CN213043583U - Three-freedom-degree plane motion platform - Google Patents
Three-freedom-degree plane motion platform Download PDFInfo
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- CN213043583U CN213043583U CN202021580246.8U CN202021580246U CN213043583U CN 213043583 U CN213043583 U CN 213043583U CN 202021580246 U CN202021580246 U CN 202021580246U CN 213043583 U CN213043583 U CN 213043583U
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Abstract
The utility model discloses a three-degree-of-freedom plane motion platform, which comprises a linear motor, wherein the linear motor comprises a coil and a magnet, and the coil and the magnet are positioned in a biased way according to a certain biased distance, so that a rotor of the linear motor can move in a direction vertical to the driving direction of the linear motor relative to a stator of the linear motor; the linear motor comprises a platform stator and a platform rotor which can move relatively, wherein the platform stator is provided with a plurality of linear motors, the magnet parts of the linear motors are fixed on the platform stator, and the coil parts of the linear motors are fixed on the platform rotor; or the coil part of the linear motor is fixed on the platform stator, and the magnet part of the linear motor is fixed on the platform rotor. The utility model discloses a compact, the overall arrangement is efficient, generate heat few and positioning accuracy is high retrencied to the structure.
Description
Technical Field
The utility model belongs to the semiconductor equipment makes the field and relates to a little operation motion platform mechanism, particularly relates to three degree of freedom plane motion platforms.
Background
The existing three-degree-of-freedom plane motion platform (X, Y direction straight motion and RZ direction rotation) generally adopts two layout modes. One is a way of realizing the motion of three degrees of freedom by adopting independent mechanisms respectively and superposing three sets of mechanisms together, as shown in fig. 1, and is realized by superposing a plurality of conventional linear motor mechanisms (the linear motor is increasingly widely applied in the linear transmission field due to the high transmission efficiency of the linear motor compared with a rotating motor), and the structures of the conventional linear motors are shown in fig. 9 and 10; another arrangement is to use a customized planar motor to achieve three degrees of freedom motion, as shown in fig. 2.
Both of these layouts have their own disadvantages:
1) layout for mechanism stacking
Firstly, the final moving part is connected with the base through each layer of mechanism, and the disturbance of each layer of mechanism is transmitted to the final moving part, so that the positioning precision of the platform is poor;
secondly, a stacking mode is adopted, and the size of the platform in the vertical direction is large;
and the parts are many and the structure is complex.
2) Layout for customized planar motors
Firstly, the plane motor is customized, the design period and the delivery period are long, and the structure is complex;
secondly, the planar motor has large heat productivity and low efficiency.
SUMMERY OF THE UTILITY MODEL
For overcoming the not enough among the prior art, the utility model aims at providing a three degree of freedom planar motion platform, this motion platform structure retrencies compactness, overall arrangement is efficient, generate heat few and positioning accuracy is high.
Another object of the present invention is to provide a linear motor for realizing the above motion stage with three degrees of freedom planar motion.
For reaching the above utility model purpose, the utility model discloses a realize through following technical scheme:
a linear motor comprises a coil and a magnet, wherein the coil and the magnet are offset positioned according to a certain offset distance, so that a rotor of the linear motor can move in a direction perpendicular to the driving direction of the linear motor relative to a stator of the linear motor.
A three-degree-of-freedom planar motion platform comprises a platform stator and a platform rotor which can move relatively, wherein a plurality of linear motors are arranged on the platform stator, magnet parts of the linear motors are fixed on the platform stator, and coil parts of the linear motors are fixed on the platform rotor; or the coil part of the linear motor is fixed on the platform stator, and the magnet part of the linear motor is fixed on the platform rotor.
Further, an air bearing is arranged between the platform stator and the platform rotor.
Furthermore, four air bearings are arranged and are respectively supported around the platform rotor.
The working principle of the utility model is as follows:
the utility model discloses a linear electric motor drive planar motion platform's platform active cell adopts the mode with linear electric motor active cell and stator offset location several millimeters to make motor active cell can for the stator with motor drive direction vertically direction motion to realize the planar motion (the fine motion) of platform in X, Y and RZ direction. But because the utility model discloses well linear electric motor coil and magnet off-set location can lead to the overlapping area reduction of coil and magnet. Since F = B · I · L · N, which is a simplified formula for calculating the linear motor force, where F is the motor thrust, B is the magnetic field strength, I is the current in the coil, L is the effective length of the coil in the magnetic field B, and N is the number of coil turns, the coil and magnet offset positioning is equivalent to reducing L so that the motor thrust will be correspondingly reduced.
