CN212757943U - Methanol tail gas recovery device for TMAH developer production line - Google Patents
Methanol tail gas recovery device for TMAH developer production line Download PDFInfo
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- CN212757943U CN212757943U CN202021273116.XU CN202021273116U CN212757943U CN 212757943 U CN212757943 U CN 212757943U CN 202021273116 U CN202021273116 U CN 202021273116U CN 212757943 U CN212757943 U CN 212757943U
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Abstract
The utility model discloses a methyl alcohol tail gas recovery unit for TMAH developer production line, including the developer production line, one side of developer production line is provided with the condensation and retrieves methyl alcohol, one side that methyl alcohol was retrieved in the condensation is provided with the vacuum pump unit, the vacuum pump unit is mainly including water ring vacuum pump, one side of vacuum pump unit is provided with the water-sealed tank, one side of water-sealed tank is provided with seven towers, one side of seven towers is provided with the membrane and retrieves the unit, the inside of membrane recovery unit is provided with the precooler, the upper end of precooler is provided with the vacuum pump, the upper end of vacuum pump is provided with bypass pipe chariot. A methyl alcohol tail gas recovery unit for TMAH developer solution production line, at seven tower tail gas exit portion installation membrane recovery units, organic phases such as methyl alcohol are liquid in the recovery tail gas, and recycle liquid resource utilization reduces tail gas concentration, alleviates follow-up VOC and administers the load, brings better use prospect.
Description
Technical Field
The utility model relates to a methyl alcohol tail gas recovery field of developer solution production line, in particular to methyl alcohol tail gas recovery unit for TMAH developer solution production line.
Background
The methyl alcohol tail gas recovery unit of TMAH developer solution production line is the support equipment who retrieves the developer solution production line and produce tail gas, and the tail gas that the developer solution production line produced if directly discharge in the air, causes the pollution of environment easily, influences people's normal use, and along with the continuous development of science and technology, people also are more and more high to the manufacturing process requirement of the methyl alcohol tail gas recovery unit of TMAH developer solution production line.
There is certain drawback in the methyl alcohol tail gas recovery unit of current TMAH developer production line when using, the methyl alcohol boiling point is low (64.7 degrees), vacuum tail gas is through liquid seal, circulating water condenses, the methanol concentration is still higher after the pickling, high enriched tail gas (containing methyl alcohol, vapor) leads to the easy saturation of active carbon, the active carbon is changed frequently (carbon adsorption device does not do the desorption processing, change the active carbon after the saturation), if change the active carbon not in time, tail gas concentration can surpass terminal treatment device and allow the concentration range, there is the potential safety hazard, certain adverse effect has been brought to people's use, for this, we provide a methyl alcohol tail gas recovery unit who is used for TMAH developer production line.
SUMMERY OF THE UTILITY MODEL
Technical problem to be solved
The utility model provides a not enough to prior art, the utility model provides a methanol tail gas recovery unit for TMAH developer production line possesses the simple operation, and convenient to use and practicality advantage such as strong can effectively solve the problem in the background art.
(II) technical scheme
In order to achieve the above purpose, the utility model adopts the following technical scheme: a methanol tail gas recovery device for a TMAH developer production line comprises the developer production line, one side of the developer production line is provided with a condensation recovery methanol, one side of the condensation recovery methanol is provided with a vacuum pump unit, the vacuum pump unit mainly comprises a water ring vacuum pump, one side of the vacuum pump unit is provided with a water seal tank, one side of the water seal tank is provided with seven towers, one side of the seven towers is provided with a membrane recovery unit, a precooler is arranged in the membrane recovery unit, the upper end of the precooler is provided with a vacuum pump, the upper end of the vacuum pump is provided with a bypass pipe chariot, the lower end of the precooler is provided with a condenser, one end of the condenser is provided with a refrigeration unit, one end of the precooler is provided with a gas separation membrane, the lower end of the condenser is provided with a methanol recovery, one side of the membrane recovery unit is, and one side of the nine towers is provided with carbon adsorption.
Preferably, the number of the water ring vacuum pumps is three.
Preferably, a first connecting pipeline is arranged between the condenser and the precooler, and an inlet of the condenser is fixedly connected with an outlet of the precooler through the first connecting pipeline.
Preferably, the seven towers produce an exhaust gas flow of 70-100Nm3The maximum summer temperature of the tail gas generated by the seven towers is 38 ℃, the lowest winter temperature is 20 ℃, the methanol content generated by the seven towers is 15.67KPa in summer and 7.24KPa in winter.
Preferably, a second connecting pipeline is arranged between the refrigerating unit and the condenser, and an inlet of the refrigerating unit is fixedly connected with an outlet of the condenser through the second connecting pipeline.
