CN212444366U - Polishing device - Google Patents
Polishing device Download PDFInfo
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- CN212444366U CN212444366U CN202021309282.0U CN202021309282U CN212444366U CN 212444366 U CN212444366 U CN 212444366U CN 202021309282 U CN202021309282 U CN 202021309282U CN 212444366 U CN212444366 U CN 212444366U
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Abstract
The utility model relates to a precision finishing technical field. The utility model relates to a polishing device, one proposal of which comprises an object stage for bearing a workpiece to be processed; the liquid carrying disc is connected with the output end of the first power assembly and can be driven by the first power assembly to rotate; a magnet for generating a magnetic field for attaching the magnetic polishing liquid to the carrier plate; a slurry addition assembly for delivering unused slurry to the carrier liquid tray; the slurry recovery assembly is used for collecting slurry used on the liquid carrying tray and comprises an electromagnet, a third power assembly and a recovery container, wherein the electromagnet is connected with the output end of the third power assembly and can be driven by the third power assembly to move between the liquid carrying tray and the recovery container. The scheme of the polishing device can realize automatic replacement of the magnetic polishing solution, simplifies the operation and is beneficial to industrial use.
Description
Technical Field
The utility model belongs to the technical field of the precision finishing technique and specifically relates to a compound fluid burnishing device of magnetism.
Background
Magnetic Composite Fluid (MCF) polishing is gradually applied to multiple fields, the principle is that the surface of a workpiece is polished by the magnetic composite fluid in an external magnetic field, and the magnetic composite fluid is continuously abraded and consumed along with the polishing, so that the used magnetic composite fluid on a liquid carrying disc needs to be taken away regularly, and new magnetic composite fluid is added to the liquid carrying disc.
SUMMERY OF THE UTILITY MODEL
The utility model discloses solve one of the technical problem in the correlation technique at least to a certain extent. Therefore, an object of the embodiments of the present invention is to provide a polishing apparatus, which can realize automatic replacement of magnetic polishing solution, simplify the operation, and facilitate industrial use.
The embodiment of the utility model provides an adopted technical scheme is:
in a first aspect, there is provided a polishing apparatus comprising
The object stage is used for bearing a workpiece to be processed;
the liquid carrying disc is connected to the output end of the first power assembly and can be driven by the first power assembly to rotate;
a magnet for generating a magnetic field for attaching a magnetic polishing liquid to the carrier plate;
a slurry addition assembly for delivering unused slurry to the carrier liquid tray;
and the slurry recovery assembly is used for collecting the slurry used on the liquid carrying tray, the slurry recovery assembly comprises an electromagnet, a third power assembly and a recovery container, the electromagnet is connected with the output end of the third power assembly and can be driven by the third power assembly to move between the liquid carrying tray and the recovery container, the electromagnet is powered on when moving to the top of the liquid carrying tray, and the electromagnet is powered off when moving to the top of the recovery container.
The liquid carrying disc is characterized by further comprising a second power assembly, wherein the magnet is connected to the output end of the second power assembly and can be driven by the second power assembly to revolve around the rotation axis of the liquid carrying disc.
The liquid carrying tray moving assembly comprises liquid carrying tray acquisition devices corresponding to the number of the liquid carrying trays and a fourth power assembly driving the liquid carrying tray acquisition devices to move, one liquid carrying tray acquisition device can separate the liquid carrying trays on the output end of the first power assembly, and the other liquid carrying tray acquisition device can convey the other liquid carrying tray to the output end of the first power assembly along with the driving of the fourth power assembly.
Further, the liquid carrying disc can break away from along vertical ascending direction the liquid carrying disc, liquid carrying disc removal subassembly still includes the roating seat, the liquid carrying disc is followed rotating base's direction of rotation connects gradually on the roating seat, fourth power component is including being used for the drive the rotatory rotary power device of roating seat, and the drive rotary power device goes up and down along vertical direction.
Furthermore, be equipped with the locating hole that extends along vertical direction on first power component's the output, the carrier liquid dish includes supporting part, connecting portion and reference column, connecting portion locate the bottom and the diameter of supporting part are less than the supporting part, the reference column is located the bottom of connecting portion just extends along vertical direction, the carrier liquid dish is in the reference column is pegged graft in the locating hole time with the synchronous rotation of first power component's output, the carrier liquid dish is in the reference column is followed along vertical ascending direction extract in the locating hole after with first power component's output breaks away from, the carrier liquid dish obtains the device including the snap ring that has the breach, the width of breach is greater than the maximum width of connecting portion, the inner circle diameter of snap ring is greater than the diameter of connecting portion, and is less than the diameter of supporting part.
Furthermore, the liquid carrying device further comprises a sensor, a trigger device and a positioning hole extending in the vertical direction are arranged on the output end of the first power assembly, a positioning column extending in the vertical direction extends out of the liquid carrying disc, the trigger device rotates for a set number of turns and rotates to a set position to trigger the sensor, so that the output end of the first power assembly stops at the current state, and the liquid carrying disc moves in the vertical direction relative to the output end of the first power assembly, so that the positioning column is inserted into the positioning hole, or the positioning column is pulled out of the positioning hole.
