CN212842914U - Clean anaerobic high-temperature atmosphere furnace - Google Patents
Clean anaerobic high-temperature atmosphere furnace Download PDFInfo
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- CN212842914U CN212842914U CN202021847406.0U CN202021847406U CN212842914U CN 212842914 U CN212842914 U CN 212842914U CN 202021847406 U CN202021847406 U CN 202021847406U CN 212842914 U CN212842914 U CN 212842914U
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Abstract
The utility model discloses a clean anaerobic high-temperature atmosphere furnace, which comprises an outer box body and an inner box body embedded in the outer box body, wherein the inner box body comprises a power cavity, a filter cavity and a drying cavity, a circulating fan and a nitrogen conveying device are arranged in the power cavity, and a filter is arranged in the filter cavity; the power cavity, the filter cavity and the drying cavity are sequentially communicated with one another to form an internal circulation air duct. The utility model divides the inner box body into a power cavity, a filter cavity and a drying cavity which are communicated with each other in turn, forms an inner circulation air channel, replaces the air in the inner box body through a nitrogen conveying device and a circulating fan which are arranged in the power cavity, filters the passing air flow by utilizing a filter arranged in the filter cavity and separates the waste gas, and forms a clean low oxygen concentration environment in the inner box body; nitrogen gas is filled in the inner box body, and the inner box body is in a micro-positive pressure state in a nitrogen gas inlet and nitrogen gas exhaust balance mode, so that ambient air is prevented from entering the inner box body, and the high-quality processing production of finished products is guaranteed.
Description
Technical Field
The utility model relates to an atmosphere furnace technical field especially relates to a clean anaerobism high temperature atmosphere furnace.
Background
An atmosphere furnace is to introduce a manually prepared atmosphere with certain components into the furnace at a certain temperature to achieve the purpose of certain heat treatment, such as gas carburization, carbonitriding, bright quenching and the like. With the progress of society and the development of science, in order to meet the production requirements of various high-precision devices, such as the curing of semiconductor wafer photoresist, the baking of glass substrates, high-precision annealing treatment and the like, an atmosphere furnace needs to be improved so that the atmosphere furnace can be applied to corresponding production procedures.
Such as a semiconductor wafer photoresist, in order to prevent the semiconductor material from being contaminated and to prevent the surface of the semiconductor material from being oxidized, it is necessary to maintain high cleanliness and low oxygen concentration conditions in an atmosphere furnace, which is lacking in the prior art.
SUMMERY OF THE UTILITY MODEL
In view of the above, there is a need to provide a clean anaerobic high-temperature atmosphere furnace, which can maintain high cleanliness in the furnace, effectively prevent material oxidation, and ensure the quality of the finished product of the workpiece.
A clean anaerobic high-temperature atmosphere furnace comprises an outer box body and an inner box body embedded in the outer box body, wherein the inner box body comprises a power cavity, a filter cavity and a drying cavity, a circulating fan and a nitrogen conveying device are arranged in the power cavity, and a filter is arranged in the filter cavity; the power cavity, the filter cavity and the drying cavity are sequentially communicated with each other to form an internal circulation air duct.
In one embodiment, the refrigerator further comprises a refrigerator door, wherein the refrigerator door comprises a door plate and a sealing cavity which is arranged on the door plate and used for sealing the inner refrigerator body; the door plate is movably connected with the outer box body, and cooling pipes are arranged in the sealing cavity and/or around the sealing cavity.
In one embodiment, the sealing cavity is provided with a plurality of air inlet holes and a plurality of air outlet holes, the drying cavity is communicated with the sealing cavity through the plurality of air inlet holes, and the power cavity is communicated with the sealing cavity through the plurality of air outlet holes.
In one embodiment, the inner box body further comprises a cooling cavity, and a cooling device is arranged in the cooling cavity; the power cavity is communicated with the filter cavity through the cooling cavity.
In one embodiment, a heating device is also arranged in the power cavity; the power cavity is arranged at the lower side of the inner box body, and the filter cavity is arranged at the rear side of the inner box body.
In one embodiment, the air inlet of the power cavity is communicated with the drying cavity, and the air outlet of the power cavity is communicated with the filtering cavity.
In one embodiment, the drying device further comprises an oxygen concentration monitor, and the oxygen concentration monitor is arranged in the outer box body and is communicated with the drying cavity.
In one embodiment, the filter further comprises an exhaust gas cooling device, wherein the exhaust gas cooling device is arranged outside the outer box body, is positioned at the rear side of the outer box body and is communicated with the filter cavity.
In one embodiment, the magnetic fluid sealing device is arranged in the outer box body, is positioned below the inner box body and is connected with the inner box body.
