CN212741505U

CN212741505U - Vacuum coating machine cavity

Info

Publication number: CN212741505U
Application number: CN202021221051.4U
Authority: CN
Inventors: 孟进
Original assignee: Shanghai Changqiao Vacuum System Manufacturing Co ltd
Current assignee: Shanghai Changqiao Vacuum System Manufacturing Co ltd
Priority date: 2020-06-28
Filing date: 2020-06-28
Publication date: 2021-03-19
Anticipated expiration: 2030-06-28

Abstract

The utility model provides a vacuum coating machine cavity belongs to the vacuum coating machine field. The vacuum coating machine cavity comprises a cavity body, a cooling assembly and a heat dissipation assembly. The cooling pipe is arranged in the hollow groove, and the water pumping end of the pump body is arranged in the water tank. The heat radiating fins are fixed on the surface of the water tank, and the heating surfaces of the semiconductor refrigerating sheets are attached to the heat radiating fins; the cooling water in the water tank passes through the pump body input cooling tube to through in the other end row return water tank of cooling tube, make it bring the heat that the cavity produced into the water tank in, the semiconductor refrigeration piece of addding cools down the coolant liquid in the water tank, the face of heating of semiconductor refrigeration piece carries out thermal diffusion to the external world through radiating fin, carry out the water-cooling heat dissipation through the cavity groove of addding, make each position temperature of cavity even, realize refrigerated purpose, vacuum coating machine has effectively been protected, the service life of the vacuum coating machine is prolonged.

Description

Vacuum coating machine cavity

Technical Field

The utility model relates to a vacuum coating machine field particularly, relates to a vacuum coating machine cavity.

Background

At present, a vacuum coating machine can generate a large amount of heat during working, and needs to be effectively cooled in time to ensure the normal working of the vacuum coating machine;

at present, the common cooling treatment is natural cooling or cooling the cavity of the vacuum coating machine through air cooling, and the cooling speed is slow and uneven, so that the cooling effect is poor, and the vacuum coating machine is easily damaged due to overhigh temperature.

SUMMERY OF THE UTILITY MODEL

In order to make up for the above insufficiency, the utility model provides a vacuum coating machine cavity aims at improving that vacuum coating machine cavity cooling rate is slow, and cools off inhomogeneously for the not good problem of cooling effect.

The utility model discloses a realize like this:

the utility model provides a pair of vacuum coating machine cavity, including cavity, cooling module and radiator unit.

The cooling assembly comprises a water tank, a cooling pipe and a pump body, wherein a hollow groove is formed in the side wall of the cavity, the cooling pipe is arranged in the hollow groove, the water pumping end of the pump body is arranged in the water tank, one end of the cooling pipe is connected with the water discharging end of the pump body, and the other end of the cooling pipe is communicated with the inside of the water tank.

The heat dissipation assembly comprises semiconductor refrigeration pieces and heat dissipation fins, the heat dissipation fins are fixed on the surface of the water tank, the heating surfaces of the semiconductor refrigeration pieces are attached to the heat dissipation fins, and the refrigeration surfaces of the semiconductor refrigeration pieces are arranged in the water tank.

In an embodiment of the present invention, the water tank is fixed to one side of the cavity, and the pump body is fixed in the water tank.

In an embodiment of the present invention, the cooling pipe is a coiled pipe, and the coiled pipe is uniformly distributed in the hollow groove in a spiral manner.

In an embodiment of the present invention, the cover plate is fixed to the upper end of the cavity, the surface of the cover plate is pasted with a sealing gasket, and the sealing gasket is attached to the upper end opening of the hollow groove in a sealing manner.

The utility model discloses an in the embodiment, the apron surface inlays and is equipped with the access cover, cavity one end is fixed with strengthens the frame, the cavity lateral wall inlays and is equipped with the observation window, fixedly connected with strengthening rib between the wall of cavity inslot both sides.

The utility model discloses an in one embodiment, be provided with rubber air bag in the water tank, rubber air bag's gas port sets up the water tank is outside, and water tank surface is provided with the atmospheric pressure balancing hole.

The utility model discloses an in an embodiment, the water filling port has been seted up to the water tank upper surface, water filling port upper end threaded connection has the end cap, end cap surface cover has the sealing washer.

