CN212785991U - Band-stop type platinum plasma generator probe - Google Patents
Band-stop type platinum plasma generator probe Download PDFInfo
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- CN212785991U CN212785991U CN202022190235.5U CN202022190235U CN212785991U CN 212785991 U CN212785991 U CN 212785991U CN 202022190235 U CN202022190235 U CN 202022190235U CN 212785991 U CN212785991 U CN 212785991U
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Abstract
The utility model provides a band elimination type platinum plasma generator probe, including the circuit board, the resistance adjusting unit, predetermine the resistance unit, the BNC interface, probe, bimetallic strip, probe includes two foil pieces, the one end of circuit board is fixed in to two foil pieces bottoms, the top clearance sets up, every foil piece inboard correspondence is equipped with a bimetallic strip, foil piece bottom and circuit board fixed connection, the less sheetmetal of coefficient of thermal expansion and the laminating setting of foil piece in the bimetallic strip, one of them foil piece is connected with a BNC through predetermineeing the resistance unit and connects, another foil piece is connected with a BNC through the resistance adjusting unit and connects. A band elimination type platinum plasma generator probe solved the drift that the operating point can appear at the probe in work, influenced stability's problem.
Description
Technical Field
The utility model belongs to the plasma generator field especially relates to a band elimination type platinum plasma generator probe.
Background
The plasma probe is essentially a pair of inert metal contacts with gaps, and has high equivalent internal resistance in a cold state and low equivalent internal resistance in a hot state. In a cold state, a higher voltage is needed to excite the probe to generate plasma, and heat is generated by the probe and air during work, so that current is increased. Therefore, the probe can have drift of the working point during operation, which affects the stability.
Disclosure of Invention
In view of this, the present invention provides a probe of platinum plasma generator with band stop to overcome the above-mentioned drawbacks of the prior art, so as to solve the problem that the probe will have drift of the working point during operation, which affects the stability.
In order to achieve the above purpose, the technical scheme of the utility model is realized like this:
the utility model provides a band stop type platinum plasma generator probe, which comprises a circuit board, the resistance adjusting unit, predetermine the resistance unit, the BNC interface, a probe, bimetallic strip, the probe includes two metal foils, the one end of circuit board is fixed in to two metal foil bottoms, the top clearance sets up, every metal foil inboard correspondence is equipped with a bimetallic strip, metal foil bottom and circuit board fixed connection, the less sheetmetal of coefficient of thermal expansion sets up with the laminating of metal foil in the bimetallic strip, one of them sheetmetal is connected with a BNC through predetermineeing the resistance unit and connects, another sheetmetal is connected with a BNC through the resistance adjusting unit and connects.
Further, the metal foil piece includes connection piece and arc portion, and the connection piece sets up with the laminating of bimetallic strip, connection piece bottom and circuit board fixed connection, and one of them connection piece links to each other with BNC joint through predetermineeing resistance unit, and another connection piece links to each other with BNC joint through adjusting the resistance unit, and the connection piece top links to each other with the one end of arc portion, and two arc portions set up relatively, and the top clearance of two arc portions sets up.
Furthermore, the adjusting unit comprises a first S-shaped wire and resistance paste, one end of the first S-shaped wire is connected with the other metal sheet, the other end of the first S-shaped wire is connected with the BNC connector, the resistance paste is fixed on the circuit board, and the resistance paste covers the first S-shaped wire along the length direction of the circuit board.
Furthermore, the first S-shaped wires are multiple, the first S-shaped wires are connected end to end, the first S-shaped wires are fixed on the ceramic circuit board, one end, far away from the first S-shaped wire connected with the first S-shaped wires, of the first S-shaped wire at one end is connected with another metal sheet, and one end, far away from the first S-shaped wire connected with the first S-shaped wire, of the first S-shaped wire at the other end is connected with the BNC connector.
Furthermore, the group adjusting unit comprises a second S-shaped wiring and resistance paste, one end of the second S-shaped wiring is connected with one metal sheet, the other end of the second S-shaped wiring is connected with the BNC connector, the resistance paste is fixed on the circuit board, and the resistance paste covers the second S-shaped wiring along the length direction of the circuit board.
Furthermore, a plurality of second S-shaped wires are arranged, the plurality of second S-shaped wires are connected end to end, the plurality of second S-shaped wires are fixed on the ceramic circuit board, one end, far away from the second S-shaped wire connected with the second S-shaped wire, of the second S-shaped wire at one end of the second S-shaped wire is connected with one metal sheet, and one end, far away from the second S-shaped wire connected with the second S-shaped wire, of the second S-shaped wire at the other end of the second S-shaped wire is connected with the BNC connector.
