CN213053964U

CN213053964U - Rotary target surface polishing device

Info

Publication number: CN213053964U
Application number: CN202021120294.9U
Authority: CN
Inventors: 陈标; 郭朋; 刘所心
Original assignee: Luoyang Jinglian Photoelectric Material Co ltd
Current assignee: Luoyang Jinglian Photoelectric Material Co ltd
Priority date: 2020-06-16
Filing date: 2020-06-16
Publication date: 2021-04-27
Anticipated expiration: 2030-06-16

Abstract

The utility model relates to a rotatory target surface grinding device, including pipe driving motor, the subassembly of polishing, the subassembly actuating mechanism of polishing, prop in the back of the body pipe, back of the body pipe ejector pin and ejector pin remove supporting component, pipe driving motor props with the back of the body pipe in and is connected, the ejector pin removes supporting component and includes the supporting seat, slide and slider, the back of the body pipe ejector pin is connected with the fine setting subassembly in the slider, the subassembly of polishing includes sliding platform, a slide rail, emery wheel driving motor and flexible emery wheel, the subassembly actuating mechanism of polishing includes the support frame, two lead screw guide rails and the lead screw guide rail driving motor who is connected with one of them lead screw guide rail, sliding platform installs on two lead screw guide rails, prop in the back of the body pipe, the back of the body. The utility model discloses can effectively clear up the incomplete indium in rotatory target surface of polishing, cull and nodulation, compare with the mode of current manual work clearance, the product quality who has both guaranteed has reduced workman intensity of labour again, improves production efficiency.

Description

Rotary target surface polishing device

Technical Field

The utility model relates to a surface grinding device, in particular to rotatory target surface grinding device.

Background

At present, flat panel display manufacturing enterprises in China develop rapidly, and China strongly supports the localization of advanced products. The existing targets for coating are of two types: planar targets and rotary targets. The sputtering utilization rate of the planar target can reach about 30%, the sputtering utilization rate of the rotary target can reach about 80%, and then the rotary target continuously rotates in the use process, so that the surface of the target is smooth and uniform in use, the nodulation phenomenon cannot occur, the use quality of the target and the uniformity of a coating film can be ensured, the defect rate is reduced, and the yield is improved. Rotating targets is a major trend in development today and beyond.

The surface polishing is a work with larger workload after the binding of the rotary target material is finished, the surface of the rotary target material is bound at high temperature to have the problems of residual glue, residual indium and coaxiality deviation caused in the binding process, and the sputtering quality and the attractiveness are influenced if the surface of the rotary target material cannot be cleaned and polished completely. If the rotary target material has slight nodulation in the sputtering process, a sputtering manufacturer needs to stop the rotary target material for polishing, the polishing mode of the conventional rotary target material is manually polishing by using sand paper, the polishing mode is high in labor intensity, manual operation is only needed, the quality cannot be guaranteed, the working efficiency is low, and the production progress is seriously influenced.

Chinese utility model patent 201920172366.5 discloses a target grinding device, including support, motor and the subassembly of polishing, adopt the device although can improve production speed, but it still has following weak point: 1. the abrasive belt is adopted for polishing, the installation and tensioning structure of the abrasive belt is complex, and the maintenance cost of the equipment is high; 2. the rotary target is fixed through the target shaft, namely, only the rotary target corresponding to the size of the target shaft can be polished, and the application range is small.

Disclosure of Invention

The to-be-solved technical problem of the utility model is: the utility model provides a rotatory target surface grinding device, the device can effectively clear up and polish incomplete indium in rotatory target surface, cull and nodulation, compares with the mode of current manual work clearance, and the product quality who has both guaranteed has reduced workman intensity of labour again, improves production efficiency, has solved the difficult problem of clearing up in current rotatory target surface.

The technical scheme for solving the technical problems is as follows: a rotary target surface polishing device comprises a tube driving motor, a polishing assembly driving mechanism, a back tube inner support, a back tube ejector rod and an ejector rod moving support assembly, wherein the tube driving motor is connected with the back tube inner support, the ejector rod moving support assembly comprises a support seat, a slide way and a slide block which are installed on the support seat, a fine adjustment assembly is arranged in the slide block, a long strip-shaped hole is formed in the side surface of the slide way, the slide block is positioned in the slide way and is positioned through a bolt I which penetrates through the long strip-shaped hole in the slide way, the back tube ejector rod is composed of an ejector head and a connecting rod, the ejector head and the connecting rod are connected through a bearing, the connecting rod is connected with the fine adjustment assembly in the slide block, the polishing assembly comprises a slide platform, a slide rail which is installed on the slide platform, a grinding wheel driving motor and a flexible grinding wheel which is connected, the grinding assembly driving mechanism comprises a support frame, two lead screw guide rails arranged on the support frame through bearings and a lead screw guide rail driving motor connected with one of the lead screw guide rails, the sliding platform is arranged on the two lead screw guide rails and is in threaded connection with the lead screw guide rails, and the inner support of the back tube and the ejector rod of the back tube are respectively positioned above two ends of the lead screw guide rails.