In an embodiment of the present invention, the semiconductor refrigeration piece is embedded in the water tank surface, and the heating surface of the semiconductor refrigeration piece and the bonding surface of the heat dissipation fin are coated with heat conductive silicone grease.

The utility model discloses an in the embodiment, be provided with the heat conduction piece in the water tank, the heat conduction piece with the fixed laminating of refrigeration face of semiconductor refrigeration piece.

The utility model discloses an in one embodiment, the water tank surface is fixed in the heat dissipation fan, the heat dissipation fan sets up the radiating fin surface.

The utility model has the advantages that: the utility model discloses a vacuum coating machine cavity that obtains through above-mentioned design, when using, with water tank and cavity inslot injected coolant liquid, cavity's heat absorption temperature is risen with cavity's coolant liquid to the control pump body, the coolant liquid suction cooling tube in the water tank, make the cryogenic liquids in the cooling tube carry out the transmission exchange of heat with cavity's high temperature coolant liquid, the cooling water in the water tank inputs the cooling tube through the pump body, and arrange back to the water tank through the other end of cooling tube, make it bring the heat that the cavity produced into the water tank, the semiconductor refrigeration piece that adds cools down to the coolant liquid in the water tank, the heating face of semiconductor refrigeration piece carries out thermal diffusion to the external world through radiating fin, carry out water-cooling heat dissipation through the cavity groove that adds, make cavity each position temperature even, can effectively take away the heat on vacuum coating machine cavity lateral wall surface, the purpose of cooling is realized, the vacuum coating machine is effectively protected, and the service life of the vacuum coating machine is prolonged.

Drawings

In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings that are required to be used in the embodiments will be briefly described below, it should be understood that the following drawings only illustrate some embodiments of the present invention, and therefore should not be considered as limiting the scope, and for those skilled in the art, other related drawings can be obtained according to the drawings without inventive efforts.

Fig. 1 is a schematic front view of a structure provided in an embodiment of the present invention;

fig. 2 is a schematic top view of the structure according to the embodiment of the present invention;

fig. 3 is a schematic view of a cavity structure provided in an embodiment of the present invention;

fig. 4 is a schematic view of a cover plate structure provided in an embodiment of the present invention;

fig. 5 is a schematic view of an internal structure of a cavity according to an embodiment of the present invention;

fig. 6 is a schematic structural view of a heat dissipation assembly according to an embodiment of the present invention.

In the figure: 100-a cavity; 110-a cover plate; 111-a gasket; 113-access cover; 130-a viewing window; 150-a reinforcing frame; 170-reinforcing ribs; 300-a cooling assembly; 310-a water tank; 311-rubber air bag; 313-air pressure balancing holes; 315-plug; 330-cooling pipes; 350-a pump body; 500-a heat dissipation assembly; 510-semiconductor chilling plates; 530-radiating fins; 550-heat conducting block; 570-Heat dissipation fan.

Detailed Description

To make the objects, technical solutions and advantages of the embodiments of the present invention clearer, the drawings of the embodiments of the present invention are combined to clearly and completely describe the technical solutions of the embodiments of the present invention, and obviously, the described embodiments are some embodiments of the present invention, not all embodiments. Based on the utility model provides a. Embodiments, all other embodiments obtained by a person skilled in the art without any inventive step are within the scope of the present invention.

Thus, the following detailed description of the embodiments of the present invention, presented in the accompanying drawings, is not intended to limit the scope of the invention, as claimed, but is merely representative of selected embodiments of the invention. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.

It should be noted that: like reference numbers and letters refer to like items in the following figures, and thus, once an item is defined in one figure, it need not be further defined and explained in subsequent figures.

In the description of the present invention, it is to be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are only for convenience of description and to simplify the description, but do not indicate or imply that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore should not be construed as limiting the present invention.

Furthermore, the terms "first", "second" and "first" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of the present invention, "a plurality" means two or more unless specifically limited otherwise.

In the present invention, unless otherwise expressly stated or limited, the terms "mounted," "connected," and "fixed" are to be construed broadly and may, for example, be fixedly connected, detachably connected, or integrally formed; either directly or indirectly through intervening media, either internally or in any other relationship. The specific meaning of the above terms in the present invention can be understood according to specific situations by those skilled in the art.