Further, the resistor paste is disposed at a central position of each second S-shaped trace.
Furthermore, the lengths of the second S-shaped wires exposed on the same side of the resistor paste are the same.
Compared with the prior art, the utility model discloses following advantage has:
(1) the metal foils and the bimetallic strip are matched, so that the distance between the two oppositely arranged metal foils can be changed along with the temperature change, the resistance adjusting unit and the preset resistance unit are adjusted, the resistance value is further adjusted, the temperature change is compensated, and the current tends to be stable
(2) The lengths of the first S-shaped wires exposed on the same side of the resistor paste are the same. When debugging, can guarantee that every cuts a short circuit line, the resistance variation is the fixed value to adjustment resistance that can be simple swift.
(3) Because the distance between two oppositely arranged metal foils of the probe is small, the probe can be excited only by adopting a low excitation voltage.
Drawings
The accompanying drawings, which form a part hereof, are included to provide a further understanding of the invention, and are incorporated in and constitute a part of this specification, illustrate embodiments of the invention and together with the description serve to explain the invention without undue limitation. In the drawings:
FIG. 1 is a schematic diagram of a probe of a band-stop platinum plasma generator according to an embodiment of the present invention;
fig. 2 is a schematic diagram of a band-stop platinum plasma generator probe according to an embodiment of the present invention.
Description of reference numerals:
1-a circuit board; 2-a probe; 21-a metal foil; 22-connecting pieces; 23-an arc-shaped portion; 3-a resistance adjusting unit; 31-a first S-shaped trace; 32-resistive paste; 4-presetting a resistance unit; 41-a second S-shaped trace; 5-bimetallic strip; 6-BNC joint.
Detailed Description
It should be noted that, in the present invention, the embodiments and features of the embodiments may be combined with each other without conflict.
In the description of the present invention, it is to be understood that the terms "center", "longitudinal", "lateral", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", and the like, indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are used merely for convenience of description and for simplicity of description, and do not indicate or imply that the device or element being referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore, should not be construed as limiting the present invention. Furthermore, the terms "first", "second", etc. are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first," "second," etc. may explicitly or implicitly include one or more of that feature. In the description of the present invention, "a plurality" means two or more unless otherwise specified.
In the description of the present invention, it is to be noted that, unless otherwise explicitly specified or limited, the terms "mounted," "connected," and "connected" are to be construed broadly, and may be, for example, fixedly connected, detachably connected, or integrally connected; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meaning of the above terms in the present invention can be understood by those of ordinary skill in the art through specific situations.
The present invention will be described in detail below with reference to the accompanying drawings in conjunction with embodiments.
As shown in fig. 1 and 2, the band-stop platinum plasma generator probe comprises a circuit board 1, a resistance adjusting unit 3, a preset resistance unit 4, a BNC interface, a probe 2 and a bimetallic strip 5, wherein the probe 2 comprises two metal foils 21, bottoms of the two metal foils 21 are riveted or welded to one end of the circuit board 1, a gap is formed in the top of the two metal foils 21, the bimetallic strip 5 is correspondingly arranged on the inner side of each metal foil 21 with a distance of about 0.2-0.5mm, the bottom of each metal foil 21 is fixedly connected with the circuit board 1, the metal strips with smaller thermal expansion coefficients in the bimetallic strip 5 are attached to the metal foils 21, one metal strip is connected with a BNC connector 6 through the preset resistance unit 4, and the other metal strip is connected with a BNC connector 6 through the resistance adjusting unit 3. The circuit board 1 is made of, but not limited to, a ceramic plate, the ceramic plate is provided with printed S-shaped wiring, the left side is a sensitivity adjusting area, the right side is a heat-sensitive resistance adjusting area, heat-sensitive materials with the alpha coefficient of 0.04 are printed on the heat-sensitive resistance adjusting area, and a ceramic substrate is cured at high temperature after being coated. And the resistance adjusting area is printed with thick film conductive paste with positive temperature coefficient on the S-shaped wiring and is cured at high temperature. The core part of the probe 2 is a U-shaped thin metal foil 21, and two ends of the U-shaped thin metal foil are fixed with bimetallic deformation sheets, wherein the bimetallic deformation sheets are nickel iron-manganese copper bimetallic deformation sheets. The bimetal deformation sheet is fixed on the ceramic substrate, two ends of the probe 2 are respectively connected with the inductance adjusting area and the resistance adjusting area, and the tail end of the probe is connected with the BNC connector. After the stress of the ceramic plate provided with the probe 2 is removed through multiple thermal cycles, the middle of the U-shaped foil is cut into a gap G1 through laser or precision sawing, sand blasting and chemical polishing are carried out, and the body of the probe 2 is equivalent to a capacitor C1.
Because the G1 gap is small, the probe 2 can be excited by adopting a lower excitation voltage; after the probe 2 is excited, the whole assembly is gradually heated, so that the current rises. Since the resistance of the resistor R1 increases with increasing temperature, the current increase is limited.
As shown in fig. 1 and 2, the metal foil 21 includes a connecting sheet 22 and arc portions 23, the connecting sheet 22 is attached to the bimetallic strip 5, the bottom of the connecting sheet 22 is fixedly connected to the circuit board 1, one of the connecting sheets 22 is connected to the BNC connector 6 through the preset resistor unit 4, the other connecting sheet 22 is connected to the BNC connector 6 through the resistance adjusting unit 3, the top of the connecting sheet 22 is connected to one end of the arc portions 23, the two arc portions 23 are arranged oppositely, and the top end gaps of the two arc portions 23 are arranged. Because the whole assembly is gradually heated after the probe 2 is excited, the bimetallic strip 5 is respectively combined together on two sides by two alloys with different thermal expansion coefficients, then the temperature is conducted through the metal foil 21, the bimetallic strip 5 converts the temperature change into mechanical motion after being heated, and because the thermal expansion coefficient of the metal sheet jointed with the metal foil 21 is lower than that of the metal sheet adjacent to the metal foil, the heated bimetallic strip 5 drives the foil to move outwards relatively, after the gap is increased, the equivalent internal resistance of the probe 2 is increased, and the current is reduced. Finally, under the common compensation of the printed resistor and the bimetal, the probe 2 realizes the thermal balance, and the current is basically stable.
Because the current of the probe 2 is stable and the distortion is small, the high-frequency interference is restrained.
As shown in fig. 1 and 2, the group adjusting unit includes a first S-shaped trace and a resistor paste 32, one end of the first S-shaped trace is connected to another metal sheet, the other end of the first S-shaped trace is connected to the BNC connector 6, the resistor paste 32 is fixed on the circuit board 1, and the resistor paste 32 covers the first S-shaped trace along the length direction of the circuit board 1.
As shown in fig. 1 and 2, the first S-shaped wires are connected end to end, the first S-shaped wires are fixed on the ceramic circuit board 1, one end of the first S-shaped wire far away from the first S-shaped wire connected with the first S-shaped wire at one end is connected with another metal sheet, and one end of the first S-shaped wire far away from the first S-shaped wire connected with the first S-shaped wire at the other end is connected with the BNC connector 6.
One or more short circuit lines in the resistance adjusting area are fused by laser or cut manually, so that the resistance can reach the required resistance value at room temperature.
As shown in fig. 1 and 2, the resistor paste 32 is disposed at a central position of each first S-shaped trace.
As shown in fig. 1 and 2, the lengths of the first S-shaped traces exposed on the same side of the resistor paste 32 are the same. When debugging is carried out, the resistance value variation is a fixed value when a short circuit line is cut off, so that the resistance value can be adjusted simply and quickly.
As shown in fig. 1 and fig. 2, the adjusting unit further includes a second S-shaped trace and a resistor paste 32, one end of the second S-shaped trace is connected to one of the metal sheets, the other end of the second S-shaped trace is connected to the BNC connector 6, the resistor paste 32 is fixed on the circuit board 1, and the resistor paste 32 covers the second S-shaped trace along the length direction of the circuit board 1.
As shown in fig. 1 and 2, the plurality of second S-shaped wires are connected end to end, the plurality of second S-shaped wires are fixed on the ceramic circuit board 1, one end of the second S-shaped wire, which is located at one end and is far away from the second S-shaped wire connected with the second S-shaped wire, is connected with one of the metal sheets, and one end of the second S-shaped wire, which is located at the other end and is far away from the second S-shaped wire connected with the second S-shaped wire, is connected with the BNC connector 6.
As shown in fig. 1 and 2, the resistor paste 32 is disposed at a central position of each second S-shaped trace.
As shown in fig. 1 and 2, the lengths of the second S-shaped traces exposed on the same side of the resistor paste 32 are the same.
The inductor can reach the required resistance value by fusing laser or manually cutting off one or more short circuit lines in the inductance adjusting area.
The resistance of the preset resistance unit 4 is adjusted to R1, generally 80% Rtotal, with a resistance value of about 40 ohms, by cutting one or more short-circuit lines of the preset resistance unit 4 at 25 ° with laser or manually. The resistance R2 of the resistance adjusting unit 3 can be changed by adjusting the short circuit line of the resistance adjusting unit 3 by laser or manually, the resistance is generally about 20% Rtotal and 5-10 ohms, R1 and Rtotal are adjusted to R1+ R2, and the resistance matching is realized with the coaxial cable.
