CN212808013U - Equal optical path imaging detection device for crystal grain adjacent surface of similar Michelson interferometer structure - Google Patents
Equal optical path imaging detection device for crystal grain adjacent surface of similar Michelson interferometer structure Download PDFInfo
- Publication number
- CN212808013U CN212808013U CN202021549292.1U CN202021549292U CN212808013U CN 212808013 U CN212808013 U CN 212808013U CN 202021549292 U CN202021549292 U CN 202021549292U CN 212808013 U CN212808013 U CN 212808013U
- Authority
- CN
- China
- Prior art keywords
- angle
- prism
- parallel plate
- optical path
- imaging
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 230000003287 optical effect Effects 0.000 title claims abstract description 78
- 239000013078 crystal Substances 0.000 title claims abstract description 66
- 238000003384 imaging method Methods 0.000 title claims abstract description 64
- 238000001514 detection method Methods 0.000 title claims abstract description 44
- 239000004065 semiconductor Substances 0.000 claims abstract description 62
- 239000011521 glass Substances 0.000 claims abstract description 28
- 238000000926 separation method Methods 0.000 claims description 19
- 238000005286 illumination Methods 0.000 claims description 10
- 238000006073 displacement reaction Methods 0.000 claims description 5
- 239000000463 material Substances 0.000 claims 1
- 238000001228 spectrum Methods 0.000 claims 1
- 238000010226 confocal imaging Methods 0.000 abstract description 17
- 230000010287 polarization Effects 0.000 description 12
- 238000000034 method Methods 0.000 description 11
- 230000015572 biosynthetic process Effects 0.000 description 4
- 238000013461 design Methods 0.000 description 4
- 230000007246 mechanism Effects 0.000 description 3
- 230000008859 change Effects 0.000 description 2
- 230000007547 defect Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 230000003595 spectral effect Effects 0.000 description 2
- 238000013459 approach Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000009977 dual effect Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000005057 refrigeration Methods 0.000 description 1
- 238000011160 research Methods 0.000 description 1
Images
Landscapes
- Investigating Or Analysing Materials By Optical Means (AREA)
Abstract
本实用新型提供一种类迈克尔逊干涉仪结构的晶粒相邻面等光程成像检测装置，包括光源、纵向同轴设置的相机、远心成像镜头、半透半反射平行平板合像器以及玻璃载物转盘、半导体晶粒，半透半反射平行平板合像器同一水平高度设置有平行平板补偿器及位于半导体晶粒正上方的天面直角转向棱镜，半导体晶粒同一水平高度与半透半反射平行平板合像器正下方设置有侧面直角转向棱镜，该装置在满足双面成像完全等光程共焦的条件下，获得相邻面的空间分离成像，能通过调节平行平板补偿器与光轴的夹角来校正补偿误差，从而可以实现半导体晶粒相邻双面同时完全等光程共焦成像检测，结构简单紧凑，装配调试容易，可靠性佳。
The utility model provides a Michelson-like interferometer-like optical path imaging detection device for adjacent surfaces of crystal grains, comprising a light source, a longitudinally coaxially arranged camera, a telecentric imaging lens, a semi-transparent and semi-reflective parallel plate image combiner and a glass The loading turntable, semiconductor die, and transflective parallel plate image combiner are provided at the same level with a parallel plate compensator and a right-angle steering prism located directly above the semiconductor die. A side right-angle turning prism is installed directly below the reflective parallel plate image combiner. The device can obtain spatially separated imaging of adjacent surfaces under the condition that the double-sided imaging is completely equal optical path confocality. By adjusting the parallel plate compensator and the light The included angle of the axis is used to correct the compensation error, so that the confocal imaging detection of the adjacent two sides of the semiconductor die can be realized at the same time with the same optical path. The structure is simple and compact, the assembly and debugging are easy, and the reliability is good.
Description
Technical Field
The utility model relates to a class michelson interferometer structure's equal optical distance formation of image detection device of crystalline grain looks proximal surface.
