CN212846091U - Vertical direction position and distance calibration mechanism - Google Patents
Vertical direction position and distance calibration mechanism Download PDFInfo
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- CN212846091U CN212846091U CN202020927014.9U CN202020927014U CN212846091U CN 212846091 U CN212846091 U CN 212846091U CN 202020927014 U CN202020927014 U CN 202020927014U CN 212846091 U CN212846091 U CN 212846091U
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Abstract
The utility model relates to a calibration equipment technical field, in particular to vertical direction position and distance calibration mechanism, the last pressure contact that is provided with of moving platform, be provided with Z axle motion slip table on the brace table, be fixed with the support on the Z axle motion slip table, Z axle motion slip table drive support is along Z axle direction motion, be fixed with suction nozzle and needle mouth on the support, suction nozzle and needle mouth move along Z axle direction along the support, still be provided with pressure sensor on the support, the pressure contact below is provided with down force transducer, go up pressure sensor and down force transducer and pass through cable junction in host computer respectively. Compared with the prior art, the utility model discloses a vertical direction position and apart from aligning gear degree of automation are high, greatly reduced to operating personnel's requirement, it is long when shortening the calibration, raise the efficiency, also avoidd the problem that different operating personnel calibrated out different results and the improper problem that causes the striking damage machine and produce the defective products of manual operation.
Description
[ technical field ] A method for producing a semiconductor device
The utility model relates to a calibration equipment technical field, in particular to vertical direction position and distance calibration mechanism.
[ background of the invention ]
In the use process of equipment such as a lens automatic coupling glue bonder, a chip mounter and the like, glue needs to be replaced in each class generally, a needle nozzle needs to be replaced when the glue is replaced, and the height of the needle nozzle or a suction nozzle needs to be calibrated after the needle nozzle is replaced. The relative position and distance calibration method of the lens coupling glue bonder or the chip mounter and other equipment in the prior art in the direction vertical to the Z axis generally comprises two methods: firstly, manually and manually calibrating, after a needle nozzle or a suction nozzle is replaced, manually and slowly adjusting the Z-axis parameter, simultaneously viewing the distance between the needle nozzle or the suction nozzle and a reference plane by eyes, modifying the Z-axis parameter repeatedly for several times to obtain the distance considered as ideal manually, and then storing the Z-axis position parameter so as to obtain the position or the distance in the Z-axis direction; secondly, image calibration, namely adding a side camera, shooting an image from the side of the needle nozzle or the suction nozzle, calculating the position of the needle nozzle or the suction nozzle in the Z-axis direction, calculating the relative distance according to the position parameters, or drawing a reference straight line in the image to manually and slowly adjust the Z-axis parameters, keeping the Z-axis parameters after aligning the lower edge of the needle nozzle or the suction nozzle with the reference straight line in a real-time image, and calculating the relative distance according to the position parameters.
The two prior art methods for calibrating the position and relative distance in the vertical Z-axis direction have problems: the manual calibration method completely depends on the experience and patience of maintenance engineers, so that the results calibrated by different maintenance engineers have larger difference, and consequently, longer time is needed to repeatedly optimize the position and distance in the Z-axis direction, so that the calibration time is long and the risk of generating defective products is high; there are two problems in image calibration, first, because it is higher to increase side camera and lighting system and lead to the cost, second, because the bottom edge profile of needle mouth and suction nozzle is not very smooth, still there are some chamfers, and there are suction nozzle and needle mouth of different shapes and types, these factors can lead to unable to obtain more clear and unified image, consequently it is difficult to realize full automatic calibration, often need to maintain engineer's manual intervention to accomplish, so also there is great difference in the result that different maintenance engineers calibrated out equally, lead to follow-up longer time of need come the repetition optimization, consequently there is the risk that calibration time is long and produce the defective products.
[ Utility model ] content
In order to overcome the above problems, the utility model provides a vertical direction position and distance calibration mechanism that can effectively solve above-mentioned problem.
The utility model provides a technical scheme who above-mentioned technical problem provided is: the vertical direction position and distance calibration mechanism comprises a substrate and a support table, wherein the support table is vertically fixed on the substrate, a moving platform is fixed on the substrate and is positioned on the side of the support table, a pressure contact is arranged on the moving platform, and the moving platform can drive the pressure contact to move in a horizontal plane; a Z-axis moving sliding table is arranged on the supporting table, a support is fixed on the Z-axis moving sliding table, the support is driven by the Z-axis moving sliding table to move along the Z-axis direction, a suction nozzle and a needle nozzle are fixed on the support, and the suction nozzle and the needle nozzle move along the Z-axis direction along with the support; the support is also provided with an upper pressure sensor, a lower pressure sensor is arranged below the pressure contact, and the upper pressure sensor and the lower pressure sensor are respectively connected with an upper computer through cables.
