CN202141553U - A sensing element for pressure measuring and a capacitive pressure sensor having the sensing element for pressure measuring - Google Patents

A sensing element for pressure measuring and a capacitive pressure sensor having the sensing element for pressure measuring Download PDF

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Publication number
CN202141553U
CN202141553U CN201120153854U CN201120153854U CN202141553U CN 202141553 U CN202141553 U CN 202141553U CN 201120153854 U CN201120153854 U CN 201120153854U CN 201120153854 U CN201120153854 U CN 201120153854U CN 202141553 U CN202141553 U CN 202141553U
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CN
China
Prior art keywords
pressure
measuring
shell
sensing
measuring chamber
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Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN201120153854U
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Chinese (zh)
Inventor
顾延
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
SHANGHAI YIYI AUTOMATION EQUIPMENT CO LTD
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SHANGHAI YIYI AUTOMATION EQUIPMENT CO LTD
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Priority to CN201120153854U priority Critical patent/CN202141553U/en
Application granted granted Critical
Publication of CN202141553U publication Critical patent/CN202141553U/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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Abstract

The utility model provides a sensing element for pressure measuring and a capacitive pressure sensor having the sensing element for pressure measuring. The sensing element for pressure measuring includes an outer shell, a measuring chamber disposed in the outer shell, a measuring diaphragm arranged in the measuring chamber, and an insulator disposed between the outer shell and the measuring chamber to separate the outer shell and the measuring chamber. In the utility model, the core measuring chamber is composed of the measuring diaphragm, leads, two capacitor plates and a rigid insulator. The core measuring chamber and the metal outer shell are separated by the insulator made of insulation materials. Experiments prove that the anti-interference capability of the sensing element for pressure measuring is improved. Thus, the correctness of measuring data of the capacitive pressure sensor is improved.