Background
The complete aplanatic confocal imaging of the crystal grain double-sided imaging detection light path of the semiconductor refrigeration device is one of the main core technical problems for obtaining double-sided simultaneous defect detection. Based on different detection devices and methods, the research of the prior semiconductor crystal grain adjacent double-sided simultaneous defect imaging detection technology has related patent applications:
as shown in fig. 1: utility model patent application No. 202010171706.0X, patent application name: the optical detection device and the method well solve the problem of quasi-confocal imaging detection of the adjacent surfaces of the semiconductor crystal grains, but an optical path difference still exists between the adjacent double-sided imaging optical paths. To obtain simultaneous confocal imaging of adjacent surfaces, it is necessary to compensate for this small optical path difference by selecting a telecentric imaging lens with a sufficiently large depth of field. Therefore, a new approach for complete aplanatic confocal imaging detection of the adjacent surfaces of the crystal grains is necessary.
As shown in fig. 2: utility model patent application number is 202010191734.8, patent application name: a novel crystal grain double-surface simultaneous aplanatic confocal imaging detection method based on time difference resolution provides a novel method for realizing complete aplanatic confocal imaging detection of adjacent surfaces of semiconductor crystal grains by using a single-group imaging system based on a time difference resolution imaging method.
As shown in fig. 3: the patent application name: the utility model discloses a device and a method for crystal grain double-sided simultaneous aplanatic confocal imaging detection based on a bicolor separation imaging method, and the utility model discloses patent application number is 202010203153.1, provides a novel method for semiconductor crystal grain adjacent surface simultaneous complete aplanatic confocal imaging detection based on a bicolor separation imaging method.
As shown in fig. 4: utility model patent application number is 202010250856.X, patent application name: a device and a method for crystal grain double-face simultaneous complete aplanatic confocal imaging detection based on a polarization separation imaging method use a polarization beam splitter to obtain two beams of illumination beams with mutually vertical polarization directions to respectively illuminate two adjacent faces of a semiconductor crystal grain to be detected. Further provides a method based on polarized light separation imaging (polarization split imaging for short), and a device and a method for realizing simultaneous and complete aplanatic confocal imaging detection of adjacent surfaces of semiconductor crystal grains by using a polarization camera.
As shown in fig. 5: the utility model discloses a patent application number is 202010296134.8, and the patent name is for using polarization to divide the image method to realize the confocal device and the method of the two-sided aplanatic confocal detection of crystalline grain simultaneously, proposes a principle still based on polarized light separation formation of image (being called for short "polarization branch image"), combines "polarization branch image prism subassembly" and uses ordinary CMOS or CCD camera to realize the confocal formation of image of the adjacent surface aplanatic confocal detection of semiconductor crystalline grain simultaneously.
In the various detection devices, a polarization optical element or a polarization CMOS sensor is generally used, and the structure or the use is slightly complicated, the cost is high, and the error compensation capability of realizing the aplanatic and double-sided separation imaging detection at the same time is insufficient.
SUMMERY OF THE UTILITY MODEL
The utility model discloses improve above-mentioned problem, promptly the to-be-solved technical problem of the utility model is that the confocal formation of image of complete aplanatic distance of present design detects the cost higher, and error compensation ability is not enough.
