CN221478845U - Stacking and feeding equipment - Google Patents

Stacking and feeding equipment Download PDF

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Publication number
CN221478845U
CN221478845U CN202420289804.7U CN202420289804U CN221478845U CN 221478845 U CN221478845 U CN 221478845U CN 202420289804 U CN202420289804 U CN 202420289804U CN 221478845 U CN221478845 U CN 221478845U
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China
Prior art keywords
adsorption
stacking
feeding
assembly
transfer device
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CN202420289804.7U
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Chinese (zh)
Inventor
谢龙辉
吴霏霏
张夫明
李贞周
黄张楠
胥宗朋
高莺旗
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Zhejiang Qiushi Semiconductor Equipment Co Ltd
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Zhejiang Qiushi Semiconductor Equipment Co Ltd
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Abstract

The utility model provides stacking and feeding equipment which comprises an adsorption and transfer device, a material box device and a feeding device, wherein the material box device is positioned below the adsorption and transfer device and the feeding device at the same time so as to receive materials provided by the adsorption and transfer device and supply the materials to the feeding device, and the material box device is movable relative to the adsorption and transfer device and the feeding device and is provided with at least two stacking stations. When the stacking and feeding equipment is operated, the stacking and feeding equipment is always provided with one stacking station for acquiring the materials fed by the adsorption and transfer device, and is always provided with the other stacking station for feeding the materials to the feeding device, after the stacking station for feeding the materials to the feeding device is emptied, the box device moves relative to the adsorption and transfer device and the feeding device, so that the stacking station for acquiring the materials fed by the adsorption and transfer device before moves below the feeding device, and the feeding device is continuously fed through the box device, so that the stacking and feeding equipment has higher feeding efficiency.