Description

Pressure measurement sensitive element and have the capacitance pressure transducer, of this element
Technical field
The utility model relates to pressure unit, specifically, relates to the pressure measurement sensitive element and has the capacitance pressure transducer, of this element.
Background technology
The function of pressure unit in general sense is physical pressure parameters such as gas that the pressure measurement sensitive element is experienced, the liquid electric signal that is transformed into standard (like 4~20mADC etc.), and secondary instruments such as indicator alarm, registering instrument, regulator are measured to supply with, indication and process are regulated.
Pressure unit is divided into capacitance pressure transmitter by sensor type, diffused silicon pressure transmitter, ceramic condenser pressure unit, ceramic piezoresistive pressure transmitter, sapphire pressure unit etc.Capacitance pressure transducer, wherein is used for converting ambient pressure variable signal (for example liquid medium pressure or pressure change) into the capacitance variations value; Has comparatively general application scenario, for example the measurement of differential pressure, flow, gauge pressure, absolute pressure, vacuum tightness, liquid level and proportion.
As shown in Figure 1, capacitance pressure transducer, is mainly formed by the pressure measurement sensitive element of realizing pressure/electric capacity conversion with the electronic circuit board that electric capacity converts two-wire system 4~20mA direct-flow output signal to.
The key element that existing pressure measurement sensitive element is a capacitance pressure transducer, is as shown in Figure 2; Its major function is that the changing value with pressure or pressure changes into initial electrical signal, comprises welded seal 1, lead-in wire 2, measuring diaphragm 3, isolation diaphragm 4, rigid insulation spare 5, capacitor plate 6.Be filled with silicone oil or fluorocarbon oil filling liquid 31 in the measuring diaphragm 3.Measuring diaphragm 3 is formed two capacitors respectively with the electrode on the both sides rigid insulation body 5.Measuring diaphragm 3 mediated when pressure reduction was zero in both sides, and the electric capacity of two capacitors equates.When pressure at both sides changed, measuring diaphragm 3 produced displacement, and electric capacity changes, thereby can measure the variation of electric signal.Electric signal is drawn by lead-in wire 2.
After pressure process is applied to isolation diaphragm 4 from the one or both sides of measuring room, reach through silicone oil filling liquid 31 on the measuring diaphragm 3 at center, measuring diaphragm 3 is flat diaphragms of an edge tensioning; Under the effect of pressure; Produce corresponding displacement (the most approximately 0.1mm), this displacement promptly forms differential capacitor and changes, and through demodulation, vibration and the amplification of electronic circuit board; Convert 4~20mA direct-flow output signal of two-wire system to, output current is directly proportional with the size of pressure process.
Generally speaking, the pressure signal that the pressure measurement sensitive element records converts the direct current signal that is directly proportional with pressure to through vibration and demodulation link, and A/D converter becomes digital signal with this current conversion, and its value is used for judging the input pressure value by microprocessor.The work of microprocessor control transmitter.In addition, it also carries out computings such as sensing linearization, replacement measurement range, work unit's conversion, damping, evolution, sensor fine setting, and diagnosis and digital communication.D/A converter converts microprocessor digital signal that come and calibrated mistake 4~20mA simulating signal into and delivers to output loop.EEPROM preserves all configurations, characterization and digital trimming data, and these data can be revised with transmitter software.Even data-storing in EEPROM, cut off the power supply also preserve complete.Digital line is that transmitter provides a connecting interface with the external unit control system of agreement (adopt HART).This wireline inspection is superimposed upon the digital signal on 4~20mA signal, and transmits information needed through the loop.
The measuring diaphragm of the pressure measurement sensitive element of above-mentioned widely used capacitance pressure transducer, and metal shell conducting, anti-interference is not strong, causes measurement data inaccurate easily.
The utility model content
The capacitance pressure transducer, that the utility model technical matters to be solved is that a kind of pressure measurement sensitive element is provided and has this element, not strong to overcome present capacitance pressure transducer, anti-interference, cause the inaccurate technical matters of measurement data easily.
In order to achieve the above object, the utility model adopts following technical scheme:
A kind of pressure measurement sensitive element comprises: shell body; Be located at the measuring chamber in the said shell body; Be placed in the measuring diaphragm in the said measuring chamber; And be located at the insulator of isolating said shell body and measuring chamber between said shell body and the said measuring chamber fully.
This pressure measurement sensitive element also comprises being located at and extends the lead-in wire outside the shell body from measuring diaphragm in the said measuring chamber.
Be filled with silicone oil or fluorocarbon oil filling liquid in the said measuring diaphragm.
Said shell body is provided with welded seal.
Correspondingly, the utility model also provides a kind of capacitance pressure transducer, that has above-mentioned pressure measurement sensitive element.
Adopt the pressure measurement sensitive element of said structure and have the capacitance pressure transducer, of this element; Insulator with insulating material is processed will be isolated by core measuring chamber and metal shell body that measuring diaphragm, lead-in wire, two capacitor plates, rigid insulation body are formed; Through evidence; Strengthen the antijamming capability of pressure measurement sensitive element, thereby improved the accuracy of capacitance pressure transducer, measurement data.
Description of drawings
Fig. 1 is the structural representation of capacitance pressure transducer;
Fig. 2 is the pressure measurement sensitive element structure figure in the existing capacitance pressure transducer;
Fig. 3 is the interior pressure measurement sensitive element structure figure of capacitance pressure transducer, of the utility model.
Embodiment
Describe the utility model in detail below in conjunction with accompanying drawing and embodiment.
As shown in Figure 3, a kind of pressure measurement sensitive element of the utility model comprises: welded seal 1, lead-in wire 2, measuring diaphragm 3, isolation diaphragm 4, rigid insulation spare 5, capacitor plate 6, insulator 7, shell body 8 and measuring chamber 9.
Measuring chamber 9 is located at the center in the said shell body 8, constitutes the core of pressure measurement sensitive element.Measuring diaphragm 3, capacitor plate 6, lead-in wire 2, rigid insulation spare 5 all are arranged in the said measuring chamber 9.Insulator 7 is located at and is isolated said shell body 8 and measuring chamber 9 between said shell body 8 and the said measuring chamber 9 fully, just the measuring diaphragm 3 in the measuring chamber 9, capacitor plate 6, lead-in wire 2, rigid insulation spare 5 is kept apart with shell body 8.Lead-in wire 2 is located in the said measuring chamber 9 and from measuring diaphragm 3 and is extended outside the shell body 8.Be filled with silicone oil or fluorocarbon oil filling liquid 31 in the said measuring diaphragm 3.Said shell body 8 is provided with welded seal 1.
Measuring diaphragm 3 is formed two capacitors respectively with the electrode on the both sides rigid insulation body 5.Measuring diaphragm 3 mediated when pressure reduction was zero in both sides, and the electric capacity of two capacitors equates.When pressure at both sides changed, measuring diaphragm 3 produced displacement, and electric capacity changes, thereby can measure the variation of electric signal.Electric signal is drawn by lead-in wire 2.
Correspondingly, the utility model also provides a kind of capacitance pressure transducer,, mainly forms by the above-mentioned pressure measurement sensitive element of realizing pressure/electric capacity conversion with the existing electronic circuit board that electric capacity converts two-wire system 4~20mA direct-flow output signal to.
The description of above embodiment mainly is for ultimate principle that the utility model is described and principal character.The utility model is not limited to the description scope of the foregoing description, in the scope of the utility model appended claims, can make variously replenish, change and replacing.

