CN212505040U - Switching device of arc power supply for vacuum coating equipment - Google Patents
Switching device of arc power supply for vacuum coating equipment Download PDFInfo
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- CN212505040U CN212505040U CN202020632617.6U CN202020632617U CN212505040U CN 212505040 U CN212505040 U CN 212505040U CN 202020632617 U CN202020632617 U CN 202020632617U CN 212505040 U CN212505040 U CN 212505040U
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- evaporation source
- arc power
- power supply
- vacuum coating
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Abstract
The utility model discloses a switching device of arc power supply for vacuum coating equipment, wherein the vacuum coating equipment is provided with a vacuum chamber, three rows of evaporation sources are fixedly arranged in the vacuum chamber, each row of evaporation source group respectively comprises 4 evaporation sources which form four rows of evaporation source groups, the anode of the arc power supply is electrically connected with the vacuum chamber, each row of evaporation source group in the two rows of evaporation source groups is respectively and electrically connected with the cathode of one arc power supply, each evaporation source in the remaining two rows of evaporation source groups is respectively and electrically connected with the cathode of the arc power supply which is in one-to-one correspondence with the evaporation source, a parallel branch circuit and an arc power supply are formed, the evaporation source and the vacuum chamber form a loop, each arc power supply and a parallel branch of the evaporation source corresponding to the arc power supply are respectively provided with a contactor, the signal input ends of the contactors are respectively and electrically connected with a relay, and the signal input ends of the relays are electrically connected to the signal output end of the control device. The utility model has the advantages of saving cost, reducing volume and weight of the vacuum coating equipment.
Description
Technical Field
The utility model relates to a coating equipment field, in particular to switching device of arc power for vacuum coating equipment.
Background
The vacuum coating equipment is generally provided with a plurality of rows (2-4) of evaporation sources, wherein 1 row of evaporation sources is used for etching cleaning, the other rows (1-3) are used for coating, each 1 row of evaporation sources comprises arc power supplies corresponding to the number of the evaporation sources, and each evaporation source is respectively connected with one arc power supply to provide power for each evaporation source.
However, each arc source has a length of 600mm, a width of 800mm and a height of 300 mm. Each additional arc power supply adds to the cost of the vacuum coating apparatus, as well as to the volume, floor space, and weight of the apparatus.
SUMMERY OF THE UTILITY MODEL
The utility model aims at providing a switching device of arc power for vacuum coating equipment has the advantage of practicing thrift the cost, reducing vacuum coating equipment volume and weight.
The above technical purpose of the present invention can be achieved by the following technical solutions:
a switching device of arc power supply for vacuum coating equipment comprises vacuum coating equipment, a three-line evaporation source group, a control device, a plurality of arc power supplies, a contactor and a relay;
the vacuum coating equipment is provided with a vacuum chamber, three rows of evaporation sources are fixedly arranged in the vacuum chamber, each row of evaporation source group respectively comprises 4 evaporation sources, four rows of evaporation source groups are formed by the evaporation sources in a conformal mode, the positive electrode of the arc power supply is electrically connected with the vacuum chamber, each row of evaporation source group in two rows of evaporation source groups is electrically connected with the negative electrode of one arc power supply, each evaporation source in the remaining two rows of evaporation source groups is electrically connected with the negative electrode of the arc power supply in one-to-one correspondence with the evaporation source to form a parallel branch, the arc power supply, the evaporation sources and the vacuum chamber form a loop, each arc power supply and the parallel branch of the corresponding evaporation source are respectively provided with a contactor, the signal input ends of a plurality of contactors are respectively electrically connected with relays, and the signal input ends of a plurality of relays are all.
The preferred scheme is as follows:
preferably: and each evaporation source in each row of evaporation sources is opened simultaneously. The evaporation sources in each column are simultaneously opened, so that the control device can conveniently control the evaporation sources.
Preferably: the contactor is a permanent magnet contactor. The permanent magnetic contactor is a micro-power consumption contactor formed by using the principle that like poles repel and opposite poles attract of magnetic poles and replacing a traditional electromagnet driving mechanism with a permanent magnet driving mechanism, and the micro-power consumption of the permanent magnetic contactor can save energy for vacuum coating equipment.
Preferably: the relay is an electromagnetic relay. The electromagnetic relay works by utilizing the suction force generated between an electromagnet iron core and an armature by current in an input circuit, and saves energy for vacuum coating equipment.
Preferably: the control device is a PLC control device. The PLC is a digital operation controller with a microprocessor and used for automatic control, control instructions can be loaded into a memory at any time for storage and execution, the PLC is used for field control, and the PLC is connected with an upper computer or a touch screen, so that the current value of field data can be observed, and statistical analysis can be performed in time.
To sum up, the utility model discloses following beneficial effect has:
through the arrangement of the relay and the contactor, better effects of a protection circuit and a control circuit can be achieved; through the setting of PLC, can play better control circuit's effect. The utility model has the advantages of saving cost, reducing volume and weight of the vacuum coating equipment.
Drawings
Fig. 1 is a block schematic diagram of the present embodiment.
In the figure, 1, a vacuum coating device; 2. an evaporation source; 3. a control device; 4. an arc power supply; 5. a contactor; 6. a relay; 111. a vacuum chamber.
Detailed Description
The present invention will be described in further detail with reference to the accompanying drawings.
In which like parts are designated by like reference numerals. It should be noted that the terms "front," "back," "left," "right," "upper" and "lower" used in the following description refer to directions in the drawings, and the terms "bottom" and "top," "inner" and "outer" refer to directions toward and away from, respectively, the geometric center of a particular component.
As shown in fig. 1, a switching device of arc power supply for vacuum coating apparatus includes a vacuum coating apparatus 1, three rows of evaporation source sets, a control device 3 and 9 arc power supplies 4, a vacuum chamber 111 is provided in the vacuum coating apparatus 1, the three rows of evaporation source sets are arranged in the vacuum chamber 111, each row of evaporation source set includes 4 evaporation sources 2, four rows of evaporation source sets are formed, one row of evaporation source set is used for etching cleaning, the other three rows of evaporation source sets are used for coating, 9 arc power supplies 4 are installed on the vacuum coating apparatus 1, the arc power supplies 4 have a length of 600mm, a width of 800mm and a height of 300mm, the specific size of the arc power supplies 4 facilitates installation of the arc power supplies 4, and the vacuum coating apparatus 1 can be allowed to leave the position for installing the arc power supplies 4. The positive pole of the arc power supply 4 is electrically connected with the vacuum chamber 111, each evaporation source group in two rows of evaporation source groups is respectively and electrically connected with the negative pole of one arc power supply 4, one evaporation source group in two rows of evaporation source groups is used for etching and cleaning, the other evaporation source group in two rows of evaporation source groups is used for coating, each evaporation source 2 in the remaining two rows of evaporation source groups is respectively and electrically connected with the negative pole of the arc power supply 4 which is in one-to-one correspondence with the evaporation source group, the arc power supply 4, the evaporation source 2 and the vacuum chamber 111 form a loop, the arc power supply 4 and the evaporation source 2 form, thus, each vacuum coating equipment can save 3 arc power supplies 4, if the evaporation source 2 is continuously added, the amount of arc power supply 4 used can be reduced continuously, the cost and volume for each vacuum equipment can be reduced, and in the case of mass production, the use of more arc power supplies 4 can be saved and, at the same time, the resources and space of the vacuum control equipment are saved.
Each arc power 4 and the parallel branch of the evaporation source 2 corresponding to the arc power are provided with a contactor 5, when the coil of the contactor 5 is electrified, the coil current can generate a magnetic field, the generated magnetic field enables the static iron core to generate electromagnetic attraction to attract the movable iron core and drive the alternating current contactor to act, the normally closed contact is opened, the normally open contact is closed, the normally open contact and the normally open contact are linked, when the coil is powered off, the electromagnetic attraction disappears, the armature is released under the action of the release spring, the contact is restored, the normally open contact is opened, the normally closed contact is closed, in order to achieve the energy-saving effect, the permanent magnet contactor is used, the permanent magnet contactor utilizes the principle that like poles repel each other and opposite poles attract each other of magnetic poles, and replaces the traditional electromagnet driving mechanism with a permanent magnet. The signal input part of every contactor 5 electric connection has the signal output part of relay 6 respectively, this relay 6 is electromagnetic relay, it is the relay that utilizes the suction effect that the inner current of input circuit produced between electromagnet core and armature to work, it is energy-conserving for vacuum coating equipment, the signal input part of every relay 6 is connected to controlling means 3's signal output part jointly, this controlling means 3 is PLC controlling means, PLC is a digital operation controller who is used for automated control who has microprocessor, can load control command into the memory at any time and store and carry out, be used for field control with PLC, be connected PLC with upper computer or touch-sensitive screen, the current value that both can observe field data, can in time carry out statistical analysis again, PLC's basic structure does: the device comprises a power supply, a central processing unit, a memory, an input unit and an output unit; the power supply is used for converting alternating current into direct current required by the interior of the PLC, and most of the PLCs adopt a switch type voltage-stabilized power supply to supply power at present; the Central Processing Unit (CPU) is the control center of PLC, also the core component of PLC, its performance has determined the performance of PLC, the central processing unit is made up of controller, arithmetic unit and register, these circuits are all concentrated on a chip, couple to input/output interface circuit of the memorizer through the address bus, control bus, the role of the central processing unit is to process and run the user program, carry on logic and mathematical operation, control the whole system to make it coordinate; the memory is a semiconductor circuit having a memory function, and functions to store a system program, a user program, a logic variable, and other information. The system program is a program for controlling the PLC to realize various functions, is compiled by a PLC manufacturer and is solidified into a Read Only Memory (ROM), and cannot be accessed by a user; the input unit is an input interface connected with the controlled device by the PLC, is a bridge for signals to enter the PLC, and is used for receiving signals transmitted by the master element and the detection element. The input types include direct current input, alternating current input and alternating current/direct current input; the output unit is also a connecting component between the PLC and the controlled equipment, and is used for transmitting an output signal of the PLC to the controlled equipment, namely converting a weak current signal sent by the central processing unit into a level signal to drive an execution element of the controlled equipment.
The specific implementation process comprises the following steps:
the PLC control device sends an etching cleaning opening signal to a signal input end of a relay 6 of an evaporation source 2 for etching cleaning through an output unit, the relay 6 is connected, the opening signal is transmitted to a contactor 5 of the evaporation source 2 for etching cleaning through a signal output end, the contactor 5 is connected, an arc power supply 4 and a vacuum chamber 111 form a complete loop, a column of evaporation sources 2 for etching cleaning work, when coating is needed, the PLC first controls the relay 6 to be disconnected, the contactor 5 is disconnected therewith, meanwhile, the PLC sends a coating opening signal to the signal input end of the relay 6 of the evaporation source 2 for coating through the output unit, the relay 6 is connected, the opening signal is transmitted to the contactor 5 of the evaporation source 2 for coating through the signal output end, the contactor 5 is connected, and the arc power supply 4 and the vacuum chamber 111 form a complete loop, the evaporation source 2 for the coating works.
The present embodiment is only for explaining the present invention, and it is not limited to the present invention, and those skilled in the art can make modifications to the present embodiment without inventive contribution as required after reading the present specification, but all of them are protected by patent laws within the scope of the claims of the present invention.
Claims (5)
1. The utility model provides a switching device of arc power for vacuum coating equipment which characterized in that: the device comprises vacuum coating equipment (1), three rows of evaporation source groups, a control device (3), a plurality of arc power supplies (4), a contactor (5) and a relay (6);
the vacuum coating equipment (1) is provided with a vacuum chamber (111), three evaporation sources (2) are fixedly arranged in the vacuum chamber (111), each evaporation source group respectively comprises 4 evaporation sources (2) which form four rows of evaporation source groups, the positive pole of each arc power supply (4) is electrically connected with the vacuum chamber (111), each evaporation source group in the two rows of evaporation source groups is respectively and electrically connected with the negative pole of one arc power supply (4), each evaporation source (2) in the remaining two rows of evaporation source groups is respectively and electrically connected with the negative pole of the arc power supply (4) which corresponds to the evaporation source group one by one to form a parallel branch, the arc power supplies (4), the evaporation sources (2) and the vacuum chamber (111) form a loop, each arc power supply (4) and the corresponding evaporation source (2) are respectively provided with a contactor (5) on the parallel branch, and the signal input ends of a plurality of the contactors (5) are respectively and electrically connected with a relay (6), the signal input ends of the relays (6) are electrically connected to the signal output end of the control device (3).
2. The switching device of an arc power supply for a vacuum coating apparatus according to claim 1, wherein: each evaporation source (2) in each column of evaporation sources (2) is turned on simultaneously.
3. The switching device of an arc power supply for a vacuum coating apparatus according to claim 1, wherein: the contactor (5) is a permanent magnet contactor.
4. The switching device of an arc power supply for a vacuum coating apparatus according to claim 1, wherein: the relay (6) is an electromagnetic relay.
5. The switching device of an arc power supply for a vacuum coating apparatus according to claim 1, wherein: the control device (3) is a PLC control device.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202020632617.6U CN212505040U (en) | 2020-04-23 | 2020-04-23 | Switching device of arc power supply for vacuum coating equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202020632617.6U CN212505040U (en) | 2020-04-23 | 2020-04-23 | Switching device of arc power supply for vacuum coating equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN212505040U true CN212505040U (en) | 2021-02-09 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202020632617.6U Active CN212505040U (en) | 2020-04-23 | 2020-04-23 | Switching device of arc power supply for vacuum coating equipment |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN212505040U (en) |
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2020
- 2020-04-23 CN CN202020632617.6U patent/CN212505040U/en active Active
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