The above description is only a preferred embodiment of the present invention, and should not be taken as limiting the invention, and any modifications, equivalent replacements, improvements, etc. made within the spirit and principle of the present invention should be included in the protection scope of the present invention.
Claims (10)
1. A band stop type platinum plasma generator probe is characterized in that: including circuit board (1), resistance adjusting unit (3), predetermine resistance unit (4), the BNC interface, probe (2), bimetallic strip (5), probe (2) include two metal foil (21), the one end of circuit board (1) is fixed in to two metal foil (21) bottoms, the top clearance sets up, every metal foil (21) inboard correspondence is equipped with one bimetallic strip (5), metal foil (21) bottom and circuit board (1) fixed connection, the less sheetmetal of thermal expansion coefficient sets up with metal foil (21) laminating in bimetallic strip (5), one of them sheetmetal is connected with one BNC through predetermineeing resistance unit (4) and connects (6), another sheetmetal is connected with one BNC through resistance adjusting unit (3) and connects (6).
2. The band stop type platinum plasma generator probe according to claim 1, wherein: metal foil piece (21) includes connection piece (22) and arc portion (23), the laminating setting of connection piece (22) and bimetallic strip (5), connection piece (22) bottom and circuit board (1) fixed connection, one of them connection piece (22) link to each other with BNC joint (6) through predetermineeing resistance unit (4), another connection piece (22) link to each other with BNC joint (6) through adjusting resistance unit (3), connection piece (22) top links to each other with the one end of arc portion (23), two arc portions (23) set up relatively, the top gap setting of two arc portions (23).
3. The band stop type platinum plasma generator probe according to claim 1, wherein: the group adjusting unit comprises a first S-shaped wiring and resistance paste (32), one end of the first S-shaped wiring is connected with another metal sheet, the other end of the first S-shaped wiring is connected with the BNC connector (6), the resistance paste (32) is fixed on the circuit board (1), and the resistance paste (32) covers the first S-shaped wiring along the length direction of the circuit board (1).
4. The band stop type platinum plasma generator probe according to claim 3, wherein: the first S-shaped wires are connected end to end and fixed on the ceramic circuit board (1), one end of the first S-shaped wire, which is located at one end of the first S-shaped wire and is far away from the first S-shaped wire connected with the first S-shaped wire, is connected with another metal sheet, and one end of the first S-shaped wire, which is located at the other end of the first S-shaped wire and is far away from the first S-shaped wire connected with the first S-shaped wire, is connected with the BNC connector (6).
5. The band stop type platinum plasma generator probe according to claim 4, wherein: the resistor paste (32) is arranged at the center of each first S-shaped wire.
6. The band stop type platinum plasma generator probe according to claim 5, wherein: the lengths of the first S-shaped wires exposed on the same side of the resistor paste (32) are the same.
7. The band stop type platinum plasma generator probe according to claim 1, wherein: the group adjusting unit comprises a second S-shaped wiring and resistance paste (32), one end of the second S-shaped wiring is connected with one metal sheet, the other end of the second S-shaped wiring is connected with the BNC connector (6), the resistance paste (32) is fixed on the circuit board (1), and the resistance paste (32) covers the second S-shaped wiring along the length direction of the circuit board (1).
8. The band stop type platinum plasma generator probe according to claim 7, wherein: the second S-shaped wires are connected end to end and fixed on the ceramic circuit board (1), one end of the second S-shaped wire, which is located at one end of the second S-shaped wire and is far away from the second S-shaped wire connected with the second S-shaped wire, is connected with one of the metal sheets, and one end of the second S-shaped wire, which is located at the other end of the second S-shaped wire and is far away from the second S-shaped wire connected with the second S-shaped wire, is connected with the BNC connector (6).
9. The band stop platinum plasma generator probe of claim 8, wherein: and the resistance paste (32) is arranged at the central position of each second S-shaped wire.
10. The band stop type platinum plasma generator probe according to claim 9, wherein: the lengths of the second S-shaped wires exposed on the same side of the resistor paste (32) are the same.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202022190235.5U CN212785991U (en) | 2020-09-29 | 2020-09-29 | Band-stop type platinum plasma generator probe |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202022190235.5U CN212785991U (en) | 2020-09-29 | 2020-09-29 | Band-stop type platinum plasma generator probe |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN212785991U true CN212785991U (en) | 2021-03-23 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202022190235.5U Active CN212785991U (en) | 2020-09-29 | 2020-09-29 | Band-stop type platinum plasma generator probe |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN212785991U (en) |
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2020
- 2020-09-29 CN CN202022190235.5U patent/CN212785991U/en active Active
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