CN213266679U - Dustproof mechanism for coating film chamber - Google Patents
Dustproof mechanism for coating film chamber Download PDFInfo
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- CN213266679U CN213266679U CN202021944023.5U CN202021944023U CN213266679U CN 213266679 U CN213266679 U CN 213266679U CN 202021944023 U CN202021944023 U CN 202021944023U CN 213266679 U CN213266679 U CN 213266679U
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- baffle
- coating chamber
- supporting plate
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Abstract
The utility model discloses a dustproof mechanism for a coating cavity, which comprises a supporting plate, a dustproof baffle and a displacement driving mechanism; the support plate is horizontally arranged in the coating chamber and is positioned above the coating substrate and the coating source; the dustproof baffle is formed by detachably splicing a plurality of dustproof unit plates in a horizontal plane; the dustproof baffle is detachably connected to the bottom surface of the supporting plate; the displacement driving mechanism is used for driving the supporting plate to horizontally move. The utility model discloses a dust baffle adsorbs the granule dust, and dust baffle comprises at least two dustproof cell boards, drives dustproof baffle horizontal migration through displacement actuating mechanism, can quick replacement dustproof cell board, avoids adsorbing on the shielding face impurity drops on the coating film base plate, can also avoid impurity to scatter in the coating film cavity and pollute the cavity; the device can effectively prolong the maintenance period of the device, improve the utilization rate of the device, reduce the operation cost of the device, improve the yield of products and be beneficial to recycling the coating materials on the baffle.
Description
Technical Field
The utility model relates to a solar cell makes technical field, and more specifically the dustproof mechanism who relates to a be used for coating film cavity that says so can increase substantially the PM cycle of improve equipment, and the utilization ratio of improve material and equipment improves the utilization ratio of material, the evaporation coating material that can also be wasted by more convenient recovery.
Background
With the development of solar cell technology, the development of high-efficiency cells is more and more emphasized. Among them, a silicon-based heterojunction solar cell (HJT cell) passivated with an amorphous silicon intrinsic layer (a-Si: h (i)) is one of the major research directions. Amorphous silicon in the HJT cell has poor conductivity, and can be covered with a conductive film on the surface thereof to achieve the purpose of conductivity, while the TCO material (transparent conductive oxide film) is widely used because of having the properties of conductivity, light transmission, reflection reduction, and the like. Among the current technical routes for TCO coating, PVD (physical vapor deposition) and RPD (reactive plasma deposition) are the two most commonly used techniques.
Compared with PVD techniques, RPD techniques can maintain an absolute advantage of 0.1-0.4% (Abs.). The PVD machine is widely used and continuously improved in the semiconductor and panel industries, so that the PVD machine is superior to an RPD in equipment unit price and machine stability. The inferior point of the RPD technology on the unit price of the equipment can make up the gap through the aspects of localization, industrialization and the like, the optimization of a mechanism is needed in the aspect of the stability of a machine table, and dust pollution is one of the main problems influencing the stable operation of the RPD. In the RPD production process, the anti-sticking plate can continuously accumulate a lot of dust, the top anti-sticking plate of the film forming cavity is the most serious, after a certain limit is reached, the dust adsorbed on the anti-sticking plate can fall off to the upper surface of the substrate to form dust which cannot be blown away, when the temperature difference changes, the phenomenon is particularly obvious, the dust accumulated on the silicon wafer is too much, the electrical property of the product can be greatly reduced, and the quality defect or the failure is caused. Since the attachment plate is already fixed on the top of the upper chamber, the attachment plate in the chamber cannot be moved and replaced under vacuum conditions, and the common practice when the problem of serious dust pollution occurs is to open the chamber to clean the attachment plate (cover plate) in the chamber or replace the clean attachment plate. Whether the cavity is cleaned or the new anti-attachment plate is replaced, the treatment method has the following problems:
1) the established vacuum system is required to be destroyed for operation, the vacuum system is required to be reestablished after the treatment is finished, the production is recovered, the production cannot be carried out in the period, and the utilization rate of equipment is reduced;
2) the process from the vacuum breaking to the production recovery is long (8h to 12h, and the like), and the operation and maintenance cost of the equipment is seriously increased in the aspects of manpower, time, spare parts and the like. Therefore, the method for solving the dust problem limits the RPD equipment in terms of maintenance period and uptime items, and shortens the equipment operation cost and improves the product quality in the manufacturing industry with higher cost and quality. Therefore, on the premise of not influencing the efficiency improvement, a solution capable of prolonging the maintenance period is urgently needed to be found.
Therefore, how to provide a mechanism suitable for prolonging the maintenance period of the coating equipment, especially suitable for evaporation, dry etching and reactive plasma coating equipment, so that the maintenance period of the machine is prolonged by several times, and the equipment utilization rate is greatly improved, which is a problem to be solved by technical personnel in the field.
SUMMERY OF THE UTILITY MODEL
In view of this, the utility model provides a dustproof mechanism for coating film cavity aims at solving above-mentioned technical problem.
In order to achieve the above purpose, the utility model adopts the following technical scheme:
a dust prevention mechanism for a coating chamber, comprising: the device comprises a supporting plate, a dustproof baffle and a displacement driving mechanism;
the supporting plate is horizontally arranged in the coating chamber and is positioned above the coating substrate and the coating source;
the dustproof baffle is formed by detachably splicing a plurality of dustproof unit plates in a horizontal plane; the dustproof baffle is detachably connected to the bottom surface of the supporting plate;
the displacement driving mechanism is arranged in the coating chamber, is connected with one end of the supporting plate and is used for driving the supporting plate to realize translational motion in a horizontal plane.
Through the technical scheme, the dust baffle adsorbs particle dust, meanwhile, the dust baffle consists of at least two dust-proof unit plates, the dust baffle is driven to horizontally move through the displacement driving mechanism, the dust-proof unit plates can be quickly replaced, impurities adsorbed on the shielding surface are prevented from falling onto the coated substrate, and the impurities can be prevented from scattering in the coated cavity to pollute the cavity; the utility model provides a dustproof mechanism that shelters from can effectively prolong the plant maintenance cycle, improve equipment utilization rate reduces equipment running cost, promotes the product yield, still is favorable to coating material's on the baffle recycle.
Preferably, in the above dustproof mechanism for a coating chamber, the abutting surfaces of the two dustproof unit plates are provided with overlapping notches, and the two dustproof unit plates are connected through a first bolt after being overlapped. Can dismantle the connection between the dustproof cell board, shelter from completely in order to form, form the overlap joint between two adjacent dustproof cell boards, be connected through first bolt, be convenient for assemble and dismantle.
Preferably, in the above dustproof mechanism for the coating chamber, the support plate and the dustproof baffle plate are both provided with multiple groups of corresponding threaded holes and are connected through a second bolt. The assembly and the disassembly between the supporting plate and the dustproof baffle plate are convenient.
Preferably, in the above dustproof mechanism for a coating chamber, the displacement driving mechanism includes a sliding groove, a sliding block, a transmission rod, a motor and a horizontal circulating transmission chain set; the sliding groove is horizontally fixed in the coating chamber and is positioned on one side of the supporting plate; the sliding block is connected in the sliding groove in a sliding mode, and the top end of the sliding block is fixedly connected with the bottom face of one side of the supporting plate; the transmission rod is vertically arranged, and the top end of the transmission rod penetrates through the sliding groove to be clamped and fixed with the bottom end of the sliding block; the motor and the horizontal circulating transmission chain group are fixed inside the film coating chamber, a power output shaft of the motor is connected with a power input wheel of the horizontal circulating transmission chain group, and the top surface of the chain of the horizontal circulating transmission chain group is fixedly connected with the bottom end of the transmission rod. The horizontal forward and backward movement of the supporting plate and the dustproof baffle can be realized; the dustproof baffle is arranged above the film coating source, when the current dustproof unit plate adsorbs a certain amount of particles and does not meet the use requirement, the dustproof baffle is horizontally moved for a certain distance through the displacement driving mechanism, and at the moment, the next dustproof unit plate is arranged above the film coating source; when the dust-proof baffle does not meet the use requirements, the vacuum can be broken, the coating chamber is opened, and the dust-proof baffle is detached for replacement and cleaning.
Preferably, in the above dustproof mechanism for a coating chamber, a printed layer is formed on one surface of the dustproof baffle plate facing the coating substrate, and a sand-blasting layer or an aluminum-melting layer is formed on the surface of the printed layer. The surface area and the roughness are improved, the final roughness is more than 13 microns, and the adhesive force of particles and dust on the dustproof baffle is increased.
Preferably, in the above dustproof mechanism for the coating chamber, the support plate is made of stainless steel, titanium alloy, aluminum alloy, copper plate, or copper alloy. Can meet the requirements of high temperature resistance, electrical conductivity and heat conductivity of the process; and the requirements of heat resistance, heat conduction and bearing capacity in film coating can be met.
Preferably, in the above dustproof mechanism for the coating chamber, the dustproof baffle is made of stainless steel, titanium alloy, aluminum alloy, copper plate, or copper alloy. Can meet the requirements of high temperature resistance, electrical conductivity and heat conductivity of the process, and can also meet the requirements of heat resistance, conduction and heat conduction during film coating.
Preferably, in the above dustproof mechanism for a coating chamber, the coating source is located below the coated substrate and is used for coating the coated substrate above the coating source. The coating source is a material to be coated, and forms a film layer on the substrate to be coated under a certain mechanism, and it can be understood that the coating source can be an organic material, an oxide layer, a nitride layer, a metal or a metal alloy.
Preferably, in the above dustproof mechanism for a coating chamber, the size of the dustproof baffle is larger than the coating area of the coating source. Can satisfy dustproof demand of sheltering from.
Preferably, in the above dustproof mechanism for the coating chamber, the size of the support plate is larger than that of the dustproof baffle plate. Can satisfy the installation demand.
Known from the above technical scheme, compare with prior art, the utility model discloses a dustproof mechanism for coating film cavity aims at solving above-mentioned technical problem:
1. the utility model discloses in can being applied to the coating film cavity of coating film equipment, dustproof baffle sets up in coating film source top, and the roughness treatment is done to the surface, can effectively adsorb the granule dust, and dustproof shelters from being provided with displacement actuating mechanism in the mechanism, can realize the horizontal migration of dustproof baffle.
2. The dustproof baffle is at least composed of two dustproof unit plates, and through the horizontal movement of the dustproof baffle, the dustproof unit plates can be replaced quickly, so that impurities adsorbed on the shielding surface are prevented from falling onto the coated substrate, and the impurities can be prevented from scattering in the coated cavity to pollute the cavity.
3. The utility model provides a dustproof mechanism that shelters from can effectively prolong the plant maintenance cycle, improve equipment utilization rate reduces equipment running cost, promotes the product yield, still is favorable to coating material's on the baffle recycle.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings required to be used in the description of the embodiments or the prior art will be briefly described below, it is obvious that the drawings in the following description are only embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to the provided drawings without creative efforts.
FIG. 1 is a schematic structural view provided by the present invention;
figure 2 attached drawing is the utility model provides a dustproof baffle's cross-sectional view.
Wherein:
1-a support plate;
2-dustproof baffle;
21-dustproof unit plate;
3-coating a film on the substrate;
4-a film coating source;
5-a first bolt;
6-a second bolt;
7-a sliding groove;
8-a sliding block;
9-transmission rod.
Detailed Description
The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.
Referring to fig. 1 and fig. 2, the embodiment of the present invention discloses a dustproof mechanism for a coating chamber, including: the device comprises a supporting plate 1, a dustproof baffle 2 and a displacement driving mechanism;
the support plate 1 is horizontally arranged in the coating chamber and is positioned above the coating substrate 3 and the coating source 4;
the dustproof baffle 2 is formed by detachably splicing a plurality of dustproof unit plates 21 in a horizontal plane; the dustproof baffle 2 is detachably connected to the bottom surface of the supporting plate 1;
the displacement driving mechanism is arranged in the coating chamber, is connected with one end of the supporting plate 1 and is used for driving the supporting plate 1 to realize translational motion in a horizontal plane.
In order to further optimize the technical scheme, the butt joint surfaces of the two dustproof unit plates 21 are provided with lapped notches, and the two dustproof unit plates are connected through the first bolt 5 after being lapped.
In order to further optimize the above technical scheme, the supporting plate 1 and the dust-proof baffle 2 are provided with a plurality of groups of corresponding threaded holes and are connected through the second bolts 6.
In order to further optimize the technical scheme, the displacement driving mechanism comprises a sliding groove 7, a sliding block 8, a transmission rod 9, a motor and a horizontal circulating transmission chain group; the sliding groove 7 is horizontally fixed in the coating chamber and is positioned on one side of the supporting plate 1; the sliding block 8 is connected in the sliding groove 7 in a sliding manner, and the top end of the sliding block is fixedly connected with the bottom surface of one side of the supporting plate 1; the transmission rod 9 is vertically arranged, and the top end of the transmission rod passes through the sliding groove 7 and is clamped and fixed with the bottom end of the sliding block 8; the motor and the horizontal circulating transmission chain group are fixed inside the film coating chamber, a power output shaft of the motor is connected with a power input wheel of the horizontal circulating transmission chain group, and the top surface of a chain of the horizontal circulating transmission chain group is fixedly connected with the bottom end of the transmission rod 9.
In order to further optimize the technical scheme, a printed layer is formed on one surface, facing the coated substrate 3, of the dustproof baffle 2, and a sand-blasting layer or an aluminum-melting-spraying layer is arranged on the surface of the printed layer.
In order to further optimize the technical scheme, the supporting plate 1 is made of stainless steel, titanium alloy, aluminum alloy, copper plate and copper alloy materials.
In order to further optimize the technical scheme, the dustproof baffle 2 is made of stainless steel, titanium alloy, aluminum alloy, copper plate and copper alloy materials.
In order to further optimize the technical scheme, the coating source 4 is positioned below the coating substrate 3 and is used for coating the coating substrate 3 above the coating source.
In order to further optimize the technical scheme, the size of the dustproof baffle plate 2 is larger than the coating area of the coating source 4.
In order to further optimize the technical scheme, the size of the supporting plate 1 is larger than that of the dustproof baffle 2.
The utility model discloses a theory of operation does:
the horizontal circulating transmission chain set is driven to move by positive and negative driving of the motor, the horizontal circulating transmission chain set drives the transmission rod 9 to perform reciprocating horizontal displacement, and the horizontal positive and negative movement of the supporting plate 1 and the dustproof baffle 2 can be realized; the dustproof baffle 2 is arranged above the film coating source 4, when the current dustproof unit plate 21 adsorbs a certain amount of particles and does not meet the use requirement, the dustproof baffle 2 is horizontally moved for a certain distance through the displacement driving mechanism, and at the moment, the next dustproof unit plate 21 is arranged above the film coating source 4; when the dustproof baffle 2 does not meet the use requirement, the vacuum can be broken, the coating cavity is opened, and the dustproof baffle 2 is detached for replacement and cleaning.
The embodiments in the present description are described in a progressive manner, each embodiment focuses on differences from other embodiments, and the same and similar parts among the embodiments are referred to each other. The device disclosed by the embodiment corresponds to the method disclosed by the embodiment, so that the description is simple, and the relevant points can be referred to the method part for description.
The previous description of the disclosed embodiments is provided to enable any person skilled in the art to make or use the present invention. Various modifications to these embodiments will be readily apparent to those skilled in the art, and the generic principles defined herein may be applied to other embodiments without departing from the spirit or scope of the invention. Thus, the present invention is not intended to be limited to the embodiments shown herein but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.
