CN213351217U - Micro-displacement optical scale platform - Google Patents
Micro-displacement optical scale platform Download PDFInfo
- Publication number
- CN213351217U CN213351217U CN202022332836.5U CN202022332836U CN213351217U CN 213351217 U CN213351217 U CN 213351217U CN 202022332836 U CN202022332836 U CN 202022332836U CN 213351217 U CN213351217 U CN 213351217U
- Authority
- CN
- China
- Prior art keywords
- micro
- bearing seat
- coupler
- focusing lens
- main base
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 230000003287 optical effect Effects 0.000 title claims abstract description 52
- 238000006073 displacement reaction Methods 0.000 title claims abstract description 19
- 230000033001 locomotion Effects 0.000 claims abstract description 18
- 238000013519 translation Methods 0.000 claims description 28
- 239000004065 semiconductor Substances 0.000 claims description 12
- 238000000034 method Methods 0.000 claims description 8
- 238000004026 adhesive bonding Methods 0.000 claims description 3
- 238000012545 processing Methods 0.000 description 3
- 238000001259 photo etching Methods 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 1
- 238000012937 correction Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
Images
Landscapes
- Microscoopes, Condenser (AREA)
Abstract
The utility model discloses a micrometric displacement optics scale platform, a serial communication port, including main base and mechanical unit and the optical unit of setting on main base, the utility model discloses a ball screw be the last most frequently used drive element of tool machine and precision machine, and its main function is to convert rotary motion into linear motion, has high accuracy, reversibility, little and efficient characteristics of frictional resistance concurrently simultaneously, and the cost is lower, combines the advantage of platform optical system and mechanical system, can realize the optics scale of low-cost high accuracy.
Description
Technical Field
The utility model relates to an optical mechanical structure designs technical field, specifically is a micrometric displacement optics scale platform.
Background
The laser scale optical part processing technology is developed for many years, and part of technical level is greatly improved. The mainstream of the current precision element optical processing depends on the traditional process or a photoetching machine. Most of the traditional process for processing the precise optical elements is manually ground, so that the efficiency is extremely low, the influence of manual factors is large, the reliability is poor and the cost is high; the photoetching machine can realize high-precision calibration, but the common calibration machine has the defects of complex structure, larger size, complex adjustment operation, inconvenient use, higher manufacturing cost and the like, and the use of the process or the instrument is limited in small-sized instrument equipment such as a satellite-borne platform and the like.
SUMMERY OF THE UTILITY MODEL
The utility model aims at the not enough of prior art, and provide a micrometric displacement optics scale platform, this kind of optics scale platform simple structure, small, convenient operation, efficient, low cost, high accuracy.
Realize the utility model discloses purpose technical scheme is:
a micro-displacement optical scale platform comprising a main base and a mechanical unit and an optical unit arranged on the main base, the mechanical unit comprising:
the motor base is provided with a stepping motor connected with a controller, two ends of the coupler are connected with the stepping motor in a mode that an open slot is tightly twisted with a thread, one end of the coupler is connected with the stepping motor, the other end of the coupler is connected with a ball screw with an external thread on the outer wall, the back surfaces of the first bearing seat and the second bearing seat are respectively provided with an open slot which is concave from outside to inside and is circular, the first bearing and the second bearing are respectively arranged in the open slots of the first bearing seat and the second bearing seat, the outer end surfaces of the open slots of the first bearing seat and the second bearing seat are respectively provided with a flange plate and a flange cover, one end of the ball screw, which is not hinged with the coupler, sequentially penetrates through the central holes of the flange plate, the first bearing seat and the second bearing seat and is stopped at the flange cover, and the micro-translation stage is sleeved, the bottom of the micro translation table is provided with a sliding block which is fixed on a main base and provides support, a main base beside the outer side of the sliding block is provided with a first positioning optical coupler and a second positioning optical coupler which are arranged at intervals, the first positioning optical coupler and the second positioning optical coupler are respectively connected with a first light screen and a second light screen which are fixed on the sliding block, a connecting rod is arranged on the surface of the micro translation table, which is not on the same side as the first positioning optical coupler and the second positioning optical coupler, the outer end of the connecting rod is provided with a reflector, and the reflector moves with the micro translation table;
the optical unit is located the homonymy of speculum, including inlaying the semiconductor laser who just is close to the speculum in main base recess, laser emission mouth and collimator intercommunication on the semiconductor laser, the collimator is located between semiconductor laser and the speculum, and focusing lens mounting base is fixed in on the main base and is located the next door of speculum, and focusing lens fixes on focusing lens mounting base through gluing mode, laser emission mouth, collimator, and the center of speculum and focusing lens 1 is on same horizontal plane.
