CN213140577U - Conveying device of semiconductor cleaning equipment - Google Patents

Abstract

The utility model provides a transmission device of semiconductor cleaning equipment, which comprises a transmission device of the semiconductor cleaning equipment and is used for transmitting a container which can contain a piece to be cleaned between a cleaning tank and a container shelf, and comprises a main body frame, a mechanical arm, a driving source and a power transmission mechanism, and is characterized in that two end parts of the mechanical arm are respectively connected with the left side and the right side of the main body frame; the left side and the right side of the main body frame are respectively provided with a power transmission mechanism, and the power transmission mechanisms are connected with the end parts positioned on the same side; the driving source is arranged on the main body frame and is connected with the power transmission mechanism; the power transmission mechanism is used for transmitting power output by the driving source to the mechanical arm so as to drive the mechanical arm to move up and down along the main body frame in the vertical direction. Use the utility model discloses, can avoid the arm to take place the skew at horizontal position, also can avoid container spare to cause transmission error because the arm downward sloping when transmitting on the arm.

Description

Conveying device of semiconductor cleaning equipment

Technical Field

The utility model relates to a semiconductor technology field specifically, relates to a semiconductor cleaning equipment's transmission device.

Background

With the rapid development of the semiconductor industry, customers tend to produce devices stably and reliably, and the production capacity of the devices is more and more significant for device suppliers.

For example, a cleaning apparatus for cleaning a wafer often has a mechanical transmission mechanism for transmitting the wafer, and a mechanical arm of the transmission mechanism is mostly suspended at a fixed end, so that during transmission, the mechanical arm may be tilted downward due to a single-side stress, which results in an inaccurate transmission position; or splinters, fragments, etc. caused by resonance of the wafer when the end of the mechanical arm moves rapidly during the transportation process.

SUMMERY OF THE UTILITY MODEL

The utility model discloses aim at solving one of the technical problem that exists among the prior art at least, provide a semiconductor cleaning equipment's transmission device to avoid the arm to take place the skew at horizontal position.

In order to realize the purpose of the utility model, the utility model provides a transmission device of semiconductor cleaning equipment, which is used for transmitting a container capable of containing a piece to be cleaned between a cleaning tank and a container shelf, and comprises a main body frame, a mechanical arm, a driving source and a power transmission mechanism, and is characterized in that two end parts of the mechanical arm are respectively connected with the left side and the right side of the main body frame; the left side and the right side of the main body frame are respectively provided with a power transmission mechanism, and the power transmission mechanisms are connected with the end parts positioned on the same side; the driving source is arranged on the main body frame and is connected with the power transmission mechanism; the power transmission mechanism is used for transmitting power output by the driving source to the mechanical arm so as to drive the mechanical arm to move up and down in the vertical direction along the main body frame.

Optionally, the power transmission mechanism includes a transmission assembly and a balance bar structure, the transmission assembly is disposed on the main body frame and is respectively connected with the driving source and the balance bar structure; the balance bar structure is connected with the mechanical arm.

Optionally, the transmission assembly comprises a gear lever, at least one first synchronous pulley, at least one second synchronous pulley, and a first synchronous belt;

the first synchronous belt pulley is fixedly arranged at the upper part of the main body frame, the second synchronous belt pulley is arranged at the bottom of the main body frame, and the first synchronous belt is arranged on the first synchronous belt pulley and the second synchronous belt pulley to form a closed loop; the first synchronous belt is connected with the balance bar structure;

the gear rod is fixedly arranged on the upper portion of the main body frame and used for transmitting power output by the driving source to the first synchronous belt wheel, the second synchronous belt wheel and the first synchronous belt, so that the synchronous belt drives the balance rod structure to move up and down in the vertical direction.

Optionally, the transmission assembly further comprises a fixing block for fixedly connecting the synchronous belt to the balance bar structure.

Optionally, the transmission device further comprises a weight member, the weight member is connected with the balance bar mechanism through a transmission structure, and the weight member is used for balancing stress of the end portion of the mechanical arm.

Optionally, the transmission structure includes second hold-in range and third synchronous pulley, the third synchronous pulley is fixed to be set up main body frame's upper end, the second hold-in range is installed on the third synchronous pulley, and both ends respectively with the counterweight with the balancing pole mechanism is connected.

Optionally, the left and right sides on the main body frame are provided with vertical guide rails, and the mechanical arm is connected with the guide rails in a sliding manner.

Optionally, a slide block is arranged on the guide rail, and the mechanical arm is connected with the guide rail through the slide block.

