CN211333885U - Isostatic compaction mould of rotatory target of pottery - Google Patents
Isostatic compaction mould of rotatory target of pottery Download PDFInfo
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- CN211333885U CN211333885U CN201922318660.5U CN201922318660U CN211333885U CN 211333885 U CN211333885 U CN 211333885U CN 201922318660 U CN201922318660 U CN 201922318660U CN 211333885 U CN211333885 U CN 211333885U
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Abstract
The utility model discloses a ceramic rotary target's isostatic compaction mould. The isostatic pressing forming die of the utility model comprises a rigid die core, an elastic outer die and an end plug; the elastic outer die consists of an outer die A part and an outer die B part which are integrally formed, the hardness of two ends is small, the hardness of the middle part is large, and the shrinkage deformation of the elastic outer die is controlled during isostatic pressing; the utility model discloses an elasticity external mold has sufficient rigidity, produces the deformation when preventing to fill powder, need not additionally to set up rigidity external mold supporting component. The utility model discloses an end plug comprises integrated into one piece's end plug A part and end plug B part, through confirming suitable hardness, solves the like sufficient deformation and the uneven problem of density of tubulose unburned bricks, is favorable to the sintering to obtain high performance ceramic target, has reduced later stage work load simultaneously, increases material utilization, reduction in production cost.
Description
Technical Field
The utility model relates to a rotatory target shaping technical field, concretely relates to static pressure forming die such as rotatory target of pottery.
Background
The coating target is a sputtering source which forms various functional films on a substrate by sputtering through magnetron sputtering, multi-arc ion plating or other types of coating systems under proper process conditions. Ceramic targets are a very important class of vacuum coating materials, including oxide ceramic targets, metal and metal alloy targets, sulfide targets, carbide targets, and the like. The target material product is widely applied to flat panel display, photovoltaic photo-thermal, touch screens, building glass, automobile glass, semiconductor chips, electronic components and the like.
At present, the forming method of the ceramic rotary target blank mainly comprises an extrusion method, in-situ colloidal solidification forming, slip casting forming and cold isostatic pressing forming. The extrusion method, the in-situ colloidal solidification forming and the slip casting forming can be formed with near net size, and have certain advantages in the aspect of manufacturing special-shaped pieces. However, the green body obtained by the extrusion method contains a large amount of organic matters and water, and is difficult to sinter and compact; the in-situ colloidal solidification forming also contains a large amount of organic matters and water, the large-size forming is easy to crack when dried, and the ultrahigh density is difficult to obtain; the grouting forming has strict requirements on the granularity and distribution of powder, slurry and a porous mould, the drying control of a green body is strict, and the technical difficulty is higher.
The cold isostatic pressing process can apply 360-degree uniform pressure, and the obtained green body has high and uniform density and is beneficial to subsequent sintering densification. In order to ensure the sealing effect, especially the sealing during pressure relief rebound, the end plug is required to have certain hardness. However, when the tubular green compact is cold isostatic pressed, deformation and displacement of the elastic outer die at the end plugs are hindered by the end plugs, resulting in a foot-like effect, resulting in a lower relative density of the green compact. When powder is filled, the inner die and the outer die are positioned by the clamp to be concentric, but the elastic outer die is easy to deform due to outward extrusion when powder is filled, so that the local parts are not concentric, and the phenomena of uneven powder filling, uneven wall thickness and irregular outer surface are caused. To overcome the forming defects, the tubular green body often needs to be machined to remove a large portion of its outer surface and ends to obtain a regular shape (e.g., CN102277558A and US 5435965). This machining not only increases the number of process steps but also results in considerable loss of material, which is also an important cause of low utilization of the powder in the production of rotary targets. In order to solve these problems, CN108556135A discloses an isostatic compaction die for rotary targets, in which a plastic transition layer capable of being radially compressed with the powder to be compacted along with the shrinkage deformation of an elastic outer die is provided between one side of an end plug facing a tubular die cavity and the powder to be compacted, but the rigid outer die and the elastic inner die are easily displaced. In addition, since the elastic outer mold has insufficient rigidity, a rigid support needs to be provided outside the elastic outer mold to prevent deformation during powder filling. The existing isostatic pressing forming die for the ceramic rotary target material also adopts the structural design of double end plugs, the inner end plug adopts the porous structural design, but the porous structural material has poor rebound force after compression deformation, the service life is reduced after repeated use, the isostatic pressing forming die and the upper hard plug are not integrally formed, when the two plugs deform during compression, the deformation between the two plugs is different, and the asynchronous deformation can bring negative effects.