The total displacement range of the micro translation stage is 0-10mm, and a first positioning optical coupler and a second positioning optical coupler respectively provide starting point position signals and end point position signals.
The stepping motor is a four-wire two-phase stepping motor, the control method adopts a subdivision driving mode to realize the output with the step pitch of 0.01mm, and then the reflector on the micro translation stage is driven to move with the step pitch of 0.01 mm.
The reflector is circular.
The focusing lens is a straight elliptic lens body, the long axis of the focusing lens is larger than the movement stroke of the reflector, and the short axis of the focusing lens is larger than the diameter of the circular reflector, so that the laser beams reflected by the reflector can be reflected to the focusing lens.
The working process of the micro-displacement optical scale platform is as follows: according to the actual precision scale requirement of the micro element, the controller controls the stepping motor to operate according to the input instruction and drives the ball screw to move through the coupler, the ball screw converts the rotary motion of the stepping motor into the linear motion of the micro translation stage, the step pitch of the micro translation stage is 0.01mm when the stepping motor moves each step, the total displacement range of the movement of the micro translation stage is 0-10mm, the linear motion of the micro translation stage can realize the fine adjustment of the direction of the laser beam reflected by the reflector, when the reflector is finely adjusted to the specified position according to the instruction of the controller, the semiconductor laser starts to emit the laser beam, the laser beam emitted by the laser emitting port is emitted to the reflector in a gathering parallel state after the action of the concave-convex lens in the collimator, the reflector reflects the laser beam to the focusing lens, and the focusing lens focuses the laser beam on the element needing to be operated, the micro-scale of the micro-element can be realized, the controller controls the micro-adjustment of the reflector by different instructions to cause the micro-change of the direction of the laser beam reflected to the focusing lens, and the micro-change of the reflection direction of the laser beam and the strength of the emitted laser beam can realize the precise scale of different degrees of different parts of the micro-element.
Compared with the prior art, the utility model its advantage lies in:
the utility model has simple structure, small volume, convenient operation, high efficiency, low cost and high precision, can be used in an airborne or spaceborne platform, adopts a subdivision driving mode to control a four-wire two-phase stepping motor, has stable torque output of the motor, ensures that the stepping motion of a micro-translation platform and the laser beam correction of a collimator can ensure that a reflector receives all laser beams emitted by a laser emitter, can realize focusing of laser beams from different positions of the motion reflector by a large-size focusing lens, and in addition, the ball screw adopted by the utility model is the most commonly used transmission element on tool machinery and precision machinery, the main function is to convert the rotary motion into linear motion, and simultaneously has the characteristics of high precision, reversibility, small frictional resistance and high efficiency, and the cost is lower, and the advantages of the platform optical system and the mechanical system are combined, so that the low-cost and high-precision optical scales can be realized.
The optical scale platform has the advantages of simple structure, small volume, convenient operation, high efficiency, low cost and high precision.
Drawings
FIG. 1 is a schematic structural diagram of an embodiment;
FIG. 2 is a schematic side view of FIG. 1;
fig. 3 is a cross-sectional view of the platform of fig. 1 in the direction of movement of the load.
In the figure: 1. the stepping motor 2, the motor base 3, the coupler 4, the first bearing seat 5, the micro translation table 6, the second bearing seat 7, the flange 8, the reflector 9, the focusing lens mounting base 10, the focusing lens 11, the main base 12, the collimator 13, the laser emitting port 14, the semiconductor laser 15, the controller 16, the ball screw 17, the slider 18, the first positioning optical coupler 19, the second positioning optical coupler 20, the flange cover 21, the first bearing 22, the second bearing 23, the first light shading plate 24, the second light shading plate 25 and the connecting rod.
Detailed Description
The contents of the present invention will be further described with reference to the accompanying drawings and examples, but the present invention is not limited thereto.