In the present disclosure, unless expressly stated or limited otherwise, the first feature "on" or "under" the second feature may comprise direct contact between the first and second features, or may comprise contact between the first and second features not directly. Also, the first feature being "on," "above" and "over" the second feature includes the first feature being directly on and obliquely above the second feature, or merely indicating that the first feature is at a higher level than the second feature. A first feature being "under," "below," and "beneath" a second feature includes the first feature being directly under and obliquely below the second feature, or simply meaning that the first feature is at a lesser elevation than the second feature.

Examples

Referring to fig. 1-6, the present invention provides a technical solution: a vacuum coating machine cavity comprises a cavity 100, a cooling assembly 300 and a heat dissipation assembly 500.

Wherein, cooling module 300 and cavity 100 internal connection take out the heat in cavity 100, cool down the cavity 100, and heat radiation module 500 carries out the heat dissipation to the heat that cooling module 300 transmitted out.

Referring to fig. 1 to 5, the cooling assembly 300 includes a water tank 310, a cooling pipe 330 and a pump body 350, a hollow groove is formed in a side wall of the cavity 100, the cooling pipe 330 is disposed in the hollow groove, a pumping end of the pump body 350 is disposed in the water tank 310, one end of the cooling pipe 330 is connected to a draining end of the pump body 350, the other end of the cooling pipe 330 is communicated with the inside of the water tank 310, the water tank 310 is fixed to one side of the cavity 100, the pump body 350 is fixed in the water tank 310, the cooling pipe 330 is a serpentine pipe, and the serpentine pipe is uniformly distributed in the hollow groove in a spiral manner, so as to uniformly cool and dissipate heat, and balance various parts of the cavity 100;

in this embodiment, a cover plate 110 is fixed at the upper end of the cavity 100, a sealing gasket 111 is adhered to the surface of the cover plate 110, the sealing gasket 111 is attached to the upper end opening of the hollow groove in a sealing manner, so that the cooling pipe 330 can be detached and replaced conveniently, scale can be accumulated due to long-term use, and the hollow groove formed in the side wall of the cavity 100 can be cleaned conveniently.

It should be noted that an access cover 113 is embedded on the surface of the cover plate 110, a reinforcing frame 150 is fixed at one end of the cavity 100, an observation window 130 is embedded on the side wall of the cavity 100, and a reinforcing rib 170 is fixedly connected between the two side walls in the hollow groove.

In this embodiment, be provided with rubber gasbag 311 in the water tank 310, the gas port of rubber gasbag 311 sets up the water tank 310 is outside, and the water tank 310 surface is provided with atmospheric pressure balancing hole 313, adds rubber gasbag 311 and atmospheric pressure balancing hole 313 and is used for balancing the internal and external pressure of water tank 310, reduces the too big damage to water tank 310 of internal and external pressure difference, increase of service life, the water filling port has been seted up to water tank 310 upper surface, water filling port upper end threaded connection has end cap 315, end cap 315 surface cover has the sealing washer.

Referring to fig. 6, the heat dissipation assembly 500 includes a semiconductor refrigeration sheet 510 and a heat dissipation fin 530, the heat dissipation fin 530 is fixed on the surface of the water tank 310, a heating surface of the semiconductor refrigeration sheet 510 is attached to the heat dissipation fin 530, and a cooling surface of the semiconductor refrigeration sheet 510 is disposed in the water tank 310, wherein the semiconductor refrigeration sheet 510 is embedded in the surface of the water tank 310, and a surface of the semiconductor refrigeration sheet 510 attached to the heat dissipation fin 530 is coated with heat conductive silicone grease.

In this embodiment, be provided with heat conduction piece 550 in the water tank 310, heat conduction piece 550 with the refrigeration face fixed laminating of semiconductor refrigeration piece 510, the water tank 310 surface fixation is in heat dissipation fan 570, heat dissipation fan 570 sets up fin 530 surface, reinforcing radiating effect.

