Improved generation reassembling type silicon chip bearing frame
Technical Field
The utility model relates to a battery piece processing equipment, concretely relates to improved generation reassembling type silicon chip bearing frame.
Background
The production process flow of the solar silicon wafer generally comprises silicon wafer detection, surface texture making and acid pickling, diffusion knot making, phosphorosilicate glass removal, plasma etching and acid pickling, antireflection film plating, screen printing, rapid sintering and the like. In the production and processing process, a plurality of silicon wafers to be processed are generally placed on the bearing frame, the whole bearing frame is connected and installed on the transportation rail, and the silicon wafers are driven to be transferred between the processing stations through the movement of the bearing frame, so that the silicon wafers are processed in batches. The bearing frame on the market is generally composed of a C/C composite board, specifically, a plurality of rectangular frame grooves are directly processed on the C/C composite board, so that a frame for bearing silicon wafers is formed, when the silicon wafers are placed, the silicon wafers are fixed on the rectangular frame grooves through hooks, or steps are directly processed at corresponding positions of the rectangular frame grooves, so that the silicon wafers are placed conveniently; however, the bearing frame processed in this way has a single function, and wastes sheet materials, resulting in an increase in processing cost. In order to overcome the defects, the utility model with the publication number of CN 209963033U discloses a spliced silicon wafer bearing frame which is formed by splicing a plurality of transverse supporting rods and a plurality of longitudinal supporting rods, so that the bearing frame is flexible to disassemble and assemble, convenient to store, capable of saving plates and capable of reducing the processing cost; however, the spliced bearing frame still needs to use a plurality of transverse supporting rods and longitudinal supporting rods, so that more C/C composite board materials are consumed, and the processing cost is still higher.
SUMMERY OF THE UTILITY MODEL
The utility model discloses an overcome prior art not enough, provide an improved generation reassembling type silicon chip bearing frame, this bearing frame simple structure saves the sheet material, easy dismounting to stability is good.
The purpose of the utility model is realized through the following technical scheme:
an improved detachable silicon wafer bearing frame comprises a plurality of transverse supporting rods and two groups of guide rail group rods, wherein the transverse supporting rods extend transversely and are arranged, the two groups of guide rail group rods extend along the longitudinal direction and are oppositely arranged, the plurality of transverse supporting rods are arranged at equal intervals, and two ends of each transverse supporting rod are respectively detachably mounted on the two groups of guide rail group rods; its characterized in that all be equipped with many between many horizontal supporting rod and support the dead lever, support the dead lever with horizontal supporting rod mutually perpendicular sets up, the both ends of supporting the dead lever all through threaded connection subassembly with horizontal supporting rod connects, threaded connection subassembly is including setting up the threaded rod on horizontal supporting rod and setting up the connecting rod at the support dead lever tip, be equipped with on the connecting rod with the helicitic texture that the threaded rod matches.
The working principle of the improved detachable silicon wafer bearing frame is as follows:
when the silicon wafer processing device works, a plurality of independent bearing plates are placed between every two transverse supporting rods, the bearing plates are supported and fixed through the two transverse supporting rods, or an integral rectangular bearing plate matched with an area defined by the two transverse supporting rods is placed on the two transverse supporting rods, and then a silicon wafer to be processed is placed at a designated position of the bearing plates; the two groups of guide rail group rods are matched with the conveying chain, and the whole bearing frame moves among the processing stations under the driving of the conveying chain, so that the carrying and transferring of the silicon wafers are realized. The improved detachable silicon wafer bearing frame of the utility model mainly uses the horizontal supporting rod to support the bearing plate, thereby realizing the carrying of the silicon wafer to be processed; compared with the traditional bearing frame, the bearing frame of the utility model omits an integral type bearing rod which is longitudinally arranged, and adopts the supporting and fixing rod with shorter length to complete the position fixing of the transverse bearing rod, thereby avoiding the longitudinal bending deformation of the transverse bearing rod, facilitating the processing and manufacturing of plates, reducing the processing difficulty, reducing the requirement on raw materials, further saving the material of the bearing frame, and being beneficial to reducing the cost; simultaneously, the both ends of supporting the dead lever are connected with horizontal supporting rod through threaded connection subassembly, effectively lock the position of supporting the dead lever to be favorable to improving the fixed of supporting the dead lever to horizontal supporting rod, improve horizontal supporting rod's resistance to deformation ability.
