CN212471890U - Forming die of plane ceramic target - Google Patents
Forming die of plane ceramic target Download PDFInfo
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- CN212471890U CN212471890U CN202020317375.1U CN202020317375U CN212471890U CN 212471890 U CN212471890 U CN 212471890U CN 202020317375 U CN202020317375 U CN 202020317375U CN 212471890 U CN212471890 U CN 212471890U
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Abstract
The utility model discloses a forming die of plane ceramic target. The die comprises a steel die, a flexible die sleeve and a flexible plate, wherein the steel die comprises an upper steel cover and a lower steel cover, the upper steel cover and the lower steel cover are installed and combined to form a cavity body, the flexible die sleeve is installed at two ends of the steel die and matched and sealed with the steel die, the flexible plate is formed by combining an upper rubber plate and a lower rubber plate and is arranged in the cavity body of the steel die, and the cavity body formed among the upper rubber plate, the lower rubber plate and the flexible die sleeve is a powder filling cavity; the Shore hardness of the flexible die sleeve is 40-90 degrees, and the Shore hardness of the flexible plate is 20-60 degrees. Utilize the utility model discloses a mould carries out cold isostatic pressing shaping to the granulation powder, can obtain the smooth ceramic target unburned bricks of size rule, can obtain the target of high compactness through the sintering, has reduced the fashioned process of hydraulic press in the ceramic target production process, has reduced equipment and oil pressure mould's input, has also reduced the risk that the fracture appears in ceramic target unburned bricks in handling simultaneously.
Description
Technical Field
The utility model relates to a ceramic target shaping technical field, concretely relates to forming die of plane ceramic target.
Background
At present, the forming method of the ceramic rotary target blank mainly comprises an extrusion method, in-situ colloidal solidification forming, slip casting forming and cold isostatic pressing forming. The extrusion method, the in-situ colloidal solidification forming and the slip casting forming can be formed with near net size, and have certain advantages in the aspect of manufacturing special-shaped pieces. However, the green body obtained by the extrusion method contains a large amount of organic matters and water, and is difficult to sinter and compact; the in-situ colloidal solidification forming also contains a large amount of organic matters and water, the large-size forming is easy to crack when dried, and the ultrahigh density is difficult to obtain; the grouting forming has strict requirements on the granularity and distribution of powder, slurry and a porous mould, the drying control of a green body is strict, and the technical difficulty is higher.
However, all the processes adopting the cold isostatic pressing method at present are subjected to mould pressing one-step forming by an oil press, and then are subjected to secondary forming by the cold isostatic pressing machine to obtain a target green body, but the forming method has the following defects: 1) the process is complicated, and the mould pressing and then the cold isostatic pressing are needed; 2) although the size of the molded green body is regular, the density uniformity of the green body is poor, and when the green body is subjected to the cold isostatic pressing process, the target material can be bent, deformed or cracked due to the fact that the pressure of the cold isostatic pressing is equal to 360 degrees; 3) the green body after one-time compression molding is not high in strength, and the green body is particularly easy to crack in the carrying process; 4) oil press equipment and dies used for cold isostatic pressing are expensive, and the production process consumes time, labor, electricity and the like; 5) the mould that present shaping was used is generally square, and difficult making special-shaped mould, special-shaped target can only rely on later stage cutting, has more leftover bits extravagant.
SUMMERY OF THE UTILITY MODEL
An object of the utility model is to overcome prior art's weak point and provide a forming die of plane ceramic target, utilize this mould to carry out cold isostatic pressing shaping to the granulation powder, can obtain the smooth ceramic target unburned bricks of size rule, again through the sintering can obtain the target of high compactness, reduced the fashioned process of hydraulic press in the ceramic target production process, reduced equipment and hydraulic mould's input, also reduced the risk that ceramic target unburned bricks appear the fracture in handling simultaneously.
In order to achieve the purpose, the utility model adopts the following technical scheme:
a forming die for a planar ceramic target comprises a steel die, a flexible die sleeve and a flexible plate, wherein the steel die comprises an upper steel cover and a lower steel cover, the upper steel cover and the lower steel cover are installed and combined to form a cavity body, the flexible die sleeve is installed at two ends of the steel die and matched and sealed with the steel die, the flexible plate is formed by combining an upper rubber plate and a lower rubber plate and is arranged in the cavity body of the steel die, and a cavity body formed among the upper rubber plate, the lower rubber plate and the flexible die sleeve is a powder filling cavity; the Shore hardness of the flexible die sleeve is 40-90 degrees, and the Shore hardness of the flexible plate is 20-60 degrees.