The utility model discloses a concrete implementation scheme is: the aplanatic imaging detection device of the crystal grain adjacent surface of the similar Michelson interferometer structure comprises a CMOS or CCD camera, a telecentric imaging lens, a semi-transparent and semi-reflective parallel flat plate image combiner, a glass carrying turntable and a semiconductor crystal grain arranged on the glass carrying turntable, which are sequentially arranged in the light path direction, a skyhook right-angle image rotating prism, a parallel flat plate compensator and a side right-angle image turning prism are respectively and sequentially arranged on the light path between the semiconductor crystal grain and the semi-transparent and semi-reflective parallel flat plate image combiner, the side right-angle image rotating prism and the skyhook right-angle image rotating prism are respectively positioned at the right side part of the semiconductor crystal grain and right above the skyhook, the skyhook right-angle image turning prism, the parallel flat plate compensator and the semi-transparent and semi-reflective parallel flat plate image combiner are positioned at the same horizontal height, and the side right-angle image rotating prism and the, meanwhile, a first right-angle surface of the side right-angle image-rotating prism is opposite to a first surface of the semi-transparent semi-reflective parallel flat-plate image combiner, a second right-angle surface of the side right-angle image-rotating prism is opposite to the side surface of the semiconductor crystal grain, and an inclined surface of the side right-angle image-rotating prism is obliquely arranged with an optical axis of the telecentric imaging lens;
two right-angle surfaces of the skyhook right-angle rotating image prism are respectively opposite to the skyhook of the semiconductor crystal grain and the second surface of the semi-transparent semi-reflective parallel flat-plate image combiner; a coaxial external illumination light source is arranged at the side of the semi-transparent semi-reflective parallel flat-plate image combiner departing from the second surface;
the light source is separated into a horizontal first light path and a longitudinal second light path by the semi-transmitting and semi-reflecting parallel flat-plate image combiner, and the first light path illuminates the skyward of the semiconductor crystal grain positioned on the glass loading turntable after passing through the first right-angle rotating image prism; the second light path illuminates the side surface of the semiconductor crystal grain to be tested after passing through a second right-angle image conversion prism;
imaging light beams of the semiconductor crystal grain skyward are incident on the parallel flat plate compensator through the first right-angle rotating image prism, are emitted in parallel through the parallel flat plate compensator to generate s displacement, and are reflected by the semi-transparent semi-reflective parallel flat plate image combiner to reach the reference output surface;
the imaging light beam on the side surface of the semiconductor crystal grain is reflected and turned by the second right-angle turning prism and then transmitted by the semi-transparent semi-reflective parallel flat plate image combiner to reach the reference output surface; the camera obtains images of the two faces independently.
Furthermore, the prism right-angle side length D of the top right-angle turning prism is the same as that of the side right-angle turning prism, the semiconductor crystal grain is positioned at the center of the glass carrying turntable, the center of the semi-transparent semi-reflective parallel flat-plate image combiner, the center of the reflection surface of the top right-angle turning prism and the side right-angle turning prism are connected with the center of the semiconductor crystal grain to form a square symmetrical light path structure with the side length of D/2+ D, and D is the center of the transparent glass carrying table width glass carrying turntable.
Furthermore, the distance between the center of the semi-transparent and semi-reflective parallel flat plate image combiner and the center of the side right-angle turning prism inclined plane is D/2+ D, the imaging optical path working distance WD of the side surface of the semiconductor crystal grain is = D/2+ D/2, the distance between the semi-transparent and semi-reflective parallel flat plate image combiner and the inclined plane of the skyhook right-angle turning prism is D/2+ D, and the imaging optical path working distance WD of the skyhook of the semiconductor crystal grain is = D/2+ D/2 on the same horizontal height.
Further, the size of the top right-angle relay prism is 15 × 15mm, and the size of the side right-angle relay prism is 15 × 15 mm.
Further, the parallel plate compensator produces a double image separation s = 1.5mm, the focal length f =51.5mm, and WD =110 mm.
Furthermore, the thickness of the parallel plate compensator is 6.5mm, the included angle between the normal line and the optical axis is 12 degrees, and the parallel plate compensator is made of K9 glass.
Further, the coaxial external illumination light source is monochromatic light, or a quasi-monochromatic light source or white light with a certain spectral bandwidth.
Compared with the prior art, the utility model discloses following beneficial effect has: the application provides a novel device and a method for complete aplanatic confocal imaging detection of adjacent surfaces based on a Michelson-like interferometer structure, and spatial separation of adjacent double-sided imaging is realized by adopting double-glass parallel flat plates in adjacent double-sided imaging light paths. The novel device can obtain the simultaneous complete aplanatic confocal imaging detection of two adjacent surfaces of the semiconductor crystal grain, does not need to use a polarizing optical element and a polarizing CMOS sensor (camera), and effectively reduces the cost of the detection device.