To above-mentioned problem the utility model discloses a following method is solved this problem: the change of the motor output when the coil and the magnet are positioned in a biased mode in the same input current is measured through an experiment, a curve of the relation between the coil bias and the change of the thrust constant is obtained, the measured curve is used as a compensation curve to be input into a control system in advance when a motor control algorithm is designed, and therefore the motor coil and the magnet have constant thrust when the coil and the magnet are biased at different distances, and accurate and stable control is achieved.
And simultaneously the utility model discloses an interference in outside world has been isolated to the active cell, cooperates high accuracy measurement system the utility model discloses can realize nanometer level positioning accuracy. As shown in fig. 3, the solid straight line represents the change in the motor constant when the magnet and coil of the linear motor are positioned in an offset manner, and the imaginary straight line represents the change in the corresponding compensation current in the compensator. The current change corresponds to the motor constant change one by one, thereby realizing stable control. Fig. 8 is the utility model discloses simplified control schematic diagram, the curve that the experiment was surveyed can be deposited in a lookup table, and the sensor detects can give the lookup table with information transfer behind the offset distance of coil and magnet to compensate the current value that will correspond in the control loop.
Advantageous effects
Compared with the prior art, the utility model discloses a three degree of freedom planar motion platforms possesses following beneficial effect:
1. the utility model discloses a mode with linear electric motor active cell and stator offset location several millimeters makes the motor active cell can for the stator with motor drive direction vertically direction motion to realize the platform at the planar motion (fine motion) of X, Y and RZ direction.
2. The utility model discloses a four standard linear electric motor drive platform active cells have consequently saved the time of customization, have reduced the uncontrollable risk of customization, have shortened development cycle greatly. Meanwhile, because the linear motor is adopted, an additional coil is not needed, and therefore the layout efficiency is higher and the heat generation is less compared with a planar motor.
3. For the overall arrangement of current adoption stacked structure, the utility model discloses the structure is simpler. Because there is not any mechanical connection between platform active cell and the platform stator, consequently can completely cut off external interference, reach higher positioning accuracy. Simultaneously because there is not laminated structure, the utility model discloses it is littleer at the vertical direction size, the structure is compacter.
4. Specially the utility model discloses a special compensation control algorithm makes the motor have invariable thrust output under the condition that the thrust constant changes.
Drawings
Fig. 1 is a schematic structural diagram of a three-degree-of-freedom motion stage implemented by a mechanism stacking layout in the prior art.
Fig. 2 is a schematic diagram of a customized planar motor implemented three-degree-of-freedom motion stage product in the prior art.
Fig. 3 is the schematic diagram of the thrust constant variation curve of the middle motor of the present invention.
Fig. 4 is a schematic structural diagram of an embodiment of the three-degree-of-freedom planar motion stage according to the present invention.
FIG. 5 is a side view of the embodiment disclosed in FIG. 4.
Fig. 6 is a schematic structural diagram of another embodiment of the three-degree-of-freedom planar motion stage according to the present invention.
FIG. 7 is a side view of the embodiment disclosed in FIG. 6.
Fig. 8 is a simplified control schematic diagram of the present invention.
Fig. 9 is a schematic structural diagram of a linear motor in the prior art.
Fig. 10 is a sectional view taken along line a-a in fig. 9.
Fig. 11 is a schematic mechanism diagram of the linear motor according to the present invention.
Fig. 12 is a sectional view taken along line B-B in fig. 11.
Fig. 13 is a schematic structural diagram of the three-degree-of-freedom planar motion platform of the present invention, which is driven by three linear motors; fig. 13(a) is a schematic diagram of a magnet part fixed on a platform stator and a coil part fixed on a platform mover, and fig. 13(b) is a schematic diagram of a magnet part fixed on a platform mover and a coil part fixed on a platform stator.
Fig. 14 is a schematic structural diagram of another embodiment of the three-degree-of-freedom planar motion platform of the present invention, which is driven by three linear motors; fig. 14(a) is a schematic diagram of a magnet part fixed on a platform stator and a coil part fixed on a platform mover, and fig. 14(b) is a schematic diagram of a magnet part fixed on a platform mover and a coil part fixed on a platform stator.
Detailed Description
The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.