Optionally, the mechanical arm is in a bar shape, and a linear guide rail is arranged along the length direction of the mechanical arm.

Optionally, the driving source includes a rotary motor connected to the gear lever to drive the gear lever to rotate about a central axis thereof.

The utility model discloses following beneficial effect has:

the utility model provides a semiconductor cleaning equipment's transmission device, equal fixedly connected with power transmission mechanism in the both ends of arm, power transmission mechanism at both ends can drive the arm motion simultaneously, make the both ends of arm reciprocate simultaneously, can realize the horizontal lift of arm, so can avoid the arm to take place the skew at horizontal position, also can avoid container spare to cause the transmission error because the arm downward sloping when transmitting on the arm, consequently, the transmission speed of arm can promote by a wide margin (need not to be steadily and slowly go up and down in purpose to transmit), the arm horizontal direction can not form resonance because container spare quick travel simultaneously, make whole transmission process more steady.

Drawings

Fig. 1 is a schematic front view of a conveying device of a semiconductor cleaning apparatus according to an embodiment of the present disclosure;

fig. 2 is a schematic diagram of a side view structure of a transfer device of a semiconductor cleaning apparatus according to an embodiment of the present application.

Detailed Description

Reference will now be made in detail to the present application, examples of which are illustrated in the accompanying drawings, wherein like reference numerals refer to the same or similar parts or parts having the same or similar functions throughout. In addition, if a detailed description of the known art is not necessary for illustrating the features of the present application, it is omitted. The embodiments described below with reference to the drawings are exemplary only for the purpose of explaining the present application and are not to be construed as limiting the present application.

It will be understood by those within the art that, unless otherwise defined, all terms (including technical and scientific terms) used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this application belongs. It will be further understood that terms, such as those defined in commonly used dictionaries, should be interpreted as having a meaning that is consistent with their meaning in the context of the prior art and will not be interpreted in an idealized or overly formal sense unless expressly so defined herein.

As used herein, the singular forms "a", "an", "the" and "the" are intended to include the plural forms as well, unless the context clearly indicates otherwise. It will be further understood that the terms "comprises" and/or "comprising," when used in this specification, specify the presence of stated features, integers, operations, elements, and/or components, but do not preclude the presence or addition of one or more other features, integers, operations, elements, components, and/or groups thereof. It will be understood that when an element is referred to as being "connected" or "coupled" to another element, it can be directly connected or coupled to the other element or intervening elements may also be present. Further, "connected" or "coupled" as used herein may include wirelessly connected or wirelessly coupled. As used herein, the term "and/or" includes all or any element and all combinations of one or more of the associated listed items.

The following describes the technical solutions of the present application and how to solve the above technical problems with specific embodiments.

Referring to fig. 1 and 2 together, there are provided a schematic diagram of a front view structure and a schematic diagram of a side view structure of a transfer device of a semiconductor cleaning apparatus for transferring a container capable of containing a member to be cleaned between a cleaning tank and a container rack according to an embodiment of the present application, the transfer device including a main body frame 60, a robot arm 10, a driving source 50, and a power transmission mechanism. Two ends of the robot arm 10 are connected to the left and right sides of the main body frame 60, respectively; the left side and the right side of the main body frame 60 are respectively provided with a power transmission mechanism, and the power transmission mechanisms are connected with the end parts positioned on the same side; the driving source 50 is provided on the main body frame 60, and is connected with the power transmission mechanism; the power transmission mechanism is used for transmitting the power output by the driving source 50 to the mechanical arm 10 so as to drive the mechanical arm 10 to move up and down in the vertical direction along the main body frame 60.

As shown in fig. 1 and 2, the robot arm 10 may be, but not limited to, horizontally suspended, and then the robot arm 10 may be driven by power transmission mechanisms at two ends of the robot arm to perform a lifting motion, and during the lifting motion of the robot arm 10, a robot (not shown) thereof may transfer a container member (which may also be an empty container member without a wafer) containing a wafer between the cleaning tank and the container shelf. It is understood that the two sets of power transmission mechanisms at the two ends of the mechanical arm 10 may be identical or slightly different, as long as both can drive the mechanical arm 10 to perform lifting motion.

According to the transmission device of the semiconductor cleaning equipment, the power transmission mechanisms are fixedly connected to the two ends of the mechanical arm 10, the power transmission mechanisms at the two ends can drive the mechanical arm 10 to move simultaneously, the two ends of the mechanical arm 10 move up and down simultaneously, horizontal lifting of the mechanical arm 10 can be achieved, the mechanical arm 10 can be prevented from being deviated in the horizontal position, transmission errors caused by downward inclination of the mechanical arm 10 when container parts are transmitted on the mechanical arm 10 can also be avoided, therefore, the transmission speed of the mechanical arm 10 can be greatly increased (special slow lifting for stable transmission is not needed), resonance cannot be formed in the horizontal direction of the mechanical arm 10 due to quick movement of the container parts, and the whole transmission process is more stable.

It should be noted that the present embodiment does not limit the specific structures and materials of the robot arm 10, the driving source, and the power transmission mechanism, as long as the robot arm 10 can horizontally lift and lower by their combined action.

In one embodiment, the power transmission mechanism may include a transmission assembly 30 and a balance bar structure 20, wherein the transmission assembly 30 may be disposed on the main body frame 60 and connected to the driving source and the balance bar structure 20, respectively; the balance bar structure 20 is connected to the robot arm 10. The driving source can be connected with the balance bar structure 20 through the transmission assembly 30, so as to drive the balance bar structure 20 to perform lifting motion; the balance bar structure 20 can drive the mechanical arm 10 to make lifting movement, thereby realizing the horizontal transmission of the power transmission mechanism to the mechanical arm 10.

Further, the transmission assembly 30 may include a gear lever 40, at least one first synchronous pulley 31a, at least one second synchronous pulley 31b, and a first synchronous belt 32. The first timing pulley 31a may be fixedly disposed at an upper portion of the main body frame 60, and the second timing pulley 31b may be disposed at a bottom portion of the main body frame 60. The first timing belt 32 may be installed on the first timing pulley 31a and the second timing pulley 31b to form a closed loop, and the first timing belt 32 may be connected with the stabilizer bar structure 20. The gear lever 40 may be fixedly provided at an upper portion of the main body frame 60 for transmitting power output from the driving source to the first timing pulley 31a, the second timing pulley 31b and the first timing belt 32, so that the first timing belt 32 drives the stabilizer bar structure 20 to move up and down in the vertical direction.

In the present embodiment, as shown in fig. 2, the first timing pulley 31a and the second timing pulley 31b are fixed to the upper end and the lower end of the frame 60, respectively, such that the first timing belt 32 forms a closed loop, and the first timing belt 32 may be connected to the stabilizer bar structure 20 to actuate the robot arm 10 to perform a lifting motion during rotation. In this way, the balance bar structure 20 and the mechanical arm 10 can be driven to move by the arrangement of the first synchronous belt pulley 31a, the second synchronous belt pulley 31b and the first synchronous belt 32, so that the transmission function of the transmission assembly 30 is realized. And the first synchronous belt pulley 31a and the second synchronous belt pulley 31b are fixedly arranged, and the rotating track of the first synchronous belt 32 around the first synchronous belt pulley 31a and the second synchronous belt pulley 31b is stable and unchanged, so that the transmission process of the transmission assembly 30 is stable and reliable, the transmission stability of the transmission device is further enhanced, and the container parts are prevented from generating deviation, resonance and the like in the transmission process.

Specifically, the power transmission mechanisms at the two ends may be respectively provided with a gear lever 40, or may share one gear lever 40, and accordingly, the gear lever 40 may be respectively connected to the first synchronous pulleys 31a at the two ends, and the gear lever 40 rotates around its central axis under the action of the driving source and drives the first synchronous pulley 31a, the second synchronous pulley 31b and the first synchronous belt 32 to rotate, so that the first synchronous belt 32 drives the balance bar structure 20 and the robot arm 10 to move up and down in the vertical direction. Thus, two sets of power transmission mechanisms can be simultaneously driven to move through one gear rod 40, so that the two sets of power transmission mechanisms simultaneously drive the mechanical arm 10 to perform lifting movement, and synchronous movement of two ends of the mechanical arm 10 is ensured. And the structure is simple, the operation is convenient, and the cost is lower. It should be noted that, the present embodiment is not limited to a gear rod, as long as it can realize the lifting motion of the driving balance bar structure 20 and the mechanical arm 10, for example, it may also be a smooth rod-shaped structure, and the first synchronous pulley 31a may be directly disposed on the rotating member 40.

Further, the transmission assembly 30 may further include a fixing member 33 for fixedly connecting the first timing belt 32 to the stabilizer bar structure 20. Specifically, the fixing member 33 may be fixed to the first synchronous belt 32 and connected to the balance bar structure 20, so that the first synchronous belt 32 is fixedly connected to and stably driven by the balance bar structure 20, and the first synchronous belt 32 is prevented from being directly connected to the balance bar structure 20 to deform, thereby affecting the driving effect, and even affecting the lifting of the robot arm 10.