1) The device is a double-parallel flat plate structure based on a similar Michelson interferometer structure, can realize the simultaneous complete aplanatic confocal imaging detection of two adjacent surfaces of a semiconductor crystal grain, and has simple structure and easy installation and adjustment;
2) the double-image separation distance s can be increased or decreased by adjusting the included angle between the parallel flat plate compensator and the optical axis in the imaging optical path of the device, and the influence on the optical path difference is small; the generated micro optical path difference can be compensated by the depth of field of the telecentric imaging lens.
3) The imaging optical path of the device can compensate and change the included angle between the parallel flat plate compensator 7 and the optical axis and the original tiny optical path difference of the mechanism by replacing the parallel flat plate compensator with different thicknesses, thereby realizing the simultaneous complete aplanatic confocal imaging detection of the two adjacent surfaces of the semiconductor crystal grains.
4) The device can also correct and compensate the tiny optical path difference caused by the angle manufacturing error and the assembly error of the semi-transmission and semi-reflection parallel flat plate image synthesizer or the right-angle rotating image prism by adjusting the included angle between the parallel flat plate compensator and the optical axis.
5) The device adopts a common parallel flat plate compensator, a parallel flat plate image combiner and a CMOS or CCD camera, does not need to use a polarization optical element and a polarization CMOS sensor (camera), and simultaneously has stronger functions of double-sided image splitting and manufacturing error compensation. The device can effectively reduce the cost of the detection device and improve the cost performance of the detection device.
6) The device for simultaneously imaging and detecting the adjacent double surfaces of the semiconductor crystal grains has the advantages of simple and compact structure, easy assembly and debugging and good reliability.
Drawings
FIGS. 1-5 illustrate conventional semiconductor die adjacent surface detection optics;
in the figure, 1 is a black-and-white camera, 2 is a telecentric imaging lens, 3 is a cubic beam splitter, 4 is a semiconductor crystal grain, 5 is a transparent glass objective table, 6 or 6a or 6b is a rotating image prism, 7 or 7a or 7b is a light source, and 8 and 9 are optical filters; 8a is a polarizing prism; 8b is a roof prism; and 8c is a trigger signal controller.
Fig. 6 is a detection device of the present patent application.
FIG. 7 is a schematic diagram of the rotation of the parallel plate compensator according to the present invention.
Fig. 8 is a design example of the present patent application.
Detailed Description
The present invention will be described in further detail with reference to the accompanying drawings and specific embodiments.
As shown in fig. 6-8, the equal optical path imaging detection device of crystal grain adjacent surface of michelson interferometer structure comprises a CMOS or CCD camera 1, a telecentric imaging lens 2, a semi-transparent and semi-reflective parallel plate image combiner 3, a glass carrying turntable 5 and a semiconductor crystal grain 6 arranged on the glass carrying turntable in turn in the optical path direction, a zenith right-angle rotating prism 4a, a parallel plate compensator 7 and a side right-angle rotating prism 4b are respectively arranged in turn on the optical path between the semiconductor crystal grain 6 and the semi-transparent and semi-reflective parallel plate image combiner, the side right-angle rotating prism and the zenith right-angle rotating prism are respectively positioned on the front side of the semiconductor crystal grain and right above the zenith, the zenith right-angle rotating prism and the parallel plate compensator 7, the semi-transparent and semi-reflective parallel plate image combiner are positioned at the same horizontal height, the side right-angle rotating prism and the semi-transparent reflective parallel plate image combiner are positioned on the optical axis of the telecentric imaging lens 2, meanwhile, a first right-angle surface 401b of the side right-angle image-rotating prism is opposite to a first surface 301 of the semi-transparent semi-reflective parallel flat-plate image combiner, a second right-angle surface 402b of the side right-angle image-rotating prism is opposite to the side surface of the semiconductor crystal grain, and an inclined surface 403b of the side right-angle image-rotating prism is obliquely arranged with the optical axis of the telecentric imaging lens;