Example (b):
referring to fig. 1, 2 and 3, a micro-displacement optical scale platform includes a main base 11, and a mechanical unit and an optical unit disposed on the main base 11, the mechanical unit including:
the motor comprises a motor base 2, a first bearing seat 4 and a second bearing seat 6 which are arranged at intervals in sequence, wherein the motor base 2 is provided with a stepping motor 1 connected with a controller 15, one end of each of two ends of a coupler 3 is connected with the stepping motor 1 in a manner that an open slot is tightly twisted by the open slot, the other end of each of the two ends of the coupler 3 is connected with a ball screw 16 of which the outer wall is provided with an external thread, the back surfaces of the first bearing seat 4 and the second bearing seat 6 are respectively provided with an open slot which is concave from outside to inside and is circular, a first bearing 21 and a second bearing 22 are respectively arranged in the open slots of the first bearing seat 4 and the second bearing seat 6, the outer end surfaces of the open slots of the first bearing seat 4 and the second bearing seat 6 are respectively provided with a flange 7 and a flange cover 20, and the end of the ball screw 16, the micro translation stage 5 is sleeved on a ball screw 16 between a first bearing seat 4 and a second bearing seat 6 in a threaded manner, a sliding block 17 fixed on a main base 11 for supporting is arranged at the bottom of the micro translation stage 5, a first positioning optical coupler 18 and a second positioning optical coupler 19 arranged at intervals are arranged on the main base 11 beside the outer side of the sliding block 17, the first positioning optical coupler 18 and the second positioning optical coupler 19 are respectively connected with a first light shielding plate 23 and a second light shielding plate 24 fixed on the sliding block 17, a connecting rod 25 is arranged on the surface of the micro translation stage 5, which is not on the same side as the first positioning optical coupler 18 and the second positioning optical coupler 19, a reflecting mirror 8 is arranged at the outer end of the connecting rod 25, and the reflecting mirror 8 moves step by step along with the micro translation;
optical unit is located speculum 8's homonymy, including inlaying in 11 recesses of main base and being close to speculum 8's semiconductor laser 14, laser emission mouth 13 and collimator 12 intercommunication on the semiconductor laser 14, collimator 12 is located between semiconductor laser 14 and the speculum 8, and focusing lens mounting base 9 is fixed in on 11 and is located speculum 8's next door of main base, and focusing lens 10 is fixed on focusing lens mounting base 9 through gluing the mode, and laser emission mouth 13, collimator 12, speculum 8 and focusing lens 10's center are on same horizontal plane.
The total displacement range of the micro translation stage 5 is 0-10mm, and a first positioning optical coupler 18 and a second positioning optical coupler 19 respectively provide starting point position signals and end point position signals.
The stepping motor 1 is a four-wire two-phase stepping motor, the control method adopts a subdivision driving mode to realize the output with the step pitch of 0.01mm, and then the reflector 8 on the micro translation stage 5 is driven to move with the step pitch of 0.01 mm.
The reflector 8 is circular.
The focusing lens 10 is a straight elliptic mirror body, and the major axis of the focusing lens 10 is larger than the movement stroke of the reflector 8, and the minor axis is larger than the diameter of the circular reflector 8, so as to ensure that the laser beams reflected by the reflector 8 can be reflected to the focusing lens 10.
The working process of the micro-displacement optical scale platform is as follows: according to the actual precision scale requirement of the micro element, the controller 15 controls the stepping motor 1 to operate according to the input instruction and drives the ball screw 16 to move through the coupler 3, the ball screw 16 converts the rotary motion of the stepping motor 1 into the linear motion of the micro translation stage 5, the step distance of the micro translation stage 5 is 0.01mm when the stepping motor 1 moves each step, the total displacement range of the movement of the micro translation stage 5 is 0-10mm, the linear motion of the micro translation stage 5 can realize the fine adjustment of the laser beam reflecting direction of the reflecting mirror 8, when the reflecting mirror 8 is finely adjusted to the appointed position according to the instruction of the controller 15, the semiconductor laser 14 starts to emit laser beams, the laser beams emitted by the laser emitting port 13 are emitted to the reflecting mirror 8 in a gathering parallel state after being acted by the concave-convex lens in the collimator 12, the reflecting mirror 8 reflects the laser beams to the focusing lens 10, and the focusing lens 10 focuses the laser beams on the element needing to operate, and further, the precise calibration of the micro-element is realized, the controller 15 controls the fine adjustment of the reflector 8 by different instructions to cause the micro-change of the direction of the laser beam reflected to the focusing lens 10, and the micro-change of the reflection direction of the laser beam and the strength of the emitted laser beam can realize the precise calibration of different degrees on different parts of the micro-element.