(III) advantageous effects
Compared with the prior art, the utility model provides a methyl alcohol tail gas recovery unit for TMAH developer production line possesses following beneficial effect:
the methanol tail gas recovery device for the TMAH developing solution production line improves the recovery efficiency of tail gas generated by the TMAH developing solution production line and improves the use efficiency of people, tail gas containing components such as methanol and the like from a seven-tower enters a gas separation membrane component through a fan, an organic phase (methanol, trimethylamine and dimethyl carbonate) preferentially permeates the membrane component, is concentrated and concentrated at the downstream side of the membrane and is condensed and recovered to a recovery tank, the tail gas generated by the TMAH developing solution production line firstly enters a methanol condensation and recovery device for condensation and recovery, then the tail gas from the methanol device enters a vacuum pump unit for purification, the vacuum pump unit mainly comprises a water ring vacuum pump, the purified tail gas enters a water seal tank for operation, the operated tail gas enters the seven-tower for use, then the tail gas from the seven-tower enters a membrane recovery unit, firstly enters a precooler and then enters a condenser, tail gas in the condenser enters into the refrigerating unit, carry out the refrigeration of tail gas, improve the recovery efficiency of tail gas, tail gas is from precooler and condenser operation back, the methyl alcohol of production, can retrieve, improve the effective utilization of resource, then pass from the vacuum pump in some tail gas, enter into the gas separation membrane with tail gas in the precooler, carry out the separation of tail gas, tail gas after the separation can further operate the use, finally can purify tail gas, can retrieve organic phases such as methyl alcohol in the tail gas, do not see through becoming the surplus gas that becomes of separating membrane, mainly for the air (containing a small amount of organic gas) discharges and gets into nine towers and follow-up VOC treatment device, the methyl alcohol tail gas recovery unit of whole TMAH developer production line simple structure, and convenient operation, the effect of use is better for traditional mode.
Drawings
Fig. 1 is the utility model relates to a structure sketch map after transformation of methanol tail gas recovery unit for TMAH developer solution production line.
Fig. 2 is the utility model relates to a structural schematic diagram of membrane recovery unit in methyl alcohol tail gas recovery unit for TMAH developer production line.
Fig. 3 is a schematic diagram of the present structure of a methanol tail gas recovery device for a TMAH developer production line.
In the figure: 1. a developing solution production line; 2. condensing and recovering methanol; 3. a water ring vacuum pump; 4. a vacuum pump unit; 5. sealing the tank with water; 6. seven towers; 7. a membrane recovery unit; 701. a refrigeration unit; 702. a condenser; 703. a precooler; 704. bypass duct chariot; 705. a vacuum pump; 706. recovering methanol; 707. a gas separation membrane; 8. nine towers; 9. and (4) carbon adsorption.
Detailed Description
In order to make the technical means, creation features, achievement purposes and functions of the present invention easy to understand, the present invention is further described below with reference to the following embodiments.
As shown in fig. 1-3, a methanol tail gas recovery device for a TMAH developer production line comprises a developer production line 1, one side of the developer production line 1 is provided with a condensation recovery methanol 2, one side of the condensation recovery methanol 2 is provided with a vacuum pump unit 4, the vacuum pump unit 4 mainly comprises a water ring vacuum pump 3, one side of the vacuum pump unit 4 is provided with a water-sealed tank 5, one side of the water-sealed tank 5 is provided with seven towers 6, one side of the seven towers 6 is provided with a membrane recovery unit 7, a precooler 703 is arranged inside the membrane recovery unit 7, the upper end of the precooler 703 is provided with a vacuum pump 705, the upper end of the vacuum pump 705 is provided with a bypass pipe chariot 704, the lower end of the precooler 703 is provided with a condenser 702, one end of the condenser 702 is provided with a refrigeration unit 701, one end of the precooler is provided with a, one side of the membrane recovery unit 7 is provided with a nine tower 8, and one side of the nine tower 8 is provided with a carbon adsorption 9.
Furthermore, the number of the water ring vacuum pumps 3 is three, so that the purification efficiency of tail gas is improved.
Further, a first connecting pipe is arranged between the condenser 702 and the precooler 703, and an inlet of the condenser 702 is fixedly connected with an outlet of the precooler 703 through the first connecting pipe, so that the condenser 702 and the precooler 703 can be conveniently connected for use.
Further, the seven towers 6 generate tail gas with the flow rate of 70-100Nm3The summer highest temperature of the tail gas generated by the seven towers 6 is 38 ℃, the winter lowest temperature is 20 ℃, the methanol content generated by the seven towers 6 is 15.67Kpa in summer and 7.24Kpa in winter, so that the method is convenient for people to carry out the next operation according to corresponding conditions and improves the treatment efficiency of people.
Furthermore, a second connecting pipeline is arranged between the refrigerating unit 701 and the condenser 702, and an inlet of the refrigerating unit 701 is fixedly connected with an outlet of the condenser 702 through the second connecting pipeline, so that the refrigerating unit 701 and the condenser 702 can be conveniently connected for use.
