CN212762908U - Micro-vibration signal sensitive element, detection mechanism and grinding machine tool setting precision detection device - Google Patents
Micro-vibration signal sensitive element, detection mechanism and grinding machine tool setting precision detection device Download PDFInfo
- Publication number
- CN212762908U CN212762908U CN202021582011.2U CN202021582011U CN212762908U CN 212762908 U CN212762908 U CN 212762908U CN 202021582011 U CN202021582011 U CN 202021582011U CN 212762908 U CN212762908 U CN 212762908U
- Authority
- CN
- China
- Prior art keywords
- vibration signal
- crack
- micro
- housing
- grinding machine
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Images
Landscapes
- Constituent Portions Of Griding Lathes, Driving, Sensing And Control (AREA)
Abstract
The utility model discloses a little vibration signal sensing element, include: the base layer is provided with a crack, the crack penetrates through the base layer along the thickness direction of the base layer, and the crack is provided with a closed tip part; the piezoelectric film is arranged on the basal layer on one side of the crack tip end part and is used for converting a vibration signal generated by the crack into an electric signal; and the output electrode is connected with the piezoelectric film and is used for outputting the electric signal. The utility model also provides a little vibration signal detection mechanism and the accurate detection device of grinding machine tool setting. The utility model discloses vibration signal to emery wheel and work piece contact production in the twinkling of an eye gathers the processing, can adjust the tool setting precision according to grinding machine processing environment, and this grinding machine tool setting accurate detection device simple structure, tool setting process are high-efficient, with low costs, have improved the surface quality and the precision of work piece processing in the accurate/ultra-precise grinding machine.
Description
Technical Field
The utility model belongs to the technical field of precision machining, concretely relates to little vibration signal sensing element and little vibration signal detection mechanism among tool setting detection device and the device towards precision/ultra-precision grinder.
Background
The precise tool setting is the first link for realizing precise machining of the sample piece by the grinding machine and is the key for ensuring the machining quality. At present, the problems of complex detection system, low precision and the like exist in a grinding machine tool setting method for precision/ultra-precision machining. The method has the advantages that the weak vibration signal generated at the moment when the cutter is in contact with the workpiece is accurately detected by means of the high-precision vibration detection device, and the method is an important way for improving the cutter setting precision of the grinding machine. However, the existing vibration detection device is difficult to meet the more strict precision requirement of the grinding machine precision/ultra-precision machining technology on the detection device. Therefore, the micro-vibration signal sensing element and the micro-vibration signal detection mechanism are designed, and meanwhile, the micro-vibration signal sensing element and the micro-vibration signal detection mechanism are applied to the precise tool setting detection of the grinding machine, and have important significance for realizing precise/ultra-precise grinding machining of the sample.
SUMMERY OF THE UTILITY MODEL
An object of the utility model is to provide a towards accurate detection device of the weak vibration signal of accurate/ultra-precise grinding machine tool setting link, aim at solving the problem that the special tool setting detection device structure of current grinding machine is complicated and the detection precision is low.
In order to achieve the above object, an embodiment of the present invention provides the following technical solutions:
in one embodiment, a micro-vibration signal sensing element is provided, comprising:
the base layer is provided with a crack, the crack penetrates through the base layer along the thickness direction of the base layer, and the crack is provided with a closed tip part;
the piezoelectric film is arranged on the basal layer on one side of the crack tip end part and is used for converting a vibration signal generated by the crack into an electric signal;
and the output electrode is connected with the piezoelectric film and is used for outputting the electric signal.
As a further improvement of the present invention, the crack is formed from one side of the basal layer to be depressed inward, and the crack has an open portion disposed opposite to the tip portion.
As a further improvement of the present invention, the material of the piezoelectric film may be one of polyvinylidene fluoride, aluminum nitride, zinc oxide, lead zirconate titanate, lithium niobate crystal, and lead titanate.
As a further improvement of the utility model, the basal layer is made of one of epoxy resin, polydimethylsiloxane or ultraviolet curing glue.
An embodiment of the utility model provides a micro-vibration signal detection mechanism, include:
the housing is hollow inside;
the probe assembly is arranged in the housing and is elastically connected with the housing, the probe assembly is provided with a first end part and a second end part which are oppositely arranged, the first end part is arranged to be protruded out of the housing, and the probe assembly can move relative to the housing in a telescopic mode under the action of external force;
any micro-vibration signal sensing element is arranged in the housing and connected with the second end of the probe assembly.