The utility model discloses a mould is by the steel mould, flexible die sleeve and flexible sheet combination obtain, and through the hardness of experimental preferred flexible die sleeve and flexible die sleeve, utilize this mould to carry out cold isostatic pressing shaping to the granulation powder, can obtain the smooth ceramic target unburned bricks of size rule, reduce the bending, defect such as deformation or fracture, can obtain the target of high compactness through the sintering again, the fashioned process of hydraulic press has been reduced in the ceramic target production process, the input of equipment and oil pressure mould has been reduced, the risk that ceramic target unburned bricks appear the fracture in handling has also been reduced simultaneously, the yield is high.
The utility model discloses well powder filling cavity is square cavity or special-shaped cavity.
Preferably, the Shore hardness of the flexible die sleeve is 60-80 degrees, so that the defects of surface pits, a head-shrinking and other pressing of the target green body can be eliminated, and the compactness of the target green body can be improved.
Preferably, the Shore hardness of the flexible plate is 30-40 degrees, which is more beneficial to improving the compactness of the target green body.
Preferably, the surface roughness of the flexible plate is less than 3.2 μm, and the roughness of the flexible plate is reduced as much as possible, so that the surface of the target green compact after cold isostatic pressing is smooth.
Preferably, both ends of steel mould all are equipped with the recess, flexible die sleeve installs in the recess.
Preferably, the parallelism of the processing of the two end surfaces of the flexible die sleeve is less than 0.5mm, which is beneficial to the consistent thickness of the ceramic target green body after cold isostatic pressing. The two end surfaces of the flexible die sleeve refer to the surface of the flexible die sleeve, which is in contact with the powder filling cavity, and the surface of the flexible die sleeve, which is close to the powder filling cavity.
Preferably, the thickness of the flexible plate is 5-15mm, which is beneficial to improving the compactness of the target green body.
Preferably, the flexible die sleeve and the flexible plate are made of silicon rubber or polyurethane, and preferably made of polyurethane.
The method for forming the planar ceramic target by using the die comprises the following steps:
(1) assembling a lower steel cover, a lower rubber plate and a flexible die sleeve in the die to form a powder filling cavity;
(2) filling the granulation powder into the assembled powder filling cavity, and scraping the surface of the powder filling cavity;
(3) sequentially assembling an upper rubber plate and an upper steel cover;
(4) and placing the assembled die and the granulated powder filled in the die into a cold isostatic press for pressing and molding, wherein the cold isostatic press pressure is 100-300MPa, and demolding to obtain the target green body.
The utility model discloses an among the forming method of plane target, directly arrange cold isostatic press built-in behind the mould with the granulation powder filling and press the shaping, need not to carry out a compression moulding in advance, production simple process.
Preferably, the cold isostatic pressing pressure is 200-270Mpa, which is beneficial to reducing the deformation degree of the blank after cold pressing and improving the density of the target material.
Compared with the prior art, the beneficial effects of the utility model are that:
the utility model discloses a mould simple structure makes simply, and is with low costs, is convenient for process into opposite sex mould. Utilize the utility model discloses a mould carries out cold isostatic pressing shaping, has reduced the process of hydraulic press mould pressing one shot forming and transport, has reduced equipment and oil pressure mould's input, shortens production cycle, improves production efficiency, has reduced the risk that ceramic target unburned bricks ftracture appears in handling, can obtain the ceramic target unburned bricks that the size rule is level and smooth, can obtain the target product of high compactness again through the sintering, is favorable to improving the yield and the rate of material collection of product.
Drawings
Fig. 1 is a schematic structural diagram of a forming die for a planar ceramic target of the present invention, 1-upper steel cover, 2-lower steel cover, 3-upper rubber plate, 4-lower rubber plate, 5-flexible die sleeve, and 6-powder filling cavity.
Detailed Description
To better illustrate the objects, aspects and advantages of the present invention, the present invention will be further described with reference to specific embodiments. It will be understood by those skilled in the art that the specific embodiments described herein are merely illustrative of the invention and are not intended to limit the invention.
In the examples, the experimental methods used were all conventional methods unless otherwise specified, and the materials, reagents and the like used were commercially available without otherwise specified.
Example 1
A forming die for a planar ceramic target material is shown in figure 1 and comprises a steel die, a flexible die sleeve and a flexible plate, wherein the steel die comprises an upper steel cover 1 and a lower steel cover 2, the upper steel cover 1 and the lower steel cover 2 are installed and combined to form a cavity body, the upper steel cover 1 and the lower steel cover 2 are both made of 45# steel, grooves are formed in two ends of the steel die, the flexible die sleeve is installed in the grooves and matched and sealed with the steel die, the flexible plate is formed by combining an upper rubber plate 3 and a lower rubber plate 4 and is arranged in the cavity body in the steel die, a cavity body formed among the upper rubber plate 3, the lower rubber plate 4 and the flexible die sleeve 5 is a powder filling cavity 6, and the powder filling cavity 6 is a square cavity body; the flexible die sleeve 5 is made of polyurethane, and the Shore hardness is 40 degrees; the flexible board is made of polyurethane, the Shore hardness is 60 degrees, the thickness is 10mm, and the surface roughness is less than 3.2 microns; the parallelism of the processing of the two end surfaces of the flexible die sleeve 5 is less than 0.5 mm.