The working principle is as follows: the methanol tail gas recovery device for the TMAH developing solution production line improves the recovery efficiency of tail gas generated by the TMAH developing solution production line 1 and the use efficiency of people, tail gas containing components such as methanol and the like from a seven-tower 6 enters a gas separation membrane 707 component through pressurization of a fan, organic phases (methanol, trimethylamine and dimethyl carbonate) preferentially permeate through a membrane component, concentration and enrichment are carried out at the downstream side of the membrane and are condensed and recovered to a recovery tank, the tail gas generated by the TMAH developing solution production line 1 firstly enters a methanol condensation and recovery 2 device for condensation and recovery, then the tail gas from a methanol device enters a vacuum pump unit 4 for purification, the vacuum pump unit 4 mainly comprises a water ring vacuum pump 3, the purified tail gas enters a water seal tank 5 for operation, the operated tail gas enters the seven-tower 6 for use, and then the tail gas from the seven-tower 6 enters a membrane recovery unit 7, the tail gas enters the precooler 703 and then enters the condenser 702, the tail gas in the condenser 702 enters the refrigerating unit 701 for refrigerating the tail gas, the recovery efficiency of the tail gas is improved, the methanol generated after the tail gas is operated from the precooler 703 and the condenser 702 can be recovered, the effective utilization of resources is improved, then, a part of the off-gas passes through the vacuum pump 705, enters the gas separation membrane 707 together with the off-gas in the precooler 703, the tail gas is separated, the separated tail gas can be further operated and used, and finally the tail gas can be purified, can retrieve organic phases such as methyl alcohol in the tail gas, the surplus gas is oozed in the becoming that does not see through the separation membrane, mainly for the air (containing a small amount of organic gas) discharges and gets into nine towers 8 and follow-up VOC treatment device, the methyl alcohol tail gas recovery unit of whole TMAH developer production line simple structure, convenient operation, the effect of using is better for traditional mode.
It is noted that, herein, relational terms such as first and second (a, b, etc.) and the like may be used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions. Also, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus. Without further limitation, an element defined by the phrase "comprising an … …" does not exclude the presence of other identical elements in a process, method, article, or apparatus that comprises the element.
The basic principles and the main features of the invention and the advantages of the invention have been shown and described above. It will be understood by those skilled in the art that the present invention is not limited to the above embodiments, and that the foregoing embodiments and descriptions are provided only to illustrate the principles of the present invention without departing from the spirit and scope of the present invention. The scope of the invention is defined by the appended claims and equivalents thereof.
Claims (5)
1. The utility model provides a methyl alcohol tail gas recovery unit for TMAH developer solution production line, includes developer solution production line (1), its characterized in that: one side of the developing solution production line (1) is provided with a condensation recycled methanol (2), one side of the condensation recycled methanol (2) is provided with a vacuum pump unit (4), the vacuum pump unit (4) mainly comprises a water ring vacuum pump (3), one side of the vacuum pump unit (4) is provided with a water-sealed tank (5), one side of the water-sealed tank (5) is provided with seven towers (6), one side of the seven towers (6) is provided with a membrane recycling unit (7), a precooler (703) is arranged in the membrane recycling unit (7), the upper end of the precooler (703) is provided with a vacuum pump (705), the upper end of the vacuum pump (705) is provided with a bypass pipe chariot (704), the lower end of the precooler (703) is provided with a condenser (702), one end of the condenser (702) is provided with a refrigerating unit (701), one end of the precooler (703) is provided with a gas separation membrane (707), the lower extreme of condenser (702) is provided with methyl alcohol and retrieves (706), one side of membrane recovery unit (7) is provided with nine towers (8), one side of nine towers (8) is provided with carbon adsorption (9).
2. The methanol tail gas recovery device for the TMAH developer production line according to claim 1, characterized in that: the number of the water ring vacuum pumps (3) is three.
3. The methanol tail gas recovery device for the TMAH developer production line according to claim 1, characterized in that: a first connecting pipeline is arranged between the condenser (702) and the precooler (703), and the inlet of the condenser (702) is fixedly connected with the outlet of the precooler (703) through the first connecting pipeline.
4. The methanol tail gas recovery device for the TMAH developer production line according to claim 1, characterized in that: the flow of the tail gas generated by the seven towers (6) is 70-100Nm3The maximum summer temperature of the tail gas generated by the seven towers (6) is 38 ℃, the lowest winter temperature is 20 ℃, and the methanol content generated by the seven towers (6) is 15.67KPa in summer and 7.24KPa in winter.
5. The methanol tail gas recovery device for the TMAH developer production line according to claim 1, characterized in that: be equipped with No. two connecting tubes between refrigerating unit (701) and condenser (702), the export fixed connection of the entry of refrigerating unit (701) through No. two connecting tubes and condenser (702).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202021273116.XU CN212757943U (en) | 2020-07-03 | 2020-07-03 | Methanol tail gas recovery device for TMAH developer production line |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202021273116.XU CN212757943U (en) | 2020-07-03 | 2020-07-03 | Methanol tail gas recovery device for TMAH developer production line |
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| CN212757943U true CN212757943U (en) | 2021-03-23 |
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| CN202021273116.XU Active CN212757943U (en) | 2020-07-03 | 2020-07-03 | Methanol tail gas recovery device for TMAH developer production line |
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Address after: 061100 Cangzhou Lingang chemical industry park, Cangzhou City, Hebei Province Patentee after: Xinlian Electronic Materials Technology Co.,Ltd. Address before: 061100 Cangzhou Lingang chemical industry park, Cangzhou City, Hebei Province Patentee before: CANGZHOU SUNHEAT CHEMICALS CO.,LTD. |
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