As a further improvement, the utility model is provided with a limit structure on the first end outside the housing, and when the probe assembly is under the effect of external force to when contracting in the housing, limit structure can restrict the contraction displacement of the probe assembly.
As a further improvement of the present invention, the second end is fixedly connected to a side surface parallel to the crack of the basal layer.
As a further improvement of the present invention, the probe assembly and the reset member are provided between the housings, the probe assembly is relative to the housing after moving under the action of external force, and the reset member can be reset under the action.
As a further improvement of the utility model, the housing is made of one of polytetrafluoroethylene and polyformaldehyde.
An embodiment of the utility model provides a grinding machine tool setting accurate detection device is still provided, include:
a base;
the micro-vibration signal detection mechanism is arranged on the base and used for collecting vibration signals generated when the grinding machine sets the tool and converting the vibration signals into electric signals;
and the signal processing and displaying mechanism is connected with the micro-vibration signal detecting mechanism and is used for processing the collected electric signals and outputting and displaying the electric signals.
As a further improvement of the present invention, the signal processing and displaying mechanism includes a charge amplifier connected to the output electrode, an analog-to-digital converter connected to the charge amplifier, a microprocessor connected to the analog-to-digital converter, and a display output structure connected to the microprocessor.
As a further improvement of the present invention, the microprocessor may be one of a single chip microcomputer and a signal digital processor.
As a further improvement, the base is a magnetic universal seat, is arranged at the position of the grinding machine where the vibration signal is convenient to detect, and can be adjusted in any direction, and the micro-vibration signal detection mechanism is connected with the base through a connecting rod.
Compared with the prior art, the beneficial effects of the utility model are that:
1. the micro-vibration signal sensing element is composed of a controllable crack structure capable of realizing efficient collection of weak signals based on a tip stress concentration effect and a piezoelectric film material capable of realizing efficient signal conversion, and can improve the detection precision of the weak signals to the maximum extent.
2. Based on have the universal seat of absorption function and add the connecting rod structure, can install in a flexible way and debug tool setting detection device, succinct practical.
Drawings
In order to more clearly illustrate the embodiments of the present application or the technical solutions in the prior art, the drawings needed to be used in the description of the embodiments or the prior art will be briefly described below, it is obvious that the drawings in the following description are only some embodiments described in the present application, and other drawings can be obtained by those skilled in the art without creative efforts.
FIG. 1 is a schematic structural diagram of a micro-vibration signal sensing device in example 1 of the present application;
FIG. 2 is a schematic structural diagram of a micro-vibration signal detection mechanism in embodiment 2 of the present application;
fig. 3 is a schematic structural diagram of a device for detecting tool setting accuracy of a grinding machine in embodiment 3 of the present application;
fig. 4 is a schematic diagram of the operation of the signal processing and display mechanism in embodiment 3 of the present application.
Detailed Description
The present invention will be described in detail below with reference to embodiments shown in the drawings. However, the present invention is not limited to the embodiments, and the structural, method, or functional changes made by those skilled in the art according to the embodiments are all included in the scope of the present invention.
Example 1:
referring to fig. 1, the present embodiment provides a micro-vibration signal sensing element 33, which includes a substrate layer 331, a crack 332, a piezoelectric film 333, and an output electrode 334; the crack 332 is opened on the substrate layer 331 and penetrates through the substrate layer 331 along the thickness direction, and the crack 332 has a closed tip; the piezoelectric film 333 is arranged on the basal layer at one side of the crack tip and is used for converting a vibration signal generated by the crack into an electric signal; the output electrode 334 is connected to the piezoelectric film 333 and outputs an electric signal.
The substrate layer 331 may be made of one of epoxy resin, polydimethylsiloxane, or ultraviolet curing adhesive; the cracks 332 are formed by being recessed inward from one side of the base layer 331, and the cracks 332 have open portions provided opposite to the tip portions; the material of the piezoelectric film 333 may be one of polyvinylidene fluoride, aluminum nitride, zinc oxide, lead zirconate titanate, lithium niobate crystal, and lead titanate.