A forming method of a planar ceramic target comprises the following steps:
(1) assembling a lower steel cover, a lower rubber plate and a flexible die sleeve in the die to form a powder filling cavity;
(2) in is mixed with2O3：SnO2Filling ITO granulation powder with the component ratio of 90:10 into the assembled powder filling cavity, and scraping the surface of the powder filling cavity;
(3) sequentially assembling an upper rubber plate and an upper steel cover;
(4) placing the assembled mould and the granulated powder filled in the mould into a cold isostatic press for pressing and forming, wherein the cold isostatic press pressure is 200MPa, and demoulding after pressure relief to obtain a target green body;
(5) and (3) sintering the target green body in a sintering furnace at 1550 ℃ for 30 hours to obtain the sintered compact target.
Example 2
A forming die for a planar ceramic target material is shown in figure 1 and comprises a steel die, a flexible die sleeve and a flexible plate, wherein the steel die comprises an upper steel cover 1 and a lower steel cover 2, the upper steel cover 1 and the lower steel cover 2 are installed and combined to form a cavity body, the upper steel cover 1 and the lower steel cover 2 are both made of 304 stainless steel, grooves are formed in two ends of the steel die, the flexible die sleeve is installed in the grooves and matched and sealed with the steel die, the flexible plate is formed by combining an upper rubber plate 3 and a lower rubber plate 4 and is arranged in the cavity body in the steel die, a cavity body formed among the upper rubber plate 3, the lower rubber plate 4 and the flexible die sleeve 5 is a powder filling cavity body 6, and the powder filling cavity body 6 is a square cavity body; the flexible die sleeve 5 is made of polyurethane, and the Shore hardness is 60 degrees; the flexible board is made of polyurethane, the Shore hardness is 40 degrees, the thickness is 10mm, and the surface roughness is less than 3.2 microns; the parallelism of the processing of the two end surfaces of the flexible die sleeve 5 is less than 0.5 mm.
A forming method of a planar ceramic target comprises the following steps:
(1) assembling a lower steel cover, a lower rubber plate and a flexible die sleeve in the die to form a powder filling cavity;
(2) in is mixed with2O3：SnO2Filling ITO granulation powder with the component ratio of 90:10 into the assembled powder filling cavity, and scraping the surface of the powder filling cavity;
(3) sequentially assembling an upper rubber plate and an upper steel cover;
(4) placing the assembled mould and the granulated powder filled in the mould into a cold isostatic press for pressing and forming, wherein the cold isostatic press pressure is 230MPa, and demoulding after pressure relief to obtain a target green body;
(5) and (3) sintering the target green body in a sintering furnace at 1550 ℃ for 30 hours to obtain the sintered compact target.
Example 3
A forming die for a planar ceramic target material is shown in figure 1 and comprises a steel die, a flexible die sleeve and a flexible plate, wherein the steel die comprises an upper steel cover 1 and a lower steel cover 2, the upper steel cover 1 and the lower steel cover 2 are installed and combined to form a cavity body, the upper steel cover 1 and the lower steel cover 2 are both made of 45# steel, grooves are formed in two ends of the steel die, the flexible die sleeve is installed in the grooves and matched and sealed with the steel die, the flexible plate is formed by combining an upper rubber plate 3 and a lower rubber plate 4 and is arranged in the cavity body in the steel die, a cavity body formed among the upper rubber plate 3, the lower rubber plate 4 and the flexible die sleeve 5 is a powder filling cavity body 6, and the powder filling cavity body 6 is a square cavity body; the flexible die sleeve 5 is made of polyurethane, and the Shore hardness is 80 degrees; the flexible board is made of polyurethane, the Shore hardness is 30 degrees, the thickness is 10mm, and the surface roughness is less than 3.2 microns; the parallelism of the processing of the two end surfaces of the flexible die sleeve 5 is less than 0.5 mm.
A forming method of a planar ceramic target comprises the following steps:
(1) assembling a lower steel cover, a lower rubber plate and a flexible die sleeve in the die to form a powder filling cavity;
(2) in is mixed with2O3：SnO2Filling ITO granulation powder with the component ratio of 90:10 into the assembled powder filling cavity, and scraping the surface of the powder filling cavity;
(3) sequentially assembling an upper rubber plate and an upper steel cover;
(4) placing the assembled mould and the granulated powder filled in the mould into a cold isostatic press for pressing and forming, wherein the cold isostatic press pressure is 270MPa, and demoulding after pressure relief to obtain a target green body;
(5) and (3) sintering the target green body in a sintering furnace at 1550 ℃ for 30 hours to obtain the sintered compact target.