The back tube inner support is of a three-jaw chuck structure.

The top of the back pipe ejector rod is of a circular truncated cone structure, and the connecting rod is connected with the large end of the top through a bearing.

The tube driving motor is supported by a support table.

The slider is internally provided with a mounting hole, the fine adjustment assembly comprises an adjusting nut and an adjusting bolt, the adjusting nut is sleeved in the mounting hole of the slider, the adjusting bolt is connected with the adjusting nut, and the connecting rod of the back tube ejector rod is connected with the adjusting nut.

Due to the adoption of the technical scheme, the utility model discloses following beneficial effect has:

1. adopt the utility model discloses can effectively clear up rotatory target surface cull, incomplete indium and nodulation, adopt mechanical device to replace current manual operation mode promptly, rotate the work of polishing and clearing up of target surface foreign matter through this device, the clearance is polished effectually, can guarantee to clear up the effect outward appearance uniformity of polishing, can guarantee product quality simultaneously.

2. And manual cleaning is replaced by mechanical cleaning, so that the workload of workers is reduced, the labor intensity of the workers is reduced, and the production efficiency is improved.

3. The flexible grinding wheel is used as a grinding tool, so that the contact area between the flexible grinding wheel and the rotary target can be increased, and the risk that the rotary target is cracked due to the problems of binding coaxiality fault and the like is reduced.

4. The back tube and the target material are supported by adopting the back tube inner support and the back tube ejector rod, so that the outer diameter threads of the back tube can be effectively protected from being damaged, the sealing performance of the back tube is improved, and the service life of the back tube is prolonged.

5. The utility model discloses can be according to rotatory target length adjustment slider position to the target that can fix multiple length is propped to adjustment back of the body intraductal and is kept between the back of the body pipe ejector pin, can polish various length specification targets of 500mm ~ 3000 mm.

6. The position of the flexible grinding wheel can be adjusted according to the outer diameter of the rotary target material, the target materials with various outer diameter specifications can be ground, and the application range is wide.

The technical features of a rotary target surface polishing apparatus according to one embodiment of the present invention will be further described with reference to the accompanying drawings and examples.

Drawings

FIG. 1: the utility model discloses a rotatory target surface grinding device user state overview (section).

FIG. 2: the utility model discloses a rotatory target surface grinding device user state top view (partially cut open).

FIG. 3: the utility model discloses a schematic diagram is connected with back of the body pipe ejector pin to fine setting subassembly in the slider.

In the figure: 1-tube driving motor, 2-grinding assembly, 21-grinding wheel driving motor, 22-slide rail, 23-flexible grinding wheel, 24-slide platform, 25-slide table, 26-bolt II, 3-grinding assembly driving mechanism, 31-screw guide rail, 32-support frame, 33-screw rod driving motor, 4-ejector rod moving support assembly, 41-support seat, 42-slide block, 421-mounting hole, 43-slide rail, 431-strip-shaped hole, 44-bolt I, 45-adjusting bolt, 46-adjusting nut, 5-back tube ejector rod, 51-ejector head, 52-connecting rod, 6-back tube inner support, 7-flange and 8-support table.

P1-backing tube, P2-rotating target.

Detailed Description

Example (b): a rotary target surface polishing device is shown in figures 1-2 and comprises a tube driving motor 1, a polishing assembly 2, a polishing assembly driving mechanism 3, a back tube inner support 6, a back tube ejector rod 5 and an ejector rod moving support assembly 4, wherein the tube driving motor 1 is supported by a support table 8, the tube driving motor is connected with the back tube inner support 6 through a flange 7, the ejector rod moving support assembly 4 comprises a support seat 41, a slide way 43 and a slide block 42, the slide way 43 is installed on the support seat, a fine adjustment assembly is arranged in the slide block, a long-strip-shaped hole 431 is formed in the side face of the slide way 43, the slide block 42 is positioned in the slide way and is positioned through a bolt I44 penetrating through the long-strip-shaped hole in the slide way, the back tube ejector rod 5 is composed of an ejector head 51 and a connecting rod 52, the ejector head and the connecting rod are connected through a bearing, the connecting rod 52 is connected with the, grinding assembly 2 includes slide bracket 24, installs slide rail 22, emery wheel driving motor 21 on slide bracket and the flexible emery wheel 23 of being connected with emery wheel driving motor, emery wheel driving motor 21 installs on slip table 25, and slip table movable mounting is on slide rail 22 and through II 26 location of bolt, emery wheel driving motor 21 passes through slip table 25 and drives and can move on slide rail 22 to can lock the location on slide rail 22 through II 26, emery wheel driving motor 21 drives flexible emery wheel 23 and polishes rotatory target surface after binding, grinding assembly actuating mechanism 3 includes support frame 32, through two lead screw guide rails 31 of bearing mounting on the support frame and lead screw guide rail driving motor 33 of being connected with one of them lead screw guide rail, slide bracket 24 installs on two lead screw guide rails 31 and passes through threaded connection with the lead screw guide rail, lead screw driving motor 33 drives slide bracket 24 through lead screw guide rail 31 and realizes linear motion, the back pipe inner support 6 and the back pipe mandril 5 are respectively positioned above two ends of the screw rod guide rail 31.