Description

Stacking and feeding equipment
Technical Field
The utility model relates to the field of feeding equipment, in particular to stacking feeding equipment.
Background
In the related art, the feeding equipment obtains the silicon chips stacked in the material taking box through the suction disc, drives the suction disc and the silicon chips to move through the linear module, places the silicon chips at the designated position, drives the suction disc again to return to the upper part of the stacked silicon chips so as to obtain and move the next silicon chip again, and takes out the material box manually after all the stacked silicon chips in the material box are taken out, supplements the stacked silicon chips again or replaces another material box with the silicon chips. However, when the silicon wafers are manually replenished and stacked or the material box is replaced, the feeding equipment needs to be stopped, and the acquisition and the movement of the silicon wafers cannot be continuously carried out, so that the feeding efficiency is lower, and the production efficiency of the silicon wafers is reduced.
Disclosure of utility model
The present utility model aims to solve at least one of the technical problems in the related art to some extent. Therefore, the embodiment of the utility model provides the stacking and feeding equipment, which can continuously feed the feeding device through the adsorption and transfer device and the material box device and has higher feeding efficiency.
The stacking and feeding equipment comprises an adsorption and transfer device, a material box device and a feeding device, wherein one end of the adsorption and transfer device is arranged above the material box device, the adsorption and transfer device is used for adsorbing and acquiring materials and moving and releasing the acquired materials to the material box device, one end of the feeding device is arranged above the material box device, the feeding device is used for adsorbing and acquiring the materials in the material box device and moving and feeding the acquired materials, the material box device is provided with at least two stacking stations, the material box device can move relative to the adsorption and transfer device and the feeding device, one stacking station is positioned below the adsorption and transfer device after the movement, the other stacking station is positioned below the feeding device, and the other stacking station positioned below the feeding device is positioned below the adsorption and transfer device before the movement.
According to the stacking and feeding equipment disclosed by the embodiment of the utility model, the material is acquired through the adsorption and transfer device and stacked in the material box device, the stacked silicon wafers in the material box device are acquired through the feeding device and are fed, the material box device is provided with at least two stacking stations, one stacking station is always used for acquiring the material supplied by the adsorption and transfer device when the stacking and feeding equipment operates, the other stacking station is always used for supplying the material to the feeding device, after the stacking station for supplying the material to the feeding device is emptied, the material box device moves relative to the adsorption and transfer device and the feeding device, so that the stacking station for acquiring the material supplied by the adsorption and transfer device before moves to the lower part of the feeding device, and the feeding device is continuously fed through the material box device, so that the stacking and feeding equipment has higher feeding efficiency.
In some embodiments, the cartridge device includes a cartridge assembly and a rotating member, at least two of the stacking stations include a first stacking station and a second stacking station disposed on the cartridge assembly, the cartridge assembly is disposed on the rotating member to rotate around a vertical direction under the drive of the rotating member, and has a first position in which the first stacking station is located below the adsorption transfer device, and a second position in which the second stacking station is located below the loading device, and the first stacking station is located below the loading device.
In some embodiments, the magazine device includes a magazine assembly and a traversing element, at least two of the stacking stations include a third stacking station, a fourth stacking station, and a fifth stacking station disposed on the magazine assembly, the magazine assembly is disposed on the traversing element, so as to be driven by the traversing element to move horizontally, and has a third position and a fourth position, the at least two of the adsorption and transport devices include a first adsorption and transport device and a second adsorption and transport device, the feeding device is disposed between the first adsorption and transport device and the second adsorption and transport device, in the third position, the third stacking station is disposed under the feeding device, the fourth stacking station is disposed under the second adsorption and transport device, the second adsorption and transport device is turned on, the first adsorption and transport device is turned off, in the fourth position, the third stacking station is disposed under the first adsorption and transport device, and the fourth stacking station is disposed under the first adsorption and transport device.
In some embodiments, the magazine assembly includes a base, a limiting member and a material ejection member, at least two stacking stations are disposed on the base, the limiting member is disposed on the base, each stacking station surrounds a corresponding plurality of the limiting members, and the material ejection member is disposed on the base and is movable in a vertical direction relative to the base, and each stacking station is provided with a corresponding material ejection member.
In some embodiments, the feeding device includes:
The first conveying adsorption assembly extends along the horizontal direction, one end of the first conveying adsorption assembly is arranged above the material box device, the bottom of the first conveying adsorption assembly is provided with a plurality of adsorption holes, and the adsorption holes are distributed at intervals along the extending direction of the first conveying adsorption assembly;
a first conveyor belt, at least a portion of which is disposed below the first transport adsorption assembly;
the material taking adsorption piece is arranged at one end of the first transmission adsorption component above the material box device and can move along the vertical direction relative to at least part of the first conveyor belt;
The first conveying driving piece is connected with the first conveying belt so as to drive at least part of the first conveying belt to move away from the material taking adsorption piece in a conveying manner along the extending direction of the first conveying adsorption assembly.
In some embodiments, the feeding device further comprises:
The first rack is provided with the first transmission adsorption assembly, the first conveyor belt and the first conveying driving piece;
And one end of the first telescopic piece is provided with the material taking adsorption piece so as to drive the material taking adsorption piece to move along the vertical direction relative to at least part of the first conveyor belt.
In some embodiments, the material has a detection position driven by the first conveyor belt;
The feeding device further comprises a plurality of detection sensors, the detection sensors are arranged on the first rack and/or the first transmission adsorption assembly, and the detection sensors and the materials at the detection positions are arranged in a one-to-one correspondence mode on a plurality of projection sides in a horizontal projection plane.
In some embodiments, the feeding device further comprises a material detector, wherein the material detector is arranged on the first rack and/or the first transmission adsorption component and is used for detecting materials in the material box device, and the material detector is electrically connected with the first telescopic piece.
