CN213239057U - Multivariable gas mass flow transmitter based on MEMS chip and flowmeter - Google Patents
Multivariable gas mass flow transmitter based on MEMS chip and flowmeter Download PDFInfo
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- CN213239057U CN213239057U CN202022214876.XU CN202022214876U CN213239057U CN 213239057 U CN213239057 U CN 213239057U CN 202022214876 U CN202022214876 U CN 202022214876U CN 213239057 U CN213239057 U CN 213239057U
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Abstract
The utility model discloses a multivariable gas mass flow changer and flowmeter based on MEMS chip. The transmitter is used for connecting with any throttling device and an external temperature sensor which passes through a thermal resistor inserted in a pipeline and is used for collecting a temperature signal of a medium in the pipeline, and comprises: the system comprises a shell, an MEMS differential pressure sensor, an MEMS pressure sensor, a main board and a sensor board, wherein the MEMS differential pressure sensor is arranged in the shell and used for acquiring differential pressure signals of a throttling device, the MEMS pressure sensor is used for acquiring pressure signals of media in a pipeline and environmental temperature signals of the medium in the pipeline; the MEMS differential pressure sensor, the MEMS pressure sensor and the external temperature sensor are respectively electrically connected with the sensor board; the main board and the sensor board are electrically connected. The utility model is used for gaseous differential pressure/super large differential pressure chip, pressure chip and temperature sensor measure and calculate, send output with multivariable signal transmission for solve the gas quality measurement of super large flow ratio, have comparable measurement accuracy.
Description
Technical Field
The utility model relates to a changer measures technical field, especially relates to a multivariable gas mass flow changer and flowmeter based on MEMS chip.
Background
The rapid development of the differential pressure transmitter technology has different working principles, and the differential pressure transmitter is mainly of a capacitance oil charging type and a resonant type and has the problems of micro differential pressure measurement, temperature drift, time drift and the like. A differential pressure gas mass flowmeter comprises five separate parts: a throttling device (generating a differential pressure element), a differential pressure/temperature transmitter (three parts respectively), and an integrating instrument with temperature and pressure compensation. While differential pressure transmitters are basically used to measure flow, multivariable flow transmitters with differential pressure transmitters as the main subject also face the same problem. Due to the MEMS chip, the effects of small volume, low power consumption and low cost can be achieved, and ultra-small differential pressure and ultra-large differential pressure can be measured with high precision and high stability, so that the ultra-large range ratio can be realized and the MEMS chip can be widely applied.
However, the micro differential pressure transmitter in the prior art can only measure the micro differential pressure above (20-30) pa, and can only measure the micro differential pressure with precision stably above 50 pa, and the measured micro differential pressure curve basically fluctuates up and down all the time, so that micro flow, especially gas with lighter density, cannot be processed.
SUMMERY OF THE UTILITY MODEL
An object of the utility model is to provide a multivariable gas mass flow changer based on MEMS chip and flowmeter thereof is connected with any throttling arrangement in the market to solve less gas mass flow measurement's problem.
In order to achieve the above object, an embodiment of the present invention provides a multivariable gas mass flow transmitter based on a MEMS chip, for connecting with any throttling device and an external temperature sensor, where the external temperature sensor is used to collect a temperature signal of a pipeline through a thermal resistor inserted in a medium in the pipeline;
the multivariable gas mass flow transmitter includes: the MEMS differential pressure sensor, the MEMS pressure sensor, the main board and the sensor board are arranged in the shell;
the MEMS differential pressure sensor is used for acquiring a differential pressure signal of the throttling device;
the MEMS pressure sensor is used for acquiring a pressure signal of a medium in the pipeline and an environment temperature signal of the position of the medium;
the MEMS differential pressure sensor, the MEMS pressure sensor and the external temperature sensor are respectively electrically connected with the sensor board, and the main board is electrically connected with the sensor board.
Preferably, the main board is electrically connected with the sensor board, a second CPU chip is arranged on the main board, a first CPU chip is arranged on the sensor board, the first CPU chip is used for collecting the differential pressure, pressure and temperature signals, filtering and linear interpolation processing are performed, the second CPU chip is used for calculating mass flow according to the collected signals, displaying multivariable signals through an LCD screen and outputting the multivariable signals through a HART bus mode, and outputting the calculated instantaneous mass flow of gas through 4-20 mA.