In one embodiment, the vacuum-pumping device is arranged in the outer box body, is positioned below the inner box body and is connected with the inner box body.
Compared with the prior art, the utility model divides the inner box body into a power cavity, a filter cavity and a drying cavity, and the power cavity, the filter cavity and the drying cavity are communicated with each other in sequence to form an inner circulation air channel, the air in the inner box body is replaced by the nitrogen conveying device and the circulation fan which are arranged in the power cavity, the air passing through the inner box body is filtered by the filter arranged in the filter cavity and is separated from the waste gas, and a clean low-oxygen concentration environment is formed in the inner box body; nitrogen gas is filled in the inner box body, and the inner box body is in a micro-positive pressure state by keeping the balance of nitrogen gas entering and discharging, so that ambient air can be prevented from entering the inner box body, and the high-quality processing production of workpieces is ensured.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings required to be used in the description of the embodiments or the prior art will be briefly described below, it is obvious that the drawings in the following description are only some embodiments of the present invention, and for those skilled in the art, drawings of other embodiments can be obtained according to the drawings without creative efforts.
FIG. 1 is a left perspective view of a clean anaerobic high temperature atmosphere furnace according to an embodiment of the present invention;
FIG. 2 is a schematic structural view of a clean anaerobic high-temperature atmosphere furnace according to an embodiment of the present invention;
FIG. 3 is a front perspective view of a clean anaerobic high-temperature atmosphere furnace according to an embodiment of the present invention;
fig. 4 is a piping system diagram of a clean anaerobic high-temperature atmosphere furnace according to an embodiment of the present invention.
Wherein: 1-outer box body, 2-inner box body, 21-power cavity, 211-circulating fan, 212-nitrogen conveying device, 213-heating device, 22-cooling cavity, 221-cooling device, 23-filtering cavity, 231-filter, 24-drying cavity, 3-box door, 31-door plate, 32-sealing cavity, 321-air inlet hole, 322-air outlet hole, 33/33' -cooling pipe, 4-oxygen concentration monitor, 5-waste gas cooling device, 6-magnetofluid sealing device, 7-vacuumizing device, 8-expansion interface and 9-control box.
Detailed Description
In order to facilitate understanding of the present invention, a clean anaerobic high-temperature atmosphere furnace will be described more fully with reference to the accompanying drawings. The preferred embodiment of the clean anaerobic high-temperature atmosphere furnace is shown in the attached drawing. However, a clean anaerobic high temperature atmosphere furnace may be implemented in many different forms and is not limited to the embodiments described herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete.
It will be understood that when an element is referred to as being "mounted on" another element, it can be directly on the other element or intervening elements may also be present. When an element is referred to as being "coupled" to another element, it can be directly coupled to the other element or intervening elements may also be present. When an element is referred to as being "connected" to another element, it can be directly connected to the other element or intervening elements may also be present.
Unless defined otherwise, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this invention belongs. The terminology used herein in the specification of the clean anaerobic high temperature atmosphere furnace is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention. As used herein, the term "and/or" includes any and all combinations of one or more of the associated listed items.
As shown in fig. 1, an embodiment of the present invention provides a clean anaerobic high-temperature atmosphere furnace, which includes an outer box 1 and an inner box 2 embedded in the outer box 1, wherein the inner box 2 includes a power chamber 21, a filter chamber 23 and a drying chamber 24, a circulating fan 211 and a nitrogen gas conveying device 212 are disposed in the power chamber 21, and a filter 231 is disposed in the filter chamber 23; the power cavity 21, the filter cavity 23 and the drying cavity 24 are sequentially communicated with one another to form an internal circulation air duct; conveying nitrogen into the inner box body 2 through a nitrogen conveying device 212 arranged in the power cavity 21, circulating gas in the inner box body 2 along an inner circulating air channel through a circulating fan 211, filtering the passing gas flow by using a filter 231 arranged in the filter cavity 23 and discharging waste gas to finish gas conversion so as to form a clean low-oxygen-concentration environment in the inner box body 2; in box 2 including nitrogen gas fills, through keeping nitrogen gas entering and exhaust balance, be in the pressure-fired state in making box 2, can prevent that ambient air from getting into box 2 for box cleanliness factor is sustainable to be maintained at 100 grades, has guaranteed the high-quality processing production of work piece.