Preferably, the upper pressure sensor is connected with an upper pressure analog quantity amplifier through a cable, and the upper pressure analog quantity amplifier is connected with an upper computer through a cable.
Preferably, the lower pressure sensor is connected with a lower pressure analog quantity amplifier through a cable, and the lower pressure analog quantity amplifier is connected with the upper computer through the cable.
Preferably, the upper pressure sensor and the lower pressure sensor both adopt high-precision pressure sensors.
Preferably, Z axle motion slip table top is provided with the motor, and the motor has the driver through cable junction, and the driver passes through cable junction in host computer.
Preferably, the Z-axis moving sliding table comprises a mounting plate, and the mounting plate is fixed on the side part of the supporting table.
Preferably, a Z-axis slide rail is arranged on the other side of the mounting plate, a sliding plate is connected to the Z-axis slide rail in a sliding manner, and the sliding plate slides along the Z-axis direction.
Preferably, the mounting plate is further provided with a Z-axis ball screw, the outer portion of the Z-axis ball screw is in threaded connection with a ball nut, and the Z-axis ball screw drives the ball nut to move along the Z-axis direction through rotation.
Preferably, the sliding plate is fixedly connected with the ball nut and moves along the Z-axis direction along with the ball nut, and the bracket is fixed on one side of the sliding plate and moves along the Z-axis direction along with the sliding plate.
Preferably, the output end of the motor is connected with the upper end of the Z-axis ball screw, and the motor drives the Z-axis ball screw to rotate.
Compared with the prior art, the vertical direction position and distance calibrating mechanism has high automation degree, greatly reduces the requirements on operators, shortens the calibrating time, improves the efficiency, and also avoids the problems that different operators calibrate different results and improper manual operation causes the impact damage to machines and the generation of defective products; the contact mode is adopted for judgment, so that the automatic calibration device can adapt to suction nozzles and needle nozzles with different shapes, types and surface finishments to realize automatic calibration; the upper pressure sensor and the lower pressure sensor both adopt high-precision pressure sensors, and can be identified when the pressure is greater than 2 grams or equal to 2 grams, so that the calibration precision is improved; simple structure reduces equipment cost.
[ description of the drawings ]
FIG. 1 is a diagram of a vertical position and distance calibration mechanism according to the present invention;
FIG. 2 is an enlarged view of FIG. 1 at A;
fig. 3 is the utility model discloses the Z axle precision motion slip table structure chart of vertical direction position and distance calibration mechanism.
[ detailed description ] embodiments
In order to make the objects, technical solutions and advantages of the present invention more clearly understood, the present invention will be further described in detail with reference to the accompanying drawings and the following embodiments. It should be understood that the specific embodiments described herein are for purposes of illustration only and are not intended to limit the invention.
It should be noted that all directional indications (such as up, down, left, right, front, and back … …) in the embodiments of the present invention are limited to relative positions on a given view, not absolute positions.
In addition, descriptions in the present application as to "first", "second", and the like are for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicit to the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one such feature. In the description of the present invention, "a plurality" means at least two, e.g., two, three, etc., unless specifically limited otherwise.
Referring to fig. 1 to 3, the vertical position and distance calibration mechanism of the present invention includes a substrate 10 and a supporting platform 20, wherein the supporting platform 20 is vertically fixed on the substrate 10. A movable platform 11 is fixed on the substrate 10, the movable platform 11 is located on the side of the support table 20, a pressure contact 12 is arranged on the movable platform 10, and the movable platform 10 can drive the pressure contact 12 to move in a horizontal plane.
The support table 20 is provided with a Z-axis moving sliding table 30, a support 40 is fixed on the Z-axis moving sliding table 30, and the support 40 is driven by the Z-axis moving sliding table 30 to move along the Z-axis direction. The suction nozzle 41 and the needle nozzle 42 are fixed on the support 40, and the suction nozzle 41 and the needle nozzle 42 move along the Z-axis direction along with the support 40.
