CN212925147U - Split type crucible with uniform evaporation - Google Patents
Split type crucible with uniform evaporation Download PDFInfo
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- CN212925147U CN212925147U CN202020578962.6U CN202020578962U CN212925147U CN 212925147 U CN212925147 U CN 212925147U CN 202020578962 U CN202020578962 U CN 202020578962U CN 212925147 U CN212925147 U CN 212925147U
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Abstract
The utility model provides a split crucible with uniform evaporation, which comprises a material containing crucible, wherein the material containing crucible is a cylinder and is divided into an upper part and a lower part, the diameter of the upper part is larger than that of the lower part, and a gas dispersing crucible and a gas concentrating crucible are arranged from top to bottom on the upper part; the gas dispersion crucible is cylindrical as a whole, the upper end of the gas dispersion crucible is an open surface, and the bottom of the gas dispersion crucible is provided with a gas inlet hole; the gas concentration crucible is cylindrical as a whole, the lower end of the gas concentration crucible is an open surface, and the upper end of the gas concentration crucible is provided with a gas outlet; the positions of the air inlet hole and the air outlet hole are matched; make gaseous homodisperse that becomes to make evaporation material evaporation in the flourishing material crucible more even, the design of disconnect-type makes gaseous concentrated crucible, gaseous dispersion crucible can easily take off, and the change is washd at any time to the convenience, makes and washs the installation more convenient.
Description
Technical Field
The utility model relates to an even split type crucible evaporates belongs to material thermal evaporation technical field.
Background
At present, most of crucibles used in the field of material thermal evaporation are graphite crucibles or ceramic crucibles with the same upper and lower diameters or small bottom diameter and large upper opening. Because the outer heating area of the crucible is close to the outer wall of the crucible, the heat is high, the evaporation rate of the metal or organic solvent close to the outer wall of the crucible is higher than that of the central area, which can cause uneven evaporation coating of the metal or organic solvent, and the coating thickness of the edge position is higher than that of the central area, a ceramic crucible with uniform evaporation is needed.
Chinese patent: CN201820006902.X discloses a double-layer uniform heat conduction graphite crucible for die casting of block alloys, which comprises an outer-layer graphite crucible and an inner-layer graphite crucible, wherein the shape of an inner cavity of the outer-layer graphite crucible is matched with the shape of the inner-layer graphite crucible. The utility model discloses a double-deck crucible design, crucible thickness homogeneous makes the alloy melt more even, makes the micrite size more unanimous in the alloy of molten condition, and then has controlled the microdefect of die-casting spare, makes the material property of die-casting spare obtain improving. However, the graphite crucible has a small bottom diameter and a large upper opening, and thus is not uniformly heated.
SUMMERY OF THE UTILITY MODEL
In order to solve the problem, the utility model provides a split type crucible with uniform evaporation.
A split crucible with uniform evaporation comprises a material containing crucible, wherein the material containing crucible comprises an upper part and a lower part, and the diameter of the upper part is larger than that of the lower part; a gas dispersion crucible and a gas concentration crucible are arranged in the inner cavity of the upper part from top to bottom; the gas dispersion crucible is cylindrical as a whole, the upper end of the gas dispersion crucible is an open surface, and the bottom of the gas dispersion crucible is provided with a gas inlet hole; the gas concentration crucible is cylindrical as a whole, the lower end of the gas concentration crucible is an open surface, and the top of the gas concentration crucible is provided with a gas outlet; the air inlet hole corresponds to the air outlet hole.
The gas concentration crucible mainly focuses gas with different evaporation rates through the gas outlet holes in the crucible, and reduces the evaporation rates of the gas at different positions through reduction of the gas inlet cross section area.
The gas dispersion crucible is used for avoiding the phenomenon that the gas rate of the gas concentrated crucible is too high, so that the coating film quality is low, the evaporation area is small, the evaporation efficiency is low, and the taking and the cleaning are convenient.
According to the utility model discloses, it is preferred, the inlet port diameter is greater than the venthole diameter.
According to the utility model discloses, it is preferred, flourishing material crucible upper end is provided with epitaxial platform, and epitaxial platform is used for supporting.
And placing the metal ring on the metal ring for supporting.
According to the utility model discloses, preferred, the height that highly is less than gaseous dispersion crucible of gaseous concentration crucible.
According to the utility model discloses, preferred, the height of gas concentration crucible and the highly uniform of gas dispersion crucible.
According to the utility model discloses, preferred, the axial length of holding the material crucible is greater than the radial length of holding the material crucible.
According to the utility model discloses, it is preferred, the upper portion height is less than the height of lower part.
The beneficial effects of the utility model reside in that:
1. through the cooperation that increases gaseous concentrated crucible, gaseous dispersion crucible, gaseous advanced gaseous concentrated pot of crossing for gaseous all concentrates the venthole and discharges, passes through gaseous dispersion pot again, makes gaseous homodisperse that becomes, thereby makes evaporation material evaporation in the flourishing material crucible more even.
2. The design of disconnect-type for gaseous concentrated crucible, gaseous dispersion crucible can easily take off, and the change is washd at any time to the convenience, makes to wash the installation more convenient.