During micro-vibration, the base layer 331 deforms under the action of force, the crack 332 deforms along with the deformation of the base layer 331, so that the internal stress of the stress field at the tip of the crack 332 is amplified rapidly, the piezoelectric film 333 converts a stress signal into an electric signal efficiently, and the change of electric charge is output through the output electrode 334 to realize vibration induction.
Example 2
Referring to fig. 2, the present embodiment provides a micro-vibration signal detection mechanism 3 including: the housing, probe assembly and micro-vibration signal sensing element 33 of example 1. Wherein, the interior of the housing is arranged in a hollow way; the probe assembly is arranged in the housing and is elastically connected with the housing; the micro-vibration signal sensing element 33 is arranged in the housing and is connected with the probe assembly 2.
The housing comprises a protective cover 311, a front end cover 312 and a rear end cover 313 which are arranged in a penetrating way, the protective cover 311, the front end cover 312 and the rear end cover 313 enclose to form a hollow chamber, and a through hole is formed in the front end cover 312; the housing is made of one of polytetrafluoroethylene and polyformaldehyde, and has the functions of protecting and reducing friction.
The probe assembly part is arranged in the hollow cavity and can move relative to the housing in a telescopic way under the action of external force; the probe assembly comprises a first end portion 321, a connecting portion 322, a second end portion 323 and a telescopic spring 324, wherein the first end portion 321 and the second end portion 323 are respectively arranged at two sides of the connecting portion 322, and the telescopic spring 324 is arranged between the connecting portion 322 and the protective cover 311 and used for resetting after the probe assembly moves.
Specifically, a first annular step portion 3111 is convexly disposed on the inner wall of the protecting cover 311, a second annular step portion 3221 is convexly disposed on one side of the connecting portion 322, which is located at the first end portion 321, and a telescopic spring 324 is disposed between the first annular step portion 3111 and the second annular step portion.
The first end 321 passes through the through hole and protrudes from the front cover 312 of the housing for contacting with a vibration source; the second end portion 323 includes a fixing portion 3231 fixed to the base layer 331 of the micro-vibration signal sensing element 33, and the fixing portion 3231 is configured in a cylindrical structure having a diameter smaller than a thickness of the base layer 331. The fixing portion 3231 may be fixedly connected to a side surface of the micro-vibration signal sensor 33 parallel to the base layer 331 and the crack 332 by glue, and may transmit the vibration signal to the micro-vibration signal sensor 33, and the fixing portion 3231 may be embedded in the side surface of the base layer 331 parallel to the crack 332 in order to fix the micro-vibration signal sensor more tightly.
The first end 321 outside the casing is also provided with a limit step 3211, and when the probe assembly contracts into the casing under the action of external force, the limit step 3211 can limit the contraction displacement of the probe assembly, so as to prevent the micro-vibration signal sensing element 33 from being damaged due to overlarge amplitude.
The micro-vibration signal sensing element 33 is fixed on one side of the protective cover 311 on the rear end cover 313 through the fixing seat 34.
Example 3
Referring to fig. 3, the present embodiment provides a device for detecting tool setting accuracy of a grinding machine, including: a base 1, a signal processing and displaying mechanism 2 and a micro-vibration signal detecting mechanism 3 in the embodiment 2; the base 1 is a magnetic universal base, is arranged on a grinding machine at a position convenient for detecting a vibration signal, and can be adjusted in any direction; the micro-vibration signal detection mechanism 3 is connected to the base 1 through a connecting rod and is used for collecting vibration signals generated when the grinding machine performs tool setting and converting the vibration signals into electric signals; the signal processing and displaying mechanism 2 is located between the base 1 and the micro-vibration signal detecting mechanism 3, and is used for processing the collected electric signals and outputting and displaying the electric signals.
Referring to fig. 4, the signal processing and display mechanism 2 includes a charge amplifier 21 connected to the output electrode 334, an analog-to-digital converter 22 connected to the charge amplifier 21, a microprocessor 23 connected to the analog-to-digital converter 22, and a display output structure 24 connected to the microprocessor 23. The piezoelectric signal generated by the output electrode 334 is processed by the charge amplifier 21, the analog-to-digital converter 22 and the microprocessor 23, and is transmitted to the display output structure 24, so that the tool setting result of the grinding machine is determined.