Specifically, as shown in fig. 1, the power cavity 21, the filter cavity 23 and the drying cavity 24 are sequentially communicated with each other, which means that a plurality of vent holes are formed in the cavity walls to communicate between the power cavity 21 and the filter cavity 23, between the filter cavity 23 and the drying cavity 24, and between the drying cavity 24 and the power cavity 21, and more specifically, the filter 231 includes an air inlet end, a clean air outlet end and an exhaust air outlet end, in this embodiment, the air inlet end of the filter 231 is communicated with the power cavity 21, the clean air outlet end of the filter 231 is communicated with the drying cavity 24, and the exhaust air outlet end of the filter 231 is communicated with the outside of the inner box 2, and the internal circulation direction of the air is the power cavity 21 → the filter cavity 23 → the drying cavity 24 → the power cavity 21, so as to complete the filtration, replacement and exhaust of the exhaust air; in other embodiments, the air inlet end of the filter 231 may be communicated with the drying cavity 24, the clean air outlet end of the filter 231 may be communicated with the power cavity 21, and the exhaust air outlet end of the filter 231 may be communicated with the outside of the inner box 2, so that the internal circulation direction of the air is the power cavity 21 → the drying cavity 24 → the filtering cavity 23 → the power cavity 21, thereby completing the filtration, replacement and exhaust air discharge.
Preferably, as shown in fig. 1, an air inlet of the power chamber 21 is communicated with the drying chamber 24, an air outlet of the power chamber 21 is communicated with the filter chamber 23, under the action of the circulating fan 211, the internal circulation direction of the gas can be designated as power chamber 21 → filter chamber 23 → drying chamber 24 → power chamber 21, at this time, an air inlet end of the filter 231 is communicated with the power chamber 21, a clean air outlet end of the filter 231 is communicated with the drying chamber 24, an exhaust air outlet end of the filter 231 is communicated with the outside of the inner box body 2, so as to complete the filtration, replacement and exhaust gas exhaust of the gas, and enable an impurity surface layer such as dust to be located between the power chamber 21 and the filter chamber 23, so that the inside of the drying chamber 24 can maintain high cleanliness, and the high-quality processing production of the workpiece.
Further, as shown in fig. 1 and 2, the clean anaerobic high-temperature atmosphere furnace further comprises a door 3, wherein the door 3 comprises a door panel 31 and a sealing cavity 32 arranged on the door panel 31 and used for sealing the inner box body 2; door plant 31 and outer box 1 swing joint, the setting (be in sealed chamber 32 outer surrounding sealed chamber 32 setting) around sealed chamber 32 and/or sealed chamber 32 has cooling tube 33 to carry out rapid cooling to chamber door 3 and interior box 2, improve production efficiency.
Specifically, the box door 3 is rotatably connected with one horizontal side through a hinge, the other horizontal side is provided with a door locking hand wheel, and the horizontal opening, closing and locking of the box door 3 are realized through the hinge and the door locking hand wheel. The sealing chamber 32 is disposed inside the door plate 31 of the door 3, and when the door 3 is closed with the outer box 1, the sealing chamber 32 seals the inner box 2 to isolate the inside of the inner box 2 from the external environment. A plurality of sealing strips are arranged on the door panel 31 around the sealing cavity 32, so that the sealing effect is further enhanced.
Furthermore, as shown in fig. 1 and 3, cooling pipes 33 'may be respectively disposed at the upper side, the left side and the right side of the drying chamber 24, and the cooling liquid is introduced into the cooling pipes 33' to rapidly cool the inner case 2, thereby improving the production efficiency.
Further, as shown in fig. 1 and 2, the sealing cavity 32 is provided with a plurality of air inlet holes 321 and a plurality of air outlet holes 322, the drying cavity 24 is communicated with the sealing cavity 32 through the plurality of air inlet holes 321, the power cavity 21 is communicated with the sealing cavity 32 through the plurality of air outlet holes 322, at this time, under the action of the circulating fan 211, the internal circulation direction of the gas can be designated as the power cavity 21 → the filter cavity 23 → the drying cavity 24 → the sealing cavity 32 → the power cavity 21, after the processing is completed, the gas passing through the sealing cavity 32 can be cooled through the cooling pipe 33 arranged in the sealing cavity 32 and/or around the sealing cavity 32, so that the rapid cooling of the inner box body 2 is realized, and the production efficiency is further improved.