In some embodiments, the adsorption transport device comprises:
The second conveying adsorption assembly extends along the horizontal direction, one end of the second conveying adsorption assembly is arranged above the material box device, the second conveying adsorption assembly comprises a plurality of adsorption pieces, and the adsorption pieces are distributed at intervals along the extending direction of the second conveying adsorption assembly;
A second conveyor belt, at least part of which is arranged below the second transmission adsorption component;
And the second conveying driving piece is connected with the second conveying belt so as to drive at least part of the second conveying belt to move towards the box loading device along the extending direction of the second conveying adsorption assembly.
In some embodiments, the stacking and feeding device further comprises a first conveying line and a second conveying line, wherein the tail end of the first conveying line is arranged below the other end of the adsorption and transfer device so as to supply materials to the adsorption and transfer device, and the head end of the second conveying line is arranged below the other end of the feeding device so as to receive and convey the materials supplied by the feeding device.
Drawings
FIG. 1 is a schematic structural view of a stacking and feeding apparatus according to an embodiment of the present utility model;
FIG. 2 is a schematic view of a cartridge device according to an embodiment of the present utility model;
FIG. 3 is a schematic diagram of a loading device according to an embodiment of the present utility model;
FIG. 4 is a schematic diagram of a feeding device according to an embodiment of the present utility model;
FIG. 5 is a schematic view of the position of the detection sensor relative to the first housing in an embodiment of the present utility model;
Fig. 6 is a schematic structural diagram of an adsorption transfer device according to an embodiment of the present utility model.
Reference numerals:
1. An adsorption transfer device; 11. an absorbing member; 12. a second conveyor belt; 13. a second transfer drive; 14. a second frame; 2. a magazine device; 21. a stacking station; 211. a first stacking station; 212. a second stacking station; 22. a cartridge assembly; 221. a base; 222. a limiting piece; 223. a material ejection piece; 3. a feeding device; 31. a first transport adsorption assembly; 32. a first conveyor belt; 33. a material taking and absorbing part; 34. a first transfer drive; 35. a first frame; 36. a detection sensor; 37. and a vacuum generator.
Detailed Description
Reference will now be made in detail to embodiments of the present utility model, examples of which are illustrated in the accompanying drawings. The embodiments described below by referring to the drawings are illustrative and intended to explain the present utility model and should not be construed as limiting the utility model.
The following describes a stack loading apparatus according to an embodiment of the present utility model with reference to fig. 1 to 6.
As shown in fig. 1 to 6, the stacking and feeding device according to the embodiment of the present utility model includes an adsorption and transfer device 1, a cartridge device 2, and a feeding device 3.
One end of the adsorption and transfer device 1 is arranged above the material box device 2, the adsorption and transfer device 1 is used for adsorbing and obtaining materials, the obtained materials are moved and released to the material box device 2, one end of the feeding device 3 is arranged above the material box device 2, the feeding device 3 is used for adsorbing and obtaining materials in the material box device 2, the obtained materials are moved and fed, the material box device 2 is provided with at least two stacking stations 21, the material box device 2 is movable relative to the adsorption and transfer device 1 and the feeding device 3, one stacking station 21 is positioned below the adsorption and transfer device 1 after movement, the other stacking station 21 is positioned below the feeding device 3, and the other stacking station 21 positioned below the feeding device 3 is positioned below the adsorption and transfer device 1 before movement.
As shown in fig. 1, the adsorption and transfer device 1 and the feeding device 3 are arranged at intervals in the left-right direction, the adsorption and transfer device 1 and the feeding device 3 extend in the front-rear direction, the cartridge device 2 is movable relative to the adsorption and transfer device 1 and the feeding device 3, when the cartridge device 2 is stationary, the cartridge device 2 extends in the left-right direction and is located below the front end of the adsorption and transfer device 1 and below the rear end of the feeding device 3, the cartridge device 2 is provided with at least two stacking stations 21, one of the stacking stations 21 is arranged below the front end of the adsorption and transfer device 1, and the other stacking station 21 is arranged below the rear end of the feeding device 3.
The adsorption transfer device 1 is used for adsorbing and acquiring materials at the rear end, then conveying the materials to the front end of the adsorption transfer device 1 along the direction from back to front, and stacking the materials in a stacking station 21 below the front end of the adsorption transfer device 1 after the materials fall off from the front end of the adsorption transfer device 1. The feeding device 3 is used for absorbing and acquiring materials in the stacking station 21 below the rear end of the feeding device 3 at the rear end, and then conveying the materials to the front end of the feeding device 3 along the direction from rear to front so as to realize feeding of the materials. After the material in the stacking station 21 below the rear end of the loading device 3 is taken out by the loading device 3, the box device 2 moves, so that the stacking station 21 below the front end of the adsorption and transfer device 1 before the movement moves below the rear end of the loading device 3 and is taken out by the loading device 3, and continuous loading of the loading device 3 is ensured by the cooperation of the box device 2 and the adsorption and transfer device 1.
Preferably, the material is a silicon wafer.
According to the stacking and feeding equipment disclosed by the embodiment of the utility model, the material is acquired through the adsorption and transfer device and stacked in the material box device, the stacked silicon wafers in the material box device are acquired through the feeding device and are fed, the material box device is provided with at least two stacking stations, one stacking station is always used for acquiring the material supplied by the adsorption and transfer device when the stacking and feeding equipment operates, the other stacking station is always used for supplying the material to the feeding device, after the stacking station for supplying the material to the feeding device is emptied, the material box device moves relative to the adsorption and transfer device and the feeding device, so that the stacking station for acquiring the material supplied by the adsorption and transfer device before moves to the lower part of the feeding device, and the feeding device is continuously fed through the material box device, so that the stacking and feeding equipment has higher feeding efficiency.
In the embodiment shown in fig. 1 and 2, the cartridge device 2 comprises a cartridge assembly 22 and a rotating member, at least two stacking stations 21 comprise a first stacking station 211 and a second stacking station 212 provided on the cartridge assembly 22, the cartridge assembly 22 is provided on the rotating member to rotate around a vertical direction under the drive of the rotating member and has a first position in which the first stacking station 211 is located below the suction transportation device 1, and a second position in which the second stacking station 212 is located below the feeding device 3, and the first stacking station 211 is located below the suction transportation device 1.
Specifically, the cartridge assembly 22 is disposed on a rotating member, which is preferably a rotating cylinder, to drive the cartridge assembly 22 to rotate about a vertical direction between a first position and a second position, and the cartridge assembly 22 has two stacking stations 21 arranged at intervals in a horizontal direction, one of which is a first stacking station 211, and the other of which is a second stacking station 212, and in the first position and the second position, the first stacking station 211 and the second stacking station 212 are arranged at intervals in a left-right direction.
In the first position, the first stacking station 211 is located below the front end of the adsorption and transfer device 1, so as to receive the material falling from the front end of the adsorption and transfer device 1, and enable the material to be stacked at the first stacking station 211, meanwhile, the second stacking station 212 is located below the rear end of the feeding device 3, and the feeding device 3 sequentially acquires the materials stacked in the second stacking station 212 and conveys the materials to be fed.
When all the materials in the second stacking station 212 are taken out by the feeding device 3, preferably, the first stacking station 211 is simultaneously stacked with the materials, the rotating member drives the material box assembly 22 to rotate to a second position, in which the first stacking station 211 is located below the rear end of the feeding device 3 to supply the materials to the feeding device 3, and the second stacking station 212 is located below the front end of the adsorption and transfer device 1 to receive the materials falling from the front end of the adsorption and transfer device 1. When all the material in the first stacking station 211 is taken out by the loading device 3, the rotating member drives the magazine assembly 22 to rotate again to the first position, thereby ensuring continuous loading of the loading device 3.
It will be appreciated that the structure of the cartridge device 2 is not limited to the embodiment shown in fig. 1 and 2, in other embodiments, the cartridge device 2 includes a cartridge assembly 22 and a traversing member, at least two stacking stations 21 include a third stacking station, a fourth stacking station and a fifth stacking station provided on the cartridge assembly 22, the cartridge assembly 22 is provided on the traversing member to be horizontally moved under the drive of the traversing member and has a third position and a fourth position, the adsorption transfer device 1 is at least two, at least two adsorption transfer devices 1 include a first adsorption transfer device and a second adsorption transfer device, the feeding device 3 is located between the first adsorption transfer device and the second adsorption transfer device, in the third position, the third stacking station is located below the feeding device 3, the fourth stacking station is located below the second adsorption transfer device, the first adsorption transfer device is turned on, in the fourth position, the third stacking station is located below the first adsorption transfer device, the fourth stacking station is located below the feeding device 3, and the first adsorption transfer device is turned on.
Specifically, the adsorption and transfer devices 1 are preferably two, one is a first adsorption and transfer device, the other is a second adsorption and transfer device, the first adsorption and transfer device and the second adsorption and transfer device are arranged at intervals along the left-right direction, the feeding device 3 is located between the first adsorption and transfer device and the second adsorption and transfer device, and preferably, the first adsorption and transfer device, the feeding device 3 and the second adsorption and transfer device are arranged at intervals from left to right.
The magazine assembly 22 is disposed on a traversing member, which is preferably a telescopic cylinder or a linear module disposed along a left-right direction, so as to drive the magazine assembly 22 to move between a third position and a fourth position along the left-right direction, wherein the magazine assembly 22 has three stacking stations 21 arranged at intervals along a horizontal direction, one of the three stacking stations is a third stacking station, the other stacking station is a fourth stacking station, and the remaining stacking stations are fifth stacking stations, and the third stacking station, the fourth stacking station and the fifth stacking station are all arranged at intervals along the left-right direction at the third position and the fourth position.
At the third position, the third stacks the below that the station was located loading attachment 3 rear end, loading attachment 3 acquires the material that stacks in the third in proper order and with the material transportation material loading, the fourth stacks the front end below that the station was located the second and adsorbs transfer device, and the second adsorbs transfer device opens, in order to receive the material that the transfer device front end was dropped to make the material stack at the fourth stack station, the fifth stacks the station and is located the right side that the transfer device was adsorbed to the second, first adsorbs transfer device and closes, including shut down and standby.
When all the materials in the third stacking station are taken out by the feeding device 3, preferably, the fourth stacking station is simultaneously fully stacked by the materials, the traversing element drives the material box assembly 22 to move to a fourth position, in the fourth position, the third stacking station is positioned below the front end of the first adsorption and transfer device, the first adsorption and transfer device is opened to receive the materials falling from the front end of the first adsorption and transfer device, the fourth stacking station is positioned below the rear end of the feeding device 3 to supply the materials to the feeding device 3, and the fifth stacking station is positioned below the front end of the second adsorption and transfer device, but the second adsorption and transfer device is closed.
When all the material in the fourth stacking station is taken out by the feeding device 3, the traversing element drives the material box assembly 22 to move to the third position again, so that continuous feeding of the feeding device 3 is ensured.
In some embodiments, the cartridge assembly 22 includes a base 221, a limiting member 222 and a pushing member 223, at least two stacking stations 21 are disposed on the base 221, the limiting member 222 is disposed on the base 221, each stacking station 21 surrounds a corresponding plurality of limiting members 222, the pushing member 223 is disposed on the base 221 and is movable in a vertical direction relative to the base 221, and each stacking station 21 is provided with a corresponding pushing member 223.
As shown in fig. 2, the base 221 extends in the left-right direction and is horizontally disposed, the base 221 is configured to be disposed on a rotating member or a traverse member, preferably, a second stacking station 212 is disposed at a left end of the base 221, a first stacking station 211 is disposed at a right end of the base 221, a plurality of corresponding limiting members 222 are surrounded on an outer periphery of the second stacking station 212, a plurality of corresponding limiting members 222 are also surrounded on an outer periphery of the first stacking station 211, and a plurality of limiting members 222 corresponding to the same stacking station 21 are arranged at intervals in a vertical direction so as to define a position of a material located in the stacking station 21 relative to the base 221, thereby avoiding material movement, ensuring that the material can be stacked in the stacking station 21, and preferably, the limiting members 222 are plates extending in the vertical direction.