In another embodiment, the transmission device may further include a weight 22, the weight 22 may be connected to the balance bar mechanism 20 through the transmission structure 212, and the weight 22 is used for balancing the stress of the end of the robot arm.

In this embodiment, the weight 22 may correspond to the weight of the robotic arm 10, and the transmission structure 212 may be connected to the weight 22 and the balance bar mechanism 20, respectively, while always keeping the weight 22 balanced with the lever of the robotic arm 10. Thus, the counterweight 22 and the mechanical arm 10 reach the lever balance at the two ends of the balance bar mechanism 20 by using the gravity action of the counterweight and the mechanical arm, according to the gravity action and the lever balance principle, the counterweight 22 will descend (ascend) in the ascending (descending) process of the mechanical arm 10, and the counterweight 22 descends (ascends) to promote the mechanical arm 10 to ascend (descend), so that the load borne by the driving source in the ascending (descending) process of the mechanical arm 10 can be reduced, and the assistance is provided for the ascending and descending of the mechanical arm 10. Wherein, the arrangement of the counterweight 22 can realize lever balance through the action of gravity, and the principle and the structure are simple, easy to realize and low in cost.

In the present embodiment, the specific structure and material of the weight 22 are not limited as long as the above-described counterweight action can be achieved and the load borne by the drive source can be reduced.

More specifically, the transmission structure 212 may include a second timing belt 212 and a third timing pulley 211, the third timing pulley 211 may be fixedly disposed at an upper end of the body frame 60, the second timing belt 212 may be mounted on the third timing pulley 211, and both ends thereof may be connected with the weight 22 and the balance bar mechanism 20, respectively. Therefore, the balance weight 22 and the balance rod mechanism 20 are respectively fixed at two ends of the second synchronous belt 212, and the balance rod mechanism 20 is connected with the mechanical arm 10, so that the mechanical arm 10 and the balance weight 22 can be driven to perform lifting motion while the second synchronous belt 212 moves around the third synchronous belt pulley 211, thereby specifically realizing lever balance of the mechanical arm 10 and the balance weight 22. And the third synchronous pulley 211 can be equivalent to a fixed pulley, so that the motion resistance of the second synchronous belt 212, the counterweight 22 at the two ends of the second synchronous belt and the mechanical arm 10 can be reduced, and the load borne by the driving source in the process of driving the mechanical arm 10 to ascend and descend can be further reduced.

As shown in fig. 2, two third synchronous pulleys 211 and two second synchronous belts 212 may be provided, and the two second synchronous belts 212 respectively move around the respective third synchronous pulleys 211 to simultaneously drive the mechanical arm 10 and the counterweight 22 to perform lifting movement, so as to further improve the carrying capacity of linear transmission and the stability of transmission.

It should be noted that the present embodiment is not limited to the synchronous belt and the synchronous wheel, which is only a preferred embodiment of the present embodiment, and the transmission assembly 30 may have other structures as long as the above-mentioned connection and transmission functions can be achieved. It may also be a chain and sprocket, for example.

In another embodiment, vertical guide rails may be further disposed on both left and right sides of the main body frame 60, so that the robot arm 10 may be slidably connected to the guide rails, and the robot arm 10 may move up and down along the guide rails, thereby ensuring the movement track of the robot arm 10 and the accuracy of transporting container parts. More specifically, the guide rail may be provided with a slider (of course, the slider may also be provided on the robot arm 10), the robot arm 10 is connected to the guide rail through the slider, and friction between the robot arm 10 and the guide rail on the main body frame 60 may be reduced by providing the slider, so that the up-and-down movement of the robot arm 10 is smoother, and the service life of the robot arm 10 may also be increased.

It should be noted that the structure of the guide rail and the slide block is only one embodiment of the present embodiment, and the present embodiment is not limited to this, and for example, a vertical sliding groove may be provided on the main body frame 60, and the robot arm 10 may directly slide up and down in the sliding groove. In addition, the embodiment is not limited to be vertical, and the guide rail may have a certain included angle with the vertical direction as long as the guiding of the up-and-down movement of the mechanical arm 10 is realized.

In addition, the mechanical arm can be in a bar shape, and a linear guide rail can be arranged along the length direction of the mechanical arm, so that the mechanical arm on the mechanical arm 10 can transmit the container piece along the linear guide rail, the transmission process of the container piece can be more stable and reliable, and the transmission precision of the container piece is further ensured.