In this embodiment, the back tube inner support is a three-jaw chuck structure, and supports one end of the back tube by utilizing radial movement of three movable jaws uniformly distributed on the chuck body, so that the back tubes with different inner diameters can be supported within a certain range. As a variation, other structures of the back tube inner support can also be adopted.

In this embodiment, the top of the back pipe ejector rod is of a circular truncated cone structure, and the connecting rod is connected with the large end of the top through a bearing. As a variation, the plug can also adopt other structures which are convenient for tightly pushing the back pipe.

In this embodiment, a mounting hole 421 is formed in the slider 42, the fine adjustment assembly includes an adjusting nut 46 and an adjusting bolt 45, the adjusting nut 46 is sleeved in the mounting hole 421 of the slider, the adjusting bolt is connected with the adjusting nut, and the connecting rod 52 of the back tube ejector rod is connected with the adjusting nut 46 (see fig. 3). When the back pipe ejector rod needs to be finely adjusted, the adjusting bolt 45 is rotated to enable the adjusting nut 46 to drive the back pipe ejector rod to do linear motion, and therefore fine adjustment of the back pipe ejector rod is achieved. As an alternative, the fine adjustment assembly may also take other forms of construction.

The working process is as follows: firstly, a rotary target material is assembled with a back tube ejector rod 5 through a back tube inner support 6, the back tube inner support 6 fixes the left end position of the rotary target material through a three-jaw chuck, the back tube ejector rod 5 and a slide block 42 move and are positioned on a slide rail 43, the rotary target material is assembled, a grinding wheel driving motor 21 and a flexible grinding wheel 23 are moved to the position contacted with the outer surface of the rotary target material through a slide rail 22 for positioning, a lead screw driving motor 33 drives a lead screw guide rail 31 to move a grinding assembly 2 to the left end of the rotary target material, a tube driving motor 1 is started to drive the rotary target material to rotate (at the moment, the tops of the back tube inner support and the back tube ejector rod rotate, a connecting rod does not rotate), the lead screw driving motor 33 is started to drive a sliding platform 24 to uniformly move rightwards through the lead screw guide rail 31, the grinding wheel driving motor is started to drive the flexible grinding wheel to rotate, and finishing the polishing work of the whole rotary target.

Claims

1. A rotary target surface grinding device is characterized in that: comprises a tube driving motor, a polishing component driving mechanism, a back tube inner support, a back tube ejector rod and an ejector rod moving support component, wherein the tube driving motor is connected with the back tube inner support, the ejector rod moving support component comprises a support seat, a slide and a slide block which are arranged on the support seat, a fine adjustment component is arranged in the slide block, the side surface of the slide way is provided with a long-strip-shaped hole, the slide block is positioned in the slide way and is positioned by a bolt I which passes through the long-strip-shaped hole on the slide way, the back tube ejector rod comprises an ejector head and a connecting rod, the ejector head and the connecting rod are connected through a bearing, the connecting rod is connected with the fine adjustment component in the slide block, the polishing component comprises a sliding platform, a slide rail which is arranged on the sliding platform, a grinding wheel driving motor and a flexible grinding wheel which is, the grinding assembly driving mechanism comprises a support frame, two lead screw guide rails arranged on the support frame through bearings and a lead screw guide rail driving motor connected with one of the lead screw guide rails, the sliding platform is arranged on the two lead screw guide rails and is in threaded connection with the lead screw guide rails, and the inner support of the back tube and the ejector rod of the back tube are respectively positioned above two ends of the lead screw guide rails.

2. The apparatus of claim 1, wherein: the back tube inner support is of a three-jaw chuck structure.

3. The apparatus of claim 1, wherein: the top of the back pipe ejector rod is of a circular truncated cone structure, and the connecting rod is connected with the large end of the top through a bearing.

4. A rotary target surface grinding apparatus according to claim 1, 2 or 3, wherein: the tube driving motor is supported by a support table.

5. A rotary target surface grinding apparatus according to claim 1, 2 or 3, wherein: the slider is internally provided with a mounting hole, the fine adjustment assembly comprises an adjusting nut and an adjusting bolt, the adjusting nut is sleeved in the mounting hole of the slider, the adjusting bolt is connected with the adjusting nut, and the connecting rod of the back tube ejector rod is connected with the adjusting nut.