two right-angle surfaces of the skyhook right-angle rotating image prism are respectively opposite to the skyhook of the semiconductor crystal grain and the second surface 302 of the semi-transparent semi-reflective parallel flat-plate image combiner; the semi-transparent semi-reflective parallel flat-plate image combiner is provided with a coaxial external illumination light source 8 at the side departing from the second surface 302, namely the first surface 301;
the illumination light source 8 is separated into a horizontal first light path and a longitudinal second light path when passing through the semi-transparent semi-reflective parallel flat plate image combiner 3, and the first light path illuminates the skyward of the semiconductor crystal grain 6 of the glass loading turntable after passing through the parallel flat plate compensator 7 and the first right-angle rotating image prism; the second light path illuminates the side surface of the semiconductor crystal grain 6 to be tested after passing through a second right-angle image-rotating prism, two beams of illumination light respectively illuminate two adjacent surfaces of the semiconductor crystal grain 6, and enough illumination conditions are provided for simultaneous imaging of the two surfaces of the crystal grain;
imaging detection light path:
two adjacent surfaces of a semiconductor crystal grain 6 illuminated by a light source generate diffused light, an imaging light beam on the top surface of the semiconductor crystal grain is incident on a parallel flat plate compensator 7 with a certain thickness through a top right-angle rotating image prism 4a, is emitted in parallel through the parallel flat plate compensator 7 to generate s displacement, and is reflected by a semi-transmitting and semi-reflecting parallel flat plate image combiner 3 to reach a reference output surface; the imaging light beam on the side of the semiconductor crystal grain is reflected and turned by the side straight angle turning prism 4b, and then is transmitted by the semi-transparent semi-reflective parallel flat plate image combiner 3 to reach the reference output surface; the CMOS or CCD camera can respectively obtain independent images on two surfaces.
The illumination light source 8 for parallel light beam incidence on the right side of the semi-transparent semi-reflective parallel flat-plate image combiner 3 or the illumination light source 8 arranged at the front ends of the right-angle image-rotating prisms 4a and 4b on the top surface and the side surface can be monochromatic light, or can be quasi-monochromatic light source or white light with a certain spectral bandwidth.
The side length of the prism right-angle side of the top right-angle turning prism is the same as that of the side right-angle turning prism, the glass carrying turntable is circular, the semiconductor crystal grain is positioned in the center of the glass carrying turntable, the center of the semi-transparent semi-reflective parallel flat plate image combiner, the center of the reflection surface of the top right-angle turning prism and the side right-angle turning prism are connected with the center of the semiconductor crystal grain to form a square symmetrical light path structure with the side length of D/2+ D, and D is the center of the transparent glass carrying table width glass carrying turntable.
The distance between the center of the semi-transmissive and semi-reflective parallel flat plate image combiner and the center of the inclined plane of the side right-angle turning prism is D/2+ D, the working distance WD of an imaging light path on the side surface of the semiconductor crystal grain is = D/2+ D/2, the semi-transmissive and semi-reflective parallel flat plate image combiner and the inclined plane of the skyhook right-angle turning prism are on the same horizontal height, the distance D/2+ D is between the semi-transmissive and semi-reflective parallel flat plate image combiner and the inclined plane of the skyhook right-angle turning prism.
The parallel plate compensator 7 makes the semiconductor crystal grain 6 plane imaging light beam generate a parallel displacement s, the size of s depends on the thickness t of the parallel plate compensator 7, the thickness of the semi-transparent semi-reflective parallel plate image combiner 3 is the glass refractive index n1 and the included angle theta 1 between the normal line of the parallel plate compensator 7 surface and the optical axis.
And respectively obtaining complete aplanatic confocal imaging detection of the separation of the top surface and the side surface of the semiconductor crystal grain by using a common CMOS or CCD camera.
In this embodiment, the present invention provides a design embodiment of a front prism image-rotating subsystem of a semiconductor crystal grain adjacent surface simultaneous complete aplanatic confocal imaging detection device.