The first stacking station 211 and the second stacking station 212 are respectively provided with a corresponding ejector member 223, the ejector member 223 is arranged on the base 221 and can move along the vertical direction relative to the base 221, preferably, the base 221 is internally provided with a second telescopic member extending along the vertical direction, the ejector member 223 is arranged at the top of the corresponding second telescopic member so as to move along the vertical direction under the driving of the second telescopic member, the top of the base 221 is provided with a groove for accommodating the ejector member 223, and when the ejector member 223 is positioned in the groove, the top surface of the ejector member 223 is flush with the top surface of the base 221, preferably, the plate body of the ejector member 223 is horizontally arranged.
When the stacking station 21 is located below the feeding device 3, as the material is gradually taken out, the ejector 223 in the stacking station 21 pushes the remaining material to gradually move upwards so as to be absorbed and acquired by the feeding device 3. When the stacking station 21 is located below the adsorption and transfer device 1, along with the falling of the materials, the material ejection member 223 in the stacking station 21 bears the gradual falling of the materials in the stacking station 21, so as to avoid the cracking caused by the larger falling height of the materials, and simultaneously avoid the interference with the adsorption and transfer device 1 when the materials are stacked.
In some embodiments, the loading device 3 includes a first transport adsorption assembly 31, a first conveyor belt 32, a take-off adsorption member 33, and a first conveyor drive 34.
The first conveying adsorption assembly 31 extends along the horizontal direction, one end of the first conveying adsorption assembly 31 is arranged above the material box device 2, a plurality of adsorption holes are formed in the bottom of the first conveying adsorption assembly 31 and are distributed at intervals along the extending direction of the first conveying adsorption assembly 31, at least part of the first conveying belt 32 is arranged below the first conveying adsorption assembly 31, the material taking adsorption assembly 33 is arranged at one end of the first conveying adsorption assembly 31, located above the material box device 2, and can move along the vertical direction relative to at least part of the first conveying belt 32, and the first conveying driving piece 34 is connected with the first conveying belt 32 to drive at least part of the first conveying belt 32 to move away from the material taking adsorption assembly 33 in the extending direction of the first conveying adsorption assembly 31 in a conveying mode.
As shown in fig. 3 and fig. 4, the first conveying adsorption component 31 is a strip-shaped cavity extending along the front-back direction, the rear end of the first conveying adsorption component 31 is located above the magazine device 2, the lower end surface of the first conveying adsorption component 31 is provided with a plurality of adsorption holes, the plurality of adsorption holes are distributed at intervals along the front-back direction, and the adsorption holes can generate upward adsorption force. The front and rear ends of the first transmission adsorption assembly 31 are respectively provided with a first belt wheel, the first conveyor belt 32 surrounds the two first belt wheels and the periphery of the first transmission adsorption assembly 31, so that a part of the first conveyor belt 32 is positioned at the lower side of the first transmission adsorption assembly 31, the first conveyor belt 32 is connected with the first transmission driving piece 34 through the first belt wheels, and under the driving of the first transmission driving piece 34, a part of the first conveyor belt 32 positioned at the lower side of the first transmission adsorption assembly 31 can move along the transmission direction from the rear to the front. The rear end of the first conveying adsorption assembly 31 is provided with a material taking adsorption member 33, the material taking adsorption member 33 can move up and down relative to the first conveying adsorption assembly 31 and the first conveyor belt 32, and the material taking adsorption member 33 is preferably a bernoulli chuck.
When the stacking station 21 fully loaded with stacked silicon wafers is located under the adsorption transfer device 1, the stacking station 21 is located under the material taking adsorption piece 33, the material taking adsorption piece 33 is driven to move downwards at first, the uppermost silicon wafer in the stacked silicon wafers is adsorbed and obtained, then the material taking adsorption piece 33 carries the silicon wafers to move upwards, the upper end faces of the silicon wafers are made to abut against the first conveying belt 32, at the moment, the adsorption force of the first transmission adsorption piece 31 acts on the silicon wafers to enable the silicon wafers to be kept on the first conveying belt 32, the material taking adsorption piece 33 stops adsorbing the silicon wafers, the first conveying belt 32 starts to move forwards and drives the silicon wafers to move forwards, in the process of the silicon wafer conveying movement, the first transmission adsorption piece 31 always acts on the adsorption force on the silicon wafers to prevent the silicon wafers from being separated from the first conveying belt 32, when the silicon wafers move to the front end of the first conveying belt 32, the silicon wafers can be separated from the first conveying belt 32 through inertia of the silicon wafers, and fall down through the silicon wafers when the adsorption force acts on the silicon wafers, and the finished loading operation can also be achieved through falling down when the adsorption force acts on the silicon wafers. When the material taking suction member 33 transfers a silicon wafer onto the first conveyor belt 32 and the first conveyor belt 32 conveys and moves the silicon wafer to the front side of the material taking suction member 33, the material taking suction member 33 can move downward again to suck and take a next silicon wafer and transfer the next silicon wafer onto the first conveyor belt 32, so that the first conveyor belt 32 can feed a plurality of silicon wafers at the same time.
It is understood that the first transfer suction assembly is not limited to a strip chamber, and in other embodiments, the first transfer suction assembly is a plurality of suction nozzles connected by a pipeline, each suction nozzle forming a suction hole.
It will be appreciated that the first conveyor belt is not limited to encircling the periphery of the first transport adsorption assembly, and in other embodiments, the first conveyor belt is in the form of a strip extending in a front-to-rear direction, the first conveyor belt is disposed below the first transport adsorption assembly, and the front and rear ends of the first conveyor belt are respectively provided with a reel through which the first conveyor belt is wound and released to move the first conveyor belt forward in a driving manner.
It will be appreciated that the take-off suction attachment is not limited to being a bernoulli chuck, and in other embodiments, the take-off suction attachment is a vacuum chuck.
In some embodiments, the loading device 3 further comprises a first frame 35 and a first telescopic member. The first frame 35 is provided with a first transport adsorption assembly 31, a first conveyor belt 32 and a first conveyor driving member 34, and one end of the first telescopic member is provided with a material taking adsorption member 33 so as to drive the material taking adsorption member 33 to be movable in a vertical direction relative to at least part of the first conveyor belt 32.