The microprocessor 23 may be one of a single chip microcomputer and a signal digital processor, and the display output structure 24 may be a display or an indicator light.
The embodiment provides a use method of a grinding machine tool setting precision detection device, which comprises the following steps:
before the magnetic universal seat is used, the grinding machine is started firstly, the magnetic universal seat is arranged at a position where signals are convenient to detect of the grinding machine, and the detection probe assembly is adjusted to be in contact with the surface of a workpiece or the surface of a clamp.
Then, the micro-vibration signal detection mechanism collects vibration signals in a non-processing state. The vibration signal is transmitted to the micro-vibration signal sensitive element, the substrate layer of the micro-vibration signal sensitive element is under the action of pressure, so that the prepared crack tip part generates stress concentration, and the piezoelectric film material positioned at the crack tip part converts the collected weak signal into an electric signal.
Furthermore, the signal processing and displaying mechanism processes and outputs and displays the electric signals, and the principle is as follows: when the grinding wheel is not in contact with the workpiece, the microprocessor outputs high level, and the indicator light is in a non-conduction state; when the grinding wheel contacts with the workpiece, the microprocessor outputs a low level, and the indicator lamp is turned on and shines, so that the purpose of accurately detecting the tool setting process of the grinding machine is achieved.
Compared with the prior art, the beneficial effects of the utility model are that:
1. the micro-vibration signal sensing element is composed of a controllable crack structure capable of realizing efficient collection of weak signals based on a tip stress concentration effect and a piezoelectric film material capable of realizing efficient signal conversion, and can improve the detection precision of the weak signals to the maximum extent.
2. Based on have the universal seat of absorption function and add the connecting rod structure, can install in a flexible way and debug tool setting detection device, succinct practical.
3. The utility model provides an accurate detection device of grinding machine tool setting gathers the processing to the vibration signal that emery wheel and work piece contact produced in the twinkling of an eye, can adjust the tool setting precision according to grinding machine processing environment, and this accurate detection device of grinding machine tool setting simple structure, tool setting process are high-efficient, with low costs, have improved the surface quality and the precision of work piece processing in the accurate/ultra-precise grinding machine.
It is obvious to a person skilled in the art that the invention is not restricted to details of the above-described exemplary embodiments, but that it can be implemented in other specific forms without departing from the spirit or essential characteristics of the invention. The present embodiments are therefore to be considered in all respects as illustrative and not restrictive, the scope of the invention being indicated by the appended claims rather than by the foregoing description, and all changes which come within the meaning and range of equivalency of the claims are therefore intended to be embraced therein. Any reference sign in a claim should not be construed as limiting the claim concerned.
Furthermore, it should be understood that although the present description refers to embodiments, not every embodiment may contain only a single embodiment, and such description is for clarity only, and those skilled in the art should integrate the description, and the embodiments may be combined as appropriate to form other embodiments understood by those skilled in the art.
Claims (10)
1. A micro-vibration signal sensing element, comprising:
the base layer is provided with a crack, the crack penetrates through the base layer along the thickness direction of the base layer, and the crack is provided with a closed tip part;
the piezoelectric film is arranged on the basal layer on one side of the crack tip end part and is used for converting a vibration signal generated by the crack into an electric signal;
and the output electrode is connected with the piezoelectric film and is used for outputting the electric signal.
2. A micro-vibration signal sensing element as claimed in claim 1, wherein the crack is formed by recessing inward from one side of the substrate layer, the crack having an open portion disposed opposite the tip portion.
3. A micro-vibration signal sensing element according to claim 1, wherein the material of the piezoelectric film is one of polyvinylidene fluoride, aluminum nitride, zinc oxide, lead zirconate titanate, lithium niobate crystal, and lead titanate.
4. A micro-vibration signal sensing element as in claim 1, wherein the substrate layer is one of epoxy, polydimethylsiloxane, or uv-cured glue.
5. A micro-vibration signal detection mechanism, comprising:
the housing is hollow inside;
the probe assembly is arranged in the housing and is elastically connected with the housing, the probe assembly is provided with a first end part and a second end part which are oppositely arranged, the first end part is arranged to be protruded out of the housing, and the probe assembly can move relative to the housing in a telescopic mode under the action of external force;
a micro-vibration signal sensing device according to any of claims 1-4, disposed within the housing and coupled to the second end of the probe assembly.
