CN212570951U

CN212570951U - Temporary storage mechanism for silicon wafers

Info

Publication number: CN212570951U
Application number: CN202021688084.XU
Authority: CN
Inventors: 蒋旭东; 张弛; 王志刚; 王四海; 蒋成斌; 顾建
Original assignee: Nanjing Topstek Automation Equipment Co ltd
Current assignee: Nanjing Topstek Automation Equipment Co ltd
Priority date: 2020-08-13
Filing date: 2020-08-13
Publication date: 2021-02-19
Anticipated expiration: 2030-08-13

Abstract

The utility model discloses a silicon chip temporary storage mechanism, including elevating system and a plurality of temporary storage frames of parallel arrangement in proper order along the horizontal direction, the temporary storage frame is equipped with the column of keeping in that a plurality of groups along its direction of height are used for supporting the silicon chip on the inside wall of temporary storage board including controlling the relative temporary storage board that sets up, and the side link up so that the conveyer passes through around the temporary storage frame, and elevating system links to each other with the temporary storage frame and drives the temporary storage frame and rise and descend. The utility model discloses a silicon chip temporary storage mechanism can realize many conveyer and use simultaneously, adopts an elevating system can realize the lift of multiunit temporary storage frame, has improved work efficiency by a wide margin.

Description

Temporary storage mechanism for silicon wafers

Technical Field

The utility model relates to a temporary storage device especially relates to a temporary storage mechanism in silicon chip is carried.

Background

The existing temporary storage mechanism for silicon wafers adopts a one-to-one matching use, a lifting machine and a temporary storage mechanism as shown in figure 1; the conveyer drives the silicon wafers to flow in, and each time one silicon wafer flows in, the electric cylinder is lifted by one interval to reach the full storage of the temporary storage plate. The existing temporary storage mechanism for silicon wafers has high cost, can only be a one-to-one conveyor, and has a bulky overall structure.

SUMMERY OF THE UTILITY MODEL

Utility model purpose: the utility model aims at providing a silicon chip temporary storage mechanism, it is with low costs, excellent in use effect.

The technical scheme is as follows: the utility model provides a silicon chip temporary storage mechanism, including elevating system and a plurality of temporary storage frame along horizontal direction parallel arrangement in proper order, the temporary storage frame is equipped with the column of keeping in that a plurality of group along its direction of height is used for supporting the silicon chip on the inside wall of temporary storage board including controlling the relative temporary storage board that sets up, and the side link up so that the conveyer passes through around the temporary storage frame, and elevating system links to each other with the temporary storage frame and drives the temporary storage frame and rise and descend. The number of the temporary storage frames can be set according to actual needs; the lifting mechanism can be a lifting electric cylinder or other devices capable of realizing height lifting in the prior art. In the prior art, the silicon wafer is conveyed to a temporary storage plate, but the cost is high, and the abrasion is serious due to the large contact surface; the utility model discloses a post of keeping in reduces the wearing and tearing of silicon chip when reduce cost.

Preferably, the temporary storage column is sleeved with a soft leather sleeve; the wear rate of the silicon wafer is degraded due to the arrangement of the soft-skin sleeve. The soft skin sleeve can be made of PU, silica gel or other materials in the prior art.

Furthermore, the surface of the sleeve is provided with a spherical bulge; the arrangement of the salient points changes the contact between the sleeve and the silicon wafer from line contact to point contact, thereby further reducing the wear rate of the silicon wafer.

Preferably, the lifting mechanism is provided with a mounting plate connected with the lifting mechanism, and the mounting plate is provided with a positioning pin; the temporary storage frame comprises a bottom plate, wherein a positioning through hole, a positioning through hole and a positioning pin are arranged on the bottom plate, so that the temporary storage frame can be quickly positioned.

Furthermore, the side wall of the bottom plate is provided with a screw hole which is communicated with the positioning hole, and a positioning bolt is arranged in the screw hole; the front end part of the positioning bolt can be abutted against the positioning pin by rotating the positioning bolt so as to realize the accurate positioning of the temporary storage frame.

Preferably, each group of temporary storage columns comprises a front temporary storage column and a rear temporary storage column which are positioned at the same height; and a space for the silicon wafer to pass through is arranged between the adjacent temporary storage columns in the upper and lower height directions.

Preferably, the bottom plate comprises a left bottom plate and a right bottom plate which are connected with the temporary storage plate, and the distance between the left bottom plate and the right bottom plate is larger than the width of the conveyor; namely, the left bottom plate is not connected with the right bottom plate, and a sufficient distance is left between the left bottom plate and the right bottom plate so that the temporary storage frame integrally passes through the conveyor; when the temporary storage frame is full or the conveyor fails, the temporary storage frame needs to be moved away, so that the whole temporary storage frame can be conveniently lifted away.

Preferably, the temporary storage frame is further provided with a connecting rod, the temporary storage frame comprises a left temporary storage plate and a right temporary storage plate, and two ends of the connecting rod are detachably connected with the outer side wall of the left temporary storage plate and the outer side wall of the right temporary storage plate respectively. One end of the connecting rod is detachably connected with the outer side wall of the left temporary storage frame, and the other end of the connecting rod is detachably connected with the outer side wall of the right temporary storage frame; when the conveyor conveys the silicon wafer to the temporary storage mechanism, the connecting rod is in a detachable state; when the temporary storage frame needs to be moved, the connecting rod is in an installation state, so that the stability of the silicon wafer is ensured, and the silicon wafer is prevented from falling.

Wherein, the height of the connecting rod is lower than that of the temporary storage column and higher than that of the silicon wafer of the conveyor.

Preferably, the temporary storage frame comprises a top plate connected with the temporary storage plate, and a handle is arranged on the top plate.

Has the advantages that: the silicon wafer temporary storage mechanism of the utility model can realize simultaneous use of a plurality of conveyors, and can realize the lifting of a plurality of groups of temporary storage frames by adopting one lifting mechanism, thereby greatly improving the working efficiency; the temporary storage frame has high positioning precision, and the temporary storage plate side wall is provided with the temporary storage column for bearing the silicon wafer, thereby greatly reducing the cost of the temporary storage mechanism; the temporary storage column is sleeved with the soft skin sleeve, so that the wear rate of the silicon wafer is reduced, and the quality of the silicon wafer is improved; and the temporary storage frame can be disassembled and assembled as required, and is convenient and practical.

Drawings

FIG. 1 is a schematic view of a conventional escrow mechanism;

fig. 2 is a front three-dimensional schematic view of the temporary storage mechanism of the present invention;

fig. 3 is a rear three-dimensional schematic view of the temporary storage mechanism of the present invention;

FIG. 4 is a front view of the temporary storage mechanism of the present invention;

FIG. 5 is a side view of the temporary storage mechanism of the present invention;

FIG. 6 is a three-dimensional schematic view of the temporary storage frame mounted on the mounting plate;

FIG. 7 is a front view of the staging frame mounted to the mounting plate;

fig. 8 is a schematic view of the working of the temporary storage mechanism and the conveyor of the present invention.

Detailed Description

The present invention will be described in further detail with reference to examples.

As shown in fig. 2, the temporary silicon wafer storage mechanism in this embodiment includes an electric lift cylinder 1 and a plurality of temporary storage frames 2 located above the electric lift cylinder. A mounting bracket 3 is fixedly arranged above the lifting electric cylinder 1, and the lifting electric cylinder 1 drives the mounting bracket to ascend and descend in height; the top fixed connection of installing support 3 has horizontal installation board 4, and horizontal installation board in this embodiment adopts the section bar to make, and mounting panel 4 extends to the left and right sides, installs four parallel arrangement's temporary storage frame 2 along its extending direction in proper order on the horizontal installation board 4, and every temporary storage frame 2 encloses into a silicon chip temporary storage area 17.

As shown in fig. 2 to 7, the temporary storage frame 2 includes two vertical temporary storage plates 5, a horizontal upper top plate 10 and a horizontal lower bottom plate, which are oppositely arranged left and right, the temporary storage plates are not arranged on the front and rear side surfaces of the temporary storage frame 2, i.e., the front and rear side surfaces of the temporary storage frame are through for the silicon wafer conveyor to pass through, and the temporary storage plates 5, the top plate 10 and the bottom plate are fixedly connected with each other. The temporary storage plate comprises a left temporary storage plate and a right temporary storage plate, screw holes are formed in the front side wall and the rear side wall of each temporary storage plate, and adaptive adjusting bolts 14 are arranged in the screw holes. The temporary storage frame is also provided with a detachable transverse connecting rod 13, and the connecting rod 13 is positioned at the front side and the rear side of the temporary storage plate 5; the connecting rod 13 is arranged at a height lower than the temporary storage column 6 and higher than the height of the silicon wafer on the conveyor 7. The adjusting bolts 14 penetrate through two ends of the connecting rod 13 and are installed on the outer side walls of the left temporary storage plate and the right temporary storage plate 5, and the connecting rod 13 realizes the installation and the disassembly of the connecting rod by rotating the adjusting bolts; the one end of connecting rod and the lateral wall of the frame of keeping in a left side can be dismantled and be connected promptly, and the other end can be dismantled with the lateral wall of the frame of keeping in a right side and be connected. A plurality of groups of temporary storage columns 6 for supporting silicon wafers are fixedly arranged on the inner side wall of the temporary storage plate 5 along the height direction of the temporary storage plate, M3 screws are adopted in the embodiment, soft leather sleeves are sleeved outside the temporary storage columns, and spherical convex points are arranged on the surfaces of the sleeves; each group of temporary storage columns 6 comprises a front temporary storage column and a rear temporary storage column which are positioned at the same height, and the width of the front temporary storage column and the width of the rear temporary storage column are slightly smaller than that of the silicon wafer; the positions of the upper and lower groups of temporary storage columns which are adjacent in height in the horizontal direction are the same, and only the heights are different; thus forming two vertical rows of temporary storage columns, and each vertical row of temporary storage columns is aligned up and down.

A handle 15 is fixedly arranged above the top plate 10. The bottom plate comprises a left bottom plate 11 and a right bottom plate 12, and the distance between the left bottom plate 11 and the right bottom plate 12 is larger than the width of the silicon wafer transmitted by the conveyor, so that the temporary storage frame can smoothly pass through the conveyor; eight connecting plates 16 are fixedly arranged on the mounting plate, each connecting plate 16 is fixedly provided with a front positioning pin and a rear positioning pin 8, and positioning through holes matched with the positioning pins are formed in the corresponding positions of the bottom plate and the positioning pins; horizontal screw holes are formed in the front side wall and the rear side wall of the bottom plate and communicated with the positioning holes, positioning bolts 9 are arranged in the screw holes, and the end portions of the positioning bolts 9 can be abutted against the positioning pins 8 by rotating the positioning bolts 9 to avoid the temporary storage frame from moving, so that the precision is improved.

When the utility model is used, as shown in fig. 8, the four temporary storage frames 2 are installed on the installation plate 4 in parallel, the positioning pin 8 is inserted into the positioning through hole of the bottom plate for positioning during installation, and the positioning bolts 9 on both sides are rotated to realize accurate positioning; at this time, one end or both ends of the connecting rod 13 are in a detached state, and the lifting electric cylinder 1 drives the four temporary storage frames 2 to ascend and descend integrally. Temporary storage mechanism during operation, when the silicon chip carried from conveyer 7, reachd the station of keeping in, promote an interval that electric jar 1 upwards promotes, switch over in proper order, reach the silicon chip and pile up the effect of keeping in, multichannel conveyer 7 can keep in step. When the frame of keeping in full silicon chip or a certain conveyer rear end breaks down, need take off the frame of keeping in that corresponds in order to change new frame of keeping in, the accessible this moment installs connecting rod 13 additional and improves the stability of keeping in the jar, and the connecting rod is in the installation lock state of attaching to loosen positioning bolt, the frame of keeping in of manual movement can.

Claims

1. The temporary storage mechanism for the silicon wafers is characterized in that: including elevating system and a plurality of frames of keeping in of parallel arrangement in proper order along the horizontal direction, the frame of keeping in includes the relative temporary storage board that sets up about, is equipped with on the inside wall of temporary storage board along a plurality of groups of its direction of height and is used for supporting the post of keeping in of silicon chip, and the side link up so that the conveyer passes through around the frame of keeping in, and elevating system links to each other with the frame of keeping in and drives the frame of keeping in and rise and descend.

2. The silicon wafer temporary storage mechanism of claim 1, wherein: the temporary storage column is sleeved with a soft leather sleeve.

3. The temporary storage mechanism for silicon wafers as claimed in claim 2, wherein: the surface of the sleeve is provided with a spherical bulge.

4. The silicon wafer temporary storage mechanism of claim 1, wherein: the lifting mechanism is provided with a mounting plate connected with the lifting mechanism, and the mounting plate is provided with a positioning pin; the temporary storage frame comprises a bottom plate, wherein a positioning through hole, a positioning through hole and a positioning pin are arranged on the bottom plate.

5. The temporary storage mechanism for silicon wafers as claimed in claim 4, wherein: the side wall of the bottom plate is provided with a screw hole which is communicated with the positioning hole, and a positioning bolt is arranged in the screw hole.

6. The temporary storage mechanism for silicon wafers as claimed in claim 4, wherein: the bottom plate comprises a left bottom plate and a right bottom plate which are connected with the temporary storage plate, and the distance between the left bottom plate and the right bottom plate is larger than the width of the conveyor for conveying the silicon wafers.

7. The silicon wafer temporary storage mechanism of claim 1, wherein: each group of temporary storage columns comprises two temporary storage columns positioned at the same height.

8. The silicon wafer temporary storage mechanism of claim 1, wherein: the temporary storage frame is further provided with a connecting rod, the temporary storage plate comprises a left temporary storage plate and a right temporary storage plate, and two ends of the connecting rod are detachably connected with the outer side wall of the left temporary storage plate and the outer side wall of the right temporary storage plate respectively.

9. The silicon wafer temporary storage mechanism of claim 1, wherein: the temporary storage frame comprises a top plate connected with the temporary storage plate, and a handle is arranged on the top plate.