Example 4
A forming die for a planar ceramic target material is shown in figure 1 and comprises a steel die, a flexible die sleeve and a flexible plate, wherein the steel die comprises an upper steel cover 1 and a lower steel cover 2, the upper steel cover 1 and the lower steel cover 2 are installed and combined to form a cavity body, the upper steel cover 1 and the lower steel cover 2 are both made of TA1, grooves are formed in two ends of the steel die, the flexible die sleeve is installed in the grooves and matched and sealed with the steel die, the flexible plate is formed by combining an upper rubber plate 3 and a lower rubber plate 4 and is arranged in the cavity body in the steel die, a cavity body formed among the upper rubber plate 3, the lower rubber plate 4 and the flexible die sleeve 5 is a powder filling cavity 6, and the powder filling cavity 6 is a square cavity body; the flexible die sleeve 5 is made of polyurethane, and the Shore hardness is 90 degrees; the flexible board is made of polyurethane, the Shore hardness is 20 degrees, the thickness is 10mm, and the surface roughness is less than 3.2 microns; the parallelism of the processing of the two end surfaces of the flexible die sleeve 5 is less than 0.5 mm.
A forming method of a planar ceramic target comprises the following steps:
(1) assembling a lower steel cover, a lower rubber plate and a flexible die sleeve in the die to form a powder filling cavity;
(2) in is mixed with2O3：SnO2Filling ITO granulation powder with the component ratio of 90:10 into the assembled powder filling cavity, and scraping the surface of the powder filling cavity;
(3) sequentially assembling an upper rubber plate and an upper steel cover;
(4) placing the assembled mould and the granulated powder filled in the mould into a cold isostatic press for pressing and forming, wherein the cold isostatic press pressure is 200MPa, and demoulding after pressure relief to obtain a target green body;
(5) and (3) sintering the target green body in a sintering furnace at 1550 ℃ for 30 hours to obtain the sintered compact target.
Example 5
A forming die for a planar ceramic target material is shown in figure 1 and comprises a steel die, a flexible die sleeve and a flexible plate, wherein the steel die comprises an upper steel cover 1 and a lower steel cover 2, the upper steel cover 1 and the lower steel cover 2 are installed and combined to form a cavity body, the upper steel cover 1 and the lower steel cover 2 are both made of 45# steel, grooves are formed in two ends of the steel die, the flexible die sleeve is installed in the grooves and matched and sealed with the steel die, the flexible plate is formed by combining an upper rubber plate 3 and a lower rubber plate 4 and is arranged in the cavity body in the steel die, a cavity body formed among the upper rubber plate 3, the lower rubber plate 4 and the flexible die sleeve 5 is a powder filling cavity body 6, and the powder filling cavity body 6 is a square cavity body; the flexible die sleeve 5 is made of polyurethane, and the Shore hardness is 70 degrees; the flexible board is made of polyurethane, the Shore hardness is 35 degrees, the thickness is 5mm, and the surface roughness is less than 3.2 microns; the parallelism of the processing of the two end surfaces of the flexible die sleeve 5 is less than 0.5 mm.
A forming method of a planar ceramic target comprises the following steps:
(1) assembling a lower steel cover, a lower rubber plate and a flexible die sleeve in the die to form a powder filling cavity;
(2) in is mixed with2O3：SnO2Filling ITO granulation powder with the component ratio of 90:10 into the assembled powder filling cavity, and scraping the surface of the powder filling cavity;
(3) sequentially assembling an upper rubber plate and an upper steel cover;
(4) placing the assembled mould and the granulated powder filled in the mould into a cold isostatic press for pressing and forming, wherein the cold isostatic press pressure is 200MPa, and demoulding after pressure relief to obtain a target green body;
(5) and (3) sintering the target green body in a sintering furnace at 1550 ℃ for 30 hours to obtain the sintered compact target.
Example 6
A forming die for a planar ceramic target material is shown in figure 1 and comprises a steel die, a flexible die sleeve and a flexible plate, wherein the steel die comprises an upper steel cover 1 and a lower steel cover 2, the upper steel cover 1 and the lower steel cover 2 are installed and combined to form a cavity body, the upper steel cover 1 and the lower steel cover 2 are both made of 45# steel, grooves are formed in two ends of the steel die, the flexible die sleeve is installed in the grooves and matched and sealed with the steel die, the flexible plate is formed by combining an upper rubber plate 3 and a lower rubber plate 4 and is arranged in the cavity body in the steel die, a cavity body formed among the upper rubber plate 3, the lower rubber plate 4 and the flexible die sleeve 5 is a powder filling cavity body 6, and the powder filling cavity body 6 is a square cavity body; the flexible die sleeve 5 is made of polyurethane, and the Shore hardness is 70 degrees; the flexible board is made of polyurethane, the Shore hardness is 35 degrees, the thickness is 20mm, and the surface roughness is less than 3.2 microns; the parallelism of the processing of the two end surfaces of the flexible die sleeve 5 is less than 0.5 mm.
A forming method of a planar ceramic target comprises the following steps:
(1) assembling a lower steel cover, a lower rubber plate and a flexible die sleeve in the die to form a powder filling cavity;
(2) in is mixed with2O3：SnO2Filling ITO granulation powder with the component ratio of 90:10 into the assembled powder filling cavity, and scraping the surface of the powder filling cavity;
(3) sequentially assembling an upper rubber plate and an upper steel cover;
(4) placing the assembled mould and the granulated powder filled in the mould into a cold isostatic press for pressing and forming, wherein the cold isostatic press pressure is 200MPa, and demoulding after pressure relief to obtain a target green body;
(5) and (3) sintering the target green body in a sintering furnace at 1550 ℃ for 30 hours to obtain the sintered compact target.
Example 7
A forming die for a planar ceramic target material is shown in figure 1 and comprises a steel die, a flexible die sleeve and a flexible plate, wherein the steel die comprises an upper steel cover 1 and a lower steel cover 2, the upper steel cover 1 and the lower steel cover 2 are installed and combined to form a cavity body, the upper steel cover 1 and the lower steel cover 2 are both made of 45# steel, grooves are formed in two ends of the steel die, the flexible die sleeve is installed in the grooves and matched and sealed with the steel die, the flexible plate is formed by combining an upper rubber plate 3 and a lower rubber plate 4 and is arranged in the cavity body in the steel die, a cavity body formed among the upper rubber plate 3, the lower rubber plate 4 and the flexible die sleeve 5 is a powder filling cavity body 6, and the powder filling cavity body 6 is a square cavity body; the flexible die sleeve 5 is made of polyurethane, and the Shore hardness is 70 degrees; the flexible board is made of polyurethane, the Shore hardness is 35 degrees, the thickness is 30mm, and the surface roughness is less than 3.2 microns; the parallelism of the processing of the two end surfaces of the flexible die sleeve 5 is less than 0.5 mm.
A forming method of a planar ceramic target comprises the following steps:
(1) assembling a lower steel cover, a lower rubber plate and a flexible die sleeve in the die to form a powder filling cavity;
(2) in is mixed with2O3：SnO2Filling ITO granulation powder with the component ratio of 90:10 into the assembled powder filling cavity, and scraping the surface of the powder filling cavity;
(3) sequentially assembling an upper rubber plate and an upper steel cover;
(4) placing the assembled mould and the granulated powder filled in the mould into a cold isostatic press for pressing and forming, wherein the cold isostatic press pressure is 200MPa, and demoulding after pressure relief to obtain a target green body;
(5) and (3) sintering the target green body in a sintering furnace at 1550 ℃ for 30 hours to obtain the sintered compact target.
Example 8
A forming die for a planar ceramic target material is shown in figure 1 and comprises a steel die, a flexible die sleeve and a flexible plate, wherein the steel die comprises an upper steel cover 1 and a lower steel cover 2, the upper steel cover 1 and the lower steel cover 2 are installed and combined to form a cavity body, the upper steel cover 1 and the lower steel cover 2 are both made of 45# steel, grooves are formed in two ends of the steel die, the flexible die sleeve is installed in the grooves and matched and sealed with the steel die, the flexible plate is formed by combining an upper rubber plate 3 and a lower rubber plate 4 and is arranged in the cavity body in the steel die, a cavity body formed among the upper rubber plate 3, the lower rubber plate 4 and the flexible die sleeve 5 is a powder filling cavity body 6, and the powder filling cavity body 6 is a square cavity body; the flexible die sleeve 5 is made of polyurethane, and the Shore hardness is 70 degrees; the flexible board is made of polyurethane, the Shore hardness is 35 degrees, the thickness is 50mm, and the surface roughness is less than 3.2 microns; the parallelism of the processing of the two end surfaces of the flexible die sleeve 5 is less than 0.5 mm.
A forming method of a planar ceramic target comprises the following steps:
(1) assembling a lower steel cover, a lower rubber plate and a flexible die sleeve in the die to form a powder filling cavity;
(2) in is mixed with2O3：SnO2Filling ITO granulation powder with the component ratio of 90:10 into the assembled powder filling cavity, and scraping the surface of the powder filling cavity;
(3) sequentially assembling an upper rubber plate and an upper steel cover;
(4) placing the assembled mould and the granulated powder filled in the mould into a cold isostatic press for pressing and forming, wherein the cold isostatic press pressure is 250MPa, and demoulding after pressure relief to obtain a target green body;
(5) and (3) sintering the target green body in a sintering furnace at 1550 ℃ for 30 hours to obtain the sintered compact target.
Example 9
A forming die for a planar ceramic target material is shown in figure 1 and comprises a steel die, a flexible die sleeve and a flexible plate, wherein the steel die comprises an upper steel cover 1 and a lower steel cover 2, the upper steel cover 1 and the lower steel cover 2 are installed and combined to form a cavity body, the upper steel cover 1 and the lower steel cover 2 are both made of 45# steel, grooves are formed in two ends of the steel die, the flexible die sleeve is installed in the grooves and matched and sealed with the steel die, the flexible plate is formed by combining an upper rubber plate 3 and a lower rubber plate 4 and is arranged in the cavity body in the steel die, a cavity body formed among the upper rubber plate 3, the lower rubber plate 4 and the flexible die sleeve 5 is a powder filling cavity body 6, and the powder filling cavity body 6 is a square cavity body; the flexible die sleeve 5 is made of polyurethane, and the Shore hardness is 75 degrees; the flexible board is made of polyurethane, the Shore hardness is 35 degrees, the thickness is 10mm, and the surface roughness is less than 3.2 microns; the parallelism of the processing of the two end surfaces of the flexible die sleeve 5 is less than 0.5 mm.
A forming method of a planar ceramic target comprises the following steps:
(1) assembling a lower steel cover, a lower rubber plate and a flexible die sleeve in the die to form a powder filling cavity;
(2) in is mixed with2O3：SnO2Filling ITO granulation powder with the component ratio of 90:10 into the assembled powder filling cavity, and scraping the surface of the powder filling cavity;
(3) sequentially assembling an upper rubber plate and an upper steel cover;
(4) placing the assembled mould and the granulated powder filled in the mould into a cold isostatic press for pressing and forming, wherein the cold isostatic press pressure is 220MPa, and demoulding after pressure relief to obtain a target green body;
(5) and (3) sintering the target green body in a sintering furnace at 1550 ℃ for 30 hours to obtain the sintered compact target.
Example 10
A forming die for a planar ceramic target material is shown in figure 1 and comprises a steel die, a flexible die sleeve and a flexible plate, wherein the steel die comprises an upper steel cover 1 and a lower steel cover 2, the upper steel cover 1 and the lower steel cover 2 are installed and combined to form a cavity body, the upper steel cover 1 and the lower steel cover 2 are both made of 45# steel, grooves are formed in two ends of the steel die, the flexible die sleeve is installed in the grooves and matched and sealed with the steel die, the flexible plate is formed by combining an upper rubber plate 3 and a lower rubber plate 4 and is arranged in the cavity body in the steel die, a cavity body formed among the upper rubber plate 3, the lower rubber plate 4 and the flexible die sleeve 5 is a powder filling cavity body 6, and the powder filling cavity body 6 is a square cavity body; the flexible die sleeve 5 is made of polyurethane, and the Shore hardness is 70 degrees; the flexible board is made of polyurethane, the Shore hardness is 40 degrees, the thickness is 15mm, and the surface roughness is less than 3.2 microns; the parallelism of the processing of the two end surfaces of the flexible die sleeve 5 is less than 0.5 mm.
A forming method of a planar ceramic target comprises the following steps:
(1) assembling a lower steel cover, a lower rubber plate and a flexible die sleeve in the die to form a powder filling cavity;
(2) in is mixed with2O3：SnO2Filling ITO granulation powder with the component ratio of 98:2 into the assembled powder filling cavity, and scraping the surface of the powder filling cavity;
(3) sequentially assembling an upper rubber plate and an upper steel cover;
(4) placing the assembled mould and the granulated powder filled in the mould into a cold isostatic press for pressing and forming, wherein the cold isostatic press pressure is 300MPa, and demoulding after pressure relief to obtain a target green body;
(5) and (3) sintering the target green body in a sintering furnace at 1550 ℃ for 30 hours to obtain the sintered compact target.
Comparative example 1
A forming die for a planar ceramic target material is shown in figure 1 and comprises a steel die, a flexible die sleeve and a flexible plate, wherein the steel die comprises an upper steel cover 1 and a lower steel cover 2, the upper steel cover 1 and the lower steel cover 2 are installed and combined to form a cavity body, the upper steel cover 1 and the lower steel cover 2 are both made of 45# steel, grooves are formed in two ends of the steel die, the flexible die sleeve is installed in the grooves and matched and sealed with the steel die, the flexible plate is formed by combining an upper rubber plate 3 and a lower rubber plate 4 and is arranged in the cavity body in the steel die, a cavity body formed among the upper rubber plate 3, the lower rubber plate 4 and the flexible die sleeve 5 is a powder filling cavity body 6, and the powder filling cavity body 6 is a square cavity body; the flexible die sleeve 5 is made of polyurethane, and the Shore hardness is 20 degrees; the flexible board is made of polyurethane, the Shore hardness is 60 degrees, the thickness is 10mm, and the surface roughness is less than 3.2 microns; the parallelism of the processing of the two end surfaces of the flexible die sleeve 5 is less than 0.5 mm.