SUMMERY OF THE UTILITY MODEL
An object of the utility model is to overcome prior art's weak point and provide an isostatic compaction mould of rotatory target of pottery for elasticity external mold shrink deformation receives control during the shaping, solves the tubulose unburned bricks production like sufficient deformation and the uneven problem of density in present cold isostatic compaction technology, is favorable to the sintering to obtain high performance ceramic target, has reduced later stage work load simultaneously, increases material utilization, reduction in production cost.
In order to achieve the purpose, the utility model adopts the following technical scheme:
an isostatic compaction mould for a ceramic rotary target comprises a rigid mould core, an elastic outer mould and an end plug, wherein the end plug comprises an end plug A part and an end plug B part which are integrally formed, the rigid mould core is arranged in an inner cavity of the elastic outer mould, a tubular mould cavity for filling powder to be formed is formed between the rigid mould core and the elastic outer mould, the two ends of the tubular mould cavity are sequentially provided with the end plug A part and the end plug B part from outside to inside, the Shore hardness of the end plug A part is 40-60 degrees, the Shore hardness of the end plug B part is 20-40 degrees, and the Shore hardness of the end plug A part is greater than that of the end plug B part; the elastic outer die comprises an outer die part A and an outer die part B which are integrally formed, the outer die part A is arranged at two ends of the outer die part B, the outer die part A is sleeved outside the end plug part A and the end plug part B, the outer die part B is sleeved outside the tubular die cavity, the Shore hardness of the outer die part A is 30-50 degrees, the Shore hardness of the outer die part B is 50-70 degrees, and the Shore hardness of the outer die part A is smaller than that of the outer die part B.
The elastic outer die of the utility model consists of an integrally formed outer die A part and an outer die B part, the hardness of both ends is small, the hardness of the middle part is large, and the shrinkage deformation of the elastic outer die is controlled and can not shift during isostatic pressing; the utility model discloses an elasticity external mold has sufficient rigidity, produces the deformation when preventing to fill powder, need not additionally to set up rigidity external mold supporting component. The utility model discloses an end plug comprises integrated into one piece's end plug A part and end plug B part, and two stopper take place to shift, arch up when can avoiding the compression to and when two stopper compression deformation, the asynchronous condition warp, the utility model discloses a confirm suitable end plug hardness, further solve like sufficient deformation and the uneven problem of density of tubulose unburned bricks, be favorable to the sintering to obtain high performance ceramic target, reduced later stage work load simultaneously, increase material utilization ratio, reduction in production cost.
Preferably, the Shore hardness of the part A of the end plug is 44-56 degrees, and the Shore hardness of the part B of the end plug is 25-36 degrees, so that the problem of foot-like defects of a formed green body is solved.
Preferably, the Shore hardness of the external mold part A is 30-40 degrees, and the Shore hardness of the external mold part B is 55-65 degrees, so that the problem of the elephant foot defect of the formed green body is solved more favorably.
Preferably, the shore hardness of the end plug part a is 50 degrees, and the shore hardness of the end plug part B is 30 degrees; the Shore hardness of the external mold part A is 38 degrees, the Shore hardness of the external mold part B is 60 degrees, and the elephant foot deformation of the target green body obtained by isostatic pressing of the mold is small.
Preferably, the inner diameter of the outer die A part is the same as that of the outer die B part, the outer diameter of the outer die B part is larger than that of the outer die A part, and the connecting surface between the outer die A part and the outer die B part is a conical connecting surface.
Preferably, the inclination angle alpha of the conical connecting surface is 10-20 degrees, and the connection transition between the external mold part A and the external mold part B with different hardness is ensured to be natural.
The utility model discloses a when static pressure forming die's application method does: the method comprises the steps of combining a rigid mold core and an elastic outer mold to form a tubular mold cavity, sealing the lower end of the tubular mold cavity by using an end plug, placing powder to be molded into the tubular mold cavity, sealing the upper end of the tubular mold cavity by using the end plug after the powder is filled, placing the mold filled with the powder into a cold isostatic press for isostatic pressing, and releasing pressure and demolding to obtain a tubular green body.
Compared with the prior art, the beneficial effects of the utility model are that:
the elastic outer mold of the utility model adopts the design of small hardness at both ends and large hardness in the middle, so that the shrinkage deformation of the elastic outer mold is controlled during cold isostatic pressing; the design of the integrally formed double-end plug is adopted, the hardness of the end plug is determined to be proper, the problems of foot-like deformation and uneven density of a tubular green body are solved, the sintering is facilitated to obtain a high-performance ceramic target material, the later turning amount is reduced, the material utilization rate is increased, and the production cost is reduced.
Drawings
Fig. 1 is a schematic structural view of an isostatic pressing forming mold for a ceramic rotary target according to the present invention;
FIG. 2 is a schematic structural view of an isostatic pressing mold for a ceramic rotary target according to comparative example 5;
in the figure, 1-the rigid core, 2-the end plug a part, 3-the end plug B part, 4-the tubular cavity, 5-the outer mould a part, 6-the outer mould B part.
Detailed Description
To better illustrate the objects, aspects and advantages of the present invention, the present invention will be further described with reference to specific embodiments. It will be understood by those skilled in the art that the specific embodiments described herein are merely illustrative of the invention and are not intended to limit the invention.
In the examples, the experimental methods used were all conventional methods unless otherwise specified, and the materials, reagents and the like used were commercially available without otherwise specified.
An isostatic pressing forming mold for a ceramic rotary target material comprises a rigid mold core 1, an elastic outer mold and an end plug, wherein the end plug comprises an end plug A part 2 and an end plug B part 3 which are integrally formed, the rigid mold core 1 is arranged in an inner cavity of the elastic outer mold, a tubular mold cavity 4 for filling powder to be formed is formed between the rigid mold core and the elastic outer mold, the end plug A part 2 and the end plug B part 3 are sequentially arranged at two ends of the tubular mold cavity 4 from outside to inside, the Shore hardness of the end plug A part 2 is 40-60 degrees, the Shore hardness of the end plug B part 3 is 20-40 degrees, and the Shore hardness of the end plug A part 2 is greater than that of the end plug B part 3; the elasticity external mold includes integrated into one piece's external mold A part 5 and external mold B part 6, external mold A part 5 is located external mold B part 6's both ends, just external mold A part 5 cover is established outside end plug A part 2 and end plug B part 3, external mold B part 6 cover is established outside tubular die cavity 4, external mold A part 5's shore hardness is 30-50 degrees, and external mold B part 6's shore hardness is 50-70 degrees, and external mold A part 5's shore hardness is less than external mold B part 6's shore hardness.
The elastic outer die of the utility model consists of an integrally formed outer die A part 5 and an outer die B part 6, the hardness of both ends is small, the hardness of the middle part is large, and the shrinkage deformation of the elastic outer die is controlled during isostatic pressing; the utility model discloses an elasticity external mold has sufficient rigidity, produces the deformation when preventing to fill powder, need not extra rigidity external mold supporting component. The utility model discloses an end plug comprises integrated into one piece's end plug A part 2 and end plug B part 3, through confirming suitable end plug hardness, solves the sufficient deformation of appearance and the uneven problem of density of tubulose unburned bricks, is favorable to the sintering to obtain high performance ceramic target, has reduced later stage work load simultaneously, increases material utilization, reduction in production cost.
In the utility model discloses in, the shore hardness of end plug A part 2 is 44-56 degrees, and the shore hardness of end plug B part 3 is 25-36 degrees, more is favorable to solving the fashioned unburned bricks and produces the problem like sufficient defect.
In the utility model, the shore hardness of the external mold part A5 is 30-40 degrees, and the shore hardness of the external mold part B6 is 55-65 degrees, which is more favorable for solving the problem that the formed green body has the elephant foot defect.
In the utility model, the shore hardness of the end plug part a 2 is 50 degrees, and the shore hardness of the end plug part B3 is 30 degrees; the Shore hardness of the external mold part A5 is 38 degrees, the Shore hardness of the external mold part B6 is 60 degrees, and the elephant foot deformation of the target green body obtained by isostatic pressing of the mold is small.
In the present invention, the inner diameter of the outer mold part a 5 is the same as the inner diameter of the outer mold part B6, the outer diameter of the outer mold part B6 is larger than the outer diameter of the outer mold part a 5, and the connection surface between the outer mold part a 5 and the outer mold part B6 is a tapered connection surface.
In the utility model discloses, the inclination alpha of toper connection face is 10-20, ensures to connect between the external mold A part 5 of different hardness and the external mold B part 6 and passes through naturally, and elasticity external mold shrinkage deformation is controlled during the compression, and avoids taking place to fracture between external mold A part 5 and the external mold B part 6.
The utility model discloses in, the material of external mold part A5 and external mold part B6 is chloroprene rubber, polyurethane, silicon rubber or polyvinyl chloride, and the same material of different hardnesses can be selected for use to external mold part A5 and external mold part B6 of same elasticity external mold, also can select for use the different material of different hardnesses.
The utility model discloses in, the material of end plug A part 2 and end plug B part 3 is chloroprene rubber, polyurethane, silicon rubber or polyvinyl chloride, and the same kind of material of different hardness can be selected for use to end plug A part 2 and end plug B part 3 of same end plug, also can select for use the different material of different hardness.
In the utility model discloses, the material of rigid mold core 1 is stainless steel, aluminum alloy, titanium alloy or magnesium alloy.
The isostatic pressing method for ceramic rotary target material by adopting the die of the utility model comprises the following steps: the method comprises the steps of combining a rigid mold core 1 and an elastic outer mold to form a tubular mold cavity 4, sealing the lower end of the tubular mold cavity 4 by using an end plug, placing powder to be molded into the tubular mold cavity 4, sealing the upper end of the tubular mold cavity 4 by using the end plug after the powder is filled, placing the mold filled with the powder into a cold isostatic press for isostatic pressing treatment, and releasing pressure and demolding to obtain a tubular green body.
Example 1
An isostatic pressing forming die for a ceramic rotary target material comprises a rigid die core 1, an elastic outer die and an end plug, wherein the end plug comprises an end plug A part 2 and an end plug B part 3 which are integrally formed, the rigid die core 1 is arranged in an inner cavity of the elastic outer die, a tubular die cavity 4 for filling powder to be formed is formed between the rigid die core 1 and the elastic outer die, the end plug A part 2 and the end plug B part 3 are sequentially arranged at two ends of the tubular die cavity 4 from outside to inside, the Shore hardness of the end plug A part 2 is 40 degrees, and the Shore hardness of the end plug B part 3 is 20 degrees; the elastic outer die comprises an outer die A part 5 and an outer die B part 6 which are integrally formed, the outer die A part 5 is arranged at two ends of the outer die B part 6, the outer die A part 5 is sleeved outside the end plug A part 2 and the end plug B part 3, the outer die B part 6 is sleeved outside the tubular die cavity 4, the Shore hardness of the outer die A part 5 is 30 degrees, the Shore hardness of the outer die B part 6 is 50 degrees, the inner diameter of the outer die A part 5 is the same as that of the outer die B part 6, the outer diameter of the outer die B part 6 is larger than that of the outer die A part 5, the connecting surface between the outer die A part 5 and the outer die B part 6 is a conical connecting surface, and the inclination angle alpha of the conical connecting surface is 10 degrees; the outer mold part A5 and the outer mold part B6 are made of chloroprene rubber; the end plug A part 2 and the end plug B part 3 are made of polyurethane; the rigid mold core 1 is made of stainless steel.
The method comprises the steps of combining a rigid mold core 1 and an elastic outer mold to form a tubular mold cavity 4, sealing the lower end of the tubular mold cavity 4 by using an end plug, placing AZO granulation powder to be molded into the tubular mold cavity 4, vibrating the powder while filling, sealing the upper end of the tubular mold cavity 4 by using the end plug after filling the powder, placing the mold filled with the powder into a cold isostatic press for isostatic pressing, releasing pressure and demolding to obtain a tubular green body, and calcining the tubular green body to obtain a finished product.
During the isostatic pressing, the end plugs are impermeable to water, and the foot-like outer diameter of the tubular green body is 3.2mm larger than the outer diameter of the normal part.
Example 2
An isostatic pressing forming die for a ceramic rotary target material comprises a rigid die core 1, an elastic outer die and an end plug, wherein the end plug comprises an end plug A part 2 and an end plug B part 3 which are integrally formed, the rigid die core 1 is arranged in an inner cavity of the elastic outer die, a tubular die cavity 4 for filling powder to be formed is formed between the rigid die core 1 and the elastic outer die, the end plug A part 2 and the end plug B part 3 are sequentially arranged at two ends of the tubular die cavity from outside to inside, the Shore hardness of the end plug A part 2 is 50 degrees, and the Shore hardness of the end plug B part 3 is 30 degrees; the elastic outer die comprises an outer die A part 5 and an outer die B part 6 which are integrally formed, the outer die A part 5 is arranged at two ends of the outer die B part 6, the outer die A part 5 is sleeved outside the end plug A part 2 and the end plug B part 3, the outer die B part 6 is sleeved outside the tubular die cavity 4, the Shore hardness of the outer die A part 5 is 38 degrees, the Shore hardness of the outer die B part 6 is 60 degrees, the inner diameter of the outer die A part 5 is the same as that of the outer die B part 6, the outer diameter of the outer die B part 6 is larger than that of the outer die A part 5, the connecting surface between the outer die A part 5 and the outer die B part 6 is a conical connecting surface, the inclination angle alpha of the conical connecting surface is 10 degrees, and the outer die A part 5 and the outer die B part 6 are made of chloroprene rubber; the end plug A part 2 and the end plug B part 3 are made of polyurethane; the rigid mold core is made of stainless steel.
The method comprises the steps of combining a rigid mold core 1 and an elastic outer mold to form a tubular mold cavity 4, sealing the lower end of the tubular mold cavity 4 by using an end plug, placing AZO granulation powder to be molded into the tubular mold cavity 4, vibrating the powder while filling, sealing the upper end of the tubular mold cavity 4 by using the end plug after filling the powder, placing the mold filled with the powder into a cold isostatic press for isostatic pressing, releasing pressure and demolding to obtain a tubular green body, and calcining the tubular green body to obtain a finished product.
During the isostatic pressing treatment, the end plugs are impermeable to water, and the foot-like outer diameter of the tubular green body is 1.1mm larger than the outer diameter of the normal part.
Example 3
An isostatic pressing forming die for a ceramic rotary target material comprises a rigid die core 1, an elastic outer die and an end plug, wherein the end plug comprises an end plug A part 2 and an end plug B part 3 which are integrally formed, the rigid die core 1 is arranged in an inner cavity of the elastic outer die, a tubular die cavity 4 for filling powder to be formed is formed between the rigid die core 1 and the elastic outer die, the end plug A part 2 and the end plug B part 3 are sequentially arranged at two ends of the tubular die cavity 4 from outside to inside, the Shore hardness of the end plug A part 2 is 60 degrees, and the Shore hardness of the end plug B part 3 is 40 degrees; the elastic outer die comprises an outer die A part 5 and an outer die B part 6 which are integrally formed, the outer die A part 5 is arranged at two ends of the outer die B part 6, the outer die A part 5 is sleeved outside the end plug A part 2 and the end plug B part 3, the outer die B part 5 is sleeved outside the tubular die cavity 4, the Shore hardness of the outer die A part 5 is 50 degrees, the Shore hardness of the outer die B part 6 is 70 degrees, the inner diameter of the outer die A part 5 is the same as the inner diameter of the outer die B part 6, the outer diameter of the outer die B part 6 is larger than the outer diameter of the outer die A part 5, the connecting surface between the outer die A part 5 and the outer die B part 6 is a conical connecting surface, and the inclination angle alpha of the conical connecting surface is 10; the outer mold part A5 and the outer mold part B6 are made of chloroprene rubber; the end plug A part 2 and the end plug B part 3 are made of polyurethane; the rigid mold core 1 is made of stainless steel.
The method comprises the steps of combining a rigid mold core 1 and an elastic outer mold to form a tubular mold cavity 4, sealing the lower end of the tubular mold cavity 4 by using an end plug, placing AZO granulation powder to be molded into the tubular mold cavity 4, vibrating the powder while filling, sealing the upper end of the tubular mold cavity 4 by using the end plug after filling the powder, placing the mold filled with the powder into a cold isostatic press for isostatic pressing, releasing pressure and demolding to obtain a tubular green body, and calcining the tubular green body to obtain a finished product.
During the isostatic pressing, the end plugs are impermeable to water, and the foot-like outer diameter of the tubular green body is 3.3mm larger than the outer diameter of the normal part.
Example 4
An isostatic pressing forming die for a ceramic rotary target material comprises a rigid die core 1, an elastic outer die and an end plug, wherein the end plug comprises an end plug A part 2 and an end plug B part 3 which are integrally formed, the rigid die core 1 is arranged in an inner cavity of the elastic outer die, a tubular die cavity 4 for filling powder to be formed is formed between the rigid die core 1 and the elastic outer die, the end plug A part 2 and the end plug B part 3 are sequentially arranged at two ends of the tubular die cavity 4 from outside to inside, the Shore hardness of the end plug A part 2 is 44 degrees, and the Shore hardness of the end plug B part 3 is 25 degrees; the elastic outer die comprises an outer die A part 5 and an outer die B part 6 which are integrally formed, the outer die A part 5 is arranged at two ends of the outer die B part 6, the outer die A part 5 is sleeved outside the end plug A part 2 and the end plug B part 3, the outer die B part 6 is sleeved outside the tubular die cavity 4, the Shore hardness of the outer die A part 5 is 30 degrees, the Shore hardness of the outer die B part 6 is 55 degrees, the inner diameter of the outer die A part 5 is the same as that of the outer die B part 6, the outer diameter of the outer die B part 6 is larger than that of the outer die A part 5, the connecting surface between the outer die A part 5 and the outer die B part 6 is a conical connecting surface, and the inclination angle alpha of the conical connecting surface is 15 degrees; the outer mold part A5 and the outer mold part B6 are made of chloroprene rubber; the end plug A part 2 and the end plug B part 3 are made of polyurethane; the rigid mold core 1 is made of stainless steel.
The method comprises the steps of combining a rigid mold core 1 and an elastic outer mold to form a tubular mold cavity 4, sealing the lower end of the tubular mold cavity 4 by using an end plug, placing AZO granulation powder to be molded into the tubular mold cavity 4, vibrating the powder while filling, sealing the upper end of the tubular mold cavity 4 by using the end plug after filling the powder, placing the mold filled with the powder into a cold isostatic press for isostatic pressing, releasing pressure and demolding to obtain a tubular green body, and calcining the tubular green body to obtain a finished product.
During the isostatic pressing, the end plugs are impermeable to water, and the foot-like outer diameter of the tubular green body is 1.4mm larger than the outer diameter of the normal part.
Example 5
An isostatic pressing forming die for a ceramic rotary target material comprises a rigid die core 1, an elastic outer die and end plugs, wherein each end plug comprises an end plug A part 2 and an end plug B part 3 which are integrally formed, the rigid die core 1 is arranged in an inner cavity of the elastic outer die, a tubular die cavity 4 for filling powder to be formed is formed between the rigid die core 1 and the elastic outer die, the end plug A part 2 and the end plug B part 3 are sequentially arranged at two ends of the tubular die cavity 4 from outside to inside, the Shore hardness of the end plug A part 2 is 56 degrees, and the Shore hardness of the end plug B part 3 is 36 degrees; the elastic outer die comprises an outer die A part 5 and an outer die B part 6 which are integrally formed, the outer die A part 5 is arranged at two ends of the outer die B part 6, the outer die A part 5 is sleeved outside the end plug A part 2 and the end plug B part 3, the outer die B part 6 is sleeved outside the tubular die cavity 4, the Shore hardness of the outer die A part 5 is 40 degrees, the Shore hardness of the outer die B part 6 is 65 degrees, the inner diameter of the outer die A part 5 is the same as that of the outer die B part 6, the outer diameter of the outer die B part 6 is larger than that of the outer die A part 5, the connecting surface between the outer die A part 5 and the outer die B part 6 is a conical connecting surface, and the inclination angle alpha of the conical connecting surface is 20 degrees; the outer mold part A5 and the outer mold part B6 are made of chloroprene rubber; the end plug A part 2 and the end plug B part 3 are made of polyurethane; the rigid mold core 1 is made of stainless steel.
The method comprises the steps of combining a rigid mold core 1 and an elastic outer mold to form a tubular mold cavity 4, sealing the lower end of the tubular mold cavity 4 by using an end plug, placing AZO granulation powder to be molded into the tubular mold cavity 4, vibrating the powder while filling, sealing the upper end of the tubular mold cavity 4 by using the end plug after filling the powder, placing the mold filled with the powder into a cold isostatic press for isostatic pressing, releasing pressure and demolding to obtain a tubular green body, and calcining the tubular green body to obtain a finished product.
During the isostatic pressing, the end plugs are impermeable to water, and the foot-like outer diameter of the tubular green body is 1.3mm larger than the outer diameter of the normal part.
Comparative example 1
The material and structure of the isostatic pressing forming mold of the ceramic rotary target material of the comparative example are basically the same as those of the example 1, except that the shore hardness of the end plug a part 2 of the mold of the comparative example is 30 degrees, and the shore hardness of the end plug B part 3 is 15 degrees.
The method comprises the steps of combining a rigid mold core 1 and an elastic outer mold to form a tubular mold cavity 4, sealing the lower end of the tubular mold cavity 4 by using an end plug, placing AZO granulation powder to be molded into the tubular mold cavity 4, vibrating the powder while filling, sealing the upper end of the tubular mold cavity 4 by using the end plug after filling the powder, placing the mold filled with the powder into a cold isostatic press for isostatic pressing, releasing pressure and demolding to obtain a tubular green body, and calcining the tubular green body to obtain a finished product.
In the isostatic pressing process, due to the insufficient rebound force of the end plug, water is found to permeate into the green body in the experiment.
Comparative example 2
The material and structure of the isostatic pressing forming mold of the ceramic rotary target material of the comparative example are basically the same as those of the example 1, except that the shore hardness of the end plug a part 2 of the mold of the comparative example is 70 degrees, and the shore hardness of the end plug B part 3 is 50 degrees.