The bracket 40 is further provided with an upper pressure sensor 811, a lower pressure sensor 821 is arranged below the pressure contact 12, and the upper pressure sensor 811 and the lower pressure sensor 821 are respectively connected to the upper computer 70 through cables 90. When the suction nozzle 41 or the needle nozzle 42 contacts the pressure contact 12, the upper pressure sensor 811 and the lower pressure sensor 821 can collect the pressure and convert the pressure information into digital signals to be transmitted to the upper computer 70, and the upper computer 70 is used for information processing.
The upper pressure sensor 811 is connected with an upper pressure analog quantity amplifier 81 through a cable 90, the upper pressure analog quantity amplifier 81 is connected with the upper computer 70 through the cable 90, and the upper pressure analog quantity amplifier 81 can improve the sensitivity of pressure acquisition and improve the calibration precision.
The lower pressure sensor 821 is connected with a lower pressure analog quantity amplifier 82 through a cable 90, the lower pressure analog quantity amplifier 82 is connected with the upper computer 70 through the cable 90, and the lower pressure analog quantity amplifier 82 can improve the sensitivity of pressure acquisition and improve the calibration precision. The upper pressure sensor 811 and the lower pressure sensor 821 are both high-precision pressure sensors, and can be identified when the pressure is greater than 2 grams or equal to 2 grams.
The top of the Z-axis moving sliding table 30 is provided with a motor 50, the motor 50 is connected with a driver 60 through a cable 90, and the driver 60 is connected with an upper computer 70 through the cable 90. The motor 50 is used for driving the Z-axis moving sliding table 30 to move along the Z-axis direction.
The mobile platform 11 is connected to the upper computer 70 and is controlled by the signal instruction of the upper computer 70.
The Z-axis moving slide table 30 includes a mounting plate 31, and the mounting plate 31 is fixed to the side of the support table 20. The other side of the mounting plate 31 is provided with a Z-axis slide rail 32, the Z-axis slide rail 32 is connected with a slide plate 33 in a sliding manner, and the slide plate 33 slides along the Z-axis direction. The mounting plate 31 is further provided with a Z-axis ball screw 35, the outer portion of the Z-axis ball screw 34 is connected with a ball nut 34 in a threaded mode, and the Z-axis ball screw 35 drives the ball nut 34 to move along the Z-axis direction through rotation. The slide plate 33 is fixedly connected to the ball nut 34 and moves in the Z-axis direction with the ball nut 34. The bracket 40 is fixed to one side of the sliding plate 33 and moves in the Z-axis direction with the sliding plate 33. The output end of the motor 50 is connected with the upper end of the Z-axis ball screw 34, and the motor 50 drives the Z-axis ball screw 34 to rotate.
When the device works, the upper computer 70 reads the values of the upper pressure sensor 811 and the lower pressure sensor 821 in real time, sets the values to be '0' when the suction nozzle 41 and the pressure contact 12 do not contact any part, and sets a contact threshold value and a contact range; acquiring the position of a suction nozzle 41, driving a pressure contact 12 to move to a position right below the suction nozzle 41 by a mobile platform 11, driving the suction nozzle 41 to move downwards by a Z-axis motion sliding table 30, automatically changing the motion speed to slow downward movement when the suction nozzle 41 is in contact with the pressure contact 12, judging that the suction nozzle 41 is in contact with the pressure contact 12 by an upper computer 70 when the numerical values of an upper pressure sensor 811 and a lower pressure sensor 821 are greater than 0, and recording the position of the Z-axis motion sliding table 30 by the upper computer 70 when the numerical values of the upper pressure sensor 811 and the lower pressure sensor 821 are within a threshold setting range; if the values of the upper pressure sensor 811 and the lower pressure sensor 821 are not within the threshold setting range, the upper computer 70 compares the current value with the threshold, and controls the Z-axis movement sliding table 30 to move upwards or downwards according to the judgment of the difference value, and records the current position of the Z-axis movement sliding table 30 until the value is within the threshold setting range, so that the calibration of the Z-axis position of the suction nozzle 41 is completed; the same principle of needle nozzle 42 position calibration is obtained, the position of the needle nozzle 42 is obtained, the movable platform 11 drives the pressure contact 12 to move to a position right below the needle nozzle 42, the Z-axis movement sliding table 30 drives the needle nozzle 42 to move downwards, when the numerical values of the upper pressure sensor 811 and the lower pressure sensor 821 are within a threshold setting range, the upper computer 70 records the position of the Z-axis movement sliding table 30, and the Z-axis position calibration of the needle nozzle 42 is completed; the position number of the Z-axis movement sliding table 30, which is acquired in front of the upper computer 70 and recorded when the suction nozzle 41 and the needle nozzle 42 are calibrated, is used for calculating the distance between the needle nozzle 42 and the suction nozzle 41, and the distance value is stored for the following operation flow.