As shown in fig. 3 and 4, the first frame 35 includes a first mounting plate that sets up horizontally and a plurality of first stabilizer bars that extend along upper and lower direction, a plurality of first stabilizer bars link to each other with the first mounting plate, the first mounting plate extends along the fore-and-aft direction, both ends are equipped with corresponding first transmission adsorption component 31 and first conveyer belt 32 respectively about the first mounting plate, the top of first mounting plate is equipped with first transmission driving piece 34, first transmission driving piece 34 synchronous drive moves about the first conveyer belt 32 at both ends about, the top of first mounting plate still is equipped with vacuum generator 37, vacuum generator 37 links to each other with two first transmission adsorption component 31, so that two first transmission adsorption component 31 synchronous produce the adsorption affinity.
The rear end of first mounting panel is equipped with the through-hole that runs through first mounting panel along upper and lower direction, and the cross-sectional area of through-hole is greater than the cross-sectional area of getting the material absorbing member 33 for be used for holding and get the material absorbing member 33, get the material absorbing member 33 and establish in the bottom of first extensible member, first extensible member is preferably established on first frame 35, in order to drive to get the material absorbing member 33 through first extensible member along upper and lower direction, and make and get the material absorbing member 33 can get into the through-hole, so that get the silicon chip that material absorbing member 33 adsorbs and obtain and can offset with first conveyer belt 32. The first leg of the first frame 35 makes a space of a certain height below the first telescopic member and the first transport adsorption assembly, so that the magazine device 2 can be set and a space for the material taking adsorption member 33 to move up and down is provided. Preferably, the first telescopic member is a telescopic cylinder.
In some embodiments, the material has a detection position driven by the first conveyor belt 32. The feeding device 3 further comprises a plurality of detection sensors 36, the detection sensors 36 are arranged on the first frame 35 and/or the first transmission adsorption component 31, and the detection sensors 36 are arranged in one-to-one correspondence with a plurality of projection edges of the materials at the detection positions in the horizontal projection plane.
As shown in fig. 3 to 5, the lower end surface of the first mounting plate has a mounting cavity in the middle of the front-rear direction, the mounting cavity extends along the front-rear direction, two detection sensors 36 arranged at intervals along the front-rear direction are arranged in the mounting cavity, the left and right ends of the first mounting plate are respectively provided with corresponding detection sensors 36, the two detection sensors 36 positioned at the left and right ends of the first mounting plate are arranged at intervals along the left and right directions, the two detection sensors 36 positioned in the mounting cavity along the front-rear direction are positioned between the two detection sensors 36, and the four detection sensors 36 are arranged at the middle of four edges of the virtual quadrangle.
The silicon chip has the testing position in the in-process that first conveyer belt 32 bottom moved, the testing position is located the below of installation cavity, when the silicon chip is located the testing position, four detection sensor 36's detection light and four projection limit one-to-one settings in the horizontal projection plane of silicon chip, whether detect the projection limit that corresponds through detection sensor 36 and be complete, with whether detect the edge that the silicon chip corresponds the projection limit through detection sensor 36 and be complete, thereby carry out the broken piece detection to the silicon chip through four detection sensor 36, need not to set up independent broken piece check out equipment again at the low reaches of loading attachment 3, thereby reduce the structural complexity of production line, because loading attachment 3 can carry out material loading and broken piece detection simultaneously, consequently, can also promote the production efficiency of production line.
The four detection sensors 36 are all electrically connected with the control device, when at least one detection sensor 36 detects that the corresponding edge of the silicon wafer is incomplete, the control device marks the silicon wafer, preferably, a rejecting device is arranged at the downstream of the feeding device 3, the control device is connected with the rejecting device, and when the marked silicon wafer moves to the rejecting device, the control device sends a signal to the rejecting device to reject the marked silicon wafer.
In some embodiments, the feeding device 3 further comprises a material detector, which is provided on the first frame 35 and/or the first transport adsorption assembly 31, for detecting the material in the cartridge device 2, and the material detector is electrically connected to the first telescopic member.
Specifically, the rear end of the first mounting plate is further provided with a mounting hole penetrating the first mounting plate along the up-down direction, the material detector is embedded in the mounting hole and is electrically connected with the first telescopic member, and when the material detector detects that the silicon wafer is arranged in the stacking station 21 below, the material detector sends an electric signal to the first telescopic member, so that the first telescopic member starts to reciprocate along the up-down direction, and the stacked silicon wafer is sequentially transferred to the bottom of the first conveyor belt 32.
It will be appreciated that the material detector and the detection sensor are not limited to being provided on the first frame, and in other embodiments, the first frame does not have the first mounting plate, and the first transport adsorption assembly is a plate-shaped chamber that is horizontally disposed and extends in the front-rear direction, and the first transport adsorption assembly is provided with a mounting cavity and a mounting hole, and is provided with the material detector, the detection sensor, the first conveyor belt, and the material taking adsorption member.
In some embodiments, the sorption transport device 1 includes a second transport sorption assembly, a second conveyor belt 12, and a second conveyor drive 13.
The second transmission adsorption component extends along the horizontal direction, one end of the second transmission adsorption component is arranged above the material box device 2, the second transmission adsorption component comprises a plurality of adsorption components 11, the adsorption components 11 are distributed at intervals along the extending direction of the second transmission adsorption component, at least part of the second conveying belt 12 is arranged below the second transmission adsorption component, and the second conveying driving component 13 is connected with the second conveying belt 12 so as to drive at least part of the second conveying belt 12 to move towards the material box device 2 along the extending direction of the second transmission adsorption component.
As shown in fig. 1 and 6, the adsorption transfer device 1 includes a second transport adsorption assembly, a second conveyor belt 12, a second transport driving member 13, and a second frame 14, the second frame 14 includes a horizontally disposed second mounting plate and a plurality of second legs extending in an up-down direction, the plurality of second legs are connected to the second mounting plate, the second mounting plate extends in a front-rear direction and is provided with the second transport adsorption assembly, front and rear ends of the second mounting plate are respectively provided with a second pulley, the second conveyor belt 12 surrounds the outer circumferences of the two second pulleys and the second mounting plate, so that a portion of the second conveyor belt 12 is located at the lower sides of the second mounting plate and the second transport adsorption assembly, the second conveyor belt 12 is connected to the second transport driving member 13 through the second pulleys, and a portion of the second conveyor belt 12 located at the lower side of the second transport adsorption assembly is conveyable in a rear-front direction under the driving of the second transport driving member 13.