Preferably, multivariable gas mass flow transmitter still includes display module and wiring terminal module, inside relative demonstration chamber and the wiring chamber of being formed with of casing, display module set up in show the chamber for show multivariable parameter and menu input, wiring terminal module set up in the wiring chamber, the mainboard respectively with display module with wiring terminal module electric connection.
Preferably, the wiring terminal module comprises a two-wire interface and an external temperature interface, and the two-wire interface is used for analog output, power supply and communication.
Preferably, a connection cavity is further formed inside the casing, the connection cavity is located below the display cavity and the wiring cavity, and the MEMS differential pressure sensor, the MEMS pressure sensor and the main board are all arranged in the connection cavity.
Preferably, the multivariable gas mass flow transmitter further comprises a pressure pipe, a cavity is formed inside the shell, the cavity is communicated with the connecting cavity, the pressure pipe penetrates through the cavity, and the output end of the pressure pipe faces the MEMS differential pressure sensor and the MEMS pressure sensor in the connecting cavity.
Preferably, the multivariable gas mass flow transmitter further comprises a connecting piece for connecting the cavity and the throttling device.
Preferably, the connecting piece comprises an oval flange for connecting a pressure guiding pipe of any one of the throttling devices.
Preferably, the connector further comprises a drum connector, through which the oval flange is connected with the mould cavity.
Preferably, the multivariable gas mass flow transmitter further comprises two wires for transmitter output, the two wires for transmitter output are electrically connected with the motherboard and are used for outputting a 4-20 mA analog signal and a full digital signal, wherein the analog signal comprises an instantaneous flow, and the digital signal comprises an instantaneous flow, an accumulated flow, a differential pressure, a temperature, a meter temperature and a percentage of the flow.
The embodiment of the utility model provides a still provide a differential pressure type gas mass flow meter, include:
the throttling device is used for generating differential pressure in the pipeline to be measured; and
a MEMS chip based multivariable gas mass flow transmitter as described in any of the above embodiments.
Preferably, the throttling device comprises an orifice plate throttling device, a nozzle throttling device, a venturi throttling device, a V-cone throttling device, an elbow throttling device, a wedge throttling device or a bartype throttling device.
The embodiment of the utility model provides a multivariable gas mass flow changer based on MEMS chip advantage lies in, selects and usesThe MEMS silicon piezoresistive differential pressure measuring chip is used as a differential pressure sensor, the pressure guiding mechanical structure guides high pressure and low pressure to a high-low port of the chip, the high pressure and the low pressure generated and guided by the throttling device are measured, and the output high-precision high-linearity voltage is proportional to the differential pressure. The utility model is used for gaseous differential pressure/super large differential pressure chip, pressure chip and temperature sensor measure and calculate, send the output with signal transmission such as pipeline differential pressure/temperature mass flow/cumulative flow, different with prior art, the gas mass measurement who is used for solving super small flow very much, has locally super small flow's measuring capability, has improved measuring precision. Meanwhile, the MEMS differential pressure sensor is selected, so that the advantages of small size, low power consumption, low cost and the best characteristic of being capable of measuring ultra-small differential pressure and ultra-large differential pressure with high precision and high stability are achieved, and accordingly, the ultra-large range ratio can be achieved. The differential pressure can be ensured to be above 2 Pa, stable measurement can be realized, and the precision is quite high when the differential pressure is 5-10 Pa; the maximum differential pressure can be stably measured to 10-15 kilopascals, the differential pressure range ratio is (5000-7500) times (10000/2-15000/2), and the flow range ratio is 70.7-86.6 times
Has a considerable flow measurement range and is incomparable with conventional differential pressure transmitters (capacitive/resonant/piezoelectric, etc.) or conventional mass flowmeters. Meanwhile, an MEMS pressure chip is also selected and used in cooperation with the differential pressure chip. The CPU with low power consumption and the isolation circuit with the patent are used, so that the power supply efficiency is greatly improved, the intrinsic explosion-proof and two-wire system output is ensured, the functions of foreign similar products can be achieved regardless of meter head display or HART bus output, and instantaneous mass flow, accumulated flow, differential pressure, temperature, instrument internal temperature, flow percentage and the like can be displayed and (bus) output in real time.
Drawings
In order to more clearly illustrate the technical solution of the present invention, the drawings required for the embodiments will be briefly described below, and obviously, the drawings in the following description are only some embodiments of the present invention, and it is obvious for those skilled in the art that other drawings can be obtained according to the drawings without creative efforts.