The utility model discloses an optimal scheme, the support dead lever one-to-one setting between adjacent two sets of horizontal supporting rod.
Preferably, the threaded rod provided on the middle transverse support rod is a double-threaded screw, which is rotatably provided on the transverse support rod.
According to a preferable scheme of the utility model, a plurality of limiting installation grooves which are arranged along the longitudinal direction are arranged on the inner side of the guide rail group rod, the limiting installation grooves are arranged at equal intervals, and the limiting installation grooves are in a 7 shape; mounting hooks which are matched with the limiting mounting grooves and arranged at right angles are arranged at the two ends of the transverse supporting rod; and the mounting hooks at the two ends of the transverse supporting rod are correspondingly arranged on the limiting mounting grooves on the two groups of guide rail group rods.
The utility model discloses a preferred scheme, corner between the both ends of horizontal supporting pole and the guide rail group pole all is equipped with the corner connecting piece, the guide rail group pole is equipped with the connecting hole with the department of correspondence of horizontal supporting pole, through bolted connection between corner connecting piece and horizontal supporting pole and the guide rail group pole.
The utility model discloses a preferred scheme, the place ahead that is located the horizontal supporting pole foremost and the rear that is located last horizontal supporting pole all are equipped with horizontal stiffener, the both ends of horizontal stiffener all with two sets of guide rail group pole are connected.
Preferably, longitudinal reinforcing rods are arranged on the inner sides of the two groups of guide rail group rods, limiting grooves are arranged at the corresponding positions of the transverse supporting rods and the transverse reinforcing rods and the longitudinal reinforcing rods, and connecting grooves matched with the limiting grooves are arranged on the longitudinal reinforcing rods; the corner connecting pieces are arranged between the longitudinal reinforcing rod and the transverse supporting rod as well as between the longitudinal reinforcing rod and the transverse reinforcing rod.
The utility model discloses a preferred scheme, guide rail group pole includes a plurality of guide rail boards, a plurality of guide rail boards are arranged along horizontal direction and are set up, and the vertical height ratio horizontal width of every guide rail board is big.
The utility model discloses a preferred scheme, be equipped with the mounting hole that a plurality of transverse arrangement set up on the horizontal supporting pole, this mounting hole with the threaded rod matches the setting.
The utility model discloses a preferred scheme, support the dead lever and set up at the connecting rod formula mechanism as an organic whole that supports the dead lever tip, just the external diameter of connecting rod is bigger than supporting the dead lever.
Compared with the prior art, the utility model following beneficial effect has:
1. the utility model mainly uses the horizontal supporting rod to support the bearing plate, thereby realizing the carrying of the silicon wafer to be processed; for traditional bearing frame, saved the supporting rod of integral vertical setting, adopted the shorter support dead lever of length to accomplish the rigidity to horizontal supporting rod to avoid horizontal supporting rod to take place fore-and-aft bending type and become, the manufacturing of the panel of being convenient for like this reduces the processing degree of difficulty, reduces the requirement to raw and other materials, has further saved bearing frame's material simultaneously, and is favorable to reduce cost.
2. The utility model discloses a both ends of supporting the dead lever are connected with the cross bearing pole through threaded connection subassembly, effectively lock the position of supporting the dead lever to be favorable to improving the fixed of supporting the dead lever to the cross bearing pole, improve the resistance to deformation ability of cross bearing pole.
Drawings
Fig. 1 is a schematic perspective view of one embodiment of an improved detachable silicon wafer carrying frame according to the present invention.
Fig. 2 is an enlarged view of a in fig. 1.
Fig. 3 is a perspective view of the guide rail set bar.
Fig. 4 is a front view of the lateral support bar.
Fig. 5 is an exploded view of two supporting rods and a threaded rod.
Fig. 6 is a front view of the longitudinal stiffener.
Detailed Description
The present invention will be further described with reference to the following examples and drawings, but the embodiments of the present invention are not limited thereto.
Referring to fig. 1 to 6, the improved detachable silicon wafer carrying frame of this embodiment includes a plurality of transverse supporting rods 1 extending transversely and two sets of guide rail set rods 5, the two sets of guide rail set rods 5 extend along a longitudinal direction and are disposed oppositely, the plurality of transverse supporting rods 1 are disposed at equal intervals, and two ends of each transverse supporting rod 1 are respectively detachably mounted on the two sets of guide rail set rods 5; all be equipped with many between many horizontal supporting rod 1 and support dead lever 3, support dead lever 3 with horizontal supporting rod 1 mutually perpendicular sets up, the both ends of supporting dead lever 3 all through threaded connection subassembly with horizontal supporting rod 1 is connected, threaded connection subassembly is including setting up threaded rod 14 on horizontal supporting rod 1 and setting up at the connecting rod 6 that supports 3 tip of dead lever, be equipped with on the connecting rod 6 with the internal thread structure that threaded rod 14 matches.