1) In this embodiment, the length and width of the rectangular relay prism for the top surface of the semiconductor crystal grain is 15 × 15mm, the length and width of the rectangular relay prism for the side surface of the semiconductor crystal grain is 15 × 15mm, and the width of the transparent glass stage is 45 mm.
2) The semi-transmitting and semi-reflecting parallel flat-plate image combiner 3 center, the reflection surface centers of the right-angle rotating image prisms 4a and 4b and the semiconductor crystal grain center are connected to form a square symmetrical optical path structure with the side length of D/2+ D =37.5 mm.
3) The semi-transparent semi-reflective parallel flat plate image combiner 3 has the side length of 15mm and the thickness of 6mm, and is parallel to the hypotenuse of the skyhook right-angle relay prism and the side right-angle relay prism.
4) The side imaging optical path working distance WD = D/2+ D/2=30mm, and the top imaging optical path working distance WD = D/2+ D/2=30 mm.
As shown in fig. 7, the thickness of the parallel plate compensator 7 is t, the included angle between the normal line of the parallel plate compensator and the optical axis of the incident light is θ, and the included angle between the normal line of the parallel plate compensator and the optical axis of the emergent light is θ'; theta 1 is an included angle between the normal of the parallel flat plate compensator, the normal of the semi-transparent and semi-inverse parallel flat plate image combiner and an incident light axis, and is an initial state of the Michelson-like interferometer structure when the angle is 45 degrees, and theta 1' is an included angle between the normal of the parallel flat plate compensator, the normal of the semi-transparent and semi-inverse parallel flat plate image combiner and an emergent light axis; theta 2 is an included angle between a normal line of the parallel flat plate compensator in the device after rotation and an optical axis of incident light, and is a state of a Michelson interferometer-like structure with a slight change, and theta 2' is an included angle between the normal line of the parallel flat plate compensator in the device after rotation and an optical axis of emergent light.
When the angle between the parallel plate compensator 7 and the optical axis is 45 °, the absolute values of the imaging separation distance and the optical path difference are both 0, and when the deflection angle deviates from 45 °, the absolute values of the imaging separation distance and the optical path difference are larger. If the imaging separation distance is greater than 1.5mm, the angle of incidence is approximately <14 ° or >64 °; it can be known from observation that when the deflection angle of the parallel flat plate compensator 7 is deflected toward a direction smaller than 45 °, the absolute value of the optical path difference is changed more slowly than when the deflection angle is deflected toward a direction having an incident angle larger than 45 °, so that the scheme of selecting the deflection angle of the parallel flat plate compensator 7 smaller than 14 ° is reasonable, and the optical path difference is-0.65 mm at this time. The system can meet the requirement of double-sided imaging separation, can make the optical path difference small, and is suitable for an optical device for double-sided detection and simultaneous imaging.
The relation between the thickness of the parallel flat plate compensator and the optical path difference is as follows:
the incident angle of the parallel flat plate compensator 7 is 45 degrees as a design reference, the mechanism position aplanatism (the point O is coincident with the point O ') of the device is ensured, and the thickness t of the parallel flat plate compensator 7 is changed to be t':
if only the thickness of the parallel plate compensator 7 is changed and the incident angle is not changed, the emergent angle is only related to the incident angle and the refractive index
θ1=θ2=45°，θ1’=θ2’，n1*sinθ1’=n*sinθ1（n=1）
The distance s between the center points of the two clear images:
s = t4-t2 =t’*sin(θ2-θ2’)/cosθ2’ - t*sin(θ1-θ1’)/cosθ1’
=(t’-t)*sin(θ1-θ1’)/cosθ1’
the optical path difference can be expressed as:
thickness t optical path of original parallel flat plate compensator: Δ 1= IJ × n1+ JP + PO
The thickness t' of the existing parallel plate compensator is as follows: Δ 2= IJ '. n1+ J' O '+ O' P
Δ1-Δ2=IJ*n1+JP+PO -(IJ’*n1+J’O’+O’P)
Wherein x1= IJ, x2= IJ ', J' O '= t3-t1+ JP, O' P = OP = t4-t2
=x1*n1+(t4-t2)-x2*n1-(t3-t1)- (t4-t2)
=x1*n1 – x2*n1-(t3-t1)
=t*n1/cosθ1’–(t’-t)*cos(θ1-θ1’)/cosθ1’
The parameters t1, t2, t3 and t4 are shown in fig. 7 and can be calculated according to geometric relations.
As can be seen from the above, when the thickness of the parallel plate compensator 7 is changed, the variation of the image separation distance and the optical path difference is in a negative relationship. When the thickness of the parallel flat plate compensator 7 is changed to be larger, the image of the sky surface is separated to the left side more, and the optical path difference is linearly increased towards the negative direction; when the thickness of the parallel flat plate compensator 7 is changed to be smaller, the image of the sky surface is separated to the right side more, and the optical path difference is linearly increased to the positive direction.
To sum up, the conclusion that the separation distance is increased by changing the incident angle of the parallel plate compensator 7 is that when the parallel plate compensator 7 is deflected in the direction of less than 45 °, the thickness of the parallel plate compensator 7 can be reduced, and when the deflected angle is deflected in the direction of more than 45 °, the thickness of the parallel plate compensator 7 can be increased, thereby achieving the purpose of reducing the optical path difference and increasing the imaging separation distance.
To make the distance of the dual image separation large enough and the optical path difference as small as possible, the present embodiment provides the following three placement schemes of the parallel plate compensator satisfying the following conditions:
a) the thickness of the parallel flat plate compensator 7 is 6mm, the included angle between the normal line and the optical axis is 14 degrees, the parallel flat plate compensator is made of K9 glass, and the optical path difference of the double images of the scheme is 0.65 mm.
b) The thickness of the parallel flat plate compensator 7 is 6.2mm, the included angle between the normal line and the optical axis is 19 degrees, the parallel flat plate compensator is made of K9 glass, a turning prism of the skyhook mechanism needs to be adjusted downwards by 0.26mm, and the optical path difference of double images of the scheme is zero.
c) The thickness of the parallel flat plate compensator 7 is 6.5mm, the included angle between the normal line and the optical axis is 12 degrees, the parallel flat plate compensator is made of K9 glass, and the optical path difference of the double images in the scheme is zero.
5) The angle displacement error of the double images generated by the angle tolerance (less than or equal to 30 arc seconds) of the semi-transmitting and semi-reflecting parallel flat plate image combiner 3, the parallel flat plate compensator 7 and the right-angle relay prism is controlled within 2 arc minutes.
Any technical solution disclosed in the present invention is, unless otherwise stated, disclosed a numerical range if it is disclosed, and the disclosed numerical range is a preferred numerical range, and any person skilled in the art should understand that: the preferred ranges are merely those values which are obvious or representative of the technical effect which can be achieved. Because numerical value is more, can't be exhaustive, so the utility model discloses just disclose some numerical values with the illustration the technical scheme of the utility model to, the numerical value that the aforesaid was enumerated should not constitute right the utility model discloses create the restriction of protection scope.
If the terms "first," "second," etc. are used herein to define parts, those skilled in the art will recognize that: the terms "first" and "second" are used merely to distinguish one element from another in a descriptive sense and are not intended to have a special meaning unless otherwise stated.
In addition, the terms used in any aspect of the present disclosure as described above to indicate positional relationships or shapes include similar, analogous, or approximate states or shapes unless otherwise stated.
The utility model provides an arbitrary part both can be assembled by a plurality of solitary component parts and form, also can be the solitary part that the integrated into one piece technology was made.
Finally, it should be noted that the above embodiments are only used for illustrating the technical solutions of the present invention and not for limiting the same; although the present invention has been described in detail with reference to preferred embodiments, it should be understood by those skilled in the art that: the invention can be modified or equivalent substituted for some technical features; without departing from the spirit of the present invention, it should be understood that the scope of the claims is intended to cover all such modifications and variations.
Claims (7)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202021549292.1U CN212808013U (en) | 2020-07-30 | 2020-07-30 | Equal optical path imaging detection device for crystal grain adjacent surface of similar Michelson interferometer structure |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202021549292.1U CN212808013U (en) | 2020-07-30 | 2020-07-30 | Equal optical path imaging detection device for crystal grain adjacent surface of similar Michelson interferometer structure |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN212808013U true CN212808013U (en) | 2021-03-26 |
Family
ID=75106235
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202021549292.1U Active CN212808013U (en) | 2020-07-30 | 2020-07-30 | Equal optical path imaging detection device for crystal grain adjacent surface of similar Michelson interferometer structure |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN212808013U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112067551A (en) * | 2020-07-30 | 2020-12-11 | 泉州师范学院 | Crystal grain adjacent surface complete aplanatic confocal imaging detection device and method based on Michelson-like interferometer structure |
-
2020
- 2020-07-30 CN CN202021549292.1U patent/CN212808013U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112067551A (en) * | 2020-07-30 | 2020-12-11 | 泉州师范学院 | Crystal grain adjacent surface complete aplanatic confocal imaging detection device and method based on Michelson-like interferometer structure |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN110987964B (en) | Method for obtaining optical detection completely equal illumination of opposite two sides of semiconductor crystal grain | |
| KR100225923B1 (en) | Ideal diffraction interferometer | |
| JP3878107B2 (en) | Defect inspection method and apparatus | |
| US8547557B2 (en) | Apparatus for determining a height map of a surface through both interferometric and non-interferometric measurements | |
| CN112504116B (en) | Measurement system for use in metrology measurement of patterned samples | |
| US9157870B2 (en) | Pattern test apparatus | |
| JP3762952B2 (en) | Optical apparatus and image measuring apparatus and inspection apparatus using the same | |
| JPS58145911A (en) | Optical system for testing with light transmission microscope by reflected light irradiation | |
| CN110806410A (en) | Optical device and method for simultaneous detection of top surface and side surface of semiconductor die | |
| CN111089840A (en) | A New Apparatus and Method for Simultaneous Quasi-Equal Optical Path Confocal Imaging Inspection of Adjacent Surfaces of Semiconductor Die | |
| CN212808013U (en) | Equal optical path imaging detection device for crystal grain adjacent surface of similar Michelson interferometer structure | |
| CN111157535A (en) | Detection device and method for simultaneous equal optical path imaging and equal illumination illumination on both sides of crystal grains based on imaging optical elements | |
| US20100085637A1 (en) | Differential interference contrast microscope | |
| CN213337388U (en) | Novel device for simultaneously and completely aplanatic confocal imaging detection of two adjacent surfaces of semiconductor crystal grains | |
| CN111044524A (en) | Optical detection device and method for realizing equal optical path imaging of semiconductor crystal grains relative to two surfaces | |
| US20010040723A1 (en) | Differential interference optical system | |
| US9429525B2 (en) | Optical module for surface inspection and surface inspection apparatus including the same | |
| TW202020436A (en) | System and method for multiple mode inspection of a sample | |
| CN112067551A (en) | Crystal grain adjacent surface complete aplanatic confocal imaging detection device and method based on Michelson-like interferometer structure | |
| CN211856323U (en) | A New Device for Simultaneous Quasi-Equal Optical Path Confocal Imaging Inspection of Adjacent Surfaces of Semiconductor Die | |
| CN213091520U (en) | Confocal imaging inspection device of complete equal optical path between adjacent faces of grains using optical wedge splitting | |
| CN212646440U (en) | A complete equal optical path confocal imaging detection device based on the adjacent surfaces of the parallel plate splitting | |
| CN111595861A (en) | Confocal imaging detection device and method for simultaneously and completely aplanatic crystal grain adjacent surfaces by using glass optical wedge for image splitting | |
| CN211741108U (en) | A device for obtaining complete equal-illuminance illumination for optical inspection of opposite sides of a semiconductor die | |
| CN212031285U (en) | A device for confocal inspection of two sides of grains at the same time with equal optical path length using polarization splitting method |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant |