CN213124413U - Semiconductor chip splitting machine - Google Patents
Semiconductor chip splitting machine Download PDFInfo
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- CN213124413U CN213124413U CN202022481501.XU CN202022481501U CN213124413U CN 213124413 U CN213124413 U CN 213124413U CN 202022481501 U CN202022481501 U CN 202022481501U CN 213124413 U CN213124413 U CN 213124413U
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Abstract
The utility model discloses a semiconductor chip splitter, which comprises a body and a portal frame connected with the body in a sliding way; and a roller for rolling the chip; the lifting roller frame is arranged on the portal frame and connected to the roller; the pair of adjusting devices are arranged between the portal frame and the lifting roller frame and used for adjusting the horizontal angle of the roller; the pair of adjusting devices are symmetrically arranged at two ends of the roller; a pair of distance detecting devices, which are arranged on the portal frame and respectively correspond to the two ends of the roller; the pair of distance detection devices are arranged at the same height and are used for detecting the height difference between the two end parts of the roller. The utility model discloses can improve the adjustment efficiency of roll horizontal angle, improve the adjustment precision of roll horizontal angle, realize the quick adjustment of roll horizontal angle in process of production, improve production efficiency.
Description
Technical Field
The utility model relates to a silicon chip processing technology field particularly, relates to a semiconductor chip lobe of a leaf machine.
Background
In the manufacturing process of semiconductor chips, after the die processing process is completed, it is necessary to separate the single die from the silicon wafer, and then perform subsequent processes such as soldering and packaging, which is also called "cracking", and the process is divided into two main steps:
1. scribing, namely scribing a scribing way with a certain depth on the silicon wafer according to the planned track and parameters by using a laser scribing device, wherein the scribing way is not completely scribed through the silicon wafer, preliminarily separating each core grain, and preparing for the next working step;
2. splinting, using a means to completely separate the initially separated core particles.
The prior published patent name is 'semi-automatic chip splitting machine and splitting method', and the Chinese utility model patent with the publication number of CN105590884B, the patent is provided with a rotary wafer bearing table and a movable portal frame, the rotary wafer bearing table is used for bearing a chip, the movable portal frame is provided with a roller, a cylinder and a spiral micro-detector, the cylinder drives the roller to roll the chip on the rotary wafer bearing table, the two ends of the roller are respectively provided with 1 spiral micro-detector, and the spiral micro-detector is utilized to adjust the pressing height and the horizontal angle of the roller.
However, the above patent manually adjusts the horizontal angle of the roller through the 2 spiral micro-measuring devices, and the 2 spiral micro-measuring devices need to be repeatedly rotated during adjustment to adjust the horizontal angle of the roller, so that the efficiency is low, the adjustment precision is low, the rapid adjustment of the horizontal angle of the roller cannot be realized in the production process, and the production efficiency is reduced.
SUMMERY OF THE UTILITY MODEL
The utility model aims at providing a semiconductor chip splitting machine, it designs to semiconductor chip splitting machine, can improve the adjustment efficiency of roll horizontal angle, improves the adjustment precision of roll horizontal angle, realizes the quick adjustment of roll horizontal angle in process of production, improves production efficiency.
The embodiment of the utility model discloses a realize through following technical scheme:
a semiconductor chip splitting machine comprises a machine body and a portal frame connected to the machine body in a sliding mode; and a roller for rolling the chip; the lifting roller frame is arranged on the portal frame and connected to the roller; the pair of adjusting devices are arranged between the portal frame and the lifting roller frame and used for adjusting the horizontal angle of the roller; the pair of adjusting devices are symmetrically arranged at two ends of the roller; the device also comprises a pair of distance detection devices which are arranged on the portal frame and respectively correspond to the two ends of the roller; the pair of distance detection devices are arranged at the same height and are used for detecting the height difference between the two end parts of the roller.
In an embodiment of the present invention, the adjusting device includes a fixed block and a movable adjusting block, the fixed block is disposed on the lifting roller frame, and the fixed block is disposed with a first inclined plane; the movable adjusting block is arranged on the portal frame, the movable adjusting block is provided with a second inclined plane attached to the first inclined plane, the movable adjusting block can slide along the horizontal decomposition direction of the second inclined plane, and the first inclined plane can slide along the second inclined plane.
In an embodiment of the present invention, the movable adjusting block is provided with a guide rail, and the guide rail is fixed to the portal frame.
In an embodiment of the present invention, the adjusting device further includes a horizontal ball screw fixed to the gantry and a motor connected to the horizontal ball screw; this horizontal ball is configured with screw nut, and this screw nut is fixed with this activity regulating block.
In an embodiment of the present invention, the lifting roller frame includes a roller frame main body and a pair of lifting guide mechanisms, and the roller is disposed in the roller frame main body; the pair of lifting guide mechanisms are symmetrically arranged at two ends of the roller frame main body, and the lifting guide mechanisms are connected to the portal frame.
In an embodiment of the present invention, the pair of lifting guide mechanisms includes a guide rod, a pair of linear bearings, and a connecting plate; the alignment bearing is fixed on the portal frame; the guide rod is inserted into the linear bearing, one end of the guide rod is hinged to the roller frame main body, and one end of the guide rod is connected to the connecting plate.
In an embodiment of the present invention, the fixing block is fixed to the connecting plate.
In an embodiment of the present invention, the distance detecting device includes a laser distance measuring sensor, and the laser distance measuring sensor irradiates the roller.
In an embodiment of the present invention, the fixing block is provided with a plurality of adjusting holes, and the fixing block is fixed to the lifting roller frame through the locking bolt.
The utility model discloses technical scheme has following advantage and beneficial effect at least:
the embodiment of the utility model provides a through setting up a pair of adjusting device and a pair of distance detection device, this adjusting device includes the fixed block, the movable adjusting block, the guide rail, horizontal ball and the motor of drive horizontal ball, this fixed block is fixed with the connecting plate in the lift roller frame, movable adjusting block sliding connection is in the guide rail, this movable adjusting block of horizontal ball drive slides along the guide rail, the first inclined plane of fixed block and the laminating of the second inclined plane of movable adjusting block, and the second inclined plane of the movable adjusting block in first inclined plane of fixed block slides. In production, the height at the two ends of the roller is monitored in real time by a laser ranging sensor in the distance detection device, detection data are sent to the controller, after the controller calculates the height difference at the two ends of the roller, the controller respectively controls the motors in the pair of adjusting devices to rotate, the movable adjusting block is driven to move by the horizontal ball screw, the height of the connecting plate is adjusted by the inclined plane matching, as the connecting plate passes through the guide rod, the roller frame main body is connected with the roller, the height at the two ends of the roller is further adjusted, and the purpose of adjusting the horizontal angle of the roller is achieved.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings that are required to be used in the embodiments will be briefly described below, it should be understood that the following drawings only illustrate some embodiments of the present invention, and therefore should not be considered as limiting the scope, and for those skilled in the art, other related drawings can be obtained according to the drawings without inventive efforts.
Fig. 1 is a schematic structural view of the present invention;
fig. 2 is a schematic structural view of the adjusting device and the distance detecting device of the present invention;
FIG. 3 is a partial schematic view of FIG. 2;
fig. 4 is a left side view of fig. 2.
Icon: 1-machine body, 2-portal frame, 3-roller, 41-fixed block, 411-adjusting hole, 42-movable adjusting block, 43-guide rail, 44-horizontal ball screw, 45-motor, 46-screw nut, 51-roller frame main body, 52-lifting guide mechanism, 521-guide rod, 522-linear bearing, 523-connecting plate, 6-laser ranging sensor and 7-driving element.
Detailed Description
In order to make the objects, technical solutions and advantages of the embodiments of the present invention clearer, the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are some, but not all, embodiments of the present invention. The components of embodiments of the present invention, as generally described and illustrated in the figures herein, may be arranged and designed in a wide variety of different configurations.
Thus, the following detailed description of the embodiments of the present invention, presented in the accompanying drawings, is not intended to limit the scope of the invention, as claimed, but is merely representative of selected embodiments of the invention. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative efforts belong to the protection scope of the present invention.
It should be noted that: like reference numbers and letters refer to like items in the following figures, and thus, once an item is defined in one figure, it need not be further defined and explained in subsequent figures.
In the description of the present invention, it should be noted that if the directions or positional relationships indicated by the terms "inside" and "outside" are based on the directions or positional relationships shown in the drawings, or the directions or positional relationships that the products of the present invention are usually placed when used, the description is only for convenience of description and simplification, but the indication or suggestion that the indicated device or element must have a specific direction, be constructed and operated in a specific direction, and therefore, should not be interpreted as a limitation of the present invention.
In the description of the present invention, it should be further noted that unless otherwise explicitly stated or limited, the terms "disposed," "mounted," "configured," and "connected" should be interpreted broadly, and may be, for example, fixedly connected, detachably connected, or integrally connected; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meaning of the above terms in the present invention can be understood in specific cases to those skilled in the art.
Referring to fig. 1 to 4, a semiconductor chip splitting machine includes a machine body 1 and a gantry 2 slidably connected to the machine body 1; and a roller 3 for rolling the chip; the lifting roller frame is arranged on the portal frame 2 and connected to the roller 3; the device also comprises a pair of adjusting devices which are arranged between the portal frame 2 and the lifting roller frame and used for adjusting the horizontal angle of the roller 3; the pair of adjusting devices are symmetrically arranged at two ends of the roller 3; the device also comprises a pair of distance detection devices which are arranged on the portal frame 2 and respectively correspond to the two ends of the roller 3; the pair of distance detecting means for detecting a height difference between both end portions of the roll 3 are provided at the same height.
In order to improve the adjustment efficiency of the horizontal angle of the roller 3 and improve the adjustment precision of the horizontal angle of the roller 3, the rapid adjustment of the horizontal angle of the roller 3 is realized in the production process, and the production efficiency is improved, the technical scheme is provided with the semiconductor chip splitting machine comprising a pair of adjusting devices and a pair of distance detecting devices. The elevating roller frame comprises a roller frame main body 51 and a pair of elevating guide mechanisms 52, and the roller 3 is arranged on the roller frame main body 51; the pair of elevation guide mechanisms 52 are symmetrically disposed at both ends of the roller frame body 51, and the elevation guide mechanisms 52 are connected to the gantry 2. The pair of lifting guide mechanisms 52 comprises a guide rod 521, a pair of linear bearings 522 and a connecting plate 523; the pair of linear bearings 522 are fixed to the gantry 2; the guide rod is inserted into the linear bearing 522, one end of the guide rod is hinged to the roller frame main body 51, and one end of the guide rod is connected to the connecting plate 523. The gantry 2 is provided with a driving element 7 for driving the roller 3 to move up and down, the driving element 7 can be an air cylinder, an electric push rod or a hydraulic cylinder, in this embodiment, the driving element 7 is an air cylinder, and a piston rod of the air cylinder is connected to the roller frame main body 51. It should be noted that, in order to adjust the horizontal angle of the roller 3, in the present technical solution, the lower end of the guide rod is hinged to the roller frame main body 51, the hinge adopts a short shaft and bearing structure, the bearing is installed on the short shaft, the lower end of the guide rod is provided with a bearing installation hole, the guide rod and the bearing are installed, and then the short shaft is fixed to the roller frame main body 51, so that the hinge between the guide rod and the roller frame main body 51 can be realized, and the error caused by the gap between the guide rod and the roller frame main body 51 can be reduced. The adjusting device comprises a fixed block 41 and a movable adjusting block 42, the fixed block 41 is configured on the lifting roller frame, the fixed block 41 is configured with a first inclined plane, in this embodiment, the fixed block 41 is fixed on the connecting plate 523; the movable adjusting block 42 is disposed on the gantry 2, the movable adjusting block 42 is disposed on a second inclined plane attached to the first inclined plane, the movable adjusting block 42 can slide along the horizontal decomposition direction of the second inclined plane, and the first inclined plane can slide along the second inclined plane. The movable adjusting block 42 is provided with a guide rail 43, and the guide rail 43 is fixed on the portal frame 2; the adjusting device further comprises a horizontal ball screw 44 and a motor 45, the horizontal ball screw 44 is fixed on the portal frame 2, and the motor 45 is connected with the horizontal ball screw 44; the horizontal ball screw 44 is provided with a screw nut 46, and the screw nut 46 is fixed to the movable adjustment block 42. The distance detecting means includes a laser distance measuring sensor 6, and the laser distance measuring sensor 6 irradiates the roll 3. It should be noted that, this distance detection device still includes electronic components such as the supporting controller with laser range finding sensor 6, and two laser range finding sensors 6 are fixed in 2 tops of portal frame in this embodiment, and two laser range finding sensors 6 are located same height, have seted up two through-holes moreover on the roller frame main part 51, and the laser energy that two laser range finding sensors 6 sent passes this through-hole vertically, and then shines to roll 3. Compared with the prior art, the technical scheme is that the adjusting device comprises a fixed block 41, a movable adjusting block 42, a guide rail 43, a horizontal ball screw 44 and a motor 45 for driving the horizontal ball screw 44, the fixed block 41 is fixed with a connecting plate 523 in the lifting roller frame, the movable adjusting block 42 is connected to the guide rail 43 in a sliding manner, the horizontal ball screw 44 drives the movable adjusting block 42 to slide along the guide rail 43, a first inclined surface of the fixed block 41 is attached to a second inclined surface of the movable adjusting block 42, and the first inclined surface of the fixed block 41 can slide along the second inclined surface of the movable adjusting block 42. In production, the laser distance measuring sensor 6 in the distance detecting device monitors the heights of the two ends of the roller 3 in real time, and the detected data is sent to the controller, after the controller calculates the height difference of the two ends of the roller 3, the controller respectively controls the motors 45 in the pair of adjusting devices to rotate, the horizontal ball screw 44 is used for driving the movable adjusting block 42 to move, the inclined plane is used for matching and adjusting the height of the connecting plate 523, because the connecting plate 523 is connected with the roller 3 through the guide rod and the roller frame main body 51, the height of the two ends of the roller 3 is adjusted, and the purpose of adjusting the horizontal angle of the roller 3 is achieved, the technical proposal can realize the automatic adjustment of the horizontal angle of the roller 3 by arranging the adjusting device and the distance detecting device, improves the adjusting efficiency of the horizontal angle of the roller 3, the horizontal angle of the roller 3 can be quickly adjusted in the production process, and the production efficiency is improved. In addition, in the technical scheme, the fixed block 41 and the movable adjusting block 42 are matched by adopting an inclined plane, so that the movable adjusting block 42 and the fixed block 41 can conveniently realize the relative sliding of any displacement value, the continuous and accurate adjustment of the height of the fixed block 41 is realized, the adjustment precision of the horizontal angle of the roller 3 is improved, and the continuous and accurate adjustment of the force for rolling the chip by the roller 3 can also be realized.
In some embodiments, the fixing block 41 is provided with a plurality of adjusting holes 411, and the fixing block 41 is fixed to the lifting roller frame by locking bolts. In order to realize the large-range adjustment of the height of the roller 3, the roller 3 is adjusted with a larger unit length, in the present technical scheme, the fixing block 41 is provided with a plurality of adjusting holes 411, in the embodiment, the fixing block 41 is configured to be a long strip shape, the adjusting holes 411 are arranged along the length direction of the fixing block 41, the portal frame 2 is provided with a hole site of the fixing block 41, the fixing block 41 is inserted into the hole site of the fixing block 41, and then the fixing block 41 is fixed to the portal frame 2 through a locking bolt. When the height of the roller 3 needs to be adjusted in a large range, the locking bolt is loosened, and the fixing block 41 is moved upwards or downwards through the adjusting holes 411 with corresponding hole numbers.
The above is only a preferred embodiment of the present invention, and is not intended to limit the present invention, and various modifications and changes will occur to those skilled in the art. Any modification, equivalent replacement, or improvement made within the spirit and principle of the present invention should be included in the protection scope of the present invention.
Claims (9)
1. A semiconductor chip breaking machine comprises
The device comprises a machine body and a portal frame connected to the machine body in a sliding manner; and
the roller is used for rolling the chip; and
the lifting roller frame is arranged on the portal frame and connected with the roller;
it is characterized by also comprising the following steps of,
a pair of adjusting devices, which are arranged between the portal frame and the lifting roller frame and are used for adjusting the horizontal angle of the roller; the pair of adjusting devices are symmetrically arranged at two ends of the roller;
a pair of distance detecting devices, which are arranged on the portal frame and respectively correspond to the two ends of the roller; the pair of distance detection devices are arranged at the same height and are used for detecting the height difference between the two end parts of the roller.
2. The semiconductor chip dicing machine according to claim 1,
the adjusting device comprises a fixed block and a movable adjusting block,
the fixed block is arranged on the lifting roller frame and is provided with a first inclined plane;
the movable adjusting block is arranged on the portal frame, the movable adjusting block is provided with a second inclined plane attached to the first inclined plane, the movable adjusting block can slide along the horizontal decomposition direction of the second inclined plane, and the first inclined plane can slide along the second inclined plane.
3. The semiconductor chip dicing machine according to claim 2,
the movable adjusting block is provided with a guide rail which is fixed on the portal frame.
4. The semiconductor chip dicing machine according to claim 2 or 3,
the adjusting device also comprises a horizontal ball screw and a motor, the horizontal ball screw is fixed on the portal frame, and the motor is connected with the horizontal ball screw;
this horizontal ball is configured with screw nut, and this screw nut is fixed with this activity regulating block.
5. The semiconductor chip dicing machine according to claim 2,
the lifting roller frame comprises a roller frame main body and a pair of lifting guide mechanisms, and the roller is arranged on the roller frame main body;
the pair of lifting guide mechanisms are symmetrically arranged at two ends of the roller frame main body, and the lifting guide mechanisms are connected to the portal frame.
6. The semiconductor chip dicing machine according to claim 5,
the pair of lifting guide mechanisms comprises a guide rod, a pair of linear bearings and a connecting plate; the alignment bearing is fixed on the portal frame; the guide rod is inserted into the linear bearing, one end of the guide rod is hinged to the roller frame main body, and one end of the guide rod is connected to the connecting plate.
7. The semiconductor chip dicing machine according to claim 6,
the fixed block is fixed on the connecting plate.
8. The semiconductor chip dicing machine according to claim 1,
the distance detection device comprises a laser distance measurement sensor, and the laser distance measurement sensor irradiates the roller.
9. The semiconductor chip dicing machine according to claim 2,
the fixed block is provided with a plurality of adjusting holes and is fixed on the lifting roller frame through locking bolts.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202022481501.XU CN213124413U (en) | 2020-10-30 | 2020-10-30 | Semiconductor chip splitting machine |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202022481501.XU CN213124413U (en) | 2020-10-30 | 2020-10-30 | Semiconductor chip splitting machine |
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| Publication Number | Publication Date |
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| CN213124413U true CN213124413U (en) | 2021-05-04 |
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| CN202022481501.XU Active CN213124413U (en) | 2020-10-30 | 2020-10-30 | Semiconductor chip splitting machine |
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| CN (1) | CN213124413U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112201621A (en) * | 2020-10-30 | 2021-01-08 | 四川上特科技有限公司 | Semiconductor chip splitting machine |
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- 2020-10-30 CN CN202022481501.XU patent/CN213124413U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112201621A (en) * | 2020-10-30 | 2021-01-08 | 四川上特科技有限公司 | Semiconductor chip splitting machine |
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