CN212460306U - Auxiliary feeding device of circuit board exposure machine and exposure machine - Google Patents
Auxiliary feeding device of circuit board exposure machine and exposure machine Download PDFInfo
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- CN212460306U CN212460306U CN202020839124.XU CN202020839124U CN212460306U CN 212460306 U CN212460306 U CN 212460306U CN 202020839124 U CN202020839124 U CN 202020839124U CN 212460306 U CN212460306 U CN 212460306U
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- exposure machine
- exposure
- circuit board
- lifting
- sealing element
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Abstract
The utility model provides a circuit board exposure machine auxiliary feeding device and exposure machine, the device includes: the rotating assembly comprises a rotating disc and a driver, the rotating disc is in transmission connection with the driver, the rotating disc is arranged below an exposure part of the exposure machine, a plurality of circuit board fixing stations are arranged on the rotating disc, and a limiting frame is arranged around each circuit board fixing station; the rotating assembly is arranged on the lifting platform and drives the rotating assembly to lift; and the sealing element is arranged on the limiting frame, and is clamped with the exposure part of the exposure machine after the rotating disc is lifted. The utility model discloses a runner assembly realizes unloading in the multistation to need not to get respectively from the both sides of exposure machine and put the circuit board, practiced thrift the stroke of arm. Through setting up lifting unit, the carousel rotates after descending, rotates and rises after targetting in place, ensures exposure in-process sealing member and exposure portion joint to realize the sealed effect of exposure in-process.
Description
Technical Field
The utility model relates to a circuit board exposure machine technique especially relates to a circuit board exposure machine auxiliary feeding device and exposure machine.
Background
The exposure machine is a complex semiconductor processing device integrating electron optical, electrical, mechanical, vacuum and computer technologies, is widely applied to the semiconductor integrated circuit manufacturing industry after 70 years, utilizes focused electron beams to expose organic polymers (generally called electronic resists or photoresists) under the control of a computer, and is commonly used in the fields of semiconductor manufacturing, photoelectric electronics, flat panels, radio frequency microwaves, diffraction optics, micro-electro-mechanical systems, concave-convex or flip chip devices and other fields requiring fine printing.
In order to improve the efficiency of the exposure machine, a plurality of exposure stations are arranged on the exposure machine to be performed alternately. For example, in the prior art, there is an apparatus capable of making two circuit boards enter an exposure machine alternately through sliding of a sliding groove to improve exposure efficiency, for example, patent CN201921161254.6 discloses a novel circuit board exposure machine, which comprises a machine body, the inner side of the machine body is provided with a sliding groove, the inner side of the sliding groove is connected with a substrate in a sliding manner, the surface of the substrate is symmetrically provided with a placing bin, the upper end surface of the substrate is symmetrically provided with a sealing groove, the surface of the machine body is symmetrically provided with a sealing block, and the surface of the sealing block is abutted with the sealing groove.
However, the existing mechanism has the disadvantages that: the shelving bin slides along the sliding groove, so that the feeding stations are arranged on two sides of the exposure machine, feeding and discharging need to be carried out on two sides, and two sets of material taking and placing strokes are designed for two mechanical arms or one mechanical arm. If the sliding groove structure is replaced by the existing turntable structure, sealing in the exposure process is difficult to achieve, and light leakage and volatile matter leakage in the exposure process to air are caused.
Disclosure of Invention
An object of the utility model is to provide a can simplify supplementary loading attachment of circuit board exposure machine and exposure machine of unloading stroke.
The following presents a simplified summary of one or more aspects in order to provide a basic understanding of such aspects. This summary is not an extensive overview of all contemplated aspects, and is intended to neither identify key or critical elements of all aspects nor delineate the scope of any or all aspects. Its sole purpose is to present some concepts of one or more aspects in a simplified form as a prelude to the more detailed description that is presented later.