Compared with the prior art, the whole calibration process of the vertical direction position and distance calibration mechanism of the utility model is automatically completed by a machine, thereby greatly reducing the requirements on operators, shortening the calibration time, improving the efficiency, and avoiding the problems that different operators calibrate different results and the machines are damaged by impact and defective products are generated due to improper manual operation; the contact mode is adopted for judgment, so that the automatic calibration can be realized by adapting to the suction nozzles 41 and the needle nozzles 42 with different shapes, types and surface finishments; the upper pressure sensor 811 and the lower pressure sensor 821 both adopt high-precision pressure sensors, and can be identified when the pressure is greater than 2 grams or equal to 2 grams, so that the calibration precision is improved; simple structure reduces equipment cost.
The above description is only for the preferred embodiment of the present invention, and not intended to limit the scope of the present invention, and all modifications made within the spirit of the present invention, equivalent replacements and improvements should be included in the scope of the present invention.
Claims (10)
1. The vertical direction position and distance calibration mechanism is characterized by comprising a substrate and a support table, wherein the support table is vertically fixed on the substrate, a moving platform is fixed on the substrate and is positioned on the side of the support table, a pressure contact is arranged on the moving platform, and the moving platform can drive the pressure contact to move in a horizontal plane;
a Z-axis moving sliding table is arranged on the supporting table, a support is fixed on the Z-axis moving sliding table, the support is driven by the Z-axis moving sliding table to move along the Z-axis direction, a suction nozzle and a needle nozzle are fixed on the support, and the suction nozzle and the needle nozzle move along the Z-axis direction along with the support;
the support is also provided with an upper pressure sensor, a lower pressure sensor is arranged below the pressure contact, and the upper pressure sensor and the lower pressure sensor are respectively connected with an upper computer through cables.
2. The vertical position and distance calibration mechanism of claim 1, wherein said upper pressure sensor is connected to an upper pressure analog amplifier by a cable, and wherein said upper pressure analog amplifier is connected to an upper computer by a cable.
3. The vertical position and distance calibration mechanism of claim 2, wherein said lower pressure sensor is connected to a lower pressure analog amplifier by a cable, and wherein said lower pressure analog amplifier is connected to the upper computer by a cable.
4. A vertical position and distance calibration mechanism according to claim 3 wherein said upper and lower pressure sensors each comprise high precision pressure sensors.
5. The vertical position and distance calibration mechanism according to claim 1, wherein a motor is provided on the top of the Z-axis motion stage, the motor is connected to a driver through a cable, and the driver is connected to the upper computer through a cable.
6. The vertical position and distance calibration mechanism of claim 5 wherein said Z-axis motion stage includes a mounting plate secured to a side of said support table.
7. The vertical position and distance calibration mechanism according to claim 6, wherein the other side of the mounting plate is provided with a Z-axis slide rail, and a slide plate is slidably coupled to the Z-axis slide rail and slides in the Z-axis direction.
8. The vertical position and distance calibration mechanism according to claim 7, wherein a Z-axis ball screw is further provided on said mounting plate, a ball nut is externally screwed to said Z-axis ball screw, and said Z-axis ball screw drives said ball nut to move in a Z-axis direction by rotation.
9. The vertical position and distance calibration mechanism according to claim 8, wherein the slide plate is fixedly coupled to the ball nut for movement therewith in the Z-axis direction, and the bracket is fixed to one side of the slide plate for movement therewith in the Z-axis direction.
10. The vertical position and distance calibration mechanism according to claim 8, wherein the output of said motor is connected to the upper end of the Z-axis ball screw, and the motor drives the Z-axis ball screw to rotate.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202020927014.9U CN212846091U (en) | 2020-05-27 | 2020-05-27 | Vertical direction position and distance calibration mechanism |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202020927014.9U CN212846091U (en) | 2020-05-27 | 2020-05-27 | Vertical direction position and distance calibration mechanism |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN212846091U true CN212846091U (en) | 2021-03-30 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202020927014.9U Active CN212846091U (en) | 2020-05-27 | 2020-05-27 | Vertical direction position and distance calibration mechanism |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN212846091U (en) |
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- 2020-05-27 CN CN202020927014.9U patent/CN212846091U/en active Active
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