A forming method of a planar ceramic target comprises the following steps:
(1) assembling a lower steel cover, a lower rubber plate and a flexible die sleeve in the die to form a powder filling cavity;
(2) in is mixed with2O3：SnO2IT with a composition ratio of 90:10Filling the O granulation powder into the assembled powder filling cavity, and scraping the surface of the powder filling cavity;
(3) sequentially assembling an upper rubber plate and an upper steel cover;
(4) and (3) placing the assembled mould and the granulated powder filled in the assembled mould into a cold isostatic press for pressing and forming, wherein the cold isostatic press pressure is 220MPa, releasing the pressure, demoulding, and disassembling to find that the water leakage phenomenon occurs in the mould.
Comparative example 2
A forming die for a planar ceramic target material is shown in figure 1 and comprises a steel die, a flexible die sleeve and a flexible plate, wherein the steel die comprises an upper steel cover 1 and a lower steel cover 2, the upper steel cover 1 and the lower steel cover 2 are installed and combined to form a cavity body, the upper steel cover 1 and the lower steel cover 2 are both made of 45# steel, grooves are formed in two ends of the steel die, the flexible die sleeve is installed in the grooves and matched and sealed with the steel die, the flexible plate is formed by combining an upper rubber plate 3 and a lower rubber plate 4 and is arranged in the cavity body in the steel die, a cavity body formed among the upper rubber plate 3, the lower rubber plate 4 and the flexible die sleeve 5 is a powder filling cavity body 6, and the powder filling cavity body 6 is a square cavity body; the flexible die sleeve 5 is made of polyurethane, and the Shore hardness is 90 degrees; the flexible board is made of polyurethane, the Shore hardness is 70 degrees, the thickness is 15mm, and the surface roughness is less than 3.2 microns; the parallelism of the processing of the two end surfaces of the flexible die sleeve 5 is less than 0.5 mm.
A forming method of a planar ceramic target comprises the following steps:
(1) assembling a lower steel cover, a lower rubber plate and a flexible die sleeve in the die to form a powder filling cavity;
(2) in is mixed with2O3：SnO2Filling ITO granulation powder with the component ratio of 90:10 into the assembled powder filling cavity, and scraping the surface of the powder filling cavity;
(3) sequentially assembling an upper rubber plate and an upper steel cover;
(4) and (3) placing the assembled mould and the granulated powder filled in the assembled mould into a cold isostatic press for pressing and forming, wherein the cold isostatic press pressure is 180MPa, releasing the pressure, demoulding, and detaching to find that the mould cracks.
Comparative example 3
A forming die for a planar ceramic target material is shown in figure 1 and comprises a steel die, a flexible die sleeve and a flexible plate, wherein the steel die comprises an upper steel cover 1 and a lower steel cover 2, the upper steel cover 1 and the lower steel cover 2 are installed and combined to form a cavity body, the upper steel cover 1 and the lower steel cover 2 are both made of 45# steel, grooves are formed in two ends of the steel die, the flexible die sleeve is installed in the grooves and matched and sealed with the steel die, the flexible plate is formed by combining an upper rubber plate 3 and a lower rubber plate 4 and is arranged in the cavity body in the steel die, a cavity body formed among the upper rubber plate 3, the lower rubber plate 4 and the flexible die sleeve 5 is a powder filling cavity body 6, and the powder filling cavity body 6 is a square cavity body; the flexible die sleeve 5 is made of polyurethane, and the Shore hardness is 65 degrees; the flexible board is made of polyurethane, the Shore hardness is 10 degrees, the thickness is 30mm, and the surface roughness is less than 3.2 microns; the parallelism of the processing of the two end surfaces of the flexible die sleeve 5 is less than 0.5 mm.
A forming method of a planar ceramic target comprises the following steps:
(1) assembling a lower steel cover, a lower rubber plate and a flexible die sleeve in the die to form a powder filling cavity;
(2) in is mixed with2O3：SnO2Filling ITO granulation powder with the component ratio of 90:10 into the assembled powder filling cavity, and scraping the surface of the powder filling cavity;
(3) sequentially assembling an upper rubber plate and an upper steel cover;
(4) and (3) placing the assembled die and the granulated powder filled in the die into a cold isostatic press for pressing and forming, wherein the cold isostatic press pressure is 80MPa, releasing the pressure, demoulding, and finding out that the surface of a target green body is uneven, the strength of the target is low and cracking occurs in the process of dismantling.