According to the utility model discloses an aspect provides a circuit board exposure machine auxiliary feeding device, include: the rotating assembly comprises a turntable and a driver, the turntable is in transmission connection with the driver, the turntable is arranged below an exposure part of the exposure machine, a plurality of circuit board fixing stations are arranged on the turntable, and a limiting frame is arranged around each circuit board fixing station; the rotating assembly is arranged on the lifting platform, and the lifting assembly drives the rotating assembly to lift; and the sealing element is arranged on the limiting frame, and when the rotating disc is lifted, the sealing element is clamped with an exposure part of the exposure machine.
In one embodiment, the shape and size of the sealing member of the auxiliary loading device correspond to the opening of the exposure part of the exposure machine.
In an embodiment, the sealing member of the auxiliary feeding device is made of rubber.
In one embodiment, the lifting assembly of the auxiliary feeding device comprises a base, a lifting driver and a lifting platform, wherein the lifting driver is arranged in the base, and the lifter is in transmission connection with the lifting driver.
In an embodiment, the driver of the auxiliary feeding device is a motor, and the motor is in transmission connection with the rotary table.
In one embodiment, a movable cavity is arranged below the limiting frame of the auxiliary feeding device, the bottom of the sealing element is arranged in the movable cavity, the sealing element penetrates out of the limiting frame, and a spring is arranged between the bottom of the sealing element and the bottom of the movable cavity.
In one embodiment, the height of the sealing member of the auxiliary feeding device is 5 mm-15 mm.
According to the utility model discloses an on the other hand still provides an exposure machine, including any one of the above-mentioned embodiments supplementary loading attachment, still include the organism, the exposure portion of organism stretch to supplementary loading attachment's top, the lower port of exposure portion is provided with the joint structure, works as lifting unit raises the back, the sealing member joint in the joint structure.
In an embodiment, the clamping structure of the exposure machine is a protrusion disposed on an inner sidewall of the exposure portion.
In one embodiment, the exposure machine of the exposure machine comprises a controller, and the lifting assembly and the rotating assembly are in communication connection with the controller.
The embodiment of the utility model provides a beneficial effect is: the multi-station feeding and discharging is realized through the rotating assembly, so that circuit boards do not need to be taken from two sides of the exposure machine, and the stroke of the mechanical arm is saved. Through setting up lifting unit, the carousel rotates after descending, rotates and rises after targetting in place, ensures exposure in-process sealing member and exposure portion joint to realize the sealed effect of exposure in-process.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings that are required to be used in the embodiments will be briefly described below, it should be understood that the following drawings only illustrate some embodiments of the present invention, and therefore should not be considered as limiting the scope, and for those skilled in the art, other related drawings can be obtained according to the drawings without inventive efforts.
The above features and advantages of the present invention will be better understood upon reading the detailed description of embodiments of the present disclosure in conjunction with the following drawings. In the drawings, components are not necessarily drawn to scale, and components having similar relative characteristics or features may have the same or similar reference numerals.
FIG. 1 is a schematic view of an exposure machine with an auxiliary loading device according to an embodiment of the present invention;
FIG. 2 is a schematic view illustrating the engagement of the sealing member with the exposure portion according to the embodiment of the present invention;
FIG. 3 is a schematic view of an exposure apparatus according to another embodiment of the present invention;
fig. 4 is a partial schematic view of the AA section of fig. 3.
Wherein: 1-a rotating assembly; 11-a turntable; 12-a driver; 13-circuit board fixing station; 14-a limit frame; 15-a seal; 2-an exposure machine; 21-an exposure section; 21 a-a snap-fit arrangement; 3-a lifting assembly; 31-a base; 32-a lifting platform; 4-a movable cavity; 5-a spring.
Detailed Description
The present invention will be described in detail below with reference to the accompanying drawings and specific embodiments. It is noted that the aspects described below in connection with the figures and the specific embodiments are only exemplary and should not be understood as imposing any limitation on the scope of the present invention.
As shown in fig. 1 and 2, the embodiment of the utility model discloses circuit board exposure machine auxiliary feeding device rotates through carousel 11 and realizes going up unloading, specifically includes: the rotating assembly 1, the rotating assembly 1 includes a rotating disc 11 and a driver 12, the rotating disc 11 is in transmission connection with the driver 12, the driver 12 is preferably a motor, and the motor is in transmission connection with the rotating disc 11. The rotary table 11 is partially arranged below the exposure part 21 of the exposure machine 2, a plurality of circuit board fixing stations 13 are arranged on the rotary table 11, in the embodiment, the number of the circuit board fixing stations 13 is 4, and a limiting frame 14 for fixing the circuit board is arranged around each circuit board fixing station 13; lifting unit 3, rotating assembly 1 set up on lifting unit 3, and lifting unit 3 drive rotating assembly 1 goes up and down. The sealing member 15, the sealing member 15 is set on the limit frame 14, when the turntable 11 is lifted, the sealing member 15 is clamped with the exposure part 21 of the exposure machine 2.
The working process of the auxiliary feeding device is as follows: the circuit board to be exposed is placed in the circuit board fixing station 13, the circuit board fixing station 13 is rotated to the position below the exposure part 21 after the rotating disc 11 rotates, then the rotating disc 11 is lifted by the lifting assembly 3, and the sealing piece 15 is clamped with the exposure part 21 as shown in fig. 2.
Specifically, the shape and size of the seal 15 correspond to the lower port of the exposure section 21 of the exposure machine 2. In a possible embodiment, the sealing member 15 may be engaged with the exposure portion 21, or may be formed by forming a groove in a lower end surface of the exposure portion 21, and inserting the sealing member 15 into the groove. Preferably, the material of the sealing element 15 may be rubber, so that better sealing performance can be obtained after clamping.
In a possible embodiment, the specific structure of the lifting assembly 3 includes a base 31, a lifting driver (which may be a cylinder, a hydraulic cylinder, etc., and is not shown in the drawings) and a lifting platform 32, the lifting driver is disposed in the base 31, and the lifter 32 is in transmission connection with the lifting driver. Of course, the lifting driver may also adopt a form of a motor matching with a screw rod to realize a lifting function, and is not limited herein.
Because different types of circuit boards require different distances from the light source during exposure, in order to adjust the distance as required, in one embodiment, as shown in fig. 3 and 4, a movable cavity 4 is arranged below the limit frame 14, the bottom of the sealing element 15 is arranged in the movable cavity 4, the sealing element 15 penetrates out of the limit frame 14, and a spring 5 is arranged between the bottom of the sealing element 15 and the bottom of the movable cavity 4. Through such design, not only can realize sealed effect when lifting assembly 3 rises carousel 11, also can adjust the circuit board simultaneously and reach the light source distance. On the basis of the above embodiment, the height of the seal 15 may be set to 5mm to 15mm as needed.
The embodiment of the utility model provides an exposure machine 2 is still provided, including above-mentioned arbitrary supplementary loading attachment, still include the organism, the portion of exposing to the sun 21 of organism stretches to supplementary loading attachment's top, and the lower port of the portion of exposing to the sun 21 is provided with joint structure 21a, and when lifting unit 3 with carousel 11 back, 15 joints of sealing member are in joint structure 21 a. As shown in fig. 2, the latch structure 21a is a protrusion disposed on an inner sidewall of the exposure portion 21. In addition, the exposure machine 2 comprises a controller (not shown in the figure), and the lifting component 3 and the rotating component 1 are both in communication connection with the controller, so that the exposure process and the feeding and discharging process can be controlled in a linkage manner.
To sum up, the embodiment of the utility model provides a realize unloading on the multistation through rotating assembly to need not to get respectively from the both sides of exposure machine and put the circuit board, practiced thrift the stroke of arm. Through setting up lifting unit, the carousel rotates after descending, rotates and rises after targetting in place, ensures exposure in-process sealing member and exposure portion joint to realize the sealed effect of exposure in-process.
The embodiments in the present description are described in a progressive manner, each embodiment focuses on differences from other embodiments, and the same and similar parts among the embodiments are referred to each other.
While, for purposes of simplicity of explanation, the methodologies are shown and described as a series of acts, it is to be understood and appreciated that the methodologies are not limited by the order of acts, as some acts may, in accordance with one or more embodiments, occur in different orders and/or concurrently with other acts from that shown and described herein or not shown and described herein, as would be understood by one skilled in the art.
The previous description of the disclosure is provided to enable any person skilled in the art to make or use the disclosure. Various modifications to the disclosure will be readily apparent to those skilled in the art, and the generic principles defined herein may be applied to other variations without departing from the spirit or scope of the disclosure. Thus, the disclosure is not intended to be limited to the examples and designs described herein but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.
The above description is only a preferred example of the present application and should not be taken as limiting the present application, and any modifications, equivalents, improvements and the like made within the spirit and principle of the present application should be included in the scope of the present application.
Claims (10)
1. The utility model provides a circuit board exposure machine auxiliary feeding device which characterized in that includes:
the rotating assembly comprises a turntable and a driver, the turntable is in transmission connection with the driver, the turntable is arranged below an exposure part of the exposure machine, a plurality of circuit board fixing stations are arranged on the turntable, and a limiting frame is arranged around each circuit board fixing station;
the rotating assembly is arranged on the lifting assembly, and the lifting assembly drives the rotating assembly to lift;
and the sealing element is arranged on the limiting frame, and when the turntable is lifted, the sealing element is clamped with an exposure part of the exposure machine.
2. The auxiliary loading device of circuit board exposure machine according to claim 1, characterized in that: the shape and size of the sealing member correspond to the opening of the exposure portion of the exposure machine.
3. The auxiliary loading device of circuit board exposure machine according to claim 2, characterized in that: the sealing element is made of rubber.
4. The auxiliary loading device of circuit board exposure machine according to claim 1, characterized in that: the lifting assembly comprises a base, a lifting driver and a lifting platform, wherein the lifting driver is arranged in the base, and the lifting platform is in transmission connection with the lifting driver.
5. The auxiliary loading device of circuit board exposure machine according to claim 1, characterized in that: the driver is a motor, and the motor is in transmission connection with the rotary table.
6. The auxiliary loading device of circuit board exposure machine according to claim 1, characterized in that: the sealing device is characterized in that a movable cavity is arranged below the limiting frame, the bottom of the sealing element is arranged in the movable cavity, the sealing element penetrates out of the limiting frame, and a spring is arranged between the bottom of the sealing element and the bottom of the movable cavity.
7. The auxiliary loading device of circuit board exposure machine according to claim 6, characterized in that: the height of the sealing element is 5 mm-15 mm.
8. An exposure machine characterized in that: the auxiliary feeding device comprises an auxiliary feeding device according to any one of claims 1 to 7, and further comprises a machine body, wherein an exposure portion of the machine body extends to the upper side of the auxiliary feeding device, a clamping structure is arranged at a lower port of the exposure portion, and when the lifting assembly is lifted, the sealing element is clamped in the clamping structure.
9. Exposure machine according to claim 8, characterised in that: the clamping structure is a protruding part arranged on the inner side wall of the exposure part.
10. Exposure machine according to claim 9, characterised in that: the exposure machine comprises a controller, and the lifting assembly and the rotating assembly are in communication connection with the controller.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202020839124.XU CN212460306U (en) | 2020-05-19 | 2020-05-19 | Auxiliary feeding device of circuit board exposure machine and exposure machine |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202020839124.XU CN212460306U (en) | 2020-05-19 | 2020-05-19 | Auxiliary feeding device of circuit board exposure machine and exposure machine |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN212460306U true CN212460306U (en) | 2021-02-02 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202020839124.XU Active CN212460306U (en) | 2020-05-19 | 2020-05-19 | Auxiliary feeding device of circuit board exposure machine and exposure machine |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN212460306U (en) |
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2020
- 2020-05-19 CN CN202020839124.XU patent/CN212460306U/en active Active
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