Claims (10)
1. A dustproof mechanism for a coating chamber, comprising: the device comprises a supporting plate (1), a dustproof baffle (2) and a displacement driving mechanism;
the support plate (1) is horizontally arranged in the coating chamber and is positioned above the coating substrate (3) and the coating source (4);
the dustproof baffle (2) is formed by detachably splicing a plurality of dustproof unit plates (21) in a horizontal plane; the dustproof baffle (2) is detachably connected to the bottom surface of the supporting plate (1);
the displacement driving mechanism is installed in the coating chamber, is connected with one end of the supporting plate (1) and is used for driving the supporting plate (1) to realize translational motion in a horizontal plane.
2. The dustproof mechanism for coating chamber according to claim 1, wherein the abutting surfaces of the two dustproof unit plates (21) are provided with overlapping notches, and the two dustproof unit plates are connected through the first bolt (5) after being overlapped.
3. The dustproof mechanism for coating chamber according to claim 1, wherein the support plate (1) and the dustproof baffle (2) are provided with a plurality of corresponding threaded holes and connected through the second bolt (6).
4. The dustproof mechanism for coating chamber according to claim 1, wherein the displacement driving mechanism comprises a sliding groove (7), a sliding block (8), a transmission rod (9), a motor and a horizontal circulating transmission chain group; the sliding groove (7) is horizontally fixed in the film coating chamber and is positioned on one side of the supporting plate (1); the sliding block (8) is connected in the sliding groove (7) in a sliding manner, and the top end of the sliding block is fixedly connected with the bottom surface of one side of the supporting plate (1); the transmission rod (9) is vertically arranged, and the top end of the transmission rod penetrates through the sliding groove (7) and is fixedly clamped with the bottom end of the sliding block (8); the motor and the horizontal circulating transmission chain group are fixed inside the film coating chamber, a power output shaft of the motor is connected with a power input wheel of the horizontal circulating transmission chain group, and the top surface of a chain of the horizontal circulating transmission chain group is fixedly connected with the bottom end of the transmission rod (9).
5. The dustproof mechanism for coating chamber according to claim 1, wherein the dustproof baffle (2) is formed with a printed layer on the surface facing the coating substrate (3), and the surface of the printed layer has a sand blasting layer or an aluminum spraying layer.
6. The dustproof mechanism for coating chamber according to any one of claims 1 to 5, wherein the support plate (1) is made of stainless steel, titanium alloy, aluminum alloy, copper plate or copper alloy material.
7. The dustproof mechanism for coating chamber according to any one of claims 1 to 5, wherein the dustproof baffle (2) is made of stainless steel, titanium alloy, aluminum alloy, copper plate or copper alloy material.
8. A dust prevention mechanism for a coating chamber according to claim 1, wherein the coating source (4) is located below the coated substrate (3) and is adapted to coat the coated substrate (3) thereabove.
9. The dustproof mechanism for coating chamber according to claim 8, wherein the size of the dustproof baffle (2) is larger than the coating area of the coating source (4).
10. The dustproof mechanism for coating chamber according to claim 9, wherein the size of the support plate (1) is larger than the size of the dustproof baffle (2).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202021944023.5U CN213266679U (en) | 2020-09-08 | 2020-09-08 | Dustproof mechanism for coating film chamber |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202021944023.5U CN213266679U (en) | 2020-09-08 | 2020-09-08 | Dustproof mechanism for coating film chamber |
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| Publication Number | Publication Date |
|---|---|
| CN213266679U true CN213266679U (en) | 2021-05-25 |
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| CN202021944023.5U Active CN213266679U (en) | 2020-09-08 | 2020-09-08 | Dustproof mechanism for coating film chamber |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114277337A (en) * | 2021-12-16 | 2022-04-05 | 深圳市华星光电半导体显示技术有限公司 | Vapor deposition device and method for manufacturing vapor deposition device |
-
2020
- 2020-09-08 CN CN202021944023.5U patent/CN213266679U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114277337A (en) * | 2021-12-16 | 2022-04-05 | 深圳市华星光电半导体显示技术有限公司 | Vapor deposition device and method for manufacturing vapor deposition device |
| CN114277337B (en) * | 2021-12-16 | 2024-03-22 | 深圳市华星光电半导体显示技术有限公司 | Vapor deposition device and method for manufacturing vapor deposition device |
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