The working principle of the vacuum coating machine cavity is as follows: when the vacuum coating machine is used, cooling liquid is injected into the water tank 310 and the hollow groove, the cooling liquid in the hollow groove raises the heat absorption temperature of the cavity 100, the pump body 350 is controlled to pump the cooling liquid in the water tank 310 into the cooling pipe 330, so that the low-temperature liquid in the cooling pipe 330 and the high-temperature cooling liquid in the hollow groove carry out heat transfer exchange, the cooling water in the water tank 310 is input into the cooling pipe 330 through the pump body 350 and is discharged back into the water tank 310 through the other end of the cooling pipe 330, so that the heat generated by the cavity 100 is brought into the water tank 310, the added semiconductor chilling plates 510 cool the cooling liquid in the water tank 310, the heating surface of the semiconductor chilling plates 510 diffuses the heat to the outside through the heat dissipation fins 530, the water cooling heat dissipation is carried out through the added hollow groove, the temperature of each part of the cavity 100 is uniform, the heat on the outer side wall surface of the cavity of the vacuum coating machine can, effectively protects the vacuum coating machine and prolongs the service life of the vacuum coating machine.

It should be noted that the specific model specifications of the pump body 350, the semiconductor chilling plate 510 and the heat dissipation fan 570 need to be determined by type selection according to the actual specification of the device, and the specific type selection calculation method adopts the prior art, so detailed description is omitted.

The power supply and the principle of the pump body 350, the semiconductor cooling fins 510 and the heat dissipation fan 570 are clear to those skilled in the art and will not be described in detail herein.

The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention, and various modifications and changes may be made by those skilled in the art. Any modification, equivalent replacement, or improvement made within the spirit and principle of the present invention should be included in the protection scope of the present invention.

Claims

1. A vacuum coating machine cavity is characterized by comprising

A chamber (100);

the cooling assembly (300) comprises a water tank (310), a cooling pipe (330) and a pump body (350), a hollow groove is formed in the side wall of the cavity (100), the cooling pipe (330) is arranged in the hollow groove, the water pumping end of the pump body (350) is arranged in the water tank (310), one end of the cooling pipe (330) is connected with the water draining end of the pump body (350), and the other end of the cooling pipe (330) is communicated with the inside of the water tank (310);

radiator unit (500), radiator unit (500) include semiconductor refrigeration piece (510) and radiating fin (530), radiating fin (530) are fixed water tank (310) surface, the face of heating of semiconductor refrigeration piece (510) with radiating fin (530) laminating, the refrigeration face setting of semiconductor refrigeration piece (510) is in water tank (310).

2. The vacuum coater chamber according to claim 1, wherein the water tank (310) is fixed to one side of the chamber (100), and the pump body (350) is fixed in the water tank (310).

3. The vacuum coater chamber according to claim 1, wherein the cooling tube (330) is a serpentine tube, and the serpentine tube is uniformly and spirally distributed in the hollow groove.

4. The vacuum coating machine cavity according to claim 1, characterized in that a cover plate (110) is fixed on the upper end of the cavity (100), a sealing gasket (111) is adhered on the surface of the cover plate (110), and the sealing gasket (111) is in sealing fit with the upper port of the hollow groove.

5. The vacuum coater chamber as claimed in claim 4, wherein an access cover (113) is embedded on the surface of the cover plate (110), a reinforced frame (150) is fixed at one end of the chamber (100), an observation window (130) is embedded on the side wall of the chamber (100), and a reinforcing rib (170) is fixedly connected between the two side walls in the hollow groove.

6. The vacuum coater chamber according to claim 1, wherein a rubber air bag (311) is arranged in the water tank (310), an air port of the rubber air bag (311) is arranged outside the water tank (310), and an air pressure balancing hole (313) is arranged on the surface of the water tank (310).

7. The vacuum coating machine cavity according to claim 1, wherein a water injection port is formed in the upper surface of the water tank (310), a plug (315) is connected to the upper end of the water injection port in a threaded manner, and a sealing ring is sleeved on the surface of the plug (315).

8. The vacuum coater chamber according to claim 1, wherein the semiconductor chilling plate (510) is embedded in the surface of the water tank (310), and a bonding surface of the heating surface of the semiconductor chilling plate (510) and the heat dissipation fin (530) is coated with heat-conducting silicone grease.

9. The vacuum coater chamber according to claim 1, wherein a heat conducting block (550) is arranged in the water tank (310), and the heat conducting block (550) is fixedly attached to the refrigerating surface of the semiconductor refrigerating sheet (510).

10. The vacuum coater chamber as claimed in claim 1, wherein the outer surface of the water tank (310) is fixed to a heat dissipating fan (570), and the heat dissipating fan (570) is disposed on the surface of the heat dissipating fins (530).