CN212559468U - Electronic-grade sulfur trioxide gas demisting device - Google Patents

Abstract

The utility model discloses an electronic level sulfur trioxide gas defogging device, including first defroster and second defroster, the second defroster is located the top of first defroster, the below of first defroster is equipped with first flushing pipe, be equipped with two second flushing pipes between first defroster and the second defroster, two one side that the second flushing pipe kept away from mutually and one side of first defroster that first flushing pipe is close to all are equipped with a plurality of shower nozzles through hose connection, the both sides of shower nozzle all are equipped with first pivot and first fixed plate, first fixed plate and corresponding first flushing pipe or second flushing pipe fixed connection. An electronic level sulfur trioxide gaseous defogging device, first defroster and second defroster can be to the gaseous defogging of sulfur trioxide, when needing to clear up first defroster and second defroster, can be so that the shower nozzle swing back and forth for the cleaning performance is better, the in-service use of being convenient for.

Description

Electronic-grade sulfur trioxide gas demisting device

Technical Field

The utility model relates to a defogging equipment technical field, in particular to gaseous defogging device of electron level sulfur trioxide.

Background

Electronic grade sulfuric acid, also known as ultra-pure sulfuric acid, belongs to ultra-clean high-purity reagents. Is the wet electronic chemistry with the largest industrial use amount, is mainly used for cleaning, photoetching and corrosion of silicon wafers and corrosion and cleaning of printed circuit boards, and can effectively remove magazine particles, inorganic residues and carbon deposits on the wafers. The demister mainly comprises fixing devices such as wave-shaped blades, plates and clamping strips, and is easy to generate fog with the particle size of 10-60 microns in the operation process of wet desulphurization and absorption towers, wherein the fog contains water, and also dissolves sulfuric acid, sulfate, sulfur dioxide and the like, and simultaneously causes pollution and serious corrosion of a fan, a heat exchanger and a flue. In manufacturing, will get into the defroster edulcoration after the sulfur trioxide evaporation, however, impurity is easy at the surperficial scale deposit of defroster, and also only spray water through the shower nozzle to the defroster among the prior art and wash, and the cleaning performance is not good.

SUMMERY OF THE UTILITY MODEL

The utility model discloses a main aim at provides an electronic level sulfur trioxide gas defogging device, can effectively solve the problem in the background art.

In order to achieve the above purpose, the utility model adopts the following technical scheme:

an electronic-grade sulfur trioxide gas demisting device comprises a first demister and a second demister, wherein the second demister is positioned above the first demister, a first flushing pipeline is arranged below the first demister, two second flushing pipelines are arranged between the first demister and the second demister, a plurality of spray heads connected through hoses are arranged on one sides, far away from the two second flushing pipelines, of the first demister, close to the first flushing pipeline, of the two second flushing pipelines, a first rotating shaft and a first fixing plate are arranged on two sides of each spray head, the first fixing plate is fixedly connected with the corresponding first flushing pipeline or the corresponding second flushing pipeline, the first rotating shaft is fixedly connected with the spray heads, one end of the first rotating shaft penetrates through the first fixing plate, a bearing is arranged at the penetrating position of the first rotating shaft and the first fixing plate, and the adjacent two first rotating shafts are connected through a coupler, one of them the one end fixedly connected with gear of first pivot, the below of gear is equipped with the fly leaf, the top fixedly connected with and the pinion rack of gear matched with of fly leaf, the bottom of fly leaf is equipped with supporting component, the top of fly leaf is equipped with drive assembly, first defroster, second defroster, first washing pipeline and second washing pipeline are through external defogging pipeline fixed connection.

Preferably, the supporting component comprises a supporting plate arranged at the bottom of the movable plate, a sliding groove is formed in the top of the supporting plate, a sliding block is arranged in the sliding groove, the top of the sliding block is fixedly connected with the bottom of the movable plate, the supporting plate is fixedly connected with a first flushing pipeline or a second flushing pipeline corresponding to the first flushing pipeline or the second flushing pipeline, supporting columns are fixedly connected to the first flushing pipeline and the second flushing pipeline, and one ends of the supporting columns are fixedly connected with the supporting plate.

Preferably, the cross section of the sliding groove and the sliding block is of a T-shaped structure.

Preferably, the drive assembly is including setting up in the rectangle ring at fly leaf top, rectangle ring and fly leaf fixed connection, equal fixedly connected with second fixed plate on first flushing pipe way and the second flushing pipe way, one side fixedly connected with motor of second fixed plate, the output of motor is equipped with the second pivot, the one end fixedly connected with carousel of second pivot, one side fixedly connected with actuating lever of carousel, just the actuating lever is located the rectangle ring.

Preferably, the motor is externally connected with a control switch and a power supply.

Compared with the prior art, the utility model discloses following beneficial effect has: through setting up first defroster, the second defroster, first flushing line, the second flushing line, the shower nozzle, first pivot, the shaft coupling, first fixed plate, the bearing, the gear, the fly leaf, the pinion rack, supporting component and drive assembly's mating reaction, first defroster and second defroster can be to sulfur trioxide gas defogging, when needing to clear up first defroster and second defroster, can be so that the shower nozzle swing back and forth for the cleaning performance is better, the in-service use of being convenient for.

Drawings

FIG. 1 is a schematic diagram of the overall structure of an electronic-grade sulfur trioxide gas demisting device according to the present invention;

FIG. 2 is a schematic structural diagram of a rectangular ring of the electronic-grade sulfur trioxide gas defogging device of the present invention;

fig. 3 is a partially enlarged schematic view of a portion a of fig. 1.

In the figure: 1. a first demister; 2. a second demister; 3. a first flush line; 4. a second flush line; 5. a spray head; 6. a first rotating shaft; 7. a coupling; 8. a first fixing plate; 9. a bearing; 10. a gear; 11. a movable plate; 12. a toothed plate; 13. a support plate; 14. a chute; 15. a slider; 16. a support pillar; 17. a second fixing plate; 18. a motor; 19. a second rotating shaft; 20. a turntable; 21. a drive rod; 22. a rectangular ring.

Detailed Description

In order to make the technical means, creation features, achievement purposes and functions of the present invention easy to understand, the present invention is further described below with reference to the following embodiments.

In the description of the present invention, it should be noted that the terms "upper", "lower", "inner", "outer", "front end", "rear end", "both ends", "one end", "the other end" and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are only for convenience of description and simplification of description, but do not indicate or imply that the device or element to which the reference is made must have a specific orientation, be constructed in a specific orientation, and be operated, and thus, should not be construed as limiting the present invention. Furthermore, the terms "first" and "second" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.

In the description of the present invention, it is to be noted that, unless otherwise explicitly specified or limited, the terms "mounted," "disposed," "connected," and the like are to be construed broadly, and for example, "connected" may be either fixedly connected or detachably connected, or integrally connected; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meaning of the above terms in the present invention can be understood in specific cases to those skilled in the art.

As shown in fig. 1-3, an electronic-grade sulfur trioxide gas demisting device comprises a first demister 1 and a second demister 2, wherein the second demister 2 is located above the first demister 1, a first flushing pipe 3 is arranged below the first demister 1, two second flushing pipes 4 are arranged between the first demister 1 and the second demister 2, one side of the two second flushing pipes 4, which is far away from the first demister 1, and one side of the first flushing pipe 3, which is close to the first demister 1, are respectively provided with a plurality of spray heads 5 connected through hoses, two sides of each spray head 5 are respectively provided with a first rotating shaft 6 and a first fixing plate 8, each first fixing plate 8 is fixedly connected with the corresponding first flushing pipe 3 or second flushing pipe 4, each first rotating shaft 6 is fixedly connected with each spray head 5, one end of each first rotating shaft 6 penetrates through the first fixing plate 8, and a bearing 9 is arranged at the penetrating part of each first rotating shaft 6 and the corresponding first fixing plate 8, two adjacent first rotating shafts 6 are connected through a coupler 7, one end of one first rotating shaft 6 is fixedly connected with a gear 10, a movable plate 11 is arranged below the gear 10, the top of the movable plate 11 is fixedly connected with a toothed plate 12 matched with the gear 10, the bottom of the movable plate 11 is provided with a supporting assembly, the top of the movable plate 11 is provided with a driving assembly, and the first demister 1, the second demister 2, the first flushing pipeline 3 and the second flushing pipeline 4 are fixedly connected through an external demisting pipeline;

the supporting assembly comprises a supporting plate 13 arranged at the bottom of the movable plate 11, a sliding groove 14 is formed in the top of the supporting plate 13, a sliding block 15 is arranged in the sliding groove 14, the top of the sliding block 15 is fixedly connected with the bottom of the movable plate 11, the supporting plate 13 is fixedly connected with the corresponding first flushing pipeline 3 or the second flushing pipeline 4, supporting columns 16 are fixedly connected to the first flushing pipeline 3 and the second flushing pipeline 4, and one ends of the supporting columns 16 are fixedly connected with the supporting plate 13; the cross sections of the sliding groove 14 and the sliding block 15 are of T-shaped structures, so that the sliding block 15 is prevented from being separated from the sliding groove 14; the driving assembly comprises a rectangular ring 22 arranged at the top of the movable plate 11, the rectangular ring 22 is fixedly connected with the movable plate 11, a second fixing plate 17 is fixedly connected to both the first flushing pipeline 3 and the second flushing pipeline 4, a motor 18 is fixedly connected to one side of the second fixing plate 17, a second rotating shaft 19 is arranged at the output end of the motor 18, a turntable 20 is fixedly connected to one end of the second rotating shaft 19, a driving rod 21 is fixedly connected to one side of the turntable 20, and the driving rod 21 is located in the rectangular ring 22; the motor 18 is externally connected with a control switch and a power supply.

It should be noted that, the utility model relates to an electronic-grade sulfur trioxide gas demisting device, when in use, the first demister 1, the second demister 2, the first flushing pipe 3 and the second flushing pipe 4 are fixedly connected through an external demisting pipe, sulfur trioxide gas is demisted through the first demister 1 and the second demister 2, impurities are removed, when the impurities are scaled on the surfaces of the first demister 1 and the second demister 2, the first flushing pipe 3 and the second flushing pipe 4 are externally connected with a water pump and a water source, the first demister 1 and the second demister 2 are cleaned through the spray head 5, meanwhile, the motor 18 drives the second rotating shaft 19 to rotate, the rotating disc 20 rotates, the driving rod 21 drives the rectangular ring 22 to move left and right repeatedly, the rectangular ring 22 drives the movable plate 11 to move left and right, through the matching of the toothed plate 12 and the gear 10, the gear 10 periodically rotates and positively and negatively, and then make shower nozzle 5 swing for the cleaning performance is better, the in-service use of being convenient for, in the movable plate 11 removes the in-process, slider 15 slides in spout 14, and through the cooperation of spout 14 and slider 15, and then make the steady removal of movable plate 11.

The basic principles and the main features of the invention and the advantages of the invention have been shown and described above. It will be understood by those skilled in the art that the present invention is not limited to the above embodiments, and that the foregoing embodiments and descriptions are provided only to illustrate the principles of the present invention without departing from the spirit and scope of the present invention. The scope of the invention is defined by the appended claims and equivalents thereof.

Claims (5)

1. The utility model provides an electronic grade sulfur trioxide gas defogging device which characterized in that: the device comprises a first demister (1) and a second demister (2), wherein the second demister (2) is arranged above the first demister (1), a first flushing pipeline (3) is arranged below the first demister (1), two second flushing pipelines (4) are arranged between the first demister (1) and the second demister (2), one side, far away from the two second flushing pipelines (4), of the first demister (1), close to the first flushing pipeline (3) are respectively provided with a plurality of spray heads (5) connected through hoses, two sides of each spray head (5) are respectively provided with a first rotating shaft (6) and a first fixing plate (8), the first fixing plate (8) is fixedly connected with the corresponding first flushing pipeline (3) or the corresponding second flushing pipeline (4), the first rotating shaft (6) is fixedly connected with the spray heads (5), one end of the first rotating shaft (6) penetrates through the first fixing plate (8), just first pivot (6) are equipped with bearing (9) with the department of running through of first fixed plate (8), adjacent two connect through shaft coupling (7) between first pivot (6), one of them one end fixedly connected with gear (10) of first pivot (6), the below of gear (10) is equipped with fly leaf (11), the top fixedly connected with and gear (10) matched with pinion rack (12) of fly leaf (11), the bottom of fly leaf (11) is equipped with supporting component, the top of fly leaf (11) is equipped with drive assembly, first defroster (1), second defroster (2), first washing pipeline (3) and second washing pipeline (4) are through external defogging pipeline fixed connection.

2. The electronic-grade sulfur trioxide gas defogging device of claim 1, wherein: the supporting component comprises a supporting plate (13) arranged at the bottom of the movable plate (11), a sliding groove (14) is formed in the top of the supporting plate (13), a sliding block (15) is arranged in the sliding groove (14), the top of the sliding block (15) is fixedly connected with the bottom of the movable plate (11), the supporting plate (13) is fixedly connected with a first flushing pipeline (3) or a second flushing pipeline (4) correspondingly, a supporting column (16) is fixedly connected to the first flushing pipeline (3) and the second flushing pipeline (4), and one end of the supporting column (16) is fixedly connected with the supporting plate (13).

3. The electronic-grade sulfur trioxide gas defogging device of claim 2, wherein: the cross sections of the sliding groove (14) and the sliding block (15) are of T-shaped structures.

4. The electronic-grade sulfur trioxide gas defogging device of claim 1, wherein: the drive assembly is including setting up in rectangle ring (22) at fly leaf (11) top, rectangle ring (22) and fly leaf (11) fixed connection, equal fixedly connected with second fixed plate (17) on first washing pipeline (3) and second washing pipeline (4), one side fixedly connected with motor (18) of second fixed plate (17), the output of motor (18) is equipped with second pivot (19), one end fixedly connected with carousel (20) of second pivot (19), one side fixedly connected with actuating lever (21) of carousel (20), just actuating lever (21) are located rectangle ring (22).

5. The electronic-grade sulfur trioxide gas defogging device of claim 4, wherein: the motor (18) is externally connected with a control switch and a power supply.

Images