6. A mechanism according to claim 5, wherein a stop structure is provided at a first end portion of the housing, the stop structure being capable of limiting the retraction displacement of the probe assembly when the probe assembly is retracted into the housing by an external force.
7. The mechanism of claim 5, wherein the second end is fixedly connected to a side of the substrate layer parallel to the crack.
8. The mechanism of claim 5, wherein a reset member is disposed between the probe assembly and the housing, and the probe assembly can be reset by the reset member after moving relative to the housing under the action of an external force.
9. The utility model provides an accurate detection device of grinding machine tool setting which characterized in that includes:
a base;
the micro-vibration signal detection mechanism of any one of the above claims 5 to 8, disposed on the base, for collecting vibration signals generated during tool setting of the grinding machine, and converting the vibration signals into electrical signals;
and the signal processing and displaying mechanism is connected with the micro-vibration signal detecting mechanism and is used for processing the collected electric signals and outputting and displaying the electric signals.
10. The grinding machine tool setting precision detection device of claim 9, wherein the signal processing and display mechanism comprises a charge amplifier connected with the output electrode, an analog-to-digital converter connected with the charge amplifier, a microprocessor connected with the analog-to-digital converter, and a display output structure connected with the microprocessor.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202021582011.2U CN212762908U (en) | 2020-08-03 | 2020-08-03 | Micro-vibration signal sensitive element, detection mechanism and grinding machine tool setting precision detection device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202021582011.2U CN212762908U (en) | 2020-08-03 | 2020-08-03 | Micro-vibration signal sensitive element, detection mechanism and grinding machine tool setting precision detection device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN212762908U true CN212762908U (en) | 2021-03-23 |
Family
ID=75050127
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202021582011.2U Active CN212762908U (en) | 2020-08-03 | 2020-08-03 | Micro-vibration signal sensitive element, detection mechanism and grinding machine tool setting precision detection device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN212762908U (en) |
-
2020
- 2020-08-03 CN CN202021582011.2U patent/CN212762908U/en active Active
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| EP1170577A3 (en) | Device for measuring torque of rotating body and method for measuring torque | |
| CN110561194B (en) | Measuring device and method for dynamic cutting force of numerical control turning | |
| CN111761515A (en) | Micro-vibration signal sensing element, micro-vibration signal detection mechanism and application thereof | |
| CN104977118B (en) | A kind of differential pressure method for sensing and the sensor probe using this method | |
| CN212762908U (en) | Micro-vibration signal sensitive element, detection mechanism and grinding machine tool setting precision detection device | |
| CN103551921A (en) | Piezoresistive integrated three-dimensional turning force sensor | |
| CN103760377B (en) | A kind of measurement apparatus of wheeled robot movable motor rotating speed | |
| CN201364886Y (en) | Binding force monitoring and detecting device | |
| CN113804281A (en) | Sound wave vibration measuring device based on F-P optical fiber Fabry-Perot sensing principle | |
| CN212111478U (en) | Piezoelectric acceleration sensor for integrated instrument | |
| CN106443068B (en) | Torsional differential quartz resonance acceleration sensor chip | |
| CN106895930A (en) | A kind of micro- power of cantilever beam structure and micro-displacement sensing device | |
| CN208171855U (en) | A kind of underwater spectral class sensor original position caliberating device | |
| CN205655926U (en) | Sensing system based on slope fiber grating | |
| CN115493731A (en) | Touch force sensor with differential pressure type structure | |
| CN201464108U (en) | Internal pressure detector for sealed pressure container | |
| CN2901258Y (en) | Float mark type vehicle oil meter | |
| CN204807044U (en) | Great -scale displacement sensor | |
| CN210147942U (en) | Pressure sensor installation torque wrench based on fiber bragg grating | |
| CN111624362A (en) | Piezoelectric acceleration sensor for integrated instrument | |
| CN202057438U (en) | Integrated strain gauge type double-freedom microload detection device | |
| CN207814149U (en) | A kind of dynamometry bolt and the rotor magnetic pole connection structure using the bolt | |
| CN212180085U (en) | Vibration meter | |
| CN219456208U (en) | High-precision fiber bragg grating acceleration sensor | |
| CN203011612U (en) | Machine oil MEMS pressure sensor based on adapter piece fixing structure |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant |