CN213068966U - Probe station for testing coplanar and non-coplanar electrodes - Google Patents
Probe station for testing coplanar and non-coplanar electrodes Download PDFInfo
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- CN213068966U CN213068966U CN202021371453.2U CN202021371453U CN213068966U CN 213068966 U CN213068966 U CN 213068966U CN 202021371453 U CN202021371453 U CN 202021371453U CN 213068966 U CN213068966 U CN 213068966U
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Abstract
The utility model discloses a probe station for testing coplanar and non-coplanar electrodes, which comprises a base, wherein an object stage is arranged on the base, a testing arm is arranged on one side of the object stage, and the testing arm is connected with a front probe; the base is provided with a through screw hole, a screw rod matched with the screw hole is arranged in the screw hole, a back probe is fixedly arranged at the top of the screw rod, and a test through hole for the back probe to pass through is formed in the objective table. The utility model discloses a three probe antarafacial designs can satisfy the test needs of coplanar electrode device and antarafacial electrode device, and the range of application is wide.
Description
Technical Field
The utility model relates to a test equipment especially relates to a probe platform that can be used to coplanar and antarafacial electrode test.
Background
The probe station is mainly applied to the testing of semiconductor industry, photoelectric industry, integrated circuits and packaging. Parameter extraction of the device is realized through a connecting instrument and an object to be tested, and the electrical characteristic test of the device can be independently realized through self-contained driving and testing software. At present, the existing probe station can only be used for testing the same-surface electrode device, but no test equipment for the different-surface electrode device exists.
SUMMERY OF THE UTILITY MODEL
Utility model purpose: the utility model aims at providing a can be used to the probe station of coplanar and different face electrode test, can realize the test of coplanar electrode and different face electrode.
The technical scheme is as follows: the utility model discloses a probe station that can be used for coplanar and non-coplanar electrode test, including the base, be equipped with the objective table on the base, objective table one side is equipped with the test arm, and the test arm is connected with positive probe; the base is provided with a through screw hole, a screw rod matched with the screw hole is arranged in the screw hole, a back probe is fixedly arranged at the top of the screw rod, and a test through hole for the back probe to pass through is formed in the objective table.
The screw is in an inverted T shape, the top of the screw is provided with an insulating platform, and a hollow channel is arranged inside the screw; the back probe penetrates through the insulating platform and is connected with the lead in the hollow channel in a welding manner; namely: the upper end of the back probe extends out of the insulating platform at the top of the screw, the lower end of the back probe is positioned in the hollow channel and is fixedly connected with the lead in a welding mode, and the lead extends to the outside of the screw.
Preferably, in order to avoid the existence of a test blind area, the test universality is improved; the test arm can move on the base to realize position adjustment, the base is made of ferromagnetic materials, and the magnetic switch of the main arm controls the movement and fixation of the test arm on the base.
Furthermore, the test arm comprises a main arm and a probe arm, wherein the main arm is connected with one end of the probe arm, the other end of the probe arm is connected with a conductive plate, and a front probe is fixedly arranged on the conductive plate.
Preferably, the main arm and the probe arm are hinged so that the probe arm can rotate left and right and is locked and fixed through a fastener. The one end of main arm is equipped with first connecting portion, and the one end of probe arm is equipped with the second connecting portion with first connecting portion complex, and first connecting portion and second connecting portion are connected for probe arm can control and rotate, and it is fixed to lock through the fastener. Optionally, a wedge sleeve is arranged at the front end of the main arm, a wedge core is arranged at the rear end of the probe arm, and the wedge core extends into the wedge sleeve and is locked and fixed through a bolt.
Preferably, the number of the probe arms is two, and the two probe arms are arranged at the front end of the main arm side by side; the distance between the two probes can be adjusted in combination with the left and right rotation of the probe arm.
Preferably, the conductive plate is provided with a first connection post for connecting the front probe and a second connection post for connecting a wire.
Wherein, the front end of the test arm is provided with a lifting device which is connected with the front probe; the lifting device comprises a mounting groove, a lifting screw and a sliding block which are positioned at the front end of the testing arm, a supporting rod sleeved with a spring is arranged in the groove, a convex block matched with the groove is arranged on the sliding block, a through hole matched with the supporting rod is arranged on the convex block, the supporting rod extends into the through hole, and the lifting screw abuts against the top of the sliding block; the lifting screw is adjusted to enable the sliding block to move up and down, so that the height of the front probe is adjusted, and the front probe is fixed through a clamping plate installed on the side face.
Preferably, the top of the sliding block is provided with a spherical bulge, and the bottom of the lifting screw props against the top of the spherical bulge, so that the stability is improved.
The novel probe station for testing the coplanar and non-coplanar electrodes comprises a base, an object stage and a testing arm, wherein the base is made of ferromagnetic materials, and the testing arm can move on the base; the front end of the main arm is provided with two probe arms, so that the two probe arms can rotate left and right and can be locked and fixed; the front end of the probe arm is provided with a lifting device which can adjust the height of the front probe; the bottom of the objective table is provided with a back probe, and the height of the back probe can be adjusted.
Has the advantages that: the utility model adopts the design of three probes with different surfaces, which can meet the test requirements of the coplanar electrode device and the coplanar electrode device, and can select any two probes for use during the test, thereby having wide application range; adopt integral type probe arm to replace original two with the portable probe of magnetic adsorption on the base, have very big simplification to the test, the person of facilitating the use carries out test operation.
Drawings
Fig. 1 is a front view of the present invention;
fig. 2 is a right side view of the present invention;
fig. 3 is a top view of the present invention;
FIG. 4 is a schematic view of a screw with a backside probe;
FIG. 5 is a schematic view of the junction of the main arm and the probe arm; wherein (a) is a front view and a plan view of the first coupling part of the main arm, (b) is a front view and a plan view of the second coupling part of the probe arm, and (c) is a schematic view of the locking bolt;
FIG. 6 is a schematic view of a slider and probe arm front end groove; wherein (a) is a front and top view of the slider and (b) is a front and top view of the groove at the front end of the probe arm;
FIG. 7 is a schematic view of the lifting mechanism of the front end of the probe arm; wherein (a) is a front view and (b) is a right view;
fig. 8 is a schematic diagram of the conductive plates, in which (a) is a front view of two of the left and right conductive plates, and (b) is a left view of the conductive plates.
Reference numerals: 1. the device comprises a base, 2, an object stage, 3, a main arm, 4, a probe arm, 5, a front probe, 6, a back probe, 7, a screw rod, 8, an insulating screw, 9, a conductive plate, 10, a first connecting column, 11, a second connecting column, 12, a horizontal wedge sleeve, 13, a horizontal wedge core, 14, a fastener, 15, an insulating platform, 16, a hollow channel, 17, a wire, 18, a lifting screw, 19, a spherical bulge, 20, a sliding block, 21, a clamping plate, 22, a support rod, 23, a welding point, 24, a magnetic switch, 25, a test through hole, 26, a groove, 27 and a lug.
Detailed Description
The present invention will be described in further detail with reference to examples.
As shown in fig. 1-3, the utility model discloses a base 1 is equipped with objective table 2 on the base 1, and objective table 2 one side is equipped with the test arm, and the test arm includes main arm 3 and two probe arms 4 of the left and right sides that link to each other with main arm 3, is equipped with magnetic switch 24 on the main arm, through the removal of the steerable test arm of rotatory magnetic switch 24 on base 1 mesa to seek best test position, specific control method is prior art, can refer to current ST-102B type probe test platform, no longer describe herein.
A through vertical screw hole is formed in the base 1, a screw rod 7 matched with the screw hole is arranged in the screw hole, as shown in fig. 4, the screw rod 7 is in an inverted T shape, an insulating platform 15 is arranged at the top of the screw rod 7, a back probe 6 is fixedly arranged at the top of the screw rod 7, and a hollow channel 16 is formed in the screw rod; the back probe 6 passes through the insulating platform 15 and is soldered to the wire 17 in the hollow channel to form a solder joint 23, and the wire 17 extends to the outside of the probe station for connection to other instruments. The back probe 6 can move up and down along with the screw 7, and the objective table 2 is provided with a test through hole 25 for the back probe to pass through.
The front end of the main arm 3 is provided with a first connecting part, as shown in fig. 5, the first connecting part comprises a horizontal wedge sleeve 12 and a fastener 14, the horizontal wedge sleeve 12 is provided with a vertical through hole, and the through hole is matched with a bolt; the rear end of the probe arm is provided with a second connecting part matched with the first connecting part, the second connecting part is a horizontal wedge core 13, a vertical through hole is formed in the second connecting part, the wedge core 12 and the wedge sleeve 13 are matched and mutually wedged, so that the probe arm 4 can rotate left and right, and a bolt extends into the through hole and is locked and fixed; namely, the left and right probe arms can rotate left and right by using respective vertical bolts as rotating shafts, and the object stage is covered by a fan shape. When the probe spacing needs to be adjusted, the bolt is firstly unscrewed, then the probe arm is rotated to enable the probe arm to be in a proper position, and then the bolt is screwed to fix the probe arm, so that the probe arm is prevented from shaking in the using process.
As shown in fig. 6 and 7, a lifting device is arranged at the front end of the probe arm, a lifting screw 18 and a mounting groove 26 are arranged at the front end of the probe arm, the lifting screw 18 is fixedly mounted at the top of the probe arm through a mounting seat, two vertical supporting rods 22 are fixedly arranged on the mounting groove 26, and springs are sleeved on the supporting rods 22. The side wall of the sliding block 20 is provided with a convex block 27 matched with the groove 26, the convex block 27 is provided with a vertical through hole, the through hole is in sliding fit with the support rod, the top of the sliding block is provided with a spherical bulge 19, and the lifting screw abuts against the spherical bulge 19; the front side wall of the slide block is fixedly provided with a conductive plate 9 through an insulating screw 8. Still install splint 21 through the bolt on the lateral wall of probe arm, slider 20 and probe arm are with splint 21 pressfitting, guarantee that the slider can not drop, have seted up vertical strip seam on the splint 21, and the bolt in the slider is embedded in the cooperation, does not influence the slider and reciprocates when guaranteeing that the slider can not drop. During installation, the supporting rod sleeved with the spring is sleeved in the through hole of the bump 27, the sliding block is installed at the front end of the probe arm, the lifting screw at the top abuts against the spherical bulge 19 on the sliding block, the lifting screw is rotated, and the sliding block 20 slides up and down along the supporting rod 22, so that the height of the current-conducting plate is adjusted.
As shown in fig. 8, each conductive plate 9 is provided with a first connecting post 10 and a second connecting post 11, which are distributed on the left and right sides, the first connecting post 10 on the inner side is used for connecting the front probe 5, and the second connecting post 11 on the outer side is used for connecting a wire.
When the utility model is used and the different-surface electrode is tested, the electrode on the bottom surface of the device to be tested is just opposite to the testing through hole on the surface of the object carrying table, the screw rod where the bottom probe is located is gently and slowly rotated to drive the probe to move upwards until the probe tip is abutted against the upper end of the electrode; and selecting a proper top probe according to the position of the electrode on the upper surface of the device, adjusting the main arm to a proper position, rotating the probe arm where the selected top probe is located until the probe tip moves right above the electrode, slowly rotating the screw of the lifting device until the probe tip abuts against the electrode, connecting the wires corresponding to the two selected probes with a test instrument, and starting testing. When the coplanar electrode test is carried out, a device to be tested is placed on the objective table, the main arm is adjusted to a proper position, the two probe arms are rotated to adjust the positions of the two probes until the probe tips are both positioned right above the test electrode, then the screw of the lifting device is rotated to enable the probes to descend until the probe tips abut against the electrode, and then the leads corresponding to the two probes are connected to a test instrument to start the test. The utility model discloses break originally and can only test coplanar electrode device and can't carry out the limitation of testing to the coplanar electrode device, adopt the optional mode of three electrodes to obtain the novel probe station that possesses coplanar and coplanar electrode test.
Claims (8)
1. The utility model provides a probe station that can be used to coplanar and antarafacial electrode test which characterized in that: the test device comprises a base, wherein an object stage is arranged on the base, and a test arm is arranged on one side of the object stage and is connected with a front probe; the base is provided with a through screw hole, a screw rod matched with the screw hole is arranged in the screw hole, a back probe is fixedly arranged at the top of the screw rod, and a test through hole for the back probe to pass through is formed in the objective table.
2. The probe station of claim 1, wherein the probe station is used for testing coplanar and coplanar electrodes, and comprises: the screw rod is in an inverted T shape, the top of the screw rod is provided with an insulating platform, and a hollow channel is arranged inside the screw rod; the back probe passes through the insulating platform and is welded with the lead in the hollow channel.
3. The probe station of claim 1, wherein the probe station is used for testing coplanar and coplanar electrodes, and comprises: the test arm comprises a main arm and a probe arm, one end of the probe arm is connected with the main arm, the other end of the probe arm is connected with a conductive plate, and a front probe is fixedly arranged on the conductive plate.
4. The probe station of claim 3, wherein the probe station is capable of testing coplanar and coplanar electrodes, and comprises: the main arm is hinged with the probe arm, so that the probe arm can rotate left and right and is locked and fixed through a fastener.
5. The probe station of claim 3, wherein the probe station is capable of testing coplanar and coplanar electrodes, and comprises: the number of the probe arms is two, and the probe arms are arranged at the front end of the main arm side by side.
6. The probe station of claim 3, wherein the probe station is capable of testing coplanar and coplanar electrodes, and comprises: the conducting plate is provided with a first connecting column used for connecting the front probe and a second connecting column used for connecting a lead.
7. The probe station of claim 1, wherein the probe station is used for testing coplanar and coplanar electrodes, and comprises: the front end of the test arm is provided with a lifting device, and the lifting device is connected with the front probe; the lifting device comprises a mounting groove, a lifting screw and a sliding block, wherein the mounting groove is located at the front end of the testing arm, a supporting rod sleeved with a spring is arranged in the groove, a convex block matched with the groove is arranged on the sliding block, a through hole matched with the supporting rod is formed in the convex block, the supporting rod stretches into the through hole, and the lifting screw abuts against the top of the sliding block.
8. The probe station of claim 7, wherein: the top of the sliding block is provided with a spherical bulge, and the bottom of the lifting screw is propped against the top of the spherical bulge.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202021371453.2U CN213068966U (en) | 2020-07-13 | 2020-07-13 | Probe station for testing coplanar and non-coplanar electrodes |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202021371453.2U CN213068966U (en) | 2020-07-13 | 2020-07-13 | Probe station for testing coplanar and non-coplanar electrodes |
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| Publication Number | Publication Date |
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| CN213068966U true CN213068966U (en) | 2021-04-27 |
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| CN202021371453.2U Active CN213068966U (en) | 2020-07-13 | 2020-07-13 | Probe station for testing coplanar and non-coplanar electrodes |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114002484A (en) * | 2022-01-04 | 2022-02-01 | 苏州大学 | Transient photovoltage test sample assembly |
-
2020
- 2020-07-13 CN CN202021371453.2U patent/CN213068966U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114002484A (en) * | 2022-01-04 | 2022-02-01 | 苏州大学 | Transient photovoltage test sample assembly |
| CN114002484B (en) * | 2022-01-04 | 2022-03-25 | 苏州大学 | Transient photovoltage test sample assembly |
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| Date | Code | Title | Description |
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| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20221208 Address after: Room 307, Building 3, No. 1128, Wuzhong Road, Minhang District, Shanghai, 201103 Patentee after: Shanghai Fumeidi Engineering Technology Co.,Ltd. Address before: No. 99 Jiangning Road, Nanjing District hirokage 211169 cities in Jiangsu Province Patentee before: JINLING INSTITUTE OF TECHNOLOGY |
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| TR01 | Transfer of patent right |