Referring to fig. 1, the supporting fixing rods 3 between two adjacent sets of transverse supporting rods 1 are arranged in a one-to-one correspondence. Thus, the supporting and fixing rods 3 corresponding to each other form an integral fixing rod extending longitudinally, which is beneficial to improving the position fixing effect on the transverse supporting rod 1.
Referring to fig. 1 and 5, the threaded rod 14 provided on the middle transverse support bar 1 (except for the foremost and rearmost transverse support bars) is a double-threaded screw that is rotatably provided on the transverse support bar 1. Through the arrangement of the double-threaded screw, the end parts of the supporting and fixing rods 3 between the two adjacent groups of the transverse supporting rods 1 are connected to the same threaded rod 14, the supporting and fixing effects of the supporting and fixing rods are improved, the structure is simplified, and the number of the threaded rods 14 arranged on the transverse supporting rods 1 can be reduced. In this embodiment, there are three supporting and fixing rods 3 between every two transverse supporting rods 1.
Referring to fig. 3 and 4, a plurality of limiting installation grooves 9 are arranged in a longitudinal direction on the inner side of the guide rail group rod 5, the limiting installation grooves 9 are arranged at equal intervals, and the limiting installation grooves 9 are 7-shaped; mounting hooks 11 which are matched with the limiting mounting grooves 9 and are arranged at right angles are arranged at two ends of the transverse supporting rod 1; and the mounting hooks 11 at the two ends of the transverse supporting rod 1 are correspondingly arranged on the limiting mounting grooves 9 on the two groups of guide rail group rods 5. Through the setting of spacing mounting groove 9 and installation hook 11, be convenient for horizontal supporting rod 1 and the installation and the dismantlement of guide rail group pole 5 to spacing effectual, accomplish the restriction to horizontal and longitudinal direction of horizontal supporting rod 1 simultaneously, design benefit, simple structure.
Referring to fig. 1 and 4, corner connectors 7 are respectively disposed at corners between two ends of the transverse support rod 1 and the guide rail group rods 5, connecting holes 10 are disposed at corresponding positions of the guide rail group rods 5 and the transverse support rod 1, and the corner connectors 7 are connected with the transverse support rod 1 and the guide rail group rods 5 through bolts. Through the arrangement of the corner connecting piece 7, the stability between the transverse supporting rod 1 and the guide rail group rod 5 is further enhanced, so that the connection between the transverse supporting rod and the guide rail group rod is firmer.
Referring to fig. 1 and 2, a transverse reinforcing rod 2 is arranged in front of the foremost transverse supporting rod 1 and behind the rearmost transverse supporting rod 1, and both ends of the transverse reinforcing rod 2 are connected with the two sets of guide rail group rods 5. In this embodiment, the transverse reinforcing rods 2 are further fixedly connected with the corners of the guide rail group rods 5 through corner connecting pieces 7 and bolts. Through the setting of horizontal stiffener 2, be favorable to improving the stability of whole bearing frame. In this embodiment, the two end portions of the horizontal reinforcing rod 2 are also provided with mounting hooks 11, and the corresponding portion of the guide rail group rod 5 is also provided with a limiting mounting groove 9, so as to limit and fix the position of the horizontal reinforcing rod 2.
Referring to fig. 1, 2 and 6, longitudinal reinforcing rods 4 are respectively arranged on the inner sides of the two groups of guide rail group rods 5, limiting grooves 12 are respectively arranged on the transverse supporting rods 1 and the transverse reinforcing rods 2 at positions corresponding to the longitudinal reinforcing rods 4, and connecting grooves 15 matched with the limiting grooves 12 are arranged on the longitudinal reinforcing rods 4; and the corner connecting pieces 7 are arranged between the longitudinal reinforcing rod 4 and the transverse supporting rod 1 as well as between the longitudinal reinforcing rod and the transverse reinforcing rod 2. Through indulging the setting of stiffener 4, form the cooperation with horizontal stiffener 2 for whole bearing frame is firmer all around, and stability is better, and can further carry out spacing and connection installation to all horizontal supporting rod 1, thereby improves the stability of whole bearing frame. In this embodiment, the spacing groove 12 on the horizontal supporting rod 1 is downward, the spacing groove 12 on the horizontal reinforcing rod 2 is downward, indulge the connecting groove 15 on the reinforcing rod 4 and correspond the matching setting, set up the spacing groove 12 of different orientations like this, be favorable to improving the installation back and indulge the fastening nature and the stability between reinforcing rod 4, horizontal reinforcing rod 2 and the horizontal supporting rod 1.
