CN212530220U

CN212530220U - Film pasting table

Info

Publication number: CN212530220U
Application number: CN202021206558.2U
Authority: CN
Inventors: 程彦; 张成宣; 胡丽兰; 胡龙
Original assignee: Dongguan Siwo Intelligent Equipment Co ltd
Current assignee: Dongguan Siwo Intelligent Equipment Co ltd
Priority date: 2020-06-24
Filing date: 2020-06-24
Publication date: 2021-02-12
Anticipated expiration: 2030-06-24

Abstract

The application discloses a film sticking table, which comprises a fixing mechanism, a lifting mechanism and a first lifting driving mechanism, wherein the lifting mechanism is slidably arranged on the fixing mechanism, and the first lifting driving mechanism is arranged between the fixing mechanism and the lifting mechanism and is used for driving the lifting mechanism to slide relative to the fixing mechanism; the fixing mechanism comprises a fixing frame and a fixing table arranged on the fixing frame, and a first abdicating hole for the lifting mechanism to pass through is formed in the fixing table; the lifting mechanism comprises a lifting frame connected with the output end of the first lifting driving mechanism and a film sticking disc which is arranged on the lifting frame and is positioned in the first yielding hole. For a wafer with a certain thickness, after the wafer is placed on the film pasting table, the first lifting driving mechanism drives the lifting mechanism to ascend or descend by a certain height, so that the upper surface of the wafer is flush with the upper surface of the fixing table, and the next film pasting operation is carried out. Therefore, the film sticking table provided by the embodiment of the application can be adapted to wafers with different thicknesses.

Description

Film pasting table

Technical Field

The application relates to the field of film sticking equipment, in particular to a film sticking table.

Background

Products such as wafers need to be subjected to film pasting treatment in the production process so as to protect the products such as the wafers. The thickness of products such as wafers can be changed in real time along with requirements, and in order to meet the film pasting requirements of wafers with different thicknesses, different film pasting equipment or different film pasting tables are replaced in the conventional mode. This approach is costly and results in a significant reduction in the efficiency of the film application.

SUMMERY OF THE UTILITY MODEL

An object of the application is to provide a pad pasting platform, aims at solving prior art, and the pad pasting platform can't satisfy the problem of the pad pasting demand of the wafer of different thickness.

To achieve the purpose, the embodiment of the application adopts the following technical scheme:

the film sticking table comprises a fixing mechanism, a lifting mechanism and a first lifting driving mechanism, wherein the lifting mechanism is slidably mounted on the fixing mechanism, and the first lifting driving mechanism is mounted between the fixing mechanism and the lifting mechanism and is used for driving the lifting mechanism to slide relative to the fixing mechanism; the fixing mechanism comprises a fixing frame and a fixing table arranged on the fixing frame, and a first abdicating hole for the lifting mechanism to pass through is formed in the fixing table; the lifting mechanism comprises a lifting frame connected with the output end of the first lifting driving mechanism and a film pasting disc arranged on the lifting frame and located in the first yielding hole.

In one embodiment, the surface of the fixed table is provided with a plurality of grooves.

In one embodiment, the surface of the fixing table is provided with a plurality of vacuum holes, and the film pasting table further comprises a vacuum pump communicated with the vacuum holes.

In one embodiment, the lifting mechanism further comprises a first quick-release plate detachably connected with the lifting frame, and a second quick-release plate detachably connected with one side of the first quick-release plate far away from the lifting frame; the film pasting disc is detachably connected to one side, far away from the first quick-release plate, of the second quick-release plate.

In one embodiment, the first lifting driving mechanism comprises a driving motor installed on the fixed frame, a lead screw nut installed on the lifting frame, and a lead screw shaft matched with the lead screw nut and connected with an output shaft of the driving motor.

In one embodiment, the fixing frame comprises a fixing bottom plate and two fixing vertical plates, wherein the fixing bottom plate is positioned on one side of the lifting frame, which is far away from the film sticking disc, and the two fixing vertical plates are connected with the fixing bottom plate; the two fixed vertical plates are opposite and arranged at intervals; the lifting frame is positioned between the two fixed vertical plates.

In one embodiment, a sliding rail is arranged on the surface of the fixed vertical plate opposite to the lifting frame, and a sliding block matched with the sliding rail is arranged on the lifting frame.

In one embodiment, the lifting frame comprises two lifting vertical plates connected with the film sticking disc, and a lifting bottom plate connected between the two lifting vertical plates; the two lifting vertical plates are opposite and arranged at intervals.

In one embodiment, a second abdicating hole is formed in the film sticking disc, a lifting rod is arranged in the second abdicating hole, and a second lifting driving mechanism is arranged between the lifting rod and the lifting bottom plate.

In one embodiment, the second lifting driving mechanism comprises a first lifting cylinder, a first connecting plate arranged at the movable end of the first lifting cylinder, a second lifting cylinder arranged on the first connecting plate, and a second connecting plate arranged at the movable end of the second lifting cylinder; the lifting rod is fixedly connected with the second connecting plate.

The beneficial effects of the embodiment of the application are as follows: and for a wafer with a certain thickness, placing the wafer on the film pasting table, and if the upper surface of the wafer is higher than the upper surface of the fixed table, driving the lifting mechanism to descend by a certain height by the first lifting driving mechanism so as to enable the upper surface of the wafer to be flush with the upper surface of the fixed table, and carrying out the film pasting operation in the next step. If the upper surface of the wafer is lower than the upper surface of the fixed table, the first lifting driving mechanism drives the lifting mechanism to rise by a certain height, so that the upper surface of the wafer is flush with the upper surface of the fixed table, and the next film pasting operation is carried out. Therefore, the film sticking table provided by the embodiment of the application can adapt to wafers with different thicknesses, does not need to replace different film sticking tables to stick films to wafers with different thicknesses, reduces the film sticking cost and accelerates the film sticking efficiency.

Drawings

In order to more clearly illustrate the technical solutions in the embodiments of the present application, the drawings needed to be used in the embodiments or the prior art descriptions will be briefly described below, and it is obvious that the drawings in the following description are only some embodiments of the present application, and it is obvious for those skilled in the art to obtain other drawings without creative efforts.

FIG. 1 is a schematic structural diagram of a film laminating station in an embodiment of the present application;

FIG. 2 is a schematic structural diagram of a lifting mechanism in an embodiment of the present application;

in the figure:

1. a fixing mechanism; 101. a fixed mount; 1011. fixing the bottom plate; 1012. fixing the vertical plate; 1013. a slide rail; 102. a fixed table; 1021. a first abdicating hole; 1022. a groove; 1023. a vacuum hole;

2. a first elevation drive mechanism; 201. a drive motor; 202. a lead screw nut; 203. a screw shaft;

3. a lifting mechanism; 301. a lifting frame; 3011. lifting the vertical plate; 3012. a lifting bottom plate; 3013. a slider; 302. a film pasting disc; 3021. a second abdicating hole; 303. a first quick release plate; 304. a second quick release plate; 305. a lifting rod; 306. a second elevation drive mechanism; 3061. a first lifting cylinder; 3062. a first connecting plate; 3063. a second lifting cylinder; 3064. a second connecting plate.

Detailed Description

In order to make the objects, technical solutions and advantages of the present application more apparent, the present application is described in further detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the present application and are not intended to limit the present application.

It will be understood that when an element is referred to as being "secured to" or "disposed on" another element, it can be directly on the other element or be indirectly on the other element. When an element is referred to as being "connected to" another element, it can be directly connected to the other element or be indirectly connected to the other element.

It will be understood that the terms "length," "width," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," and the like, refer to an orientation or positional relationship illustrated in the drawings for convenience in describing the present application and to simplify description, and do not indicate or imply that the referenced device or element must have a particular orientation, be constructed and operated in a particular orientation, and thus should not be construed as limiting the present application.

Furthermore, the terms "first", "second" and "first" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of the present application, "a plurality" means two or more unless specifically limited otherwise.

The following detailed description of implementations of the present application is provided in conjunction with specific embodiments.

As shown in fig. 1-2, an embodiment of the present application provides a film laminating table, which includes a fixing mechanism 1, a lifting mechanism 3 slidably mounted on the fixing mechanism 1, and a first lifting driving mechanism 2 mounted between the fixing mechanism 1 and the lifting mechanism 3 and used for driving the lifting mechanism 3 to slide relative to the fixing mechanism 1; the fixing mechanism 1 comprises a fixing frame 101 and a fixing table 102 arranged on the fixing frame 101, wherein a first abdicating hole 1021 for the lifting mechanism 3 to pass through is formed in the fixing table 102; the lifting mechanism 3 comprises a lifting frame 301 connected with the output end of the first lifting driving mechanism 2, and a film sticking disc 302 arranged on the lifting frame 301 and positioned in the first abdicating hole 1021.

In the embodiment of the present application, the process of using the film pasting station to paste films on products such as wafers is as follows: the wafer is placed on the pad 302 to cover the stage 102 and the pad 302, and in order to ensure the pad effect, the upper surface of the wafer needs to be flush with the upper surface of the stage 102. After a wafer with a certain thickness is placed on the film pasting table, if the upper surface of the wafer is higher than the upper surface of the fixed table 102, the first lifting driving mechanism 2 drives the lifting mechanism 3 to descend by a certain height, so that the upper surface of the wafer is flush with the upper surface of the fixed table 102, and the next film pasting operation is performed. If the upper surface of the wafer is lower than the upper surface of the fixed stage 102, the first lifting driving mechanism 2 drives the lifting mechanism 3 to ascend by a certain height, so that the upper surface of the wafer is flush with the upper surface of the fixed stage 102, and the next film pasting operation is performed. Therefore, the film sticking table provided by the embodiment of the application can adapt to wafers with different thicknesses, does not need to replace different film sticking tables to stick films to wafers with different thicknesses, reduces the film sticking cost and accelerates the film sticking efficiency.

Referring to fig. 1-2, as another embodiment of the film laminating table provided by the present application, a plurality of grooves 1022 are formed on the surface of the fixing table 102, the surface of the film has glue, and the arrangement of the grooves 1022 can reduce the sticking capability of the film to the fixing table 102, so that after the film laminating is completed, the waste film not in contact with the wafer can be collected and not stick to the surface of the fixing table 102 tightly.

Referring to fig. 1-2, as another embodiment of the film laminating station provided by the present application, a plurality of vacuum holes 1023 are formed on the surface of the fixing station 102, and the film laminating station further includes a vacuum pump communicated with the vacuum holes 1023. The tension film is uniformly adsorbed, the flatness of the film is ensured, and the film which is not adhered to the wafer is conveniently cut subsequently.

Referring to fig. 1-2, as another embodiment of the film laminating table provided in the present application, the lifting mechanism 3 further includes a first quick release plate 303 detachably connected to the lifting frame 301, and a second quick release plate 304 detachably connected to a side of the first quick release plate 303 away from the lifting frame 301; the film pasting disk 302 is detachably connected to one side of the second quick release plate 304 away from the first quick release plate 303. That is, the lifting mechanism 3 can be formed by assembling the lifting frame 301, the first quick-release plate 303, the second quick-release plate 304 and the film pasting disk 302, and the first quick-release plate 303, the second quick-release plate 304 and the film pasting disk 302 with different thicknesses can be replaced according to requirements so as to adapt to different film pasting requirements.

Referring to fig. 1-2, as another embodiment of the film laminating table provided by the present application, the first lifting driving mechanism 2 includes a driving motor 201 installed on the fixing frame 101, a lead screw nut 202 installed on the lifting frame 301, and a lead screw shaft 203 engaged with the lead screw nut 202 and connected to an output shaft of the driving motor 201. The driving motor 201 drives the screw shaft 203 to rotate, and then the lifting motion of the lifting frame 301 connected with the screw nut 202 is realized. Of course, in other embodiments, the first lifting driving mechanism 2 may also be a driving mechanism composed of a mechanism such as an air cylinder.

Referring to fig. 1-2, as another embodiment of the film laminating table provided by the present application, the fixing frame 101 includes a fixing bottom plate 1011 located on a side of the lifting frame 301 away from the film laminating plate 302, and two fixing vertical plates 1012 connected to the fixing bottom plate 1011; the two fixed vertical plates 1012 are opposite and arranged at intervals; the lifting frame 301 is positioned between the two fixed vertical plates 1012, so that the two fixed vertical plates 1012 can perform limiting and guiding functions on the lifting frame 301, and the lifting frame 301 is not easy to deviate from a preset position in the lifting process.

Referring to fig. 1-2, as another embodiment of the film pasting table provided by the present application, a slide rail 1013 is disposed on a surface of the fixed vertical plate 1012 opposite to the lifting frame 301, a slide block 3013 matched with the slide rail 1013 is disposed on the lifting frame 301, and the lifting frame 301 has a guiding function of the slide block 3013 and the slide rail 1013 during a lifting process, so that the lifting process can be more stable.

Referring to fig. 1-2, as another embodiment of the film sticking table provided by the present application, the lifting frame 301 includes two lifting vertical plates 3011 connected to the film sticking disc 302, and a lifting bottom plate 3012 connected between the two lifting vertical plates 3011; the two lifting vertical plates 3011 are arranged oppositely and at intervals, and can support the film pasting disk 302 well.

Referring to fig. 1-2, as another embodiment of the film pasting table provided in the present application, a second yielding hole 3021 is formed on the film pasting disk 302, a lifting rod 305 is disposed in the second yielding hole 3021, and a second lifting driving mechanism 306 is disposed between the lifting rod 305 and the lifting bottom plate 3012. The second lifting driving mechanism 306 can drive the lifting rod 305 to rise to protrude out of the surface of the film pasting disk 302 to receive the wafer to be pasted, and then the lifting rod 305 descends to make the wafer reach the surface of the film pasting disk 302.

Referring to fig. 1-2, as another embodiment of the film laminating table provided by the present application, the second lifting driving mechanism 306 includes a first lifting cylinder 3061, a first connecting plate 3062 disposed at a movable end of the first lifting cylinder 3061, a second lifting cylinder 3063 mounted on the first connecting plate 3062, and a second connecting plate 3064 disposed at a movable end of the second lifting cylinder 3063; the lifting rod 305 is fixedly connected to the second connecting plate 3064. The first lifting cylinder 3061 can be installed on the first quick detach plate 303 through the adapter rod, the cooperation of the first lifting cylinder 3061 and the second lifting cylinder 3063, and the lifting rod 305 is driven to a sufficient height.

It is to be understood that aspects of the present invention may be practiced otherwise than as specifically described.

It should be understood that the above examples are merely examples for clearly illustrating the present application, and are not intended to limit the embodiments of the present application. Other variations and modifications will be apparent to persons skilled in the art in light of the above description. And are neither required nor exhaustive of all embodiments. Any modification, equivalent replacement, and improvement made within the spirit and principle of the present application shall be included in the protection scope of the claims of the present application.

Claims

1. The film sticking table is characterized by comprising a fixing mechanism, a lifting mechanism and a first lifting driving mechanism, wherein the lifting mechanism is slidably arranged on the fixing mechanism, and the first lifting driving mechanism is arranged between the fixing mechanism and the lifting mechanism and is used for driving the lifting mechanism to slide relative to the fixing mechanism; the fixing mechanism comprises a fixing frame and a fixing table arranged on the fixing frame, and a first abdicating hole for the lifting mechanism to pass through is formed in the fixing table; the lifting mechanism comprises a lifting frame connected with the output end of the first lifting driving mechanism and a film pasting disc arranged on the lifting frame and located in the first yielding hole.

2. The film laminating table of claim 1, wherein the surface of the fixing table is provided with a plurality of grooves.

3. The lamination table according to claim 1, wherein the surface of the fixing table is provided with a plurality of vacuum holes, and the lamination table further comprises a vacuum pump communicated with the vacuum holes.

4. The film sticking table according to claim 1, wherein the lifting mechanism further comprises a first quick-release plate detachably connected with the lifting frame, and a second quick-release plate detachably connected with one side of the first quick-release plate far away from the lifting frame; the film pasting disc is detachably connected to one side, far away from the first quick-release plate, of the second quick-release plate.

5. The film laminating table according to claim 1, wherein the first lifting driving mechanism comprises a driving motor installed on the fixing frame, a lead screw nut installed on the lifting frame, and a lead screw shaft matched with the lead screw nut and connected with an output shaft of the driving motor.

6. The film sticking table according to claim 1, wherein the fixing frame comprises a fixing bottom plate positioned on one side of the lifting frame far away from the film sticking disc, and two fixing vertical plates connected with the fixing bottom plate; the two fixed vertical plates are opposite and arranged at intervals; the lifting frame is positioned between the two fixed vertical plates.

7. The film sticking table according to claim 6, wherein a slide rail is arranged on the surface of the fixed vertical plate opposite to the lifting frame, and a slide block matched with the slide rail is arranged on the lifting frame.

8. The film sticking table according to any one of claims 1 to 7, wherein the lifting frame comprises two lifting vertical plates connected with the film sticking disc, and a lifting bottom plate connected between the two lifting vertical plates; the two lifting vertical plates are opposite and arranged at intervals.

9. The film sticking table according to claim 8, wherein a second abdicating hole is formed in the film sticking disc, a lifting rod is arranged in the second abdicating hole, and a second lifting driving mechanism is arranged between the lifting rod and the lifting bottom plate.

10. The film laminating table according to claim 9, wherein the second lifting driving mechanism comprises a first lifting cylinder, a first connecting plate arranged at the movable end of the first lifting cylinder, a second lifting cylinder arranged on the first connecting plate, and a second connecting plate arranged at the movable end of the second lifting cylinder; the lifting rod is fixedly connected with the second connecting plate.