The method comprises the steps of combining a rigid mold core 1 and an elastic outer mold to form a tubular mold cavity 4, sealing the lower end of the tubular mold cavity 4 by using an end plug, placing AZO granulation powder to be molded into the tubular mold cavity 4, vibrating the powder while filling, sealing the upper end of the tubular mold cavity 4 by using the end plug after filling the powder, placing the mold filled with the powder into a cold isostatic press for isostatic pressing, releasing pressure and demolding to obtain a tubular green body, and calcining the tubular green body to obtain a finished product.
Due to the higher hardness of the end plug, the foot-like outer diameter of the tubular green body is more than 10mm larger than the outer diameter of the normal part.
Comparative example 3
The material and structure of the isostatic pressing forming die of the ceramic rotary target material of the comparative example are basically the same as those of the embodiment 1, except that the shore hardness of the external die part a 5 of the die of the comparative example is 20 degrees, and the shore hardness of the external die part B6 is 40 degrees.
The method comprises the steps of combining a rigid mold core 1 and an elastic outer mold to form a tubular mold cavity 4, sealing the lower end of the tubular mold cavity 4 by using an end plug, placing AZO granulation powder to be molded into the tubular mold cavity 4, vibrating the powder while filling, sealing the upper end of the tubular mold cavity 4 by using the end plug after filling the powder, placing the mold filled with the powder into a cold isostatic press for isostatic pressing, releasing pressure and demolding to obtain a tubular green body, and calcining the tubular green body to obtain a finished product.
Due to the high hardness of the outer die, the outer diameter of the foot-like part of the tubular green body is larger than the outer diameter of the normal part by more than 8 mm.
Comparative example 4
The material and structure of the isostatic pressing forming die for the ceramic rotary target material in the comparative example are basically the same as those of the embodiment 1, except that the shore hardness of the external die part a 5 of the die in the comparative example is 50 degrees, and the shore hardness of the external die part B6 is 80 degrees.
The method comprises the steps of combining a rigid mold core 1 and an elastic outer mold to form a tubular mold cavity 4, sealing the lower end of the tubular mold cavity 4 by using an end plug, placing AZO granulation powder to be molded into the tubular mold cavity 4, vibrating the powder while filling, sealing the upper end of the tubular mold cavity 4 by using the end plug after filling the powder, placing the mold filled with the powder into a cold isostatic press for isostatic pressing, releasing pressure and demolding to obtain a tubular green body, and calcining the tubular green body to obtain a finished product.
The outer diameter of the elephant foot of the tubular green compact is larger than that of the normal portion by more than 10mm due to the high hardness of the outer die, and it was found that the elephant foot portion is easily broken to induce the target to be cracked in the axial direction.
Comparative example 5
An isostatic pressing forming die for a ceramic rotary target material is shown in figure 2 and comprises a rigid die core 1, an elastic outer die, an end plug A part 2 and an end plug B part 3, wherein the rigid die core 1 is arranged in an inner cavity of the elastic outer die, a tubular die cavity 4 for filling powder to be formed is formed between the rigid die core 1 and the elastic outer die, the two ends of the tubular die cavity 4 are sequentially provided with the end plug A part 2 and the end plug B part 3 from outside to inside, the Shore hardness of the end plug A part 2 is 40 degrees, and the Shore hardness of the end plug B part 3 is 20 degrees; the elastic outer die comprises an outer die A part 5 and an outer die B part 6, the outer die A part 5 is sleeved outside the end plug A part 2, the end plug B part 3 and the tubular die cavity 4, the outer die B part 5 is sleeved outside the outer die A part 5, the outer diameter of the outer die A part 5 is the same as the inner diameter of the outer die B part 6, the Shore hardness of the outer die A part 5 is 30 degrees, and the Shore hardness of the outer die B part 6 is 50 degrees; the outer mold part A5 and the outer mold part B6 are made of chloroprene rubber; the end plug A part 2 and the end plug B part 3 are made of chloroprene rubber; the rigid mold core 1 is made of stainless steel.
The method comprises the steps of combining a rigid mold core 1 and an elastic outer mold to form a tubular mold cavity 4, sealing the lower end of the tubular mold cavity 4 by an end plug A part 2 and an end plug B part 3, placing AZO granulated powder to be molded into the tubular mold cavity 4, vibrating the powder while filling, sealing the upper end of the tubular mold cavity 4 by the end plug A part 2 and the end plug B part 4 after filling the powder, placing a mold filled with the powder into a cold isostatic press for isostatic pressing, releasing pressure and demolding to obtain a tubular green body, and calcining the tubular green body to obtain a finished product.