Claims (5)

1. a pressure measurement sensitive element is characterized in that, comprising:
Shell body;
Be located at the measuring chamber in the said shell body;
Be placed in the measuring diaphragm in the said measuring chamber; With
Be located at the insulator of isolating said shell body and measuring chamber between said shell body and the said measuring chamber fully.
2. pressure measurement sensitive element as claimed in claim 1 is characterized in that, this pressure measurement sensitive element also comprises being located at and extends the lead-in wire outside the shell body from measuring diaphragm in the said measuring chamber.
3. pressure measurement sensitive element as claimed in claim 1 is characterized in that, is filled with silicone oil or fluorocarbon oil filling liquid in the said measuring diaphragm.
4. pressure measurement sensitive element as claimed in claim 1 is characterized in that said shell body is provided with welded seal.
5. capacitance pressure transducer, that has like the described pressure measurement sensitive element of arbitrary claim in the claim 1 to 4.
CN201120153854U 2011-05-13 2011-05-13 A sensing element for pressure measuring and a capacitive pressure sensor having the sensing element for pressure measuring Expired - Fee Related CN202141553U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201120153854U CN202141553U (en) 2011-05-13 2011-05-13 A sensing element for pressure measuring and a capacitive pressure sensor having the sensing element for pressure measuring

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201120153854U CN202141553U (en) 2011-05-13 2011-05-13 A sensing element for pressure measuring and a capacitive pressure sensor having the sensing element for pressure measuring

Publications (1)

Publication Number Publication Date
CN202141553U true CN202141553U (en) 2012-02-08

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CN201120153854U Expired - Fee Related CN202141553U (en) 2011-05-13 2011-05-13 A sensing element for pressure measuring and a capacitive pressure sensor having the sensing element for pressure measuring

Country Status (1)

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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102635989A (en) * 2012-03-22 2012-08-15 奇瑞汽车股份有限公司 Automobile air conditioner protection system and control method for same
CN105865683A (en) * 2015-01-23 2016-08-17 航天长征火箭技术有限公司 Grain bin pressure sensing system and grain bin reserve online monitoring and early warning system
CN107976279A (en) * 2017-12-15 2018-05-01 北京创昱科技有限公司 A kind of vacuum measuring device

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102635989A (en) * 2012-03-22 2012-08-15 奇瑞汽车股份有限公司 Automobile air conditioner protection system and control method for same
CN105865683A (en) * 2015-01-23 2016-08-17 航天长征火箭技术有限公司 Grain bin pressure sensing system and grain bin reserve online monitoring and early warning system
CN107976279A (en) * 2017-12-15 2018-05-01 北京创昱科技有限公司 A kind of vacuum measuring device
WO2019114243A1 (en) * 2017-12-15 2019-06-20 北京创昱科技有限公司 Vacuum testing device

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C14 Grant of patent or utility model
GR01 Patent grant
C17 Cessation of patent right
CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20120208

Termination date: 20130513