Fig. 1 is a schematic structural diagram of a multivariable gas mass flow transmitter according to an embodiment of the present invention;
fig. 2 is a schematic structural diagram of a multivariable gas mass flow transmitter according to an embodiment of the present invention;
fig. 3 is a schematic diagram of an electrical module connection for a multivariable gas mass flow transmitter according to another embodiment of the present invention.
Detailed Description
The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative efforts belong to the protection scope of the present invention.
It should be understood that the step numbers used herein are for convenience of description only and are not intended as limitations on the order in which the steps are performed.
It is to be understood that the terminology used in the description of the invention herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention. As used in the specification and the appended claims, the singular forms "a", "an", and "the" are intended to include the plural forms as well, unless the context clearly indicates otherwise.
The terms "comprises" and "comprising" indicate the presence of the described features, integers, steps, operations, elements, and/or components, but do not preclude the presence or addition of one or more other features, integers, steps, operations, elements, components, and/or groups thereof.
The term "and/or" refers to and includes any and all possible combinations of one or more of the associated listed items.
Referring to fig. 1, fig. 2 and fig. 3, an embodiment of the present invention provides a multivariable gas mass flow transmitter based on a MEMS chip, for connecting with any one of the throttling devices and the external temperature sensor 203. The multivariable gas mass flow transmitter includes: housing 100, and a MEMS differential pressure sensor 201, a MEMS pressure sensor 202, a sensor board 204, and a motherboard 205 disposed within the housing 100.
The MEMS differential pressure sensor 201 is used for acquiring a differential pressure signal of the throttling device. The MEMS pressure sensor 202 is used to collect a pressure signal of the medium in the pipeline and an ambient temperature signal of the location thereof. The external temperature sensor 203 is used for collecting the temperature signal of the pipeline through a thermal resistor inserted in the medium in the pipeline and is electrically connected through the terminal module 111 of the wiring cavity 110. The MEMS differential pressure sensor 201, the MEMS pressure sensor 202 and the external temperature sensor 203 are electrically connected to the sensor board 204, respectively, and the main board 205 is electrically connected to the sensor board 204.
In the embodiment, the MEMS sensors including the MEMS pressure sensor 202 and the MEMS differential pressure sensor 201 are selected, so that the advantages of small size, low power consumption, low cost, and the best characteristic of being capable of measuring ultra-small differential pressure and ultra-large differential pressure with high precision and high stability are achieved, thereby realizing ultra-large range ratio. Can ensure that the differential pressure can be stably measured when the differential pressure is more than 2 Pa, achieves equivalent precision when the differential pressure is 5-10 Pa, can stably measure the maximum differential pressure to 10-15 kilopascals, and has the differential pressure range ratio of (5000-7500) times
The flow range ratio is 70.7-86.6 times, the flow measurement range is quite large, and the flow measurement range is incomparable with that of a traditional differential pressure transmitter (capacitance type/resonance type/piezoelectric type and the like) or a traditional mass flowmeter. Specifically, in this embodiment, the MEMS differential pressure sensor 201 is adopted, effective measurement of the micro differential pressure and the ultra-large differential pressure of the gas is achieved, the MEMS pressure sensor 202 and the external temperature sensor 203 are adopted, the differential pressure value is combined, calculation of the gas mass flow is completed, display of multivariable and multivariable (HART) output are realized, and the multivariable includes: differential pressure,Temperature, pressure, differential pressure, instantaneous mass flow, cumulative mass flow, output percentage, and instrument internal temperature, among others.
The embodiment of the utility model provides a multivariable gas mass flow transmitter based on MEMS chip (including MEMS pressure sensor 202 and MEMS differential pressure sensor 201) advantage lies in, differential pressure/pressure signal that produces various throttling arrangement on the spot through oval flange introduces, lead and press mechanical structure to draw the height port of chip with high-low pressure, select and used MEMS silicon piezoresistive formula to survey the differential pressure chip as differential pressure transmitter/pressure transmitter, lead and press mechanical structure to draw the height port of chip with high-low pressure, measure the height port that produces and draw by throttling arrangement, its voltage and the differential pressure that exports the high linearity of high accuracy are proportional. The utility model is used for gaseous little differential pressure/super large differential pressure chip, pressure chip and temperature sensor measure and calculate, send the output with signal transmission such as pipeline differential pressure/temperature/mass flow/cumulative flow, different with prior art, the gas quality who is used for solving very large flow ratio very much measures, also has comparable measurement accuracy.