Claims (5)
1. A micro-displacement optical scale platform comprising a main base and a mechanical unit and an optical unit disposed on the main base, the mechanical unit comprising:
the motor base is provided with a stepping motor connected with a controller, two ends of the coupler are connected with the stepping motor in a mode that an open slot is tightly twisted with a thread, one end of the coupler is connected with the stepping motor, the other end of the coupler is connected with a ball screw with an external thread on the outer wall, the back surfaces of the first bearing seat and the second bearing seat are respectively provided with an open slot which is concave from outside to inside and is circular, the first bearing and the second bearing are respectively arranged in the open slots of the first bearing seat and the second bearing seat, the outer end surfaces of the open slots of the first bearing seat and the second bearing seat are respectively provided with a flange plate and a flange cover, one end of the ball screw, which is not hinged with the coupler, sequentially penetrates through the central holes of the flange plate, the first bearing seat and the second bearing seat and is stopped at the flange cover, and the micro-translation stage is sleeved, the bottom of the micro translation table is provided with a sliding block which is fixed on a main base and provides support, a main base beside the outer side of the sliding block is provided with a first positioning optical coupler and a second positioning optical coupler which are arranged at intervals, the first positioning optical coupler and the second positioning optical coupler are respectively connected with a first light screen and a second light screen which are fixed on the sliding block, a connecting rod is arranged on the surface of the micro translation table, which is not on the same side as the first positioning optical coupler and the second positioning optical coupler, the outer end of the connecting rod is provided with a reflector, and the reflector moves with the micro translation table;
the optical unit is located the homonymy of speculum, including inlaying the semiconductor laser who just is close to the speculum in main base recess, laser emission mouth and collimator intercommunication on the semiconductor laser, the collimator is located between semiconductor laser and the speculum, and focusing lens mounting base is fixed in on the main base and is located the next door of speculum, and focusing lens fixes on focusing lens mounting base through gluing mode, laser emission mouth, collimator, and the center of speculum and focusing lens is on same horizontal plane.
2. A micro-displacement optical scale platform according to claim 1, wherein the total displacement range of the micro-translation stage is 0-10mm, and the first positioning optical coupler and the second positioning optical coupler provide the starting point position signal and the end point position signal respectively.
3. A micro-displacement optical scale platform according to claim 1, wherein the stepping motor is a four-wire two-phase stepping motor, and the control method adopts a subdivision driving mode to realize an output with a step pitch of 0.01mm, so as to drive the mirror on the micro-translation stage to move with a step pitch of 0.01 mm.
4. A micro-displacement optical scale platform according to claim 1 wherein the mirror is circular in shape.
5. A micro-displacement optical scale platform according to claim 1 wherein the focusing lens is a straight elliptical mirror body, and the major axis of the focusing lens is larger than the motion stroke of the mirror, and the minor axis is larger than the diameter of the circular mirror.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202022332836.5U CN213351217U (en) | 2020-10-20 | 2020-10-20 | Micro-displacement optical scale platform |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202022332836.5U CN213351217U (en) | 2020-10-20 | 2020-10-20 | Micro-displacement optical scale platform |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN213351217U true CN213351217U (en) | 2021-06-04 |
Family
ID=76131708
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202022332836.5U Expired - Fee Related CN213351217U (en) | 2020-10-20 | 2020-10-20 | Micro-displacement optical scale platform |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN213351217U (en) |
-
2020
- 2020-10-20 CN CN202022332836.5U patent/CN213351217U/en not_active Expired - Fee Related
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN210119568U (en) | Laser radar scanning device and vehicle with same | |
| CN112068309B (en) | Three-dimensional scanning system containing double-paraboloid mirror dynamic focusing module | |
| CN116086361B (en) | Straightness measuring device for large-stroke guide rail and error obtaining method | |
| CN111755936A (en) | High-precision light path collimating reflector adjusting mechanism and adjusting method | |
| CN213351217U (en) | Micro-displacement optical scale platform | |
| CN103471577B (en) | Optical mechanism is closed in mechanical shaking laser gyro | |
| CN114216396B (en) | Compound eye unit motion error measuring device based on laser interferometer | |
| CN202062087U (en) | System for realizing parallelism of reflection surface axis and rotation axis of dove prism | |
| CN104471457B (en) | Optical module and the method being used for assembling optical module | |
| CN209811458U (en) | Automatic focusing laser marking machine with 3D self-modeling function | |
| CN214153417U (en) | Laser line light source | |
| CN1277136C (en) | Photoswitch and its control method | |
| CN212963947U (en) | Spectrum confocal sensor linearity calibration device | |
| CN212390966U (en) | Multifunctional detection device based on laser triangulation method | |
| CN218446215U (en) | Time-division energy device | |
| JP2021092563A (en) | Measuring device for optoelectronic unit | |
| CN218647232U (en) | Electric converter for objective lenses with different multiples | |
| CN118795659A (en) | Optical delay line device | |
| CN221826433U (en) | Auxiliary calibration equipment for optical instrument | |
| CN213812138U (en) | Novel image measuring instrument | |
| CN111266727B (en) | Ultrahigh-power laser space beam combining module and control system thereof | |
| CN215732659U (en) | High-efficiency high-power 355nm ultraviolet laser | |
| CN219320582U (en) | Tool is used in adjustment of 5W laser instrument beam shaping | |
| CN116944703B (en) | Mechanical arm integrating carbon dioxide laser cutting function and system thereof | |
| CN109870107A (en) | A kind of device for mutually being demarcated between a variety of nanometer displacement sensors |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20210604 |