CN213340285U - Low-temperature electrode assembly of superconducting ECR ion source - Google Patents

Low-temperature electrode assembly of superconducting ECR ion source Download PDF

Info

Publication number
CN213340285U
CN213340285U CN202022902917.4U CN202022902917U CN213340285U CN 213340285 U CN213340285 U CN 213340285U CN 202022902917 U CN202022902917 U CN 202022902917U CN 213340285 U CN213340285 U CN 213340285U
Authority
CN
China
Prior art keywords
insulating support
negative electrode
electrode
positive electrode
reinforcing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN202022902917.4U
Other languages
Chinese (zh)
Inventor
周小影
汪锋
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Anhui Feynman Technology Co ltd
Original Assignee
Anhui Feynman Technology Co ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Anhui Feynman Technology Co ltd filed Critical Anhui Feynman Technology Co ltd
Priority to CN202022902917.4U priority Critical patent/CN213340285U/en
Application granted granted Critical
Publication of CN213340285U publication Critical patent/CN213340285U/en
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Landscapes

  • Containers, Films, And Cooling For Superconductive Devices (AREA)

Abstract

The application relates to a low-temperature electrode assembly of a superconducting ECR ion source, which comprises a first insulating support, a second insulating support, a negative electrode arranged between the first insulating support and the second insulating support, and a positive electrode penetrating through the first insulating support, wherein the positive electrode and the negative electrode are both made of conductive metal, an insulating medium layer is coated on the positive electrode and the negative electrode, two ends of the negative electrode are both spliced with the first insulating support, the negative electrode penetrates through the second insulating support in a reciprocating manner, and a first reinforcing part for reinforcing the connection between the negative electrode and the first insulating support is arranged between the negative electrode and the first insulating support; the end part of the positive electrode is in plug-in fit with the second insulating support, and a second reinforcing part used for reinforcing connection between the second insulating support and the positive electrode is arranged between the positive electrode and the second insulating support. The superconducting ECR ion source has the effects of preventing the separation between the electrode and the insulating support and ensuring the normal operation of the superconducting ECR ion source.