Referring to fig. 2, the guide rail set bar 5 includes a plurality of guide rail plates 8, the plurality of guide rail plates 8 are arranged in a horizontal direction, and a vertical height of each guide rail plate 8 is greater than a horizontal width. In this embodiment, the plurality of rail plates 8 are connected together by bolts. By arranging the guide rail group rod 5, the bending resistance of the guide rail plate 8 in the vertical direction is obviously improved, so that the deformation resistance of the whole bearing frame is improved, the top surface of a silicon wafer is ensured to be kept horizontal in the processing and transporting processes, and the processing quality of the silicon wafer is improved.
In this embodiment, the supporting and fixing rod 3 is made of stainless steel. The supporting fixing rod 3 made of stainless steel is adopted, so that the cost is reduced, and the processing difficulty is reduced; in addition, the bearing plate is supported between the transverse supporting rods 1, the silicon wafer is heated and is mainly influenced by the bearing plate and the transverse supporting rods 1, and the supporting and fixing rods 3 mainly play a role in stabilizing the transverse supporting rods 1, so that the cost and the processing difficulty can be effectively reduced by adopting the supporting and fixing rods 3 made of stainless steel materials with lower cost.
Referring to fig. 1 and 4, the transverse support rod 1 is provided with a plurality of mounting holes 13 arranged in a transverse row, and the mounting holes 13 are matched with the threaded rods 14. Through the setting of mounting hole 13, the setting of threaded rod 14 of being convenient for, simultaneously, set up a plurality of mounting holes 13, can set up threaded rod 14 in the different positions of horizontal supporting rod 1 according to actual conditions to support dead lever 3 and set up in different positions, improve the installation flexibility who supports dead lever 3
Referring to fig. 5, the supporting and fixing rod 3 and the connecting rod 6 disposed at the end of the supporting and fixing rod 3 are an integral mechanism, and the connecting rod 6 has a larger outer diameter than the supporting and fixing rod 3.
Referring to fig. 1 to 6, the working principle of the improved detachable silicon wafer carrying frame of the present embodiment is as follows:
when the silicon wafer machining device works, a plurality of independent bearing plates are placed between every two transverse supporting rods 1, the bearing plates are supported and fixed through the two transverse supporting rods 1, or an integral rectangular bearing plate matched with an area defined by the two transverse supporting rods 1 is placed on the two transverse supporting rods 1, and then a silicon wafer to be machined is placed at a designated position of the bearing plates; the two groups of guide rail group rods 5 are matched with the conveying chain, and the whole bearing frame moves among the processing stations under the driving of the conveying chain, so that the carrying and transferring of the silicon wafers are realized. The improved detachable silicon wafer bearing frame of the utility model mainly uses the horizontal supporting rod 1 to support the bearing plate, thereby realizing the carrying of the silicon wafer to be processed; compared with the traditional bearing frame, the bearing frame of the utility model omits an integral type bearing rod which is longitudinally arranged, and adopts the supporting and fixing rod 3 with shorter length to complete the position fixing of the transverse bearing rod 1, thereby avoiding the longitudinal bending type change of the transverse bearing rod 1, facilitating the processing and manufacturing of plates, reducing the processing difficulty, reducing the requirement on raw materials, further saving the material of the bearing frame, and being beneficial to reducing the cost; simultaneously, the both ends of supporting dead lever 3 are connected with horizontal supporting rod 1 through threaded connection subassembly, effectively lock the position of supporting dead lever 3 to be favorable to improving the fixed of supporting dead lever 3 to horizontal supporting rod 1, improve the resistance to deformation ability of horizontal supporting rod 1.
The above is the preferred embodiment of the present invention, but the embodiment of the present invention is not limited by the above, and any other changes, modifications, substitutions, combinations, and simplifications which do not depart from the spirit and principle of the present invention should be equivalent replacement modes, and all are included in the scope of the present invention.