Drawings
FIG. 1 is a schematic structural view of the present invention;
FIG. 2 is a schematic view of the material holding crucible of the utility model;
FIG. 3 is a schematic view of the gas concentrating crucible of the present invention;
FIG. 4 is a schematic view of the gas distribution crucible of the present invention;
wherein, 1, a material containing crucible; 2. a gas concentrating crucible; 3. a gas dispersion crucible; 4. an air inlet; 5, air outlet holes; 6. and an epitaxial stage.
Detailed Description
The present invention will be further described, but not limited to, by the following examples in conjunction with the accompanying drawings.
Example 1:
as shown in fig. 1-4, a split crucible with uniform evaporation comprises a material holding crucible, wherein the material holding crucible is a cylinder and is divided into an upper part and a lower part, and the diameter of the upper part is larger than that of the lower part; a gas dispersion crucible and a gas concentration crucible are arranged in the upper part of the inner cavity from top to bottom; the gas dispersion crucible is cylindrical as a whole, the upper end of the gas dispersion crucible is an open surface, and the bottom of the gas dispersion crucible is provided with a gas inlet hole; the gas concentration crucible is cylindrical as a whole, the lower end of the gas concentration crucible is an open surface, and the upper end of the gas concentration crucible is provided with a gas outlet; the air inlet hole is matched with the air outlet hole in position. The diameter of the air inlet hole is larger than that of the air outlet hole.
The inlet port diameter is greater than the venthole, it is provided with epitaxial platform to hold material crucible upper end, and the platform of extending is convenient for hold placing of material crucible, the height that highly is less than gaseous dispersion crucible of gas concentration crucible.
The working process is as follows:
on will contain the material crucible and hold the material and place the heater, the position of placing that highly is less than the gas dispersion crucible of material, concentrate gas crucible and gas dispersion crucible in placing in proper order and hold the material crucible, open the heater and will hold the material heating evaporation in the material crucible, concentrate the venthole at top with gas through gas concentration crucible and then the inlet port and the gas dispersion crucible of rethread gas dispersion crucible bottom pass the evaporation material to the base plate on carry out the coating film deposit, whole main work process is accomplished.
Example 2:
a split crucible with uniform evaporation is structurally as in embodiment 1, except that: the height of the gas concentration crucible is equal to that of the gas dispersion crucible.
Example 3:
a split crucible with uniform evaporation is structurally as in embodiment 1, except that: the height of the gas concentration crucible is less than that of the gas dispersion crucible.
Example 4:
a split crucible with uniform evaporation is structurally as in embodiment 1, except that: the diameter of the air inlet hole is consistent with the size of the air outlet hole.
The above description is only a preferred embodiment of the present invention, and should not be taken as limiting the invention, and any modifications, equivalent replacements, improvements, etc. made within the spirit and principle of the present invention should be included in the protection scope of the present invention.
Claims (7)
1. The utility model provides a split type crucible of evaporation is even which characterized in that: the device comprises a material containing crucible, wherein the material containing crucible comprises an upper part and a lower part, and the diameter of the upper part is larger than that of the lower part; a gas dispersion crucible and a gas concentration crucible are arranged in the inner cavity of the upper part from top to bottom; the gas dispersion crucible is cylindrical as a whole, the upper end of the gas dispersion crucible is an open surface, and the bottom of the gas dispersion crucible is provided with a gas inlet hole; the gas concentration crucible is cylindrical as a whole, the lower end of the gas concentration crucible is an open surface, and the top of the gas concentration crucible is provided with a gas outlet; the air inlet hole corresponds to the air outlet hole.
2. The split crucible for uniform evaporation according to claim 1, wherein: the diameter of the air inlet hole is larger than that of the air outlet hole.
3. The split crucible for uniform evaporation according to claim 1, wherein: an extension table is arranged at the upper end of the material containing crucible.
4. The split crucible for uniform evaporation according to claim 1, wherein: the height of the gas concentration crucible is less than that of the gas dispersion crucible.
5. The split crucible for uniform evaporation according to claim 1, wherein: the height of the gas concentration crucible is equal to that of the gas dispersion crucible.
6. The split crucible for uniform evaporation according to claim 1, wherein: the axial length of the material containing crucible is greater than the radial length of the material containing crucible.
7. The split crucible for uniform evaporation according to claim 1, wherein: the upper portion height is less than the height of the lower portion.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202020578962.6U CN212925147U (en) | 2020-04-17 | 2020-04-17 | Split type crucible with uniform evaporation |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202020578962.6U CN212925147U (en) | 2020-04-17 | 2020-04-17 | Split type crucible with uniform evaporation |
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| Publication Number | Publication Date |
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| CN212925147U true CN212925147U (en) | 2021-04-09 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN202020578962.6U Active CN212925147U (en) | 2020-04-17 | 2020-04-17 | Split type crucible with uniform evaporation |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113447394A (en) * | 2021-07-13 | 2021-09-28 | 西北大学 | Complex organic mixture simulated distillation device and method based on thermogravimetric analyzer |
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2020
- 2020-04-17 CN CN202020578962.6U patent/CN212925147U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113447394A (en) * | 2021-07-13 | 2021-09-28 | 西北大学 | Complex organic mixture simulated distillation device and method based on thermogravimetric analyzer |
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