CN212708615U - Micro transfer printing device based on micro surface transfer printing method - Google Patents

Abstract

The utility model discloses a micro-transfer device based on micro-surface transfer method, including fixing X axle removal portion on the bottom plate, installing Z axle removal portion on the slip table of X axle removal portion, installing the electron microscope in the bottom plate top through the bracing piece to and install the PDMS elastic seal on Z axle removal portion, it has the sample to place the platform to change PDMS elastic seal below, electron microscope's position in the top of PDMS elastic seal, electron microscope is connected with the CCD camera of connecting the panel display, in order to realize showing the rendition image that electron microscope gathered to observe the rendition process and save the rendition image. The utility model can clearly observe whether the ink is successfully transferred, whether the transfer position is correct, and the transfer effect and other conditions through the electron microscope; the whole transfer process can be monitored in real time.

Description

Micro transfer printing device based on micro surface transfer printing method

Technical Field

The utility model relates to a little surface machining technical field especially relates to a micro-transfer device to a certain target execution rendition on the surface under the microcosmic condition.

Background

With the development of modern science and technology, micro-surface processing technology has attracted people's attention. First, White Sides proposed microcontact printing technology (abbreviated as μ CP technology) in 1994. The micro-CP can construct micro-patterns on the surface of micron and submicron order, so that small molecules, polymers, biological macromolecules and cells are selectively adhered on the surface of the material, thereby having important significance for the fields of biosensors, basic research of cell biology and the like.

Microcontact printing is a micro-fabrication method for printing patterns on a substrate by using an elastomeric stamp in combination with a self-assembled monolayer technique. Microcontact printing has the advantage of being fast and inexpensive, but it also does not require the harsh conditions of a clean room, or even an absolutely flat surface. The micro-contact printing is also suitable for various surfaces and has the characteristic of flexible and changeable operation method.

At present, the existing micro transfer printing device on the market can observe whether the seal ink is successfully transferred on the micro surface, but cannot position a certain target on the micro surface. For example, it is difficult to position the micro-scale air holes of the blade by using the existing micro-transfer device to transfer the biosensor to the air holes of the blade. If the seal is accurately transferred to a certain target on the micro surface, the seal is required to accurately position the target to be transferred on the micro surface on an X-Y plane, and the seal is required to be driven by a servo and supported by an image acquisition system, so that the seal is inconvenient to use.

SUMMERY OF THE UTILITY MODEL

The present invention is directed to overcome the above-mentioned drawbacks of the prior art and to provide a micro-transfer printing device based on a micro-surface transfer printing method.

For realizing the utility model discloses a technical scheme that the purpose adopted is:

the utility model provides a micro-transfer device based on little surface transfer method, including fixing X axle removal portion on the bottom plate, installing Z axle removal portion on the slip table of X axle removal portion, installing the electron microscope that has focusing knob and can adjust focal distance above the bottom plate through the bracing piece to and install the PDMS elastic seal on Z axle removal portion, there is the sample to place the platform PDMS elastic seal below, electron microscope's being located the top of PDMS elastic seal, electron microscope is connected with the CCD camera of being connected panel display, in order to realize showing the rendition image that electron microscope gathered to observe the rendition process and save the rendition image.

Preferably, the PDMS elastic stamp is mounted on the Z-axis moving part through a horizontally arranged bracket.

Preferably, the base plate is provided with illuminating light on one side thereof to provide a light source required for observing the microscopic surface.

Preferably, the support rod is in threaded connection with the bottom plate.

The X-axis moving part comprises an X-axis high-torque type ball screw, and the Z-axis moving part comprises a Z-axis high-torque type ball screw and is used for moving and positioning the micro transfer printing device.

Preferably, the micro transfer printing device based on the micro surface transfer printing method further comprises a driving part, wherein the driving part comprises an X, Z two-shaft high-torque type stepping motor and a corresponding high-torque type stepping motor driver; the high-torque type stepping motor driver is used for converting control pulses sent by the controller into angular displacement of the stepping motor; the controller integrates a stepping motor controller and a pulse generator, and can control the high-torque stepping motor and adjust the speed.

Preferably, the controller is a control box with a source program, and the control box is provided with a knob for adjusting the movement of the motor.

Compared with the prior art, the beneficial effects of the utility model are that:

1. the device of the utility model is simple in structure, the operation of being convenient for has overcome prior art structure technology complicacy, and manufacturing cost is high, complex operation's defect.

2. The utility model discloses the device can realize the rendition (like the blade gas pocket) to a certain target in microcosmic surface, is superior to the current micro-transfer device on the market, and this utility model device can realize the location of higher accuracy to the rendition target on the plane through accurate ball drive, has great meaning to the research in fields such as biosensor.

3. The utility model can clearly observe whether the ink is successfully transferred, whether the transfer position is correct, and the transfer effect and other conditions through the electron microscope; can monitor the whole process of transfer printing in real time

4. The utility model discloses the whole occupation space of device is little, is convenient for install and remove, can pack into the draw-bar box, and DC power supply supplies power, can satisfy some outdoor operations's needs.

Drawings

FIG. 1 is a schematic structural diagram of a micro-transfer printing device based on a micro-surface transfer printing method according to the present invention;

in the figure: 1-Z axis high torque type stepping motor; 2-Z axis ball screw; 3-a stamp holder; 4-a CCD camera; 5-a support frame; 6-a metal rod; 7-a lighting lamp; 8-an elastic clip; 9-a support bar; 10-sample placement stage (with heating plate); 11-PDMS elastic seal; 12-a balancing plate; 13-electron microscope; 14-X axis ball screw; 15-display panel.

Detailed Description

The present invention will be described in further detail with reference to the following drawings and specific embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the invention and are not intended to limit the invention.

As shown in FIG. 1, the micro transfer printing device based on micro surface transfer printing method of the present invention comprises a bottom plate, a two-axis moving part, an image collecting part, a driving part, a control part, and a transfer printing executing part; the bottom plate is made of aluminum materials, and the surface anode is oxidized into black.

The two-axis moving section includes an X-axis ball screw 14 and a Z-axis ball screw 2. The X-axis ball screw 14 is fixed on the bottom plate and is connected and fixed by an inner hexagon screw. The Z-axis ball screw 2 is placed on a sliding table of the X-axis ball screw 12 and fixed by an inner hexagonal screw.

The image acquisition part comprises an electron microscope 13 and a CCD camera 4; an ocular of an electron microscope 13 is connected with the CCD camera 4, the electron microscope 13 is fixed on the metal rod 6 through a support frame 5, and the bottom of the metal rod 6 is tapped with external threads which are connected with a threaded hole of the bottom plate, so that the electron microscope is fixed on the bottom plate; the metal rod 6 is opposite to the Z-axis ball screw, and the microscope lens barrel axis is vertical to the horizontal plane. The microscope is positioned right above the sample stage 10 and the PDMS stamp 11, so that the transfer of the stamp to the microscopic surface can be completely observed in the field of view by the electron microscope 13.

The electron microscope 13 is provided with an illuminating lamp 7 by bypassing the elastic clamp 8 to provide a light source required for observing the microscopic surface, and the focus of the electron microscope 13 can be adjusted by a focusing knob thereon. The electron microscope 13 is opposed to the Z-axis ball screw 2, and the objective lens of the electron microscope, the stamp head of the PDMS elastic stamp 11, and the sample are ensured to be on the same axis. The CCD camera 4 is connected to the display panel 15, and can display the image information acquired by the electron microscope 13 on the display, and according to the observation requirement, the image can be digitally enlarged/reduced by the buttons on the camera, ensuring that a clear microscopic surface image is obtained.

Specifically, the CCD camera collects an image observed by the electron microscope and transmits image information to the display, so that the microscopic surface image to be transferred can be observed on the display, and the observed image and image can also be stored in real time by using the storage medium. The electron microscope can be focused through the focusing knob, and micro surface targets can be observed respectively by adjusting different focal lengths.

The transfer executing part comprises a PDMS elastic stamp 11, a sample placing table 10 (with a heating plate) arranged on a bottom plate through a support rod 9, and a balance plate 12 with a spring arranged on the outer side of the stamp, wherein the balance plate with the spring is used for adjusting the transfer inclination angle and performing the transfer buffering function. As shown in fig. 1, the PDMS elastic stamp 11 is divided into a stamp head and a stamp holder, the stamp holder 3 is a rib plate structure, the stamp head extends out from the outer edge of the stamp holder 3 and is slightly lower than the screw block, this structural design can ensure the execution process of the whole transfer work, the moving range of the PDMS elastic stamp is within the stroke range of the Z-axis ball screw 2, the PDMS elastic stamp can reach the surface of the sample earlier than the screw block in the process of traveling, and meanwhile, because the extended stamp head is coaxial with the objective lens of the electron microscope and the sample placing table, it is ensured that only the sample and the stamp head can be observed in the field of the microscope without other obstacles, thereby also ensuring that only the transparent stamp head can be observed in the field of the electron microscope and can not be blocked by other parts.

Wherein, the sample placing table 10 is provided with a clamping piece for clamping the sample and a heating plate (not shown), the heating plate is positioned between the sample placing table and the sample, and the heating plate is positioned between the sample placing table and the sample. In the transfer process, when the stamp is covered on the surface of a sample, the ink of the stamp can be transferred and adhered to the surface of the sample after the sample is heated to a certain temperature, and is solidified on the surface of the sample after being cooled. The sample placing table is positioned under a lens cone of the electron microscope, is provided with a clamping piece (not shown) for clamping a sample, is a two-position inclined platform, and can be inclined at different angles to be matched with a balance plate with a spring. The driving part consists of an X-axis high-torque type stepping motor, a Z-axis high-torque type stepping motor 1 and a corresponding stepping motor driver. The stepping motors on the two shafts are connected with the stepping motor drivers through leads to respectively drive the ball screws on the shafts.

The control part integrates a stepping motor controller and a pulse generator, and can control the stepping motor and adjust the speed. The controller is internally provided with a source program which is written in advance, and the program can be changed according to the requirement. The program functions are: firstly, the stepping motor on the X and Z axes is controlled to rotate by the control box, the start, stop and direction knobs and the control pulse knobs on the control box can control the start, stop, forward and reverse rotation and the rotating speed of the motor, so that the ball screw of the corresponding axis is driven to rotate, the ball screw 2 of the Z axis with the PDMS elastic seal 11 can freely move in the horizontal and vertical planes, and the microscopic target is positioned. Then, the Z-axis lead screw is moved to dip in the ink, the direction knob of the Z-axis control box is pressed down, the motor rotates reversely, and the seal is far away. Finally, after the sample is placed on the sample stage 10, the direction knob is pressed, the motor rotates reversely, and the image of the electron microscope is observed until the final transfer printing is finished.

The micro-transfer printing is carried out by using the device according to the following steps:

s1: the source program of the control box is properly modified according to the actual motion condition to meet the requirement;

s2: placing a ball screw on a flat platform and fixing the ball screw by using an inner hexagon screw;

s3: wiring, wherein the two stepping motor drivers are respectively connected with the stepping motors on the two-axis moving lead screw by leads, and the two stepping motor drivers are connected with the control module;

s4: placing a sample on a sample placing table, placing printing ink on a transfer table, and turning on a switch of a power supply;

s5: adjusting the position of the sample to a position about one centimeter above the printing ink, and rotating a focusing knob of the electron microscope until the target to be transferred can be clearly observed on a display;

s6: adjusting the movement of a Z-axis ball screw to drive the stamp head to move downwards, and rotating a focusing knob of an electron microscope to observe a clear image so that the whole surface of the stamp head is stably stained with ink;

s7: removing the seal, placing a sample to be transferred on the transfer printing table, adjusting the movement of a Z-axis ball screw to drive the seal head to move downwards, and simultaneously rotating a focusing knob of an electron microscope to observe a clear image;

s8: switching on a power supply of the heating plate, carrying out transfer printing operation after heating to a required temperature, observing through an electron microscope, and waiting for 10 seconds after the ink on the seal is completely contacted with the sample;

s9: and (5) removing the seal, rotating the focusing knob to focus on the surface of the sample, and observing the transfer effect.

The utility model discloses focus on can carrying out the micro-rendition to little surface, it is extensive to use in the microelectronics field. The transfer printing process is observed in real time in the transfer printing process, the transferred pictures can be collected or the transferred images can be stored in the transfer printing process, the use is convenient, and the operation is simple.

The foregoing is only a preferred embodiment of the present invention, and it should be noted that, for those skilled in the art, a plurality of improvements and decorations can be made without departing from the principle of the present invention, and these improvements and decorations should also be regarded as the protection scope of the present invention.

Claims (7)

1. The utility model provides a micro-transfer device based on little surface transfer method which characterized in that, including fixing X axle removal portion on the bottom plate, installing Z axle removal portion on the slip table of X axle removal portion, installing the electron microscope that has focusing knob and can adjust focal distance in the bottom plate top through the bracing piece to and install the PDMS elastic seal that is used for the different patterns of rendition on Z axle removal portion, PDMS elastic seal below has the sample to place the platform, electron microscope's the position in the top of PDMS elastic seal, electron microscope is connected with the CCD camera of being connected panel display, in order to realize showing the rendition image that electron microscope gathered to observe the rendition process and save the rendition image.

2. The micro transfer printing apparatus according to claim 1, wherein the PDMS elastic stamp is mounted on the Z-axis moving part through a horizontally arranged support.

3. The micro transfer printing apparatus according to claim 1, wherein the base plate is provided with illumination light on one side thereof for providing a light source required for observing the micro surface.

4. The micro transfer printing apparatus according to claim 1, wherein the support bar is screwed to the base plate.

5. The micro transfer device according to claim 1, wherein the X-axis moving part comprises an X-axis high torque type ball screw, and the Z-axis moving part comprises a Z-axis high torque type ball screw for movement and positioning of the micro transfer device.

6. The micro transfer printing device based on the micro surface transfer printing method according to claim 5, further comprising a driving part, comprising X, Z two-axis high torque type stepping motor and corresponding high torque type stepping motor driver; the high-torque type stepping motor driver is used for converting control pulses sent by the controller into angular displacement of the stepping motor; the controller integrates a stepping motor controller and a pulse generator, and can control the high-torque stepping motor and adjust the speed.

7. The micro transfer printing apparatus according to claim 6, wherein the controller is a control box with a source program, and the control box has a knob for adjusting the movement of the motor.

Images