.
5. graphite boat clamping device according to any one of claim 1 to 4, it is characterised in that: the clamping jaw (22) is C
Font clamping jaw, clamping jaw (22) top are connected with the clamping actuator (23), and lower part is stairstepping.
6. a kind of three axis conveying robots, it is characterised in that: clamped including graphite boat described in any one of claims 1 to 5
Mechanism and the inner support frame (5) being set in glove box (4), the inner support frame (5) are equipped with two column X-axis transmission mechanisms
(6), Y-axis transmission mechanism (7) are equipped between the two column X-axis transmission mechanisms (6), the Y-axis transmission mechanism (7) is equipped with Z axis
Transmission mechanism (8), the Z-axis transmission mechanism (8) connect with the installation base plate (1) of graphite boat clamping device, the installation base plate
(1) it is arranged in parallel with the X-axis transmission mechanism (6).
7. three axis conveying robot according to claim 6, it is characterised in that: the X-axis transmission mechanism (6) is X-axis electricity
Cylinder, two arrange between the X-axis transmission mechanisms (6) equipped with first motor deceleration thermomechanical components (61), the first motor deceleration unit
Part (61) two sides are respectively equipped with one group of coupling assembly (62), and the coupling assembly (62) connect with ipsilateral X-axis electric cylinders, institute
Stating Y-axis transmission mechanism (7) is Y-axis electric cylinders, and Y-axis electric cylinders end is connected with the sliding block (9) of X-axis electric cylinders, the Z-axis transmission mechanism
It (8) is Z axis electric cylinders, Z axis electric cylinders are connected with the sliding block (9) of Y-axis electric cylinders, the sliding block of the installation base plate (1) and the Z axis electric cylinders
(9) it is connected.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
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| CN201710841848.0A CN107585562B (en) | 2017-09-18 | 2017-09-18 | A kind of graphite boat clamping device and three axis conveying robots |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710841848.0A CN107585562B (en) | 2017-09-18 | 2017-09-18 | A kind of graphite boat clamping device and three axis conveying robots |
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| CN107585562A CN107585562A (en) | 2018-01-16 |
| CN107585562B true CN107585562B (en) | 2019-06-28 |
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Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN109879586A (en) * | 2019-04-17 | 2019-06-14 | 浙江鸿达石英电子科技有限公司 | A kind of automatic positioning equipment applied to quartz products |
| CN111515988B (en) * | 2020-05-12 | 2021-10-26 | 湖南红太阳光电科技有限公司 | Manipulator capable of grabbing multiple graphite boats and grabbing method of manipulator |
| CN117302959A (en) * | 2023-11-28 | 2023-12-29 | 浙江晶盛机电股份有限公司 | Conveying equipment, cleaning device, cleaning system and graphite boat cleaning method |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5102287A (en) * | 1990-09-06 | 1992-04-07 | Tekmax Inc. | Plate handling apparatus |
| CN201778110U (en) * | 2010-08-13 | 2011-03-30 | 深圳市捷佳伟创微电子设备有限公司 | Plasma enhanced chemical vapor deposition (PECVD) automatic loading and unloading boat device |
| CN103802118B (en) * | 2012-11-08 | 2016-01-20 | 沈阳新松机器人自动化股份有限公司 | Clipping dull and stereotyped conveying robot |
| CN205870579U (en) * | 2016-07-29 | 2017-01-11 | 浙江优傲智能科技有限公司 | Box tongs of self -adaptation |
| CN106476044A (en) * | 2016-11-25 | 2017-03-08 | 安徽智联投资集团有限公司 | A kind of mechanical arm for express parcel sorting |
| CN206288682U (en) * | 2016-12-26 | 2017-06-30 | 广东利迅达机器人系统股份有限公司 | A kind of handling equipment of high-precision three axles transfer |
| CN206445797U (en) * | 2017-01-16 | 2017-08-29 | 东莞海倍斯机械科技有限公司 | A kind of large-scale horizontal manipulator out of shape |
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