CN213079245U - Chip single-side brushing device and chip automatic cleaning equipment - Google Patents
Chip single-side brushing device and chip automatic cleaning equipment Download PDFInfo
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- CN213079245U CN213079245U CN202021645290.2U CN202021645290U CN213079245U CN 213079245 U CN213079245 U CN 213079245U CN 202021645290 U CN202021645290 U CN 202021645290U CN 213079245 U CN213079245 U CN 213079245U
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Abstract
The utility model relates to a chip scrubbing unit field, in particular to chip one-sided brush washes device, include: a chip fixing unit, a rotating unit, a brush unit, and a water spraying unit. The chip fixing unit is arranged above the frame and used for fixing the chip. One end of the rotating unit is fixed with the rack, and the other end of the rotating unit is fixed with the chip fixing unit and used for driving the chip fixing unit to rotate so as to drive the chip to rotate. The brush unit is arranged on the periphery of the chip fixing unit and used for brushing and washing the chip fixed on the chip fixing unit. The water spraying unit is arranged on the periphery of the chip fixing unit and used for washing the chip fixed on the chip fixing unit. The utility model discloses in, the rotatory chip rotation of fixing on the fixed unit of chip of drive of rotary unit, the chip is scrubbed in the relative chip swing of brush simultaneously, has increased the frequency of contact of brush with the chip, has improved the work efficiency who scrubs the chip.
Description
Technical Field
The utility model relates to a chip scrubbing unit field, in particular to chip single face brushing device.
Background
Conventionally, after the wafer is subjected to an etching or doping implantation process, a cleaning process, generally referred to as a Carlo process, is performed. The cleaning process is carried out in a wet cleaning table device comprising a plurality of tanks for providing different chemical substance solutions and ammonia water/hydrogen peroxide mixed solutions. At present, in the wafer brushing process, most of the wafers are manually brushed, and some of the wafers are cleaned by brushing equipment, so that the existing brushing equipment has low cleaning efficiency, and the requirements of the existing market cannot be met.
Therefore, it is desirable to provide a single-sided chip brushing apparatus to solve the above technical problems.
SUMMERY OF THE UTILITY MODEL
The utility model provides a device is scrubbed to chip single face drives the chip rotation of fixing on the fixed unit of chip through the rotation of rotary unit, and the chip is scrubbed to the relative chip swing of brush simultaneously, has increased the frequency of contact of brush with the chip, has improved the work efficiency who scrubs the chip, has solved the problem that chip single face scrubbing device is inefficiency.
The utility model provides a device is washed to chip single-side brush, sets up in the frame for scrub the chip, include:
the chip fixing unit is arranged above the rack and used for fixing a chip;
one end of the rotating unit is fixed with the rack, and the other end of the rotating unit is fixed with the chip fixing unit and is used for driving the chip fixing unit to rotate so as to drive the chip to rotate;
the brush unit is arranged on the peripheral side of the chip fixing unit and used for brushing and washing the chip fixed on the chip fixing unit;
the water spraying unit is arranged on the periphery of the chip fixing unit and used for washing the chip fixed on the chip fixing unit;
the brush unit comprises a connecting piece fixed with the rack and a brush arranged at the bottom end of the connecting piece; the brush and the connecting piece are rotatably connected.
In the chip single-side brushing device of the utility model, the connecting piece comprises a first rotating shaft, a first rotating sleeve sleeved on the first rotating shaft and a rotating block arranged at one end of the first rotating shaft; the brush is rotated by the rotating shaft.
In the chip single-side brushing device, two brushes are arranged at the acute angle on the rotating block.
In the chip single-side brushing device of the utility model, the water spraying unit comprises a first spray head and a second spray head;
the first spray head penetrates through the hairbrush and is arranged in the center of the bottom of the hairbrush;
the second spray head is arranged at the top of the water spraying unit.
In the chip single face brushing device, the rotatable setting of second shower nozzle is in water spray unit top for the position of adjustment water spray.
Chip single face brushing device in, the week side of the fixed unit of chip is provided with the water tank, just water tank one side is provided with keeps away a recess, keep away a recess with the fixed unit of chip corresponds the setting, just keep away the bottom of a recess and apart from the distance of frame is less than the top of the fixed unit of chip is apart from the distance of frame.
In the chip single-side brushing device of the utility model, the rotating unit is arranged on the frame in a penetrating way, and comprises a motor arranged on the first side of the frame, a second rotating shaft arranged on the frame in a penetrating way, and a second shaft sleeve sleeved on the second rotating shaft and fixed on the second side of the frame;
the motor drives the second rotating shaft to rotate through belt wheel transmission; and a chip fixing unit is arranged at the top of the second rotating shaft.
Chip single face brushing device in, the top of second rotation axis is discoid structure, chip fixed unit fixes discoid structural.
Among the chip single face brushing device, be provided with automatically controlled subassembly in the frame to through touch-sensitive screen change and input chip single face brushing device's parameter.
A chip self-cleaning equipment, include chip single face brushing device.
The utility model discloses compare in prior art, its beneficial effect is: the rotary unit rotates to drive the chip fixed on the chip fixing unit to rotate, and meanwhile, the brush swings relative to the chip to scrub the chip, so that the contact frequency of the brush and the chip is increased, and the work efficiency of scrubbing the chip is improved. Wherein, in order to increase the swing range of the brush and improve the quality of the chip brushed by the brush, two brushes are arranged on the rotating block in an acute angle.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings required to be used in the embodiments are briefly introduced below, and the drawings in the following description are only corresponding drawings of some embodiments of the present invention.
Fig. 1 is a schematic structural view of the chip single-side brushing device of the present invention.
Fig. 2 is an exploded view of the brush unit and the water spray unit of the chip single-side brushing device of the present invention.
Fig. 3 is an exploded view of the rotary unit of the chip single-side brushing device of the present invention.
Fig. 4 is a schematic structural diagram of the automatic chip cleaning device of the present invention.
The device comprises a rack 11, a rotating unit 12, a brush unit 13, a water spraying unit 14, a chip fixing unit 15, a water tank 16, a connecting piece 131, a brush 132, a first rotating shaft 1311, a first rotating sleeve 1312, a rotating block 1313, a motor 121, a second rotating shaft 122, a second rotating sleeve 123, a disc-shaped structure 122a, a second spray head 142, a clearance groove 161, an electric control assembly 17, a shell 18 and a manual movable door 19.
Detailed Description
The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by the skilled in the art without creative work belong to the protection scope of the present invention.
The present invention provides a preferred embodiment of a chip single-side brushing device capable of solving the above technical problems.
In the drawings, elements having similar structures are denoted by the same reference numerals.
The terms "first," "second," and the like in the terms of the present invention are used for descriptive purposes only and are not to be construed as indicating or implying relative importance, nor should they be construed as limiting in any way.
The utility model provides a chip single face brushing device's preferred embodiment does:
referring to fig. 1, fig. 1 is a schematic structural diagram of a chip single-side brushing device according to the present invention.
The utility model provides a device is washed to chip single-side brush, sets up in frame 11 for scrub the chip, its characterized in that includes: a chip fixing unit 15, a rotating unit 12, a brush unit 13, and a water spraying unit 14. A chip fixing unit 15 is disposed above the frame 11 for fixing the chip. One end of the rotating unit 12 is fixed to the frame 11, and the other end is fixed to the chip fixing unit 15, so as to drive the chip fixing unit to rotate, and further drive the chip to rotate. The brush unit 13 is disposed at a circumferential side of the chip fixing unit, and brushes the chip fixed on the chip fixing unit. The water spray unit 14 is provided at the circumferential side of the chip fixing unit 15 for washing the chip fixed on the chip fixing unit 15. Wherein the brush unit 13 includes a coupling member 131 fixed to the frame 11, and a brush 132 provided at a lower end of the coupling member. The brush 132 and the link 131 are rotatably connected.
In this embodiment, when the chip is brushed by the brush, the rotation unit 12 rotates to drive the chip fixed on the chip fixing unit 15 to rotate, and the brush 132 swings relative to the chip to brush the chip, so that the contact frequency between the brush and the chip is increased, and the chip brushing efficiency is improved.
Referring to fig. 1 and 2, fig. 1 is a schematic structural diagram of a chip single-side brushing device according to the present invention; fig. 2 is a schematic structural view of the brush unit and the water spraying unit of the chip single-side brushing device of the present invention.
The connection member 131 includes a first rotation shaft 1311, a first rotation sleeve 1312 fitted over the first rotation shaft 1311, and a rotation block 1313 provided at one end of the first rotation shaft 1311. The brush 132 is rotated by the first rotation shaft 1311. In order to increase the swing amplitude of the brush and improve the quality of the brush brushing chip, two brushes 132 are disposed at an acute angle on the rotating block 1313.
Referring to fig. 3, fig. 3 is an exploded view of a rotary unit of the chip single-side brushing device of the present invention.
The rotating unit 12 is disposed on the frame 11 in a penetrating manner, and includes a motor 121 disposed on a first side of the frame, a second rotating shaft 122 disposed on the frame 11 in a penetrating manner, and a second shaft sleeve 123 sleeved on the second rotating shaft 122 and fixed on a second side of the frame. The motor 121 drives the second rotating shaft 122 to rotate through belt pulley transmission; the chip fixing unit 15 is provided on top of the second rotation shaft 122. Further, in order to improve the stability of the chip fixing unit 15 on the second rotation shaft 122, the top of the second rotation shaft 122 is a disc-shaped structure 122 a.
Referring to fig. 2, fig. 2 is a schematic structural view of a brush unit and a water spraying unit of the chip single-side brushing device of the present invention.
The water spray unit 14 includes first and second spray heads 142. The first nozzle penetrates the brush 132 and is disposed at the center of the bottom of the brush. The second spray head 142 is disposed on the top of the water spray unit 14. And a second spray head 142 is rotatably provided at the top of the water spray unit 14 for adjusting the position of spraying water.
Referring to fig. 1, fig. 1 is a schematic structural diagram of a chip single-side brushing device according to the present invention.
The periphery of the chip fixing unit 15 is provided with a water tank 16, one side of the water tank is provided with a avoiding groove 161, the avoiding groove 161 is arranged corresponding to the chip fixing unit 15, and the distance from the bottom of the avoiding groove 161 to the rack 11 is smaller than the distance from the top of the chip fixing unit 15 to the rack 11.
Please refer to fig. 4, wherein fig. 4 is a schematic structural diagram of the automatic chip cleaning apparatus according to the present invention.
The embodiment also provides automatic chip cleaning equipment comprising the single-side chip brushing device. The frame 11 is a frame built by aluminum section, and the periphery of the frame is wrapped by a shell 18 consisting of an acrylic transparent plate; and a manual movable door 19 is arranged at the position of the shell corresponding to the single-side cleaning assembly and used for replacing the hairbrush.
An electric control assembly 17 is arranged on the shell, and parameters of the automatic chip cleaning equipment are changed and input through a touch screen.
The specific working flow of the chip single-side brushing device in this embodiment is described as follows:
the chip to be brushed is fixed on the chip fixing unit 15, and then the motor 121 is turned on to start the rotating unit 12, and the second rotating shaft 122 rotates and drives the chip fixing unit 15 to rotate, thereby driving the chip to rotate. Meanwhile, the water spraying unit 14 is turned on to start spraying water to the chip fixed on the chip fixing unit 15, and the first rotating shaft 1311 rotates to drive the rotating block 1313 to rotate, thereby driving the brush 132 fixed on the rotating block to swing left and right, increasing the contact frequency between the brush and the chip, and improving the work efficiency of brushing the chip. In order to improve the stability of the chip fixing unit 15 on the second rotation shaft 122, the top of the second rotation shaft 122 is a disc-shaped structure 122 a. In order to increase the swing amplitude of the brush and improve the quality of the brush brushing chip, two brushes 132 are disposed at an acute angle on the rotating block 1313.
Therefore, the marking process of the chip single-side brushing device is completed.
In summary, although the present invention has been described with reference to the preferred embodiments, the above-described preferred embodiments are not intended to limit the present invention, and those skilled in the art can make various changes and modifications without departing from the spirit and scope of the present invention, so that the scope of the present invention shall be determined by the scope of the appended claims.
Claims (10)
1. The utility model provides a device is washed to chip single-side brush, sets up in the frame for scrub the chip, its characterized in that includes:
the chip fixing unit is arranged above the rack and used for fixing a chip;
one end of the rotating unit is fixed with the rack, and the other end of the rotating unit is fixed with the chip fixing unit and is used for driving the chip fixing unit to rotate so as to drive the chip to rotate;
the brush unit is arranged on the peripheral side of the chip fixing unit and used for brushing and washing the chip fixed on the chip fixing unit;
the water spraying unit is arranged on the periphery of the chip fixing unit and used for washing the chip fixed on the chip fixing unit;
the brush unit comprises a connecting piece fixed with the rack and a brush arranged at the bottom end of the connecting piece; the brush and the connecting piece are rotatably connected.
2. The single-side chip scrubbing device according to claim 1, wherein said connecting member comprises a first rotating shaft, a first rotating sleeve fitted over said first rotating shaft, and a rotating block disposed at one end of said first rotating shaft; the brush is rotated by the rotating shaft.
3. The single-sided scrubbing apparatus according to claim 2, wherein said rotating block has two brushes disposed thereon at an acute angle.
4. The single-sided scrubbing apparatus according to claim 3, wherein said water spraying unit comprises a first nozzle and a second nozzle;
the first spray head penetrates through the hairbrush and is arranged in the center of the bottom of the hairbrush;
the second spray head is arranged at the top of the water spraying unit.
5. The single-side brushing device for chips according to claim 4, wherein the second nozzle is rotatably arranged on the top of the water spraying unit for adjusting the position of water spraying.
6. The single-side brushing device for chips according to claim 1, wherein a water tank is disposed around the chip fixing unit, and a space-avoiding groove is disposed on one side of the water tank, the space-avoiding groove is disposed corresponding to the chip fixing unit, and the distance from the bottom of the space-avoiding groove to the rack is smaller than the distance from the top of the chip fixing unit to the rack.
7. The single-side chip scrubbing device according to claim 1, wherein said rotary unit is disposed through said frame, and comprises a motor disposed at a first side of said frame, a second rotary shaft disposed through said frame, and a second bushing fitted over said second rotary shaft and fixed at a second side of said frame;
the motor drives the second rotating shaft to rotate through belt wheel transmission; and a chip fixing unit is arranged at the top of the second rotating shaft.
8. The single-sided scrubbing apparatus for chips as defined in claim 7, wherein said second rotating shaft has a disk-shaped top portion, and said chip fixing unit is fixed to said disk-shaped top portion.
9. The single-sided scrubbing apparatus according to claim 1, wherein said frame is provided with an electronic control assembly, and parameters of said single-sided scrubbing apparatus are changed and inputted via a touch screen.
10. An automatic chip cleaning device, characterized by comprising a single-side chip brushing device according to any one of claims 1 to 8.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202021645290.2U CN213079245U (en) | 2020-08-10 | 2020-08-10 | Chip single-side brushing device and chip automatic cleaning equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202021645290.2U CN213079245U (en) | 2020-08-10 | 2020-08-10 | Chip single-side brushing device and chip automatic cleaning equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN213079245U true CN213079245U (en) | 2021-04-30 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202021645290.2U Active CN213079245U (en) | 2020-08-10 | 2020-08-10 | Chip single-side brushing device and chip automatic cleaning equipment |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN213079245U (en) |
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2020
- 2020-08-10 CN CN202021645290.2U patent/CN213079245U/en active Active
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