The external mold A and the external mold B are not integrally molded, so that the external mold A and the external mold B are easy to displace when the powder is filled through high-frequency vibration, and the two external molds can be separated when the cold isostatic pressing is carried out, so that the external mold B loses the function; and the end plug part A and the end plug part B are not integrally formed, so that the two plugs are arched in the isostatic pressing process, and the deformation is asynchronous when the two plugs are compressed and deformed.
From the results of examples 1-5 and comparative examples 1-4, the utility model discloses the shore hardness of external mold part A is controlled 30-50 degrees, and the shore hardness of external mold part B is controlled 50-70 degrees, and especially the shore hardness of end plug part A is 44-56 degrees, and the shore hardness of end plug part B is 25-36 degrees, and the shore hardness of external mold part A is 30-40 degrees, and the shore hardness of external mold part B is 55-65 degrees, is favorable to solving the problem that the fashioned green compact produced and is liked foot defect. From the results of example 1 and comparative example 5, it can be seen that the present invention, by designing the end plug part a and the end plug part B as an integrally formed structure and by providing the external mold part a and the external mold part B as an integrally formed structure, can ensure that the external mold part a and the external mold part B do not shift during cold isostatic pressing.
Finally, it should be noted that the above embodiments are only used for illustrating the technical solutions of the present invention and not for limiting the protection scope of the present invention, and although the present invention has been described in detail with reference to the preferred embodiments, it should be understood by those skilled in the art that the technical solutions of the present invention can be modified or replaced with equivalents without departing from the spirit and scope of the technical solutions of the present invention.
Claims (6)
1. The isostatic pressing forming mold for the ceramic rotary target is characterized by comprising a rigid mold core, an elastic outer mold and an end plug, wherein the end plug comprises an end plug A part and an end plug B part which are integrally formed, the rigid mold core is arranged in an inner cavity of the elastic outer mold, a tubular mold cavity for filling powder to be formed is formed between the rigid mold core and the elastic outer mold, the end plug A part and the end plug B part are sequentially arranged at two ends of the tubular mold cavity from outside to inside, the Shore hardness of the end plug A part is 40-60 degrees, the Shore hardness of the end plug B part is 20-40 degrees, and the Shore hardness of the end plug A part is greater than that of the end plug B part; the elastic outer die comprises an outer die part A and an outer die part B which are integrally formed, the outer die part A is arranged at two ends of the outer die part B, the outer die part A is sleeved outside the end plug part A and the end plug part B, the outer die part B is sleeved outside the tubular die cavity, the Shore hardness of the outer die part A is 30-50 degrees, the Shore hardness of the outer die part B is 50-70 degrees, and the Shore hardness of the outer die part A is smaller than that of the outer die part B.
2. The isostatic pressing forming die for ceramic rotary targets as claimed in claim 1, wherein the shore hardness of the end plug a portion is 44-56 degrees, and the shore hardness of the end plug B portion is 25-36 degrees.
3. The isostatic pressing mold for ceramic rotary targets according to claim 1, wherein the shore hardness of the outer mold part a is 30-40 degrees, and the shore hardness of the outer mold part B is 55-65 degrees.
4. The isostatic pressing forming mold for ceramic rotary targets according to claim 1, wherein the shore hardness of the end plug a portion is 50 degrees, and the shore hardness of the end plug B portion is 30 degrees; the Shore hardness of the external mold part A is 38 degrees, and the Shore hardness of the external mold part B is 60 degrees.
5. The isostatic pressing mold for ceramic rotary targets according to claim 1, wherein the inner diameter of the outer mold part a is the same as the inner diameter of the outer mold part B, the outer diameter of the outer mold part B is larger than the outer diameter of the outer mold part a, and the connecting surface between the outer mold part a and the outer mold part B is a tapered connecting surface.
6. The isostatic pressing forming die for ceramic rotary targets according to claim 5, wherein the angle of inclination α of the conical connecting surface is 10 ° to 20 °.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201922318660.5U CN211333885U (en) | 2019-12-20 | 2019-12-20 | Isostatic compaction mould of rotatory target of pottery |
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| Application Number | Priority Date | Filing Date | Title |
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| CN201922318660.5U CN211333885U (en) | 2019-12-20 | 2019-12-20 | Isostatic compaction mould of rotatory target of pottery |
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| CN211333885U true CN211333885U (en) | 2020-08-25 |
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