The left and right ends of the second mounting plate and the middle part along the left and right directions are respectively provided with a corresponding second conveyor belt 12, a second conveying driving piece 13 is arranged at the rear end of the second mounting plate and is simultaneously connected with the second belt pulleys of the three second conveyor belts 12 so as to synchronously drive the three second conveyor belts 12 to move, the second conveying adsorption assembly comprises two rows of adsorption pieces 11, each row of adsorption pieces 11 comprises a plurality of adsorption pieces 11 which are arranged at intervals along the front and rear directions, each adsorption piece 11 is embedded at the bottom of the second mounting plate, the two rows of adsorption pieces 11 are arranged at intervals along the left and right directions, one row of adsorption pieces 11 is positioned between the second conveyor belt 12 at the left end and the second conveyor belt 12 at the middle part, the other row of adsorption pieces 11 is positioned between the second conveyor belt 12 at the right end and the second conveyor belt 12 at the middle part, and the adsorption pieces 11 are used for generating adsorption force to acquire and keeping the bottom of the second conveyor belt 12, and preferably, the adsorption pieces 11 are Bernoulli suckers.
When the silicon chip passes under the rear end of the adsorption transfer device 1, the two adsorption pieces 11 positioned at the rearmost end of the second mounting plate suck the lower silicon chip and make the silicon chip prop against the second conveying belt 12, the silicon chip moves to the front end of the second mounting plate from back to front under the driving of the second conveying belt 12 and the adsorption force of the adsorption pieces 11 from back to front, then falls into the stacking station 21 below from the front end of the second mounting plate, the silicon chip can fall off the second conveying belt 12 and fall through the inertia of the second conveying belt 12, and the silicon chip can also fall through stopping the adsorption force of the two adsorption pieces 11 at the foremost end.
It will be appreciated that the configuration of the adsorption transfer device and the loading device is not limited to that shown in fig. 1, and in other embodiments, the adsorption transfer device includes a first transport adsorption assembly and the loading device includes a second transport adsorption assembly.
In some embodiments, the stacking and feeding device according to the embodiments of the present utility model further includes a first conveying line and a second conveying line, where the tail end of the first conveying line is disposed below the other end of the adsorption and transfer device 1 to supply materials to the adsorption and transfer device 1, and the head end of the second conveying line is disposed below the other end of the feeding device 3 to receive and convey the materials supplied by the feeding device 3.
Specifically, the first transfer chain and the second transfer chain are preferably conveyer belt devices, and the tail end of the first transfer chain is arranged below the rear end of the adsorption transfer device 1 so as to provide silicon wafers for the adsorption transfer device 1, when the silicon wafers of the first transfer chain are conveyed below the rear end of the adsorption transfer device 1, the silicon wafers are adsorbed and acquired by the adsorption transfer device 1, the first transfer chain can extend along the left-right direction and also can extend along the front-back direction, and when the adsorption transfer device 1 comprises the first adsorption transfer device and the second adsorption transfer device, the tail end of the first transfer chain is simultaneously positioned below the rear end of the first adsorption transfer device and below the rear end of the second adsorption transfer device. The first conveyor line may be a conveyor line connecting the stacking and feeding device and the upstream device, or may be a conveyor line provided in the upstream device.
The front end of the second conveying line is arranged below the front end of the feeding device 3 to receive the silicon wafers fed by the feeding device 3, the silicon wafers fall onto the second conveying line from the front end of the feeding device 3 and are conveyed to downstream equipment, such as rejecting equipment, by the second conveying line.
In the description of the present utility model, it should be understood that the terms "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc. indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, are merely for convenience in describing the present utility model and simplifying the description, and do not indicate or imply that the devices or elements referred to must have a specific orientation, be configured and operated in a specific orientation, and thus should not be construed as limiting the present utility model.
Furthermore, the terms "first," "second," and the like, are used merely for distinguishing between and not for indicating or implying a relative importance or an implicit indication of the number of features indicated. Thus, a feature defining "a first" or "a second" may explicitly or implicitly include at least one such feature. In the description of the present utility model, the meaning of "plurality" means at least two, for example, two, three, etc., unless specifically defined otherwise.
In the present utility model, unless explicitly specified and limited otherwise, the terms "mounted," "connected," "secured," and the like are to be construed broadly, and may be, for example, fixedly connected, detachably connected, or integrally formed; may be mechanically connected, may be electrically connected or may be in communication with each other; either directly or indirectly, through intermediaries, or both, may be in communication with each other or in interaction with each other, unless expressly defined otherwise. The specific meaning of the above terms in the present utility model can be understood by those of ordinary skill in the art according to the specific circumstances.
In the present utility model, unless expressly stated or limited otherwise, a first feature "up" or "down" a second feature may be the first and second features in direct contact, or the first and second features in indirect contact via an intervening medium. Moreover, a first feature being "above," "over" and "on" a second feature may be a first feature being directly above or obliquely above the second feature, or simply indicating that the first feature is level higher than the second feature. The first feature being "under", "below" and "beneath" the second feature may be the first feature being directly under or obliquely below the second feature, or simply indicating that the first feature is less level than the second feature.
For purposes of this disclosure, the terms "one embodiment," "some embodiments," "example," "a particular example," or "some examples," etc., mean that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the utility model. In this specification, schematic representations of the above terms are not necessarily directed to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples. Furthermore, the different embodiments or examples described in this specification and the features of the different embodiments or examples may be combined and combined by those skilled in the art without contradiction.
While the above embodiments have been shown and described, it should be understood that the above embodiments are illustrative and not to be construed as limiting the utility model, and that variations, modifications, alternatives, and variations of the above embodiments may be made by those of ordinary skill in the art without departing from the scope of the utility model.