Comparative example 4
A forming die for a planar ceramic target material is shown in figure 1 and comprises a steel die, a flexible die sleeve and a flexible plate, wherein the steel die comprises an upper steel cover 1 and a lower steel cover 2, the upper steel cover 1 and the lower steel cover 2 are installed and combined to form a cavity body, the upper steel cover 1 and the lower steel cover 2 are both made of 45# steel, grooves are formed in two ends of the steel die, the flexible die sleeve is installed in the grooves and matched and sealed with the steel die, the flexible plate is formed by combining an upper rubber plate 3 and a lower rubber plate 4 and is arranged in the cavity body in the steel die, a cavity body formed among the upper rubber plate 3, the lower rubber plate 4 and the flexible die sleeve 5 is a powder filling cavity body 6, and the powder filling cavity body 6 is a square cavity body; the flexible die sleeve 5 is made of polyurethane, and the Shore hardness is 60 degrees; the flexible board is made of polyurethane, the Shore hardness is 50 degrees, the thickness is 10mm, and the surface roughness is less than 3.2 microns; the parallelism of the processing of the two end surfaces of the flexible die sleeve 5 is less than 0.5 mm.
A forming method of a planar ceramic target comprises the following steps:
(1) assembling a lower steel cover, a lower rubber plate and a flexible die sleeve in the die to form a powder filling cavity;
(2) in is mixed with2O3：SnO2Filling ITO granulation powder with the component ratio of 90:10 into the assembled powder filling cavity, and scraping the surface of the powder filling cavity;
(3) sequentially assembling an upper rubber plate and an upper steel cover;
(4) and (3) placing the assembled die and the granulated powder filled in the die into a cold isostatic press for pressing and forming, wherein the cold isostatic press pressure is 260MPa, releasing the pressure, demoulding, and detaching to find that the target green body cracks.
TABLE 1
It can be seen from embodiments 1-10 and comparative examples 1-4 that adopt the utility model discloses the mould, put the powder under steel cap, down rubber slab and flexible die sleeve form the powder and fill the intracavity and carry out the cold isostatic pressing shaping, can obtain the smooth ceramic target green compact of size rule, can obtain the target of high compactness through the sintering again, especially when the shore hardness of flexible die sleeve is 60-80 degrees, the shore hardness of flexible board is 30-40 degrees, the thickness of flexible board is 5-15mm, cold isostatic pressure is 200 and gives other year pressure 270Mpa, the target of high compactness that can when the material of flexible die sleeve and flexible board was polyurethane.
The utility model saves the procedure of forming by using the oil press in the production process, and reduces the equipment investment and the investment of the oil pressure die; meanwhile, the carrying risk is reduced, and huge economic benefits are generated.
The material of flexbile plate is silicon rubber or polyurethane, is convenient for process the flexbile plate, makes it have special-shaped cavity for the production of special-shaped plane target.
Finally, it should be noted that the above embodiments are only used for illustrating the technical solutions of the present invention and not for limiting the protection scope of the present invention, and although the present invention has been described in detail with reference to the preferred embodiments, it should be understood by those skilled in the art that the technical solutions of the present invention can be modified or replaced with equivalents without departing from the spirit and scope of the technical solutions of the present invention.
Claims (8)
1. A forming die for a planar ceramic target is characterized by comprising a steel die, a flexible die sleeve and a flexible plate, wherein the steel die comprises an upper steel cover and a lower steel cover, the upper steel cover and the lower steel cover are assembled to form a cavity body, the flexible die sleeve is installed at two ends of the steel die and is matched and sealed with the steel die, the flexible plate is formed by combining an upper rubber plate and a lower rubber plate and is arranged in the cavity body of the steel die, and a cavity formed among the upper rubber plate, the lower rubber plate and the flexible die sleeve is a powder filling cavity; the Shore hardness of the flexible die sleeve is 40-90 degrees, and the Shore hardness of the flexible plate is 20-60 degrees.
2. The forming die for a planar ceramic target according to claim 1, wherein the flexible die sleeve has a shore hardness of 60-80 degrees.
3. The mold for molding a planar ceramic target according to claim 1, wherein the flexible plate has a shore hardness of 30 to 40 degrees.
4. The mold for molding a planar ceramic target according to claim 1, wherein the surface roughness of the flexible plate is less than 3.2 μm.
5. The forming die for planar ceramic targets as claimed in claim 1, wherein two ends of the steel die are each provided with a groove, and the flexible die sleeve is mounted in the grooves.
6. The forming die for planar ceramic targets according to claim 1, wherein the parallelism of the machining of the two end faces of the flexible die sleeve is less than 0.5 mm.
7. The forming die for a planar ceramic target according to claim 1, wherein the flexible plate has a thickness of 5-15 mm.
8. The forming die for the planar ceramic target according to claim 1, wherein the flexible die sleeve and the flexible plate are made of silicone rubber or polyurethane.
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