The first embodiment is as follows:
referring to fig. 11 and 12, a linear motor includes a coil and a magnet, which are offset-positioned by an offset distance D such that a mover of the linear motor is movable in a direction perpendicular to a driving direction of the linear motor with respect to a stator of the linear motor.
Example two:
referring to fig. 4 and 5, a three-degree-of-freedom planar motion platform includes a platform stator 1 and a platform mover 2, where the platform stator 1 is disposed with four linear motors (see embodiment one), which are first, second, third, and fourth linear motors 301, 302, 303, 304, respectively, the first and second linear motors 301, 302 are disposed oppositely, the third and fourth linear motors 303, 304 are disposed oppositely, and the platform mover 2 is located in an area formed by the first, second, third, and fourth linear motors 301, 302, 303, 304.
Further, the magnet portions of the first, second, third and fourth linear motors 301, 302, 303, 304 are fixed to the platform stator 1, and the coil portions of the first, second, third and fourth linear motors 301, 302, 303, 304 are fixed to the platform mover 2.
Further, an air bearing 4 is arranged between the platform stator 1 and the platform mover 2.
Furthermore, four air bearings 4 are arranged and respectively supported around the platform mover 2.
In this embodiment, the first linear motor 301 and the second linear motor 302 drive the platform mover 2 to linearly move in the Y direction, the third linear motor 303 and the fourth linear motor 304 drive the platform mover 2 to linearly move in the X direction, and the first linear motor 301 and the second linear motor 302, or the third linear motor 303 and the fourth linear motor 304 drive the platform mover 2 to rotate in the RZ direction.
Example three:
referring to fig. 6 and 7, a three-degree-of-freedom planar motion platform includes a platform stator 1 and a platform mover 2, where the platform stator 1 is disposed with four linear motors (see embodiment one), which are first, second, third, and fourth linear motors 301, 302, 303, 304, the first and second linear motors 301, 302 are disposed oppositely, the third and fourth linear motors 303, 304 are disposed oppositely, and the platform mover 2 is located in an area formed by the first, second, third, and fourth linear motors 301, 302, 303, 304.
Further, the coil portions of the first, second, third and fourth linear motors 301, 302, 303, 304 are fixed to the platform stator 1, and the magnet portions of the first, second, third and fourth linear motors 301, 302, 303, 304 are fixed to the platform mover 2.
Further, an air bearing 4 is arranged between the platform stator 1 and the platform mover 2.
Furthermore, four air bearings 4 are arranged and respectively supported around the platform mover 2.
In this embodiment, the coils of the four linear motors are fixed on the platform stator 1, and the magnets are fixed on the platform mover 2, which has an advantage over the second embodiment in that the platform mover 2 is not connected to the coils of the linear motors, thereby reducing the disturbance of the motor cables to the platform mover 2.
Example four:
referring to fig. 13(a) and 13(b), a three-degree-of-freedom planar motion platform includes a platform stator 1 and a platform mover 2, where the platform stator 1 is disposed with three linear motors, which are, according to the first embodiment, a first linear motor 301, a second linear motor 302, and a third linear motor 303, where the first and second linear motors 301 and 302 are disposed on two sides of the platform mover 2 and are disposed in an X direction of the platform mover 2 to drive the platform mover 2 to linearly move in a Y direction, the third linear motor 303 is disposed in the Y direction of the platform mover 2 to drive the platform mover 2 to linearly move in the X direction, and the first and second linear motors 301 and 302 together drive the platform mover 2 to rotate in an RZ direction. See example two or example three for other structures.
Example five:
referring to fig. 14(a) and 14(b), a three-degree-of-freedom planar motion stage, the linear motor comprises a platform stator 1 and a platform mover 2 which can move relatively, three linear motors are arranged on the platform stator 1, referring to the first embodiment, namely a first linear motor 301, a second linear motor 302 and a third linear motor 303, the first, second and third linear motors 301, 302 and 303 are uniformly arranged outside the platform mover 2, the third linear motor 303 is located in the Y direction of the platform mover 2, is used for driving the platform mover 2 to linearly move in the X direction, the first and second linear motors 301 and 302 drive the platform mover 2 to linearly move in the Y direction under the combined action, the first, second, and third linear motors 301, 302, and 303 drive the platform mover 2 to rotate in the RZ direction together. See example two or example three for other structures.
Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.