Description

Low-temperature electrode assembly of superconducting ECR ion source
Technical Field
The present application relates to the field of ion source assemblies, and more particularly, to a low temperature electrode assembly for a superconducting ECR ion source.
Background
The working principle of the superconducting ECR ion source is as follows: microwave enters a cavity of the ion source from an injection end, the cavity is a part of a vacuum system and is filled with working gas, when the microwave frequency is equal to the electron cyclotron motion frequency, part of electrons resonate and absorb energy from the microwave, the electrons are accelerated to high energy, and high charge state ions are generated through step-by-step collision ionization; in addition, an axial magnetic mirror field is formed by axial superconducting coils of the ion source; the radial superconducting coil forms a radial six-pole magnetic field, and the two magnetic fields are superposed to form magnetic confinement. The axial magnetic mirror field has a minimum value in the center of the cavity, the plasma keeps the highest density, and the high charge state ions are finally sucked out by the suction electrode through the small hole of the plasma electrode. And the electrode assembly is an important component of the ion source for generating magnetic field conditions.
At present, the basic principle of generating low-temperature plasma by using a dielectric barrier method is to insert an insulating medium between two electrodes, and the insulating medium is used for blocking that arc discharge can not occur between the two electrodes and only micro-filament current breakdown can occur to gas between the two electrodes, so that glow discharge is generated, the glow discharge can fully ionize the gas between the electrodes, and a large amount of plasma rich in energetic particles and active groups is generated.
For example, chinese utility model patent publication No. CN203086835U discloses a low-temperature plasma generator electrode assembly, the positive electrode and the negative electrode of which are conductive metal wires, and the outer surface of the conductive metal wire is coated or sleeved with an insulating material resistant to electrical high voltage and chemical corrosion to form a dielectric barrier layer, the positive electrode and the negative electrode keep the same distance and form a positive electrode pair and a negative electrode pair according to a certain geometric shape, and the positive electrode pair and the negative electrode pair are fixed by an insulating support. The positive electrode and the negative electrode of the electrode assembly are in a linear shape or an elliptical shape or a spiral shape, the positive electrode is arranged on the inner side of the electrode pair, and the negative electrode is arranged on the outer side of the electrode pair.
With respect to the related art in the above, the inventors consider that: as the superconducting ECR ion source inevitably generates vibration during working, the separation between the electrode and the insulating support is easily caused along with the increase of the working time, and the operation of the superconducting ECR ion source is influenced.
SUMMERY OF THE UTILITY MODEL
In order to prevent the separation between the electrode and the insulating support and ensure the normal operation of the superconducting ECR ion source, the application provides a low-temperature electrode assembly of the superconducting ECR ion source.
The low-temperature electrode assembly of the superconducting ECR ion source adopts the following technical scheme:
a low-temperature electrode assembly of a superconducting ECR ion source comprises a first insulating support, a second insulating support, a negative electrode arranged between the first insulating support and the second insulating support, and a positive electrode penetrating through the first insulating support, wherein both the positive electrode and the negative electrode are made of conductive metal, insulating medium layers are coated on the positive electrode and the negative electrode, two ends of the negative electrode are inserted into the first insulating support, the negative electrode penetrates through the second insulating support in a reciprocating manner, and a first reinforcing part used for reinforcing the connection between the negative electrode and the first insulating support is arranged between the negative electrode and the first insulating support; the end part of the positive electrode is in plug-in fit with the second insulating support, and a second reinforcing part used for reinforcing connection between the second insulating support and the positive electrode is arranged between the positive electrode and the second insulating support.
Through adopting above-mentioned technical scheme, the negative electrode has strengthened being connected with first insulating support through first reinforcement, and the positive electrode has strengthened being connected with second insulating support through second reinforcement, and the negative electrode is reciprocal to be worn to locate on the second insulating support, through the limiting action of negative electrode, make the difficult and first insulating support skew of second insulating support, thereby make and further strengthened being connected between positive electrode and the second insulating support, so, be difficult for breaking away from between the electrode of this superconductive ECR ion source's low temperature electrode subassembly and the insulating support, be favorable to guaranteeing superconductive ECR ion source's normal operating.
