Carousel formula feed mechanism
Technical Field
The utility model relates to a semiconductor chip preparation field for the linking of upstream and downstream chip manufacturing equipment especially relates to a carousel formula feed mechanism.
Background
In the field of chip manufacturing, the manufacture of a chip requires a plurality of steps, and generally, a production line is continuously arranged to increase the production speed. And at some less production factory buildings, then need the transportation of semi-manufactured goods, and transport artifical or the great transmission track of volume to semi-manufactured goods among the prior art, for this application has designed a small in size's short distance to turn to conveying loading attachment. The upstream and downstream chip manufacturing equipment can be designed to be more compact, and the occupied space is reduced.
Disclosure of Invention
The utility model aims to solve the problem that to the shortcoming among the above-mentioned prior art, put forward improvement scheme or alternative, especially a small to can go up the improvement or the alternative of unloading simultaneously.
In order to solve the above problem, the utility model discloses a scheme as follows: a rotating disc type feeding mechanism comprises a rotating disc and a rotating disc driving motor, wherein the rotating disc driving motor is connected with the rotating disc through a transmission device and used for driving the rotating disc to rotate; the loading jig is used for loading the chip; the four loading jigs are provided with a feeding station, a discharging station, a monitoring station and a standby station at corresponding positions; the discharging station is positioned behind the feeding station; the monitoring station is positioned in front of the feeding station.
Further, according to the above design scheme, the rotating disc type feeding mechanism is characterized by further comprising a material taking monitoring assembly, wherein the material taking monitoring assembly is arranged at the detection station; the material taking monitoring assembly comprises a mounting bracket and a correlation sensor; and the correlation sensor mounting bracket is used for detecting whether a chip exists on the material loading jig running to the monitoring station.
Further, according to above-mentioned design the carousel formula feed mechanism, its characterized in that, carousel driving motor passes through synchronizing wheel and hold-in range and is connected with the rotary disk.
Further, according to the above design scheme, the rotating disc type feeding mechanism is characterized by further comprising an installation bottom plate; the turntable driving motor is arranged below the mounting bottom plate; a turntable adjusting mechanism is arranged above the mounting bottom plate; the rotating disc is arranged on the mounting bottom plate through a rotating disc adjusting mechanism; the rotary disc adjusting mechanism comprises a transverse adjusting part and a longitudinal adjusting part, and the rotary disc can be finely adjusted on the mounting base plate through the transverse adjusting part and the longitudinal adjusting part.
Further, according to the above design scheme, the rotating disc type feeding mechanism is characterized in that the loading jig is provided with a through hole; a vacuum cavity communicated with the through hole on the material loading jig is arranged in the rotating disc; the four loading jigs are all communicated with the independent vacuum cavities; the vacuum cavity is communicated with the aerodynamic device through a vacuum joint. The connection mode of the vacuum cavity and the through hole on the loading jig is described in another patent of the company: a multifunctional small turntable for optical inspection and laser printing of semiconductor wafers.
The technical effects of the utility model are as follows: the rotating disc type feeding mechanism adopts a rotating disc type structure, and the chip can be transferred between different process devices by using a small space. The utility model provides a carousel formula feed mechanism can accelerate the pay-off for connect chip manufacturing upstream and downstream equipment, can reduce the space that takes up an area with the compacter of upstream and downstream chip manufacturing equipment design, and, feeding station and ejection of compact station blowing simultaneously and getting the material, improved equipment operating efficiency. And negative pressure is designed to prevent material falling. Simultaneously, the technical scheme of this application has still designed the monitoring station, is located the preceding setting of feeding station, monitors through the year material tool of this position of correlation inductor, if ejection of compact station does not take away the chip on carrying the material tool, then is blocked the signal of correlation inductor to feeding station no longer gives this blowing on carrying the material tool. Avoiding the material falling caused by repeated material discharging.
Drawings
Fig. 1 is a schematic structural diagram of a rotating disc type feeding mechanism.
Fig. 2 is a top view of the carousel feed mechanism.
Fig. 3 is an enlarged structural diagram of the loading jig.
Fig. 4 is a structural schematic diagram of the rotating disc type feeding mechanism.
Wherein, 1 is an installation bottom plate, 2 is a turntable driving motor, 3 is a rotating disk, 4 is a turntable adjusting mechanism, 5 is an opposite emission sensor and an installation support, 21 is a synchronizing wheel, 22 is a synchronous belt, 31 is a material loading jig, 32 is a feeding station, 33 is a discharging station, 34 is a standby station, 35 is a monitoring station, 36 is a through hole, and 37 is a vacuum cavity.
Detailed Description
The present invention will be described in further detail with reference to the accompanying drawings.
In the description of the present invention, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are only for convenience of description and simplification of description, but do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus, should not be construed as limiting the present invention. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.
In the description of the present invention, it is to be noted that, unless otherwise explicitly specified or limited, the terms "mounted," "connected," and "connected" are to be construed broadly, e.g., as meaning either a fixed connection, a removable connection, or an integral connection; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The meaning of the above terms in the present invention can be understood in specific cases by those skilled in the art.
Example (b): a rotating disc type feeding mechanism comprises a rotating disc and a rotating disc driving motor, wherein the rotating disc driving motor is connected with the rotating disc through a transmission device and used for driving the rotating disc to rotate, and four material loading jigs are symmetrically arranged on the outer side of the rotating disc; the loading jig is used for loading the chip; the four loading jigs are provided with a feeding station, a discharging station, a monitoring station and a standby station at corresponding positions; the discharging station is positioned behind the feeding station; the monitoring station is positioned in front of the feeding station; the material taking monitoring assembly is arranged at the detection station; the material taking monitoring assembly comprises a mounting bracket and a correlation sensor; the correlation sensor mounting bracket is used for detecting whether a chip is on a material loading jig running to a monitoring station; the turntable driving motor is connected with the rotating disc through a synchronous wheel and a synchronous belt; the device also comprises an installation bottom plate; the turntable driving motor is arranged below the mounting bottom plate; a turntable adjusting mechanism is arranged above the mounting bottom plate; the rotating disc is arranged on the mounting bottom plate through a rotating disc adjusting mechanism; the rotary disc adjusting mechanism comprises a transverse adjusting part and a longitudinal adjusting part, and the rotary disc can be finely adjusted on the mounting base plate through the transverse adjusting part and the longitudinal adjusting part; the loading jig is provided with a through hole; a vacuum cavity communicated with the through hole on the material loading jig is arranged in the rotating disc; the four loading jigs are all communicated with the independent vacuum cavities; the vacuum cavity is communicated with the aerodynamic device through a vacuum joint.
The carousel formula feed mechanism of this embodiment can accelerate the pay-off for connect chip manufacturing upstream and downstream equipment, can reduce occupation of land space with the compacter of upstream and downstream chip manufacturing equipment design, and, feeding station and ejection of compact station blowing simultaneously and getting the material, improved equipment operating efficiency. And negative pressure is designed to prevent material falling. The monitoring station is designed simultaneously, the material carrying jig located at the monitoring station is monitored by arranging the correlation sensors on two sides of the monitoring station, and when chips exist on the material carrying jig at the position, correlation signals of the correlation sensors are cut off, so that material taking failure is judged, and the rotary disc continues to rotate and does not perform material discharging action.