Referring to FIG. 3, in one embodiment, the multivariable gas mass flow transmitter further comprises a sensor board 204 and a motherboard 205 communicatively coupled to each other.
The main board 205 is provided with a second CPU chip 208, the sensor board 204 is provided with a first CPU chip 207, the first CPU chip 207 is used for collecting the differential pressure, pressure and temperature signals and carrying out filtering and linear interpolation processing, the second CPU chip 208 is used for carrying out mass flow calculation according to the collected signals, multivariable signals are displayed through an LCD screen and output in a HART bus mode, and the calculated instantaneous mass flow of the gas is output through 4-20 mA.
In the embodiment, the pressure difference introduced by the oval flange interface and the pressure guiding pipe is directly measured by the MEMS differential pressure sensor 201, the pressure of the pipeline and the ambient temperature of the processing site are directly measured by the MEMS pressure sensor 202, and I2C bus output, direct measurement of the temperature of the pipeline by an external temperature sensor 203 (such as a thermal resistor inserted in the pipeline), direct access by an external terminal, pre-amplification circuit and CPU powerAnd the three-way signal is collected to the first CPU chip 207, the differential pressure signal and the temperature signal are subjected to linearization processing according to built-in calibration data and converted into digital signals, the digital signals are communicated with the second CPU chip 208 of the mainboard 205 through a serial port, the second CPU chip 208 completes instantaneous/accumulated flow calculation, the button 206 performs menu operation and the display module 102 performs control header display and multivariable two-wire (4-20 mA + HART) output, wherein the instantaneous/accumulated flow is calculated by adopting the existing algorithm. In addition, the CPU with low power consumption and the isolation circuit with patents are used, so that the power supply efficiency is improved, and the intrinsic explosion-proof and two-wire system output are ensured.
Referring to fig. 1 and 2, in one embodiment, the multivariable gas mass flow transmitter further comprises a display module 102 and a terminal module 111. The housing 100 is formed with a display cavity 101 and a wiring cavity 110 opposite to each other, the display module 102 is disposed in the display cavity 101, and the terminal module 111 is disposed in the wiring cavity 110.
In the present embodiment, the display module 102 is disposed in the display cavity 101. The calculation program is installed in a background server, and is used for collecting and inputting pipeline information (such as inner diameter, wall thickness and material), medium information (such as medium name, standard condition density and density condition) and process parameters (such as design temperature/pressure and full range) by utilizing an APP operation interface of the mobile phone, submitting the information to the server, calculating and displaying a flow coefficient generated by the algorithm, including all the information, so that a user only inputs one main parameter into the instrument, and field debugging is basically finished. This process can also be pre-set to the meter before the product leaves the factory if the installed piping and parameters are determined. In addition, the shell 100 adopts a double-cavity transmitter structure, and is of an integrated structure, so that the wiring is convenient.
Referring to fig. 2, in an embodiment, the connection terminal module 111 includes a two-wire interface 109 and an external temperature interface 108, and the two-wire interface 109 is used for analog output, power supply and communication.
In this embodiment, two wires of the two-wire system interface 109 are power supplies, and are also analog signals (4 to 20mA) output of instantaneous flow, and are also HART multivariable digital signal output (three functions in one), and the external temperature interface 108 is used for directly connecting a nearby medium temperature sensor (for example, a thermal resistor inserted in a pipeline) through an external terminal.
Referring to fig. 1, 2 and 3, in an embodiment, a connection cavity 107 is further formed inside the housing 100, the connection cavity 107 is located below the display cavity 101 and the wiring cavity 110, and the MEMS differential pressure sensor 201, the MEMS pressure sensor 202 and the main board 205 are all disposed in the connection cavity 107.
Referring to fig. 1, fig. 2 and fig. 3, in an embodiment, the multivariable gas mass flow transmitter includes a pressure pipe 103, a cavity 104 is further formed inside the housing 100, the cavity 104 is communicated with the connection cavity 107, the pressure pipe 103 is disposed inside the cavity 104, and an output end of the pressure pipe 103 faces a MEMS differential pressure sensor 201 and a MEMS pressure sensor 202 in the connection cavity 107.
