CN213121668U

CN213121668U - Chip wafer subfissure detection device

Info

Publication number: CN213121668U
Application number: CN202022297458.1U
Authority: CN
Inventors: 常永青
Original assignee: Dongguan Heda Grinding Technology Co ltd
Current assignee: Dongguan Heda Grinding Technology Co ltd
Priority date: 2020-10-15
Filing date: 2020-10-15
Publication date: 2021-05-04
Anticipated expiration: 2030-10-15

Abstract

The utility model discloses a chip wafer latent detection device that splits, which comprises a body the lower extreme fixed mounting of body has the supporting legs movable feed gate is installed to one side of body, the feed gate is to open structure fixed mounting has the door handle on the feed gate light-proof glass is installed at both ends around the body the upper end fixed mounting of body has the control panel, the control panel is equipped with digital display screen and mobile control button. When carrying out latent splitting detection to chip circle brilliant, rotate the motor and rotate and drive inside detecting element and carry out movable detection, both ends fixed mounting separates light glass around the body upper end simultaneously, can effectually avoid in the testing process highlight to cause light pollution to the external world for the staff receives the injury.

Description

Chip wafer subfissure detection device

Technical Field

The utility model relates to a wafer technology field specifically is a latent detection device that splits of chip wafer.

Background

The wafer refers to a silicon wafer used for manufacturing a silicon semiconductor integrated circuit, and is called a wafer because the shape is circular; various circuit device structures can be fabricated on a silicon wafer to form an IC product with specific electrical functions.

When the existing chip wafer subfissure detection device is used for detection, the CCD camera light detection is adopted, so that the light pollution to the outside can be caused when the detection is carried out, the harm is caused to workers, and the efficiency of the traditional detection device is lower.

SUMMERY OF THE UTILITY MODEL

An object of the utility model is to provide a chip wafer subfissure detection device to propose current chip wafer subfissure detection device in solving above-mentioned background art, when examining, owing to adopt CCD camera light detection to make and can cause light pollution to the external world when examining, cause harm to the staff, and the lower problem of detection device efficiency in the past.

In order to achieve the above object, the utility model provides a following technical scheme: the chip wafer subfissure detection device comprises a body, wherein supporting legs are fixedly mounted at the lower end of the body, a movable feeding door is mounted on one side of the body, the feeding door is of a split structure and is movably connected with the body, a door handle is fixedly mounted on the feeding door, light-blocking glass is mounted at the front end and the rear end of the upper portion of the body, and a control panel is fixedly mounted at the upper end of the body.

Preferably, the control panel is installed digital display screen and control button body upper end fixed mounting has the rotation motor, the transmission end of rotation motor extends to the inside of body.

Preferably, the transmission end of the rotating motor passes through a shaft coupling swing joint transmission shaft, the transmission shaft is connected with one end of a movable rail rod, the movable rail rod penetrates through the inside of the body, the movable shaft is installed at the other end of the movable rail rod, and the movable shaft is fixedly connected with the body.

Preferably, the movable rail rod is provided with a movable transverse rail, the lower end of the transverse rail is provided with an electric push rod and a CCD camera, and the CCD camera is fixedly connected with the transmission end of the electric push rod.

Preferably, the front end and the rear end of the middle part inside the body are fixedly provided with slide rails, the lower end inside the body is fixedly provided with light source generators, and the light source generators are uniformly distributed at the lower end inside the body.

Preferably, the middle part of the interior of the body is positioned between the slide rails and is provided with a bearing frame, and the bearing frame is movably connected with the body.

Preferably, the bearing frame is provided with bearing grooves, and the bearing grooves are uniformly distributed on the bearing frame.

Preferably, the bearing frame is provided with a handle, and the handle and the feeding door are arranged on the same side.

Preferably, the front end and the rear end of the bearing frame are fixedly provided with sliding grooves, and the sliding grooves are matched with the sliding rails and movably connected with the sliding rails.

Preferably, the bearing groove is matched with the light source generator in position, a limiting slide bar is fixedly mounted at the upper end inside the body, a limiting rod is movably mounted at the lower end of the middle part of the limiting slide bar, and the limiting rod is fixedly connected with the upper end of the transverse moving rail.

Compared with the prior art, the beneficial effects of the utility model are that:

1. when the chip wafer subfissure detection device is used for subfissure detection of a chip wafer, the rotating motor rotates to drive the internal detection part to perform movable detection, and meanwhile, the light-proof glass is fixedly arranged at the front end and the rear end of the upper end of the body, so that the light pollution of strong light to the outside in the detection process can be effectively avoided, and workers are injured;

2. according to the chip wafer subfissure detection device, the movable rail rod is installed, the motor is rotated to drive the movable rail rod to rotate, so that a detection part can flexibly move in the body, the wafer can be quickly detected by arranging the position of the wafer, and the working effect is effectively improved;

3. this chip wafer latent detection device that splits, when removing the detection time, the middle part movable mounting sideslip rail of removal rail pole carries out lateral shifting with the CCD camera through electric putter promotion for detection range is wider, and nimble degree is higher, and the effectual activity detectability that has improved the detection, and it is wider to detect the coverage.

Drawings

FIG. 1 is a schematic perspective view of the present invention;

FIG. 2 is a schematic sectional view of the present invention;

fig. 3 is a schematic view of the three-dimensional structure of the carrying frame of the present invention.

In the figure: 1. a body; 2. supporting legs; 3. a feed gate; 4. a door handle; 5. light-blocking glass; 6. a control panel; 7. a digital display screen; 8. a control button; 9. rotating the motor; 10. a drive shaft; 11. moving the rail rod; 12. a movable shaft; 13. traversing the rail; 14. an electric push rod; 15. a CCD camera; 16. a slide rail; 17. a light source generator; 18. a bearing frame; 19. a bearing groove; 20. a handle; 21. a chute.

Detailed Description

The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.

Referring to fig. 1-3, the present invention provides a technical solution: the utility model provides a chip wafer subfissure detection device, includes body 1, has supporting legs 2 at the lower extreme fixed mounting of body 1 movable feed gate is installed to one side of body, and feed gate 3 is to open structure, and feed gate 3 and body 1 swing joint have door handle 4 on the feed gate 3, and both ends fixed mounting has light-proof glass 5 around body 1 upper portion, and the upper end fixed mounting of body 1 has control panel 6.

Further, digital display screen 7 and mobile control button 8 are installed to control panel 6, there is rotation motor 9 at 1 upper end fixed mounting of body, the transmission end that rotates motor 9 extends to the inside of body 1, when hidden crack detection is being carried out to the chip circle brilliant, it drives inside detection part and carries out movable detection to rotate motor 9, both ends fixed mounting separates light glass 5 around the body 1 upper end simultaneously, can effectually avoid in the testing process highlight to cause light pollution to the external world, make the staff receive the injury.

Further, the transmission end that rotates motor 9 passes through shaft coupling swing joint transmission shaft 10, the one end of removal rail pole 11 is connected to transmission shaft 10, removal rail pole 11 runs through to body 1 inside, loose axle 12 is installed to the other end of removal rail pole 11, loose axle 12 with body 1 fixed connection, through installation removal rail pole 11, when examining time measuring, rotate motor 9 and drive removal rail pole 11 and rotate for detection part can carry out nimble activity in body 1's inside, through carrying out the position setting to the wafer, can be quick detect, effectual improvement working effect.

Further, movable transverse rail 13 is installed to removal rail pole 11, install electric putter 14 and CCD camera 15 at transverse rail 13 lower extreme, CCD camera 15 and electric putter 14's transmission end fixed connection, when carrying out the removal and examining time measuring, the middle part activity installation transverse rail 13 of removal rail pole 11 promotes through electric putter 14 and carries out lateral shifting with CCD camera 15, make detection range wider, and nimble degree is higher, the effectual activity detectability that has improved the detection, and it is wider to detect the coverage.

Further, both ends fixed mounting has slide rail 16 around the inside middle part of body 1, and the inside lower extreme fixed mounting of body 1 has light source generator 17, and light source generator 17 is at the inside lower extreme evenly distributed of body 1, through lower extreme fixed mounting light source generator 17 in body 1 inside, can carry out the highlight to the brilliant, detects its inside, and CCD camera 15 can transmit the brilliant data of circle simultaneously.

Furthermore, a bearing frame 18 is arranged in the middle of the inside of the body 1 between the slide rails 16, the bearing frame 18 is movably connected with the body 1,

furthermore, the carrying frame 18 is fixedly provided with carrying grooves 19, the carrying grooves 19 are uniformly distributed on the carrying frame 18, and the chip wafers can be uniformly placed on the carrying grooves.

Further, the carrying frame 18 is provided with a handle 20, the handle 20 is arranged on the same side with the feeding door 3, and by arranging the handle 20 on the carrying frame 18, after the detection is finished, the carrying frame 18 can be pulled out from the inside of the body 1.

Further, fixed spout 21 that is provided with in both ends around the carriage 18,

spout

21 and 16 looks adaptations of slide rail and swing joint through

spout

21 and 16 looks adaptations of slide rail for more lubrication when sliding, and avoid great vibrations to cause the damage to the wafer.

Further, bearing groove 19 and light source generator 17's position looks adaptation, the inside upper end fixed mounting of body 1 has spacing draw runner 22, the lower extreme movable mounting at spacing draw runner 22 middle part has gag lever post 23, gag lever post 23 and the upper end fixed connection of sideslip rail 13, through bearing groove 19 and light source generator 17's position looks adaptation, when examining time measuring, can gather together the light source and shine the wafer, and avoid causing the light source to shine not in place, cause and detect unusual phenomenon.

The working principle is as follows: at first place the brilliant fixing on bearing groove 19 with the circle, with bearing frame 18 through spout 21 and the inside of slide rail 16 propulsion body 1, open the power, carry out the highlight illumination to the brilliant circle through light source generator 17, detect its inside, CCD camera 15 can transmit the brilliant data of circle simultaneously, show on the digital display screen, simultaneously at the in-process that detects, it rotates to rotate motor 9 and drive removal rail bar 11, make the detecting element can carry out nimble activity in the inside of body 1, through carrying out the position setting to the brilliant circle, can be quick detect, electric putter 14 promotes and carries out lateral shifting with CCD camera 15, make detection range wider, and nimble degree is higher, the effectual activity detection ability that has improved the detection.

It should be finally noted that the above only serves to illustrate the technical solution of the present invention, and not to limit the scope of the present invention, and that simple modifications or equivalent replacements performed by those skilled in the art to the technical solution of the present invention do not depart from the spirit and scope of the technical solution of the present invention.

Claims

1. The utility model provides a latent detection device that splits of chip wafer, includes body (1), its characterized in that: the light-shielding door is characterized in that supporting legs (2) are fixedly mounted at the lower end of the body (1), a movable feeding door (3) is mounted on one side of the body (1), the feeding door (3) is of a split structure, a door handle (4) is fixedly mounted on the feeding door (3), light-shielding glass (5) is mounted at the front end and the rear end of the upper portion of the body (1), and a control panel (6) is fixedly mounted at the upper end of the body (1).

2. The chip wafer subfissure detection device of claim 1, wherein: digital display screen (7) and control button (8) are installed to control panel (6) body (1) upper end fixed mounting has rotation motor (9), the transmission end of rotating motor (9) extends to the inside of body (1).

3. The chip wafer subfissure detection device of claim 2, wherein: the transmission end of rotating motor (9) passes through shaft coupling swing joint transmission shaft (10), the one end of removal rail pole (11) is connected in transmission shaft (10), it runs through to body (1) inside to remove rail pole (11), loose axle (12) are installed to the other end of removal rail pole (11), loose axle (12) with body (1) fixed connection.

4. The chip wafer subfissure detection device of claim 3, wherein: the movable transverse rail (13) is installed on the movable rail rod (11), the electric push rod (14) and the CCD camera (15) are installed at the lower end of the transverse rail (13), and the CCD camera (15) is fixedly connected with the transmission end of the electric push rod (14).

5. The chip wafer subfissure detection device of claim 1, wherein: the light source device is characterized in that sliding rails (16) are fixedly mounted at the front end and the rear end of the middle part inside the body (1), light source generators (17) are fixedly mounted at the lower end of the inside of the body (1), and the light source generators (17) are uniformly distributed at the lower end of the inside of the body (1).

6. The chip wafer subfissure detection device of claim 5, wherein: the middle part of the interior of the body (1) is positioned between the slide rails (16) and is provided with a bearing frame (18), and the bearing frame (18) is movably connected with the body (1).

7. The chip wafer subfissure detection device of claim 6, wherein: the bearing frame (18) is provided with bearing grooves (19), and the bearing grooves (19) are uniformly distributed on the bearing frame (18).

8. The chip wafer subfissure detection device of claim 7, wherein: the bearing frame (18) is provided with a handle (20), and the handle (20) is arranged on the same side with the feeding door (3).

9. The chip wafer subfissure detection device of claim 6, wherein: the front end and the rear end of the bearing frame (18) are fixedly provided with sliding grooves (21), and the sliding grooves (21) are matched with the sliding rails (16) and movably connected with the sliding rails.

10. The chip wafer subfissure detection device of claim 7, wherein: the position looks adaptation of bearing groove (19) and light source generator (17), the inside upper end fixed mounting of body (1) has spacing draw runner (22) the lower extreme movable mounting in middle part of spacing draw runner (22) has gag lever post (23), gag lever post (23) and the upper end fixed connection of sideslip rail (13).