The carrier platform is arranged above the liquid carrying tray and can be driven by the fifth power assembly to move in the vertical direction relative to the liquid carrying tray.
Further, the slurry adding assembly comprises a liquid storage container, a switching device, a pump and a pipeline, and a suction port of the pump is communicated with the liquid storage container through the pipeline.
Further, the pump performs the turning on and off operations cyclically, and the switching device cuts off the pipe at a time t1 after the pump is turned on, the pump is turned off at a time t2 after the turning on, and t2 is later than t 1.
Further, the slurry addition assembly includes a vibratable reservoir.
The utility model discloses beneficial effect of embodiment:
the embodiment of the utility model provides a through setting up objective table, carrier liquid dish, first power component, magnet, thick liquid and adding subassembly and thick liquid recovery subassembly, can realize the automatic replacement of magnetic polishing liquid, simplify the operation, be favorable to the industrialization to use.
Drawings
FIG. 1 is a top layout view of the first embodiment;
FIG. 2 is a partial cross-sectional view of a side view of the first embodiment;
FIG. 3 is a cross-sectional view of the first power module of the first embodiment in connection with a carrier plate;
FIG. 4 is a cross-sectional view of the first embodiment carrier liquid tray moving assembly in connection with the carrier liquid tray;
FIG. 5 is a cross-sectional view of the first embodiment slurry recovery assembly, carrier tray and carrier tray moving assembly in connection therewith;
FIG. 6 is a cross-sectional view of the second embodiment first power module in connection with a carrier plate.
Detailed Description
This part will describe the embodiment of the present invention in detail, and the embodiment of the present invention is shown in the attached drawings, and the function of the attached drawings is to supplement the description of the text part of the specification with figures, so that each technical feature and the whole technical solution of the embodiment of the present invention can be understood visually and vividly, but it cannot be understood as the limitation to the protection scope of the present invention.
In the description of the present invention, if an orientation description is referred to, for example, the directions or positional relationships indicated by "upper", "lower", "front", "rear", "left", "right", etc. are based on the directions or positional relationships shown in the drawings, only for convenience of description and simplification of description, and it is not intended to indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus, should not be construed as limiting the present invention. If a feature is referred to as being "disposed," "secured," or "connected" to another feature, it can be directly disposed, secured, or connected to the other feature or be indirectly disposed, secured, or connected to the other feature.
In the description of the embodiments of the present invention, if "a plurality" is referred to, it means one or more, if "a plurality" is referred to, it means two or more, if "greater than", "less than" or "more than" is referred to, it is understood that the number is not included, and if "more than", "less than" or "within" is referred to, it is understood that the number is included. If reference is made to "first" or "second", this should be understood to distinguish between features and not to indicate or imply relative importance or to implicitly indicate the number of indicated features or to implicitly indicate the precedence of the indicated features.
In addition, unless defined otherwise, technical and scientific terms used in the embodiments of the present invention have the same meaning as commonly understood by one of ordinary skill in the art. The terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention.
First embodiment
Referring to fig. 1 and 2, fig. 1 shows a top layout view of the first embodiment, and fig. 2 shows a partial cross-sectional view of a side view of the first embodiment. As shown, the present embodiment includes a liquid carrying tray 100, a first power assembly 200, a fifth power assembly 300, a slurry adding assembly 400, a slurry recycling assembly 500, a liquid carrying tray moving assembly 600, and a base 700, and in addition, the present embodiment also includes a magnet and a stage not shown in fig. 1. The carrier plate 100 is used for carrying magnetic polishing liquid for polishing, and the carrier plate 100 is connected to an output end of the first power assembly 200 and can be driven by the first power assembly 200 to rotate. According to the direction shown in fig. 1, the fifth power assembly 300 is located above the first power assembly 200, the output end of the fifth power assembly 300 is connected to an object stage, the object stage is used for bearing a workpiece to be processed, the object stage in this embodiment is disposed above the liquid-carrying tray 100 and can be driven by the fifth power assembly 300 to move in the vertical direction relative to the liquid-carrying tray 100, and when the object stage descends to a set height until the workpiece to be processed contacts with the magnetic composite fluid on the liquid-carrying tray 100, polishing can be achieved. The magnet is located below the carrier plate 100 and is used for generating an external magnetic field to attach the magnetic composite fluid to the carrier plate 100, and in this embodiment, the magnet is a permanent magnet and the magnetic polishing solution is a magnetic composite fluid. The carrier liquid tray moving assembly 600 is located below the first power assembly 200, and is used for transferring the carrier liquid tray 100 needing to recover the magnetic composite fluid to a recovery position, and transferring the empty carrier liquid tray 100 to the output end of the first power assembly 200, so that the processing efficiency of the polishing device is improved through the recycling of the carrier liquid tray 100. The slurry adding assembly 400 and the slurry recovery assembly 500 are both located on the right side of the first power assembly 200, the slurry adding assembly 400 is used for delivering unused slurry to the liquid carrying tray 