Further, as shown in fig. 1, the inner box 2 further includes a cooling chamber 22, a cooling device 221 is disposed in the cooling chamber 22, and after the processing is completed, the gas passing through the cooling chamber 22 can be rapidly cooled by the cooling device 221, so that the cooling of the inner box 2 is accelerated, and the production efficiency is improved; the power cavity 21 is communicated with the filter cavity 23 through the cooling cavity 22, that is, the cooling cavity 22 is communicated with the power cavity 21, the air inlet end of the filter 231 is communicated with the cooling cavity 22, the air outlet end of the clean air of the filter 231 is communicated with the drying cavity 24, and the air outlet end of the waste air of the filter 231 is communicated with the outside of the inner box body 2, under the action of the circulating fan 211, the internal circulation direction of the air can be specified as the power cavity 21 → the cooling cavity 22 → the filter cavity 23 → the drying cavity 24 → the sealing cavity 32 → the power cavity 21, preferably, the cooling device 221 is a multilayer cooling coil, after the processing is finished, the cooling liquid is introduced into the multilayer cooling coil to realize the rapid cooling of the inside of the inner box body 2, and the.
Further, as shown in fig. 1 and 3, a heating device 213 is further disposed in the power cavity 21, and the heating device 213 heats the gas passing through the power cavity 21, and forms a circulating heat flow under the action of the circulating fan 211 to heat the material in the drying cavity 24; the downside of interior box 2 is arranged in to power chamber 21, box 2's rear side is arranged in to filter chamber 23, through setting up the position to power chamber 21 and filter chamber 23 and carrying out rational arrangement, make the inside inner loop wind channel of interior box 2 flow smoothly, the air current is through filter chamber 23 purification back in dry chamber 24 forward flow, directly get into sealed chamber 32 and get into power chamber 21 through sealed chamber 32 direction, make temperature distribution in the dry chamber 24 even, avoid semiconductor material because of being heated the inhomogeneous influence work piece finished product quality.
In addition, with the rear side of box 2 including filter chamber 23 sets up, can pack into box 2 and set up in filter chamber 23 in the front side of box 2 in with filter 231 passes through, box 2 rear side is sealed completely in for box 2 leakproofness is better in, guarantees the inside clear low oxygen concentration environment of box 2 in.
Further, as shown in fig. 4, the oxygen concentration monitoring device further comprises an oxygen concentration monitoring instrument 4, wherein the oxygen concentration monitoring instrument 4 is arranged in the outer box body 1 and communicated with the drying cavity 24, the oxygen concentration inside the inner box body 2 is collected and detected in real time, and the oxygen concentration inside the inner box body 2 is processed after being detected to be qualified.
Further, as shown in fig. 1 and 4, the exhaust gas cooling device 5 is further included, the exhaust gas cooling device 5 is disposed outside the outer box 1, is located at the rear side of the outer box 1, and is communicated with the filter cavity 23, specifically, the exhaust gas outlet end of the filter 231 in the filter cavity 23, and the exhaust gas cooling device 5 may be a heat exchanger or a radiator with a cooling water-cooling coil to cool down and discharge the filtered and replaced exhaust gas.
Further, as shown in fig. 3 and 4, the magnetic fluid sealing device 6 is further included, the magnetic fluid sealing device 6 is arranged in the outer box body 1, is located below the inner box body 2 and is connected with the inner box body 2, gaps between the interfaces on the inner box body 2 are sealed through the magnetic fluid sealing device 6, the sealing effect is good, and a certain temperature isolation function can be achieved.
Further, as shown in fig. 3 and 4, the internal pressure recovery device further comprises a vacuumizing device 7, wherein the vacuumizing device 7 is arranged in the outer box body 1 and is located below the inner box body 2 and is connected with the inner box body 2, air in the inner box body 2 is completely pumped out through the vacuumizing device 7 before processing, then a small amount of high-purity nitrogen is injected through the nitrogen conveying device 212 to recover the internal and external pressure difference of the inner box body 2, gas conversion is completed, and the inner box body 2 is filled with nitrogen to be in a micro-positive pressure state. Compared with the mode of directly introducing nitrogen for gas conversion, the gas conversion mode of injecting nitrogen after vacuumizing has higher conversion speed and less nitrogen consumption, and greatly improves the production efficiency.
Further, as shown in fig. 2 to 4, a control box 9 is further provided in the outer box 1 on the left or right side of the inner box 2, a PLC is provided in the control box 9, and is connected to the circulating fan 211, the nitrogen gas conveying device 212, the heating device 213, the cooling device 221, the oxygen concentration monitor 4, the exhaust gas cooling device 5, the magnetic fluid sealing device 6, the vacuum pumping device 7, and various electric valves or electromagnetic valves in the pipelines for conveying nitrogen gas and cooling liquid through the PLC, and an operation panel is provided on the control box 9, so that manual control and automatic control of the clean anaerobic high-temperature atmosphere furnace can be realized through the operation panel. The inner box body 2 is also provided with a plurality of expansion interfaces 8, which are used for installing devices such as a pressure relief safety valve, a differential pressure gauge, a temperature controller, a pressure controller and the like on the inner box body 2, and are connected with a PLC (programmable logic controller) to realize highly integrated intelligent control.
