CN212658911U - Laser repairing device - Google Patents

Abstract

The utility model provides a laser repairing device, which comprises a laser component, a lens component and an optical steering device laser component, wherein the laser component is used for emitting laser used for correcting defects on a to-be-corrected component of a display panel; the piece to be corrected is a color film substrate or a mask of the display panel; the optical diverter is obliquely arranged on a transmission light path of the laser and is positioned on the backlight side of the lens component, and is used for irradiating the laser which penetrates through the lens component along the horizontal direction or the oblique direction and correcting the defects. The utility model discloses a radium-shine patching device can help the restoration of defect on display panel's various membrane base plate or the mask version.

Description

Laser repairing device

Technical Field

The utility model relates to a laser repair field especially relates to a radium-shine patching device.

Background

With the development of display technology, flat display devices such as liquid crystal displays have been widely used in electronic products such as computers, televisions, mobile phones, etc. due to their advantages of thin size, light weight, excellent picture quality, low power consumption, long service life, digitalization, no radiation, etc.

The display panel, such as a liquid crystal display panel, mainly includes a color film substrate and an array substrate which are oppositely disposed, and an electric field is applied to a liquid crystal molecular layer sandwiched between the color film substrate and the array substrate, so as to control the arrangement state of liquid crystal molecules in the liquid crystal molecular layer, and enable the display panel to display images. In the manufacturing process of a display panel such as a color film substrate or a mask, damage may occur due to factors of process and environment, resulting in a poor product. In order to improve the yield of the color film substrate or the mask and reduce the production scrap, the defects and defects (such as black defects or white defects) generated in the manufacturing process of the color film substrate or the mask are generally corrected. At present, a correction method for a color film substrate or a mask mainly includes grinding correction, laser correction and ink correction. The grinding correction and the laser correction can be performed on the black defects on the color film substrate or the mask. The laser correction is to remove the over-high black defect on the color film substrate or the mask by using a laser high polymerization energy vertical irradiation mode, so as to achieve the purpose of correcting the black defect.

However, when the black defect on the color filter substrate is vertically irradiated by laser using the laser correction method, the color filter substrate and the pixel electrode on the array substrate may be broken down.

SUMMERY OF THE UTILITY MODEL

The utility model provides a radium-shine patching device can help the restoration of defect on display panel's various membrane base plate or the mask version.

The utility model provides a laser repairing device, which comprises a laser component, a lens component and an optical steering gear, wherein the laser component is used for emitting laser, and the laser is used for correcting defects on a to-be-corrected part of a display panel; the piece to be corrected is a color film substrate or a mask of the display panel; the optical diverter is obliquely arranged on a transmission light path of the laser, is positioned on the backlight side of the lens assembly and is used for irradiating the laser penetrating through the lens assembly along the horizontal direction or the inclined direction and correcting the defects.

In one possible embodiment, the angle between the optical deflector and the piece to be corrected is 40 ° to 50 °.

In a possible embodiment, when the laser beam transmitted through the lens assembly irradiates the optical redirector along a direction perpendicular to the member to be corrected, an included angle between the optical redirector and the member to be corrected is 45 °.

In one possible embodiment, the optical redirector is a laser mirror.

In a possible implementation manner, the correction device further comprises a driving element, the driving element comprises a fixed seat and a driving part, and the driving part is connected to the fixed seat and connected to the optical steering gear so as to drive the optical steering gear to move in a vertical direction relative to the to-be-corrected piece.

In one possible embodiment, the distance between the optical deflector and the piece to be corrected is greater than or equal to 1 μm;

and/or the lens assembly comprises a plurality of lenses with different multiples, is arranged on one side of the fixed seat facing the defect and can rotate relative to the fixed seat.

In a possible embodiment, the optical deflector further comprises a barrier which is transparent to the laser light, is located between the optical deflector and the lens assembly, and is covered on top of the defect and the optical deflector.

In a possible embodiment, the enclosure has a light-transmissive region at a position opposite to the lens assembly, the light-transmissive region being transmissive to the laser light, the optical diverter being disposed opposite to the light-transmissive region;

and/or a distance exists between the bottom of the enclosure and the piece to be corrected.

In a possible implementation manner, the enclosure is connected with the driving part and can move in the vertical direction relative to the piece to be corrected under the driving of the driving part;

the distance between the enclosure and the to-be-corrected piece is equal to the distance between the optical steering gear and the to-be-corrected piece.

In a possible embodiment, the device further comprises a height sensor, which is connected to the drive and is movable in the vertical direction relative to the part to be corrected, for controlling the distance between the optical deflector and the part to be corrected.

In one possible embodiment, the base of the height sensor is at the same height as the base of the optical deflector, or the base of the height sensor is lower than the base of the optical deflector.

In a possible embodiment, the laser assembly includes a laser group, an optical element and a laser adjuster, the laser group is used for emitting the laser light, and the optical element is arranged on the transmission optical path and used for reflecting and/or transmitting the laser light so as to enable the laser light to pass through the laser adjuster;

the laser regulator is provided with a gap with adjustable size, the gap can enable the laser to pass through, and the laser regulator is used for regulating the size of the laser so as to enable the laser to reach the size required by the laser correction process.

In a possible embodiment, the laser light source group includes a first laser light source group and a second laser light source group, the first laser light source group and the second laser light source group can emit the laser light in different forms, and the optical element is configured to reflect and/or transmit the laser light emitted by the first laser light source group or the second laser light source group.

The embodiment provides a laser repairing device, an optical redirector is obliquely arranged on a transmission light path of laser and is located on a backlight side of a lens component, compared with the vertical irradiation of the laser in the prior art, the embodiment enables the laser penetrating through the lens component to irradiate along a horizontal or oblique direction and correct defects by changing the inclination angle of the optical redirector, and can burn a part with an excessively high defect under the action of the laser, so that the defects on a to-be-corrected piece of a display panel, such as a color film substrate or a mask, can be corrected, the corrected color film substrate or mask can meet the design requirements of the display panel, and meanwhile, the possibility that the defects penetrate through pixel electrodes on the color film substrate and an array substrate by the vertical irradiation of the laser can be avoided, and further the yield of the to-be-corrected piece and the display panel can be improved. Therefore, the utility model discloses a radium-shine patching device can help the restoration of defect on display panel's various membrane base plate or the mask version.

Drawings

In order to illustrate the technical solutions of the present invention or the prior art more clearly, the drawings used in the following description of the embodiments or the prior art will be briefly introduced, and it is obvious that the drawings in the following description are some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to the drawings without inventive labor.

Fig. 1 is a schematic structural view of a laser repairing apparatus according to an embodiment of the present invention;

fig. 2 is a schematic structural diagram of a defect on a to-be-corrected part before correction according to an embodiment of the present invention;

fig. 3 is a schematic structural diagram of a defect on a to-be-corrected part after correction according to an embodiment of the present invention.

Description of reference numerals:

100-laser repairing device; 10-a laser assembly; 11-laser group; 111-a first laser light source group; 1111-pulse laser; 1112-a first attenuator; 112-a second laser light source group; 1121 — continuous laser; 1122-a second attenuator; 1123-a beam expander; 12-a first optical element; 13-a second optical element; 14-a laser regulator; 141-a gap; 20-a lens assembly; 21-a lens; 30-an optical redirector; 40-a driver; 41-a fixed seat; 42-a drive section; 50-enclosure; 51-long side; 52-short side; 53-a light-transmitting region; 60-height measuring sensors; 200-a part to be corrected; 210-defect.

Detailed Description

In order to make the objects, technical solutions and advantages of the embodiments of the present invention clearer, the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are some, but not all, embodiments of the present invention. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative efforts belong to the protection scope of the present invention.

The display panel, such as a liquid crystal display panel, may include a Color Filter (CF) substrate, an array substrate, and a liquid crystal layer between the CF substrate and the array substrate, wherein the CF substrate is provided with a common electrode. The common electrode has a certain voltage, and forms a voltage difference with the pixel electrode in each pixel region of the array substrate, the voltage difference is used for driving liquid crystal molecules in the liquid crystal molecule layer to deflect, so that display is performed, and display with different brightness of the liquid crystal display panel is realized by controlling the deflection angle of the liquid crystal molecules. The CF substrate is a main device for realizing color display on a liquid crystal display panel, and is generally formed by coating a Black Matrix (BM), a Red (R) photoresist, a Green (G) photoresist, a Blue (B) photoresist, and a Spacer (Photo Spacer, PS) on a glass substrate, and exposing, developing, and drying the coated substrate. The CF substrate and the array substrate are generally formed with wiring patterns, electrode patterns, and the like, so that a plurality of display regions spaced apart from each other are formed on the substrate. The patterns on the CF substrate and the array substrate are generally formed using a photolithography technique (Photo). The photolithography technique is mainly to form a wiring pattern, an electrode pattern, and the like on a substrate (e.g., a glass substrate) by forming a patterned mask on the substrate and then etching the mask.

In the manufacturing process of a display panel such as a CF substrate or a mask, damage may occur due to process and environmental factors, resulting in a defective product. In order to improve the yield (and the yield) of the CF substrate or the mask and reduce the production scrap, the defects and the defects (such as black defects or white defects) generated in the manufacturing process of the CF substrate or the mask are corrected, so that the yield of the CF substrate or the mask is improved. The correction method in the prior art mainly comprises ink correction, grinding correction and laser correction. The ink correction is mainly realized by injecting photoresist materials (such as BM, R, G and B) corresponding to the periphery of a white defect into the white defect on the CF substrate or the mask plate by using an ink jet nozzle.

And the grinding correction and the laser correction can be performed on the black defects on the color film substrate or the mask. The grinding and correction mainly comprises the step of grinding the defect with the too high height compared with the black defect by using a grinding belt, so that the height of the defect can be controlled within 2 mu m, the defect with the too high height on the CF substrate or the mask can be corrected, and the defect with the too high height (for example, more than 2 mu m) can be prevented from influencing the yield of the CF substrate or the mask. However, the polishing correction technique is prone to scratch the polished surface of a product (such as a CF substrate or a mask) due to the defect itself and the polishing instability, and the product quality is seriously affected. As described in the background art, when the black defect on the CF substrate is vertically irradiated by the laser correction method, the color film substrate and the pixel electrodes on the array substrate may be broken down, so that quality abnormality of the CF substrate and the display panel occurs, and yield of the CF substrate and the display panel is affected.

Therefore, the embodiment of the utility model provides a radium-shine patching device can help the restoration of defect on display panel's various membrane base plate or the mask version.

Examples

Fig. 1 is the embodiment of the utility model provides a radium-shine patching device's schematic structure diagram, fig. 2 is the utility model provides a treat the schematic structure diagram of the defect on the correction piece before the correction, fig. 3 is the embodiment of the utility model provides a treat the schematic structure diagram of the defect on the correction piece after the correction.

Referring to fig. 1, the present invention provides a laser repairing apparatus 100, which may include a laser assembly 10, a lens assembly 20 and an optical redirector 30, wherein the laser assembly 10 is used for emitting laser light, and the laser light is used for correcting a defect 210 on a to-be-corrected piece 200 of a display panel; the to-be-corrected member 200 may be a color film substrate or a mask of a display panel. The defect 210 on the piece to be corrected 200 can be understood as an excessively high black defect or other excessively high defect 210 on the CF substrate or reticle. The optical redirector 30 is obliquely arranged on the transmission path of the laser light, and the optical redirector 30 is arranged on the backlight side of the lens assembly 20 and is used for enabling the laser light transmitted through the lens assembly 20 to irradiate along the horizontal direction or the oblique direction and correct the defect 210.

Compared with the vertical irradiation of laser in the prior art, the embodiment can change the inclination angle of the optical redirector 30, so that the laser passing through the lens assembly 20 can irradiate and correct the defect 210 along the horizontal or inclined direction, and can burn the part with the too high defect 210 under the action of the laser, thereby realizing the correction of the defect 210 on the to-be-corrected piece 200 of the display panel, such as a CF substrate or a mask, so that the corrected CF substrate or mask can meet the design requirement of the display panel, and at the same time, the possibility that the defect 210 is irradiated by the laser vertically to break down the pixel electrodes on the CF substrate and the array substrate can be avoided, thereby improving the yield of the to-be-corrected piece 200 and the display panel. Compared with the method of grinding and correcting, the embodiment can reduce or avoid the possibility of aggravating the poor quality due to the attribute of the defect 210 (such as the form of the defect 210) and the abnormal repairing in the repairing process, improve the yield of the piece to be corrected 200 and the display panel, reduce the consumption of the grinding belt, and save the cost for correcting the defect 210. Therefore, the laser repairing apparatus 100 of the present invention can help repair the defect 210 on the CF substrate or the mask of the display panel.

The laser emitted by the laser assembly 10 may be a high-energy laser beam, such as a laser, capable of correcting the defect 210 by burning. Since the laser emitted by the laser assembly 10 is a high-energy laser, the part with the too high defect 210 explained in the manufacturing process of the piece to be corrected 200 can be corrected by burning, the risk that foreign matters fall onto the piece to be corrected 200 after the part with the defect 210 is burned by the laser is avoided, even if the burned part is scattered in the correction area of the piece to be corrected 200, the part can be cleaned in the subsequent manufacturing process, and the quality of the piece to be corrected 200 is not abnormal. Therefore, through the arrangement of the optical deflector 30 in the transmission optical path, the defect 210 with too high height on the part to be corrected 200 can be corrected, the yield of the part to be corrected 200 and the display panel is improved, the display of the part to be corrected 200 and the display panel is not affected, and the correction effect is good.

In the prior art, the safety level of the laser can be classified into four grades according to the damage degree of the laser to human body, and the four grades are respectively Class1 to Class4 from low to high. In this embodiment, the laser, such as laser, emitted by the laser module 10 can be regarded as low-output visible laser (i.e. Class1, with the power between 0.4mW and 1 mW), so that the low-output laser does not harm human bodies, and the safety of the design can be ensured.

Referring to fig. 1, the laser assembly 10 may include a laser group 11, an optical element, and a laser adjuster 14, wherein the laser group 11 is configured to emit laser light, and the optical element may be disposed on a transmission path of the laser group 11 and configured to reflect and/or transmit the laser light so that the laser light passes through the laser adjuster 14. That is, the optical element may change the transmission direction of the laser light emitted from the laser group 11 through at least one of reflection and transmission, so that the laser light may pass through the laser adjuster 14 according to a predetermined light path, and at the same time, may contribute to reducing the structural size of the laser repairing apparatus 100, so that the structure of the laser repairing apparatus 100 is more compact.

The laser adjuster 14 is provided with a gap 141 with adjustable size, and the gap 141 can pass the laser for adjusting the size of the laser to reach the size required by the laser correction process. Thus, when the laser passes through the gap 141, the size of the laser, such as the size of the cross section of the laser, can be adjusted by adjusting the size of the gap 141, so that the laser can reach the size required by the laser correction process, and the defects 210 with different sizes can be corrected.

As a possible embodiment, the laser regulator 14 may be one or more masks with different sized apertures 141 inside. That is, the laser adjuster 14 may be a mask having apertures 141 of different sizes. Alternatively, the laser regulator 14 may have a plurality of light-shielding plates, and the size of the aperture 141 on each light-shielding plate may be different. Therefore, the laser reflected and transmitted by the optical element can enter and pass through the gap 141 of the light shielding plate by matching the gap 141 with different sizes on the light shielding plate or replacing the light shielding plate, so that the size of the laser is adjusted through the gap 141 with different sizes, and the defects 210 with different sizes are better corrected.

Alternatively, as another possible embodiment, the laser regulator 14 may also include a plurality of (e.g., 2 or 4) light-shielding plates, and the above-mentioned gap 141 may be formed between the plurality of light-shielding plates. This allows adjustment of the size of the gap 141 by changing the distance between the plurality of light shielding plates. In the present embodiment, the structure of the laser regulator 14 is not further limited.

As shown in fig. 1, the laser light source group 11 may include a first laser light source group 111 and a second laser light source group 112, and the first laser light source group 111 and the second laser light source group 112 may emit laser light in different forms. That is, the first laser light source group 111 and the second laser light source group 112 may employ different lasers. The optical element is used for reflecting and/or transmitting the laser light emitted by the first laser light source group 111 or the second laser light source group 112, so that the laser light emitted by the first laser light source group 111 or the second laser light source group 112 can pass through the gap 141 of the laser regulator 14 under the action of the optical element.

For example, the first laser light source group 111 may employ a pulse laser 1111, and the second laser light source group 112 may employ a continuous laser 1121. In this way, by setting the pulse laser 1111 and the continuous laser 1121 and controlling the pulse laser 1111 and the continuous laser 1121 to emit separately, different laser emission requirements of the laser group 11 can be realized, so that the defect 210 repairable by the laser repairing apparatus 100 or the repairing effect is better.

Accordingly, the optical element may also include a first optical element 12 and a second optical element 13, and the first optical element 12 is disposed obliquely on a laser emission path of the pulse laser 1111 and reflects the pulsed laser light emitted from the pulse laser 1111 so that the pulsed laser light may pass through the slit 141 of the laser adjuster 14. The second optical element 13 is obliquely disposed on the laser emission path of the continuous laser 1121, and reflects the continuous laser light emitted from the continuous laser 1121 so that the continuous laser light can pass through the slit 141 of the laser adjuster 14.

It should be noted that, in order to reduce the volume of the laser repairing apparatus 100, when the pulse laser 1111 and the continuous laser 1121 are horizontally disposed in the vertical direction and the pulse laser 1111 is located above the continuous laser 1121, the pulse laser and the continuous laser respectively irradiate the first optical element 12 and the second optical element 13 along the horizontal direction, and at this time, the pulse laser can transmit the second optical element 13, so that the pulse laser can pass through the slit 141 of the laser adjuster 14. In order to enable the pulsed laser and the continuous laser to irradiate and repair the defect 210 along the horizontal direction, the included angles between the first optical element 12 and the second optical element 13 and the horizontal direction should be 45 °.

Illustratively, the first optical element 12 may be a mirror or other optical element capable of reflecting the pulsed laser light. The second optical element 13 may be a transmission mirror or other optical element capable of transmitting the pulsed laser light and reflecting the continuous laser light.

Referring to fig. 1, first laser light source group 111 may further include a first attenuator 1112, so that the intensity of the pulsed laser light can be reduced by first attenuator 1112 to achieve the laser intensity required by the laser repair process. The second laser light source group 112 may further include a second attenuator 1122 and a beam expander 1123, and the beam expander 1123 may be located between the second attenuator 1122 and the second optical element 13, so that after the intensity of the continuum laser is reduced by the second attenuator 1122 to reach the laser intensity required by the laser repair process, the diameter of the input continuum laser may be collimated by the beam expander 1123 to be enlarged, so as to achieve a better defect 210 correction effect.

Wherein, the included angle between the optical redirector 30 and the piece 200 to be corrected can be 40-50 degrees. This allows the defect 210 to be corrected by adjusting the tilt angle of the optical redirector 30 so that the laser light passing through the lens assembly 20 is directed horizontally or at an oblique angle.

It should be understood that, according to the principle of light reflection, in order to ensure that the laser light transmitted through the lens assembly 20 can irradiate in a horizontal or oblique direction and correct the defect 210, the included angle between the optical redirector 30 and the to-be-corrected member 200 (i.e. the oblique angle of the optical redirector 30 on the transmission path of the laser light) also depends on the angle at which the laser light enters or transmits through the lens assembly 20. Therefore, in the present embodiment, the included angle between the optical redirector 30 and the to-be-corrected element 200 is not further limited.

It should be understood that, when the laser light transmitted through the lens assembly 20 irradiates and corrects the defect 210 in a horizontal or oblique direction, in order to make the height of the repaired defect less than or equal to 2 μm, the angle between the laser light reflected by the optical redirector 30 and the vertical direction should be greater than or equal to 90 ° and less than or equal to 95 °.

For example, referring to fig. 1 to 3, when the laser beam transmitted through the lens assembly 20 irradiates the optical redirector 30 along a direction perpendicular to the to-be-corrected member 200, an included angle between the optical redirector 30 and the to-be-corrected member 200 is 45 °. It can be known from the principle of light reflection that the laser passing through the lens assembly 20 can irradiate and correct the defect 210 along the horizontal direction (i.e. 90 degrees from the vertical direction) under the action of the optical redirector 30, and correct the defect 210 with too high height on the CF substrate or the mask, so that the height of the repaired defect is less than or equal to 2 μm, and the defect 210 is prevented from affecting the yield of the CF substrate or the mask due to too high height, and the corrected CF substrate or the mask (as shown in fig. 3) can meet the design requirement of the display panel, and simultaneously the possibility that the defect 210 is irradiated by the laser vertically to break down the CF substrate and the pixel electrode on the array substrate can be avoided, thereby improving the yield of the piece to be corrected 200 and the display panel.

Illustratively, the optical redirector 30 may be a laser mirror or other optical element that reflects laser light.

Illustratively, when the laser transmitted through the lens assembly 20 is irradiated in an oblique direction and corrects the defect 210, an angle between the laser reflected by the optical redirector 30 and a vertical direction may be 95 °, so that the defect 210 with an excessively high height on the CF substrate or the mask can be corrected, and the height of the defect after being repaired is less than or equal to 2 μm, so as to avoid the defect 210 with an excessively high height from affecting the yield of the CF substrate or the mask.

In order to facilitate the adjustment of the height of the optical redirector 30, referring to fig. 1, the laser repairing apparatus 100 may further include a driving component 40, where the driving component 40 may include a fixing base 41 and a driving portion 42, and the driving portion 42 is connected to the fixing base 41 and connected to the optical redirector 30 to drive the optical redirector 30 to move in the vertical direction relative to the to-be-corrected piece 200. Thus, when the driving portion 42 moves on the fixing base 41 in the vertical direction relative to the to-be-repaired piece 200, because the optical redirector 30 is fixed on the driving portion 42, the optical redirector 30 can move synchronously with the driving portion 42 under the driving of the driving portion 42, so that the optical redirector 30 moves in the vertical direction relative to the to-be-repaired piece 200, and further the distance between the optical redirector 30 and the to-be-repaired piece 200 can be adjusted through the driving portion 42, and the surface of the to-be-repaired piece can be prevented from being damaged by the optical redirector 30 while the defect 210 is ensured to be repaired.

Illustratively, the driving member 40 may be a linear motor, a telescopic motor or other driving device with a driving portion 42 capable of linear motion. Wherein the driving member 40 can be mounted on the member 200 to be corrected so as to correct the height-too-high defect 210 on the member 200 to be corrected. In the present embodiment, the structure of the driving member 40 is not further limited.

Further, in order to avoid the optical deflector 30 from causing pressure damage or surface scratch on the member to be corrected 200, the distance between the optical deflector 30 and the member to be corrected 200 should be greater than or equal to 1 μm. It should be understood that, in order to ensure the effect of correcting the defect 210, the distance between the optical redirector 30 and the to-be-corrected piece 200 may be controlled within a range that depends on the height of the defect 210, the length of the optical redirector 30 and the included angle between the optical redirector 30 and the to-be-corrected piece 200, and therefore, in the present embodiment, the upper limit of the distance between the optical redirector 30 and the to-be-corrected piece 200 is not further limited.

Wherein, referring to fig. 1, lens assembly 20 may include a plurality of lenses 21 with different powers, and lens assembly 20 may be disposed on a side of fixing base 41 facing defect 210 and may rotate with respect to fixing base 41. Therefore, the lens assembly 20 can be fixed through the fixing seat 41, and meanwhile, according to the requirement of the laser repairing process, the lens assembly 20 can be rotated, so that laser passing through the laser regulator 14 can irradiate the defect 210 through the lenses 21 with different magnifications and through reflection of the optical redirector 30, and the high correction of the defect 210 can be realized.

As a possible embodiment, the lens assembly 20 may further include a converter, the plurality of lenses 21 are disposed on the converter, the converter is disposed on the fixing base 41 and can rotate relative to the fixing base 41, so that the plurality of lenses 21 can be fixed on the fixing base 41 through the converter and can rotate relative to the fixing base 41.

In order to improve the safety performance of the laser repairing apparatus 100, referring to fig. 1, the laser repairing apparatus 100 may further include a barrier 50 that is transparent to laser light, and the barrier 50 may be located between the optical redirector 30 and the lens assembly 20 and cover the defect 210 and the top of the optical redirector 30. Thus, when the height of the defect 210 is ensured to be corrected, the laser can be blocked by the enclosure 50, so that the laser is prevented from irradiating the outside of the laser repairing device 100 and causing damage to the outside, and the safety performance of the laser repairing device 100 is further improved.

To facilitate laser light transmission, the enclosure 50 has a light-transmitting region 53 at a position opposite to the lens assembly 20, the light-transmitting region 53 allows laser light to transmit, and the optical redirector 30 may be disposed opposite to the light-transmitting region 53, as shown in fig. 1. This can shorten the transmission light path of the laser light, so that the laser light that permeates through the light-transmitting area 53 can be directly irradiated to the optical redirector 30, thereby reducing the loss of the laser light during transmission and contributing to improving the utilization rate of the laser light.

Illustratively, the light-transmitting region 53 may be a region of the enclosure that is transparent to laser light, and the region may be formed of a light-transmitting material. Alternatively, the transparent region 53 may enclose a through hole formed in the block 50, and the laser light passing through the lens assembly 20 may be irradiated onto the optical redirector 30 through the through hole. In the present embodiment, the structural form of the light-transmitting region 53 is not further limited.

In order to avoid the fence 50 from causing pressure injury or surface-worn scratch on the to-be-corrected piece 200, a distance exists between the bottom of the fence 50 and the to-be-corrected piece 200. The bottom of the enclosure 50 may be at the same height as the bottom of the optical redirector 30, or the bottom of the enclosure 50 may be lower or higher than the bottom of the optical redirector 30. In this embodiment, the position relationship between the bottom of the enclosure 50 and the bottom of the optical redirector 30 is not further limited, as long as the enclosure 50 can prevent the laser from irradiating the outside of the laser repairing apparatus 100 and causing damage to the outside, and at the same time, the enclosure does not contact the surface of the to-be-corrected piece 200.

As a possible embodiment, referring to fig. 1, the enclosure 50 may be connected to the driving portion 42 and may be moved in a vertical direction relative to the member to be corrected 200 by the driving portion 42. In this way, the enclosure 50 and the optical deflector 30 can be moved synchronously with the drive 42 in order to control the distance between the enclosure 50 and the optical deflector 30 and the piece 200 to be modified.

Illustratively, the distance between the fence 50 and the member to be modified 200 is equal to the distance between the optical deflector 30 and the member to be modified 200. That is, the bottom of the enclosure 50 and the bottom of the optical deflector 30 are at the same height relative to the member to be modified 200, which allows better control of the distance between the enclosure 50 and the optical deflector 30 and the member to be modified 200.

Alternatively, as another possible embodiment, the enclosure 50 may be fixed on the to-be-corrected member 200 by a fixing frame or other structure, and have a fixed distance (for example, 1 μm) with the to-be-corrected member 200, and the driving portion 42 may extend into the enclosure 50 and drive the optical redirector 30 to move in the vertical direction in the enclosure 50. In this embodiment, the fixing manner of the enclosure 50 is not further limited.

For example, the enclosure 50 may be an "L" shaped enclosure 50 as shown in fig. 1 or other configurations of the enclosure 50. When enclosure 50 is an "L" shaped enclosure 50, the long side 51 of enclosure 50 is positioned over the top of defect 210 and optical redirector 30, and clear area 53 is positioned on long side 51 of enclosure 50. The short edge 52 of the dam 50 is positioned to the side of the defect 210 and on a different side of the defect 210 than the optical redirector 30. The distance between the apron 50 and the part 200 to be modified is understood to be the distance between the bottom of the short side 52 of the apron 50 and the part 200 to be modified. The bottom of the rail 50 may also be understood as the bottom of the short side 52 of the rail 50. In the present embodiment, the structural form of the enclosure 50 is not further limited.

In order to facilitate the control of the distance between the optical redirector 30 and the to-be-corrected member 200, referring to fig. 1, the laser repairing apparatus 100 may further include a height sensor 60, and the height sensor 60 may be connected to the driving portion 42 and may be movable in a vertical direction with respect to the to-be-corrected member 200 for controlling the distance between the optical redirector 30 and the to-be-corrected member 200. Thus, the height measuring sensor 60 is connected with the driving part 42, and can be driven by the driving part 42 to synchronously move together with the optical steering gear 30 in the vertical direction relative to the to-be-corrected member 200, so that when the positions of the height measuring sensor 60 and the optical steering gear 30 are relatively fixed, the distance between the height measuring sensor 60 and the to-be-corrected member 200, which is measured by the height measuring sensor 60, can be used for controlling and adjusting the distance between the optical steering gear 30 and the to-be-corrected member 200.

As a possible embodiment, the bottom of the altimetric sensor 60 and the bottom of the optical redirector 30 may be at the same height. That is, the distance between the bottom of the level sensor 60 and the surface of the member to be corrected 200 is equal to the distance between the bottom of the optical deflector 30 and the surface of the member to be corrected 200. Thus, the distance between the optical diverter 30 and the to-be-corrected piece 200 can be controlled by controlling the distance between the bottom of the height measuring sensor 60 and the surface of the to-be-corrected piece 200, so that the optical diverter 30 is prevented from being crushed or scratched on the to-be-corrected piece 200.

Alternatively, as another possible embodiment, the bottom of the height sensor 60 may be lower than the bottom of the optical redirector 30. Thus, when the height measuring sensor 60 is driven by the driving part 42 to move in the vertical direction toward the direction of the member to be corrected 200, the height measuring sensor 60 contacts the member to be corrected 200 earlier than the optical deflector 30, so that the distance between the optical deflector 30 and the member to be corrected 200 can be controlled and adjusted by controlling the distance between the bottom of the height measuring sensor 60 and the surface of the member to be corrected 200 according to the height difference between the height measuring sensor 60 and the optical deflector 30. In the present embodiment, the arrangement of the height sensor 60 and the relative position with respect to the optical deflector 30 are not further limited as long as the distance between the optical deflector 30 and the member to be corrected 200 can be controlled and adjusted by the height sensor 60.

The utility model discloses a radium-shine patching device, through setting up the transmission light path of laser with optics steering gear slope, and be located the side of being shaded of lens subassembly, can make the laser that sees through the lens subassembly can follow level or incline direction and shine and revise the defect, when making various membrane base plate or mask version after the correction can accord with display panel's designing requirement, can avoid the laser to shine the possibility that the defect punctures the pixel electrode on various membrane base plate and the array substrate perpendicularly, and then promote the yield of treating correction piece and display panel.

Finally, it should be noted that: the above embodiments are only used to illustrate the technical solution of the present invention, and not to limit the same; although the present invention has been described in detail with reference to the foregoing embodiments, it should be understood by those skilled in the art that: the technical solutions described in the foregoing embodiments may still be modified, or some or all of the technical features may be equivalently replaced; such modifications and substitutions do not depart from the spirit and scope of the present invention.

Claims (10)

1. A laser repairing device is characterized by comprising a laser assembly, a lens assembly and an optical diverter, wherein the laser assembly is used for emitting laser which is used for correcting defects on a to-be-corrected part of a display panel; the piece to be corrected is a color film substrate or a mask of the display panel; the optical diverter is obliquely arranged on a transmission light path of the laser, is positioned on the backlight side of the lens assembly and is used for irradiating the laser penetrating through the lens assembly in a horizontal or inclined direction and correcting the defects.

2. The laser repairing device of claim 1, wherein the included angle between the optical deflector and the member to be corrected is 40-50 °.

3. The laser repairing apparatus of claim 2, wherein when said laser beam transmitted through said lens assembly irradiates said optical deflector along a direction perpendicular to said member to be repaired, an angle between said optical deflector and said member to be repaired is 45 °.

4. The laser repairing apparatus according to any one of claims 1 to 3, further comprising a driving member, wherein the driving member comprises a fixing base and a driving portion, and the driving portion is connected to the fixing base and connected to the optical redirector to drive the optical redirector to move in a vertical direction relative to the to-be-corrected member.

5. The laser repairing apparatus of claim 4, wherein the distance between the optical diverter and the member to be corrected is greater than or equal to 1 μm.

6. The laser repair apparatus of claim 4, further comprising a barrier through which the laser light passes, the barrier being positioned between the optical redirector and the lens assembly and covering the defect and the top of the optical redirector.

7. The laser repair apparatus of claim 6, wherein the enclosure has a transparent area opposite the lens assembly, the transparent area being transparent to the laser light, and the optical diverter is disposed opposite the transparent area.

8. The laser repairing device of claim 6, wherein the enclosure is connected to the driving portion and is driven by the driving portion to move in a vertical direction relative to the member to be repaired;

the distance between the enclosure and the to-be-corrected piece is equal to the distance between the optical steering gear and the to-be-corrected piece.

9. The laser repairing apparatus of claim 4, further comprising a height sensor connected to the driving portion and movable in a vertical direction with respect to the member to be repaired for controlling a distance between the optical redirector and the member to be repaired.

10. The laser repairing apparatus according to any of the claims 1-3, wherein said laser assembly comprises a laser group, an optical element and a laser adjuster, said laser group is used for emitting said laser light, said optical element is disposed on said transmission path and used for reflecting and/or transmitting said laser light, so that said laser light passes through said laser adjuster;

the laser regulator is provided with a gap with adjustable size, the gap can enable the laser to pass through, and the laser regulator is used for regulating the size of the laser so as to enable the laser to reach the size required by the laser correction process.

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