Preferably, the first reinforcing part comprises a fixing ring sleeved on and fixed with the negative electrode, a sliding ring sleeved on the negative electrode, a compression spring fixed between the fixing ring and the sliding ring, a mounting cover sleeved on the negative electrode and a mounting ring fixed on the first insulating bracket; the mounting ring is sleeved on the negative electrode, and the outer wall of the mounting cover is in threaded connection with the inner wall of the mounting ring; the fixed ring with the sliding ring all set up in the installation lid, installation lid opening orientation first insulating support, just the sliding ring set up in one side that first insulating support was kept away from to fixed ring.
By adopting the technical scheme, after the negative electrode and the first insulating support are inserted in place, an operator screws the mounting cover to continuously screw the mounting cover into the mounting ring, in the process, the mounting cover is continuously close to the first insulating support to enable the mounting cover to extrude the sliding ring, the compression spring is compressed to enable the fixing ring to be subjected to an acting force towards the first insulating support, so that the negative electrode is subjected to an acting force towards the first insulating support, and the connection between the negative electrode and the first insulating support is firmer; in addition, the arrangement of the compression spring improves the elastic action between the negative electrode and the first insulating bracket, and is favorable for preventing the negative electrode from breaking due to stress concentration.
Preferably, the second insulating support is provided with an annular groove, the second reinforcing portion comprises a connecting ring sleeved on and fixed with the positive electrode, and a reinforcing cover sleeved on the positive electrode and in clearance fit with the positive electrode, the connecting ring is arranged in the reinforcing cover, and an opening edge of the reinforcing cover is screwed into the annular groove and in threaded fit with the inner wall of the annular groove.
Through adopting above-mentioned technical scheme, when reinforcing the lid and screwing, in reinforcing the ring channel on the insulating support of lid screw in second, at this moment, reinforcing the lid and constantly towards the insulating support roof pressure go-between of second to it is firm to peg graft between messenger's positive electrode and the insulating support of second.
Preferably, a rotary piece which is convenient for an operator to rotate the reinforcing cover is fixed on the outer end face of the reinforcing cover.
Through adopting above-mentioned technical scheme, the setting of spinning the piece has made things convenient for operating personnel to rotate the reinforcement lid.
In summary, the present application includes at least one of the following beneficial technical effects:
1. the electrode of the low-temperature electrode assembly of the superconducting ECR ion source is not easy to separate from the insulating support, so that the normal operation of the superconducting ECR ion source is ensured;
2. due to the arrangement of the compression spring, the elastic action between the negative electrode and the first insulating support is improved, and the negative electrode is prevented from being broken due to stress concentration.
Drawings
FIG. 1 is a schematic diagram of a cryogenic electrode assembly for a superconducting ECR ion source according to an embodiment of the present application.
Description of reference numerals: 1. a first insulating support; 2. a second insulating support; 21. an annular groove; 3. a negative electrode; 4. a positive electrode; 5. a first reinforcing section; 51. a fixing ring; 52. a slip ring; 53. a compression spring; 54. installing a cover; 55. a mounting ring; 6. a second reinforcing section; 61. a connecting ring; 62. reinforcing the cover; 621. and (7) spinning.
Detailed Description
The present application is described in further detail below with reference to fig. 1.
The embodiment of the application discloses a low-temperature electrode assembly of a superconducting ECR ion source. Referring to fig. 1, the low-temperature electrode assembly of the superconducting ECR ion source includes a first insulating support 1 made of alumina ceramic, a second insulating support 2 made of alumina ceramic, a negative electrode 3 disposed between the first insulating support 1 and the second insulating support 2, and a positive electrode 4 disposed through the first insulating support 1. The positive electrode 4 and the negative electrode 3 are both alloy tungsten wires, and insulating medium layers made of alumina ceramics are coated on the positive electrode 4 and the negative electrode 3. The two ends of the negative electrode 3 are connected with the first insulating support 1 in an inserting mode, the middle of the negative electrode 3 penetrates through the second insulating support 2 in a reciprocating mode, the negative electrode 3 extends in a U shape, and a first reinforcing portion 5 used for reinforcing the connection of the negative electrode 3 and the first insulating support 1 is arranged between the negative electrode 3 and the first insulating support 1. One end of the positive electrode 4 extends to one side of the first insulating support 1 far away from the second insulating support 2, the other end of the positive electrode is in plug-in fit with the second insulating support 2, and a second reinforcing part 6 used for reinforcing connection between the second insulating support 2 and the positive electrode 4 is arranged between the positive electrode 4 and the second insulating support 2.