Referring to fig. 1 and 2, in one embodiment, the multivariable gas mass flow transmitter further comprises a connector for connecting the cavity 104 and the throttling device.
In this embodiment, the utility model provides a multivariable gas mass flow transmitter does not include throttling arrangement, and throttling arrangement can be various products of various producers, and their output all is differential pressure signal, conveys through two pressure channels, according to MEMS differential pressure sensor 201's power supply requirement and terminal definition, obtains the millivolt signal that corresponds with differential pressure linearity at the delivery outlet.
Referring to fig. 1 and 2, in one embodiment, the connector includes an elliptical flange 105, and the elliptical flange 105 is used to connect to a pressure tube 106 of any one of the throttling devices.
In this embodiment, the present invention provides two independent channels, i.e. positive and negative pressure pipes 106, to directly lead the positive and negative pressures generated by the throttling device to two pressure ports of the MEMS chip (the MEMS pressure sensor 202 and the MEMS differential pressure sensor 201 in this embodiment).
Referring to fig. 1 and 2, in one embodiment, the connector further comprises a drum connector 112, and the elliptical flange 105 is connected to the cavity 104 via the drum connector 112.
In this embodiment, the connecting element comprises an oblong flange 105 and a drum connector 112, the oblong flange 105 being used for connecting a pressure guiding tube 106 of the throttling device, and the oblong flange 105 being connected to the mould cavity 104 via the drum connector 112. Specifically, the utility model discloses a two independent passageways are positive and negative respectively and draw pressure pipe 106, will be directly drawn to two pressure ports of MEMS chip (MEMS pressure sensor 202 and MEMS differential pressure sensor 201 in this embodiment) by the positive and negative pressure that throttling arrangement produced. Wherein, the utility model provides a multivariable gas mass flow transmitter does not include throttling arrangement, and throttling arrangement can be various products of various producers, and their output all is differential pressure signal, conveys through two pressure channel, according to MEMS differential pressure sensor 201's power supply requirement and terminal definition, obtains the millivolt signal that corresponds with the differential pressure linearity at the delivery outlet.
Referring to fig. 3, in one embodiment, the multivariable gas mass flow transmitter further comprises two lines for transmitter output, the two lines being electrically connected to the motherboard 205 and configured to output a 4-20 mA analog signal and a full digital signal, wherein the analog signal comprises instantaneous flow, cumulative flow, differential pressure, temperature, instrument temperature, and percentage of flow.
Digital signals (pipeline differential pressure/temperature/pressure/internal temperature/mass flow/accumulated flow of an electronic cavity) HART are superposed in analog signals 4-20 mA, and the total two lines are a power supply power line, a 4-20 mA analog output line and a HART communication line, contain digital values of various multivariable signals in HART and are output to a HART interface of an upper computer system.
In the embodiment, the function of the similar foreign products can be achieved no matter the meter head display or the HART bus output, and the instantaneous flow, the accumulated flow, the differential pressure, the temperature, the internal temperature of the instrument, the flow percentage and the like can be displayed and (bus) output in real time.
The embodiment of the utility model provides a differential pressure type gas mass flowmeter is still provided, including the throttling arrangement who is arranged in the pipeline that awaits measuring to produce differential pressure and the multivariable gas mass flow transmitter based on the MEMS chip in the above-mentioned arbitrary one embodiment.
In one embodiment, the restriction comprises an orifice restriction, a nozzle restriction, a venturi restriction, a V-cone restriction, a bent pipe restriction, a wedge restriction, or a bayonette restriction.
The throttling device comprises dozens of types, namely primary elements, and is used for generating differential pressure, and the multivariable gas mass flow transmitter based on the MEMS chip can be connected with any throttling device through a standard elliptical flange.
Of course, the throttling device in the present embodiment is not limited to the above listed types of throttling devices, and may also be other types of throttling devices, and is not limited in particular here.
The foregoing is a preferred embodiment of the present invention, and it should be noted that, for those skilled in the art, a plurality of improvements and decorations can be made without departing from the principle of the present invention, and these improvements and decorations are also considered as the protection scope of the present invention.