Further, the driving source may include a rotary motor 50, and an output shaft of the rotary motor 50 may be connected to the gear lever 40 to drive the gear lever 40 to rotate around a central axis thereof, so as to simultaneously drive the two sets of power transmission mechanisms to move. And the structure is simple, the operation is convenient, and the cost is lower.

It should be noted that the present embodiment is not limited to the rotating electrical machine 50, as long as the function of the driving transmission assembly 30 can be achieved.

Based on the same concept of the above-mentioned conveying device of the semiconductor cleaning apparatus, this embodiment may further provide a semiconductor cleaning apparatus, which includes a cleaning chamber and a conveying device, where the conveying device is the conveying device of any of the above-mentioned embodiments, and is configured to transfer the container member capable of holding the wafer into the cleaning chamber or transfer the container member capable of holding the wafer from the cleaning chamber.

The semiconductor cleaning device provided in this embodiment includes the transmission device of the semiconductor cleaning device, so that at least the beneficial effects of the transmission device of the semiconductor cleaning device can be achieved, and details are not repeated herein.

In the description of the present application, it is to be understood that the terms "center", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", and the like indicate orientations or positional relationships based on those shown in the drawings, and are only for convenience of description and simplicity of description, and do not indicate or imply that the referenced device or element must have a particular orientation, be constructed and operated in a particular orientation, and therefore, are not to be construed as limiting the present invention.

The foregoing is only a partial embodiment of the present application, and it should be noted that, for those skilled in the art, several modifications and decorations can be made without departing from the principle of the present application, and these modifications and decorations should also be regarded as the protection scope of the present application.

Claims (10)

1. A transmission device of semiconductor cleaning equipment is used for transmitting a container capable of containing a piece to be cleaned between a cleaning tank and a container shelf, and comprises a main body frame, a mechanical arm, a driving source and a power transmission mechanism, wherein two end parts of the mechanical arm are respectively connected with the left side and the right side of the main body frame; the left side and the right side of the main body frame are respectively provided with a power transmission mechanism, and the power transmission mechanisms are connected with the end parts positioned on the same side; the driving source is arranged on the main body frame and is connected with the power transmission mechanism; the power transmission mechanism is used for transmitting power output by the driving source to the mechanical arm so as to drive the mechanical arm to move up and down in the vertical direction along the main body frame.

2. The transmission device according to claim 1, wherein the power transmission mechanism includes a transmission assembly and a balance bar structure, the transmission assembly being provided on the main body frame and connected to the drive source and the balance bar structure, respectively; the balance bar structure is connected with the mechanical arm.

3. The transmission of claim 2, wherein the transmission assembly includes a gear lever, at least one first synchronous pulley, at least one second synchronous pulley, and a first synchronous belt;

the first synchronous belt pulley is fixedly arranged at the upper part of the main body frame, the second synchronous belt pulley is arranged at the bottom of the main body frame, and the first synchronous belt is arranged on the first synchronous belt pulley and the second synchronous belt pulley to form a closed loop; the first synchronous belt is connected with the balance bar structure;

the gear rod is fixedly arranged on the upper portion of the main body frame and used for transmitting power output by the driving source to the first synchronous belt wheel, the second synchronous belt wheel and the first synchronous belt, so that the synchronous belt drives the balance rod structure to move up and down in the vertical direction.

4. The transfer device of claim 3, wherein the drive assembly further comprises a fixed block for fixedly attaching the timing belt to the balance bar structure.

5. The transfer device of claim 2 or 3, further comprising a weight member connected to the balance bar mechanism by a transfer structure, the weight member for balancing forces at the end of the robotic arm.

6. The transmission device as claimed in claim 5, wherein the transmission structure comprises a second synchronous belt and a third synchronous pulley, the third synchronous pulley is fixedly disposed at the upper end of the main body frame, the second synchronous belt is mounted on the third synchronous pulley, and two ends of the second synchronous belt are respectively connected to the counterweight and the balance bar mechanism.

7. The transfer device of claim 1, wherein vertical guide rails are provided on both left and right sides of the main body frame, and the robot arm is slidably connected to the guide rails.

8. The transfer device of claim 7, wherein the guide rail is provided with a slider, and the mechanical arm is connected with the guide rail through the slider.

9. The transfer device of claim 2, wherein the robot arm is bar-shaped and is provided with a linear guide along a length direction thereof.

10. The transmission of claim 3, wherein the drive source includes a rotary motor coupled to the gear lever to drive the gear lever about its central axis.

Images