Claims (8)
1. The utility model provides a three degree of freedom planar motion platforms, includes platform stator (1) and platform active cell (2) that can relative movement, a plurality of linear electric motor have been arranged on platform stator (1), linear electric motor includes coil and magnet, its characterized in that: and the coil and the magnet are offset positioned according to a certain offset distance (D), so that the rotor of the linear motor can move in the direction vertical to the driving direction of the linear motor relative to the stator of the linear motor.
2. The three-degree-of-freedom planar motion table according to claim 1, wherein: and a magnet part of the linear motor is fixed on the platform stator (1), and a coil part of the linear motor is fixed on the platform rotor (2).
3. The three-degree-of-freedom planar motion table according to claim 1, wherein: the coil part of the linear motor is fixed on the platform stator (1), and the magnet part of the linear motor is fixed on the platform rotor (2).
4. A three-degree-of-freedom planar motion table according to claim 2 or 3, characterized in that: the linear motors comprise three linear motors, namely a first linear motor (301), a second linear motor (302) and a third linear motor (303), wherein the first linear motor (301) and the second linear motor (302) are oppositely arranged at two sides of the platform rotor (2), are arranged in the X direction of the platform rotor (2), and are used for driving the platform rotor (2) to linearly move in the Y direction; the third linear motor (303) is arranged in the Y direction of the platform mover (2) and used for driving the platform mover (2) to move linearly in the X direction; the first linear motor (301) and the second linear motor (302) drive the platform mover (2) to rotate in the RZ direction together.
5. A three-degree-of-freedom planar motion table according to claim 2 or 3, characterized in that: a plurality of linear electric motor includes threely, is first linear electric motor (301), second linear electric motor (302) and third linear electric motor (303) respectively, first, second, third linear electric motor (301, 302, 303) evenly arrange the outside of platform active cell (2), third linear electric motor (303) are located on the Y direction of platform active cell (2), are used for the drive platform active cell (2) are at X direction linear movement, first, second linear electric motor (301, 302) drive under the combined action platform active cell (2) are at Y direction linear movement, first, second, third linear electric motor (301, 302, 303) together drive platform active cell (2) are rotatory in the RZ direction.
6. A three-degree-of-freedom planar motion table according to claim 2 or 3, characterized in that: the linear motors comprise a first linear motor, a second linear motor, a third linear motor and a fourth linear motor (301, 302, 303, 304), wherein the first linear motor and the second linear motor (301, 302) are oppositely arranged at two sides of the platform rotor (2), are arranged in the X direction of the platform rotor (2), and are used for driving the platform rotor (2) to linearly move in the Y direction; the third linear motor and the fourth linear motor (303, 304) are oppositely arranged on the other two sides of the platform rotor (2), arranged in the Y direction of the platform rotor (2) and used for driving the platform stator (1) to linearly move in the X direction; the first linear motor and the second linear motor (301 and 302) or the third linear motor and the fourth linear motor (303 and 304) drive the platform mover (2) to rotate in the RZ direction together.
7. A three-degree-of-freedom planar motion table according to claim 2 or 3, characterized in that: an air bearing (4) is arranged between the platform stator (1) and the platform rotor (2).
8. The three-degree-of-freedom planar motion table according to claim 7, wherein: four air bearings (4) are arranged and are respectively supported around the platform rotor (2).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202021580246.8U CN213043583U (en) | 2020-08-03 | 2020-08-03 | Three-freedom-degree plane motion platform |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202021580246.8U CN213043583U (en) | 2020-08-03 | 2020-08-03 | Three-freedom-degree plane motion platform |
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| Publication Number | Publication Date |
|---|---|
| CN213043583U true CN213043583U (en) | 2021-04-23 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN202021580246.8U Active CN213043583U (en) | 2020-08-03 | 2020-08-03 | Three-freedom-degree plane motion platform |
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Address after: Room 601, Building D, Zhonghe (Suzhou) Science and Technology Innovation Port, No. 588 Xiangrong Road, High Speed Rail New City, Xiangcheng District, Suzhou City, Jiangsu Province, 215000 (6th and 7th floors) Patentee after: Jiangsu Jicui sukesi Technology Co.,Ltd. Country or region after: Zhong Guo Address before: Room 601-a109, Tiancheng information building, 88 Tiancheng Road, high speed rail new town, Xiangcheng District, Suzhou City, Jiangsu Province Patentee before: Jiangsu Jicui sukesi Technology Co.,Ltd. Country or region before: Zhong Guo |