Claims (12)
1. A multivariable gas mass flow transmitter based on an MEMS chip is characterized by being used for being connected with any throttling device and an external temperature sensor, wherein the external temperature sensor is used for acquiring a temperature signal of a pipeline through a thermal resistor inserted in a medium in the pipeline;
the multivariable gas mass flow transmitter includes: the MEMS differential pressure sensor, the MEMS pressure sensor, the main board and the sensor board are arranged in the shell;
the MEMS differential pressure sensor is used for acquiring a differential pressure signal of the throttling device;
the MEMS pressure sensor is used for acquiring a pressure signal of a medium in the pipeline and an environment temperature signal of the position of the medium;
the MEMS differential pressure sensor, the MEMS pressure sensor and the external temperature sensor are respectively electrically connected with the sensor board, and the main board is electrically connected with the sensor board.
2. The MEMS chip based multivariable gas mass flow transmitter of claim 1 wherein a second CPU chip is provided on the motherboard and a first CPU chip is provided on the sensor board;
the first CPU chip is used for collecting the differential pressure, pressure and temperature signals and carrying out filtering and linear interpolation processing;
and the second CPU chip is used for calculating mass flow according to the acquired signals, displaying the multivariable signals through an LCD screen and outputting the multivariable signals in a HART bus mode, and outputting the calculated instantaneous mass flow of the gas through 4-20 mA.
3. The MEMS chip-based multivariable gas mass flow transmitter of claim 2, further comprising a display module and a terminal module;
the display module is arranged in the display cavity and used for displaying multivariate parameters and menu input;
the wiring terminal module is arranged in the wiring cavity, and the main board is electrically connected with the display module and the wiring terminal module respectively.
4. The MEMS chip-based multivariable gas mass flow transmitter of claim 3, wherein the terminal module comprises a two-wire interface for analog output, power supply and communication and an external temperature interface.
5. The MEMS chip based multivariable gas mass flow transmitter of claim 3, wherein a connection cavity is further formed inside the housing, the connection cavity is located below the display cavity and the wiring cavity, and the MEMS differential pressure sensor, the MEMS pressure sensor and the main board are all disposed in the connection cavity.
6. The MEMS chip based multivariable gas mass flow transmitter according to claim 5, further comprising a pressure pipe, wherein a cavity is formed inside the housing, the cavity is communicated with the connection cavity, the pressure pipe is inserted inside the cavity, and an output end of the pressure pipe faces the MEMS differential pressure sensor and the MEMS pressure sensor inside the connection cavity.
7. A MEMS chip based multivariable gas mass flow transmitter of claim 6 further comprising a connector for connecting the cavity with any of the flow restrictions.
8. A MEMS chip based multivariable gas mass flow transmitter of claim 7 wherein the connector comprises an elliptical flange for connecting to a pressure lead tube of any of the throttling devices.
9. The MEMS chip-based multivariable gas mass flow transmitter of claim 8, wherein the connector further comprises a drum connector through which the elliptical flange is connected with the cavity.
10. The MEMS chip-based multivariable gas mass flow transmitter of claim 8, further comprising two wires for transmitter output, the two wires being electrically connected to the motherboard and configured to output a 4-20 mA analog signal and a full digital signal, wherein the analog signal comprises instantaneous flow, cumulative flow, differential pressure, temperature, instrument temperature, and a percentage of flow.
11. A differential pressure gas mass flow meter, comprising:
the throttling device is used for generating differential pressure in the pipeline to be measured; and
a MEMS chip based multivariable gas mass flow transmitter as claimed in any one of claims 1 to 10.
12. A differential pressure gas mass flowmeter as claimed in claim 11 wherein said restriction comprises an orifice plate restriction, a nozzle restriction, a venturi restriction, a V-cone restriction, an elbow restriction, a wedge restriction or a bayonette restriction.
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| CN202022214876.XU CN213239057U (en) | 2020-09-30 | 2020-09-30 | Multivariable gas mass flow transmitter based on MEMS chip and flowmeter |
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| CN202022214876.XU CN213239057U (en) | 2020-09-30 | 2020-09-30 | Multivariable gas mass flow transmitter based on MEMS chip and flowmeter |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN117647350A (en) * | 2024-01-30 | 2024-03-05 | 无锡华阳科技有限公司 | Pressure sensor |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN117647350A (en) * | 2024-01-30 | 2024-03-05 | 无锡华阳科技有限公司 | Pressure sensor |
| CN117647350B (en) * | 2024-01-30 | 2024-03-29 | 无锡华阳科技有限公司 | Pressure sensor |
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