Referring to fig. 1, the first reinforcing part 5 includes a fixing ring 51 fitted over and fixed to an end of the negative electrode 3, a sliding ring 52 fitted over an end of the negative electrode 3, a compression spring 53 fixed between the fixing ring 51 and the sliding ring 52, a mounting cap 54 fitted over the negative electrode 3, and a mounting ring 55 fixed to the first insulating holder 1. The fixing ring 51, the compression spring 53 and the sliding ring 52 are sequentially arranged along the direction gradually far away from the first insulating support 1, and the fixing ring 51, the compression spring 53 and the sliding ring 52 are all arranged in the mounting cover 54. The mounting ring 55 is sleeved on the negative electrode 3, the opening of the mounting cover 54 faces the first insulating bracket 1, the edge of the opening of the mounting cover 54 extends into the mounting ring 55, and the outer wall of the mounting cover 54 is in threaded connection with the inner wall of the mounting ring 55. After the negative electrode 3 and the first insulating bracket 1 are inserted in place, an operator screws the mounting cover 54, so that the mounting cover 54 is continuously screwed into the mounting ring 55, in the process, the mounting cover 54 is continuously close to the first insulating bracket 1, the mounting cover 54 presses the sliding ring 52, the compression spring 53 is compressed, the fixing ring 51 is subjected to an acting force towards the first insulating bracket 1, the negative electrode 3 is subjected to an acting force towards the first insulating bracket 1, and the connection between the negative electrode 3 and the first insulating bracket 1 is firmer; in addition, the arrangement of the compression spring 53 improves the elastic action between the negative electrode 3 and the first insulating frame 1, which is advantageous for preventing the negative electrode 3 from breaking due to stress concentration.
Referring to fig. 1, an annular groove 21 is formed in the surface of the second insulating support 2 close to the first insulating support 1, and an opening of the annular groove 21 is circular. The second reinforcing portion 6 includes a connection ring 61 fixed to the positive electrode 4 and a reinforcing cover 62 fitted to the positive electrode 4 with a gap therebetween. The connection ring 61 is a circular ring sheet and is disposed in the reinforcing cover 62, and an opening edge of the reinforcing cover 62 is screwed into the annular groove 21 and is in threaded fit with an inner wall of the annular groove 21 away from the positive electrode 4. When the reinforcing cover 62 is screwed, the reinforcing cover 62 is screwed into the annular groove 21 on the second insulating support 2, and at this time, the reinforcing cover 62 continuously presses the connecting ring 61 toward the second insulating support 2, so that the positive electrode 4 and the second insulating support 2 are firmly inserted. In addition, the outer end face of the reinforcing cover 62 is fixed with two rotary sheets 621 which are convenient for an operator to rotate the reinforcing cover 62, the rotary sheets 621 are in a butterfly wing shape, and the two rotary sheets 621 are uniformly arranged around the axis of the reinforcing cover 62.
The implementation principle of the low-temperature electrode assembly of the superconducting ECR ion source in the embodiment of the application is as follows: the negative electrode 3 is strengthened being connected with the first insulating support 1 through the first reinforcing part 5, the positive electrode 4 is strengthened being connected with the second insulating support 2 through the second reinforcing part 6, the negative electrode 3 is arranged on the second insulating support 2 in a reciprocating penetrating mode, the second insulating support 2 is not prone to offsetting from the first insulating support 1 through the limiting effect of the negative electrode 3, and therefore connection between the positive electrode 4 and the second insulating support 2 is further strengthened, therefore, the low-temperature electrode assembly of the superconducting ECR ion source is not prone to being separated from the insulating support, and normal operation of the superconducting ECR ion source is guaranteed.
The above embodiments are preferred embodiments of the present application, and the protection scope of the present application is not limited by the above embodiments, so: all equivalent changes made according to the structure, shape and principle of the present application shall be covered by the protection scope of the present application.

Claims (4)

1. The utility model provides a low temperature electrode subassembly of superconductive ECR ion source, includes first insulating support (1), second insulating support (2), sets up negative electrode (3) between first insulating support (1) and second insulating support (2), wears to locate positive electrode (4) on first insulating support (1), and positive electrode (4) and negative electrode (3) are conducting metal, and all the cladding is provided with insulating medium layer, its characterized in that on positive electrode (4) and negative electrode (3): both ends of the negative electrode (3) are inserted into the first insulating support (1), the negative electrode (3) penetrates through the second insulating support (2) in a reciprocating manner, and a first reinforcing part (5) for reinforcing the connection between the negative electrode (3) and the first insulating support (1) is arranged between the negative electrode (3) and the first insulating support (1); the end part of the positive electrode (4) is in plug-in fit with the second insulating support (2), and a second reinforcing part (6) used for reinforcing connection between the second insulating support (2) and the positive electrode (4) is arranged between the positive electrode (4) and the second insulating support (2).
2. A cryogenic electrode assembly of a superconducting ECR ion source according to claim 1, wherein: the first reinforcing part (5) comprises a fixing ring (51) sleeved on the negative electrode (3) and fixed with the negative electrode, a sliding ring (52) sleeved on the negative electrode (3), a compression spring (53) fixed between the fixing ring (51) and the sliding ring (52), a mounting cover (54) sleeved on the negative electrode (3) and a mounting ring (55) fixed on the first insulating bracket (1); the mounting ring (55) is sleeved on the negative electrode (3), and the outer wall of the mounting cover (54) is in threaded connection with the inner wall of the mounting ring (55); the fixing ring (51) and the sliding ring (52) are arranged in the mounting cover (54), the opening of the mounting cover (54) faces the first insulating support (1), and the sliding ring (52) is arranged on one side, away from the first insulating support (1), of the fixing ring (51).
3. A cryogenic electrode assembly of a superconducting ECR ion source according to claim 1, wherein: the second insulating support (2) is provided with an annular groove (21), the second reinforcing part (6) comprises a connecting ring (61) which is sleeved on the positive electrode (4) and fixed with the positive electrode, and a reinforcing cover (62) which is sleeved on the positive electrode (4) and in clearance fit with the positive electrode, the connecting ring (61) is arranged in the reinforcing cover (62), and the opening edge of the reinforcing cover (62) is screwed into the annular groove (21) and is in threaded fit with the inner wall of the annular groove (21).
4. A cryogenic electrode assembly of a superconducting ECR ion source according to claim 3, wherein: a rotary sheet (621) which is convenient for an operator to rotate the reinforcing cover (62) is fixed on the outer end surface of the reinforcing cover (62).
CN202022902917.4U 2020-12-03 2020-12-03 Low-temperature electrode assembly of superconducting ECR ion source Expired - Fee Related CN213340285U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202022902917.4U CN213340285U (en) 2020-12-03 2020-12-03 Low-temperature electrode assembly of superconducting ECR ion source

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202022902917.4U CN213340285U (en) 2020-12-03 2020-12-03 Low-temperature electrode assembly of superconducting ECR ion source

Publications (1)

Publication Number Publication Date
CN213340285U true CN213340285U (en) 2021-06-01

Family

ID=76079231

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202022902917.4U Expired - Fee Related CN213340285U (en) 2020-12-03 2020-12-03 Low-temperature electrode assembly of superconducting ECR ion source

Country Status (1)

Country Link
CN (1) CN213340285U (en)

Similar Documents

Publication Publication Date Title
US4163151A (en) Separated ion source
CN109786205B (en) Electron cyclotron resonance ion source
KR100664770B1 (en) Ion source and operation method therefor
CA1066425A (en) Continuous ionization injector for low pressure gas discharge device
CN213340285U (en) Low-temperature electrode assembly of superconducting ECR ion source
CN1594649A (en) Metal ion source
US20100110602A1 (en) Electric field control methods and apparatuses for corona wind fans
CN208352191U (en) The inserted vacuum interrupter of shielding case
CN1263080C (en) Ion source
US4835341A (en) Electrical insulator for use in plasma environment
CN111180298A (en) Radio frequency ion source starts filament device
JP3092814B2 (en) Sputter ion pump
JP4253925B2 (en) Ion source
CN215249564U (en) Discharge body, electric field device and ozone generator
CN211125562U (en) Radio frequency ion source starts filament device
US11482394B2 (en) Bidirectional gas discharge tube
CN208352190U (en) Shielding case suspension type vacuum interrupter
RU2792635C2 (en) Gas-discharge source of electrons
RU177485U1 (en) CONTROLLED VACUUM DISCHARGE
CN216528735U (en) Carbon ion source device with reflector power supply
CN110708852A (en) Plasma gun
CN100533642C (en) Ion source with modified gas delivery
CN115665965A (en) Spiral injection mirror structure for cyclotron and use method thereof
US3093298A (en) Ionic pump
Soliman et al. Physical characteristics of the modified glow discharge ion source

Legal Events

Date Code Title Description
GR01 Patent grant
GR01 Patent grant
CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20210601