Claims (10)

1. The stacking and feeding equipment is characterized by comprising an adsorption and transfer device (1), a material box device (2) and a feeding device (3),
One end of the adsorption and transfer device (1) is arranged above the material box device (2), the adsorption and transfer device (1) is used for adsorbing and acquiring materials and moving and releasing the acquired materials to the material box device (2),
One end of the feeding device (3) is arranged above the material box device (2), the feeding device (3) is used for absorbing and acquiring materials in the material box device (2) and feeding the acquired materials in a moving way,
The material box device (2) is provided with at least two stacking stations (21), the material box device (2) is movable relative to the adsorption transfer device (1) and the feeding device (3), and after the material box device is moved, one stacking station (21) is positioned below the adsorption transfer device (1), the other stacking station (21) is positioned below the feeding device (3), and the other stacking station (21) positioned below the feeding device (3) is positioned below the adsorption transfer device (1) before the material box device is moved.
2. The stacking and feeding apparatus according to claim 1, wherein the magazine arrangement (2) comprises a magazine assembly (22) and a rotating member, at least two of the stacking stations (21) comprising a first stacking station (211) and a second stacking station (212) provided on the magazine assembly (22), the magazine assembly (22) being provided on the rotating member to rotate about a vertical direction under the drive of the rotating member and having a first position and a second position,
In the first position, the first stacking station (211) is located below the adsorption transfer device (1), the second stacking station (212) is located below the feeding device (3), in the second position, the second stacking station (212) is located below the adsorption transfer device (1), and the first stacking station (211) is located below the feeding device (3).
3. The stacking and feeding apparatus according to claim 1, wherein the magazine means (2) comprises a magazine assembly (22) and a traverse member, at least two of the stacking stations (21) comprise a third stacking station, a fourth stacking station and a fifth stacking station provided on the magazine assembly (22), the magazine assembly (22) being provided on the traverse member to be horizontally moved by the traverse member and having a third position and a fourth position,
The number of the adsorption and transport devices (1) is at least two, the at least two adsorption and transport devices (1) comprise a first adsorption and transport device and a second adsorption and transport device, the feeding device (3) is positioned between the first adsorption and transport device and the second adsorption and transport device,
The third position, the third stacking station is located the below of loading attachment (3), the fourth stacking station is located the below of second absorption transfer device, the second absorption transfer device is opened, the first absorption transfer device is closed, the fourth position, the third stacking station is located the below of first absorption transfer device, the fourth stacking station is located the below of loading attachment (3), the first absorption transfer device is opened, the second absorption transfer device is closed.
4. A stacking and feeding device according to claim 2 or 3, characterized in that the magazine assembly (22) comprises a base (221), a limiting member (222) and a jacking member (223), wherein at least two stacking stations (21) are arranged on the base (221), the limiting member (222) is arranged on the base (221), each stacking station (21) surrounds a corresponding plurality of limiting members (222), and the jacking member (223) is arranged on the base (221) and can move in a vertical direction relative to the base (221), and each stacking station (21) is provided with a corresponding jacking member (223).
5. The stacking feeding apparatus according to claim 1, wherein the feeding device (3) comprises:
The first conveying adsorption assembly (31), the first conveying adsorption assembly (31) extends along the horizontal direction, one end of the first conveying adsorption assembly is arranged above the material box device (2), a plurality of adsorption holes are formed in the bottom of the first conveying adsorption assembly (31), and the adsorption holes are distributed at intervals along the extending direction of the first conveying adsorption assembly (31);
a first conveyor belt (32), at least part of the first conveyor belt (32) being arranged below the first transport adsorption assembly (31);
The material taking adsorption piece (33) is arranged at one end of the first transmission adsorption assembly (31) above the material box device (2), and can move along the vertical direction relative to at least part of the first conveyor belt (32);
And the first conveying driving piece (34) is connected with the first conveying belt (32) so as to drive at least part of the first conveying belt (32) to move away from the material taking absorbing piece (33) in the conveying direction of the first conveying absorbing assembly (31).
6. The stacking feeding apparatus as claimed in claim 5, wherein the feeding device (3) further comprises:
A first frame (35), the first frame (35) being provided with the first transport adsorption assembly (31), the first conveyor belt (32) and the first transport drive (34);
And one end of the first telescopic piece is provided with the material taking absorbing piece (33) so as to drive the material taking absorbing piece (33) to move along the vertical direction relative to at least part of the first conveyor belt (32).
7. The stacking feeding apparatus of claim 6, wherein the material has a detection position driven by the first conveyor belt (32);
The feeding device (3) further comprises a plurality of detection sensors (36), the detection sensors (36) are arranged on the first frame (35) and/or the first transmission adsorption component (31), and the detection sensors (36) are arranged in one-to-one correspondence with the projection sides of the materials at the detection positions in the horizontal projection plane.
8. The stacking feeding apparatus according to claim 6, wherein the feeding device (3) further comprises a material detector provided on the first frame (35) and/or the first transport adsorption assembly (31) for detecting material in the magazine device (2), the material detector being electrically connected with the first telescopic member.
9. The stacking feeding apparatus according to claim 1, wherein the adsorption transfer device (1) comprises:
The second conveying adsorption assembly extends along the horizontal direction, one end of the second conveying adsorption assembly is arranged above the material box device (2), the second conveying adsorption assembly comprises a plurality of adsorption pieces (11), and the adsorption pieces (11) are distributed at intervals along the extending direction of the second conveying adsorption assembly;
A second conveyor belt (12), at least part of the second conveyor belt (12) being arranged below the second transport adsorption assembly;
And the second conveying driving piece (13) is connected with the second conveying belt (12) so as to drive at least part of the second conveying belt (12) to move towards the material box device (2) along the extending direction of the second conveying adsorption assembly.
10. The stacking and feeding device according to claim 1, further comprising a first conveyor line and a second conveyor line, wherein the tail end of the first conveyor line is arranged below the other end of the adsorption and transfer device (1) so as to supply materials to the adsorption and transfer device (1), and the head end of the second conveyor line is arranged below the other end of the feeding device (3) so as to receive and convey the materials supplied by the feeding device (3).
CN202420289804.7U 2024-02-08 2024-02-08 Stacking and feeding equipment Active CN221478845U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202420289804.7U CN221478845U (en) 2024-02-08 2024-02-08 Stacking and feeding equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202420289804.7U CN221478845U (en) 2024-02-08 2024-02-08 Stacking and feeding equipment

Publications (1)

Publication Number Publication Date
CN221478845U true CN221478845U (en) 2024-08-06

Family

ID=92355994

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202420289804.7U Active CN221478845U (en) 2024-02-08 2024-02-08 Stacking and feeding equipment

Country Status (1)

Country Link
CN (1) CN221478845U (en)

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