Through the scheme, the positions of the outer box body 1, the inner box body 2, the control box 9 and the devices are reasonably arranged, so that the whole clean anaerobic high-temperature atmosphere furnace is compact and reasonable in inside, regular in shape and high in popularization and application values.
The above-mentioned embodiments only represent some embodiments of the present invention, and the description thereof is specific and detailed, but not to be construed as limiting the scope of the present invention. It should be noted that, for those skilled in the art, without departing from the spirit of the present invention, several variations and modifications can be made, which are within the scope of the present invention. Therefore, the protection scope of the present invention should be subject to the appended claims.
Claims (10)
1. The clean anaerobic high-temperature atmosphere furnace is characterized by comprising an outer box body and an inner box body embedded in the outer box body, wherein the inner box body comprises a power cavity, a filter cavity and a drying cavity, a circulating fan and a nitrogen conveying device are arranged in the power cavity, and a filter is arranged in the filter cavity; the power cavity, the filter cavity and the drying cavity are sequentially communicated with one another to form an internal circulation air duct.
2. The clean anaerobic high-temperature atmosphere furnace according to claim 1, further comprising a door, wherein the door comprises a door plate and a sealing cavity arranged on the door plate and used for sealing the inner box body; the door plate is movably connected with the outer box body, and cooling pipes are arranged in the sealing cavity and/or around the sealing cavity.
3. The clean anaerobic high-temperature atmosphere furnace as claimed in claim 2, wherein the sealed chamber is provided with a plurality of air inlets and a plurality of air outlets, the drying chamber is communicated with the sealed chamber through a plurality of the air inlets, and the power chamber is communicated with the sealed chamber through a plurality of the air outlets.
4. The clean anaerobic high-temperature atmosphere furnace according to claim 3, wherein the inner box body further comprises a cooling cavity, and a cooling device is arranged in the cooling cavity; the power cavity is communicated with the filter cavity through the cooling cavity.
5. The clean anaerobic high-temperature atmosphere furnace according to any one of claims 1 to 4, wherein a heating device is further arranged in the power cavity; the power cavity is arranged at the lower side of the inner box body, and the filter cavity is arranged at the rear side of the inner box body.
6. The clean anaerobic high-temperature atmosphere furnace according to claim 5, wherein the air inlet of the power cavity is communicated with the drying cavity, and the air outlet of the power cavity is communicated with the filtering cavity.
7. The clean anaerobic high-temperature atmosphere furnace as claimed in claim 1, further comprising an oxygen concentration monitor, wherein the oxygen concentration monitor is arranged in the outer box body and is communicated with the drying chamber.
8. The clean anaerobic high-temperature atmosphere furnace according to claim 1, further comprising an exhaust gas cooling device, wherein the exhaust gas cooling device is arranged outside the outer box body, is positioned at the rear side of the outer box body and is communicated with the filter cavity.
9. The clean anaerobic high-temperature atmosphere furnace according to claim 1, further comprising a magnetic fluid sealing device, wherein the magnetic fluid sealing device is arranged in the outer box body, is positioned below the inner box body and is connected with the inner box body.
10. The clean anaerobic high-temperature atmosphere furnace according to any one of claims 1 to 4 and 7 to 9, further comprising a vacuum extractor, wherein the vacuum extractor is arranged in the outer box body, is positioned below the inner box body and is connected with the inner box body.
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| Application Number | Priority Date | Filing Date | Title |
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| CN202021847406.0U CN212842914U (en) | 2020-08-28 | 2020-08-28 | Clean anaerobic high-temperature atmosphere furnace |
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| CN202021847406.0U CN212842914U (en) | 2020-08-28 | 2020-08-28 | Clean anaerobic high-temperature atmosphere furnace |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114720803A (en) * | 2022-04-05 | 2022-07-08 | 苏州中科科美科技有限公司 | Environment forming method and test system |
| TWI790942B (en) * | 2022-03-10 | 2023-01-21 | 精材科技股份有限公司 | Semiconductor oven |
-
2020
- 2020-08-28 CN CN202021847406.0U patent/CN212842914U/en active Active
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI790942B (en) * | 2022-03-10 | 2023-01-21 | 精材科技股份有限公司 | Semiconductor oven |
| CN114720803A (en) * | 2022-04-05 | 2022-07-08 | 苏州中科科美科技有限公司 | Environment forming method and test system |
| CN114720803B (en) * | 2022-04-05 | 2023-01-31 | 苏州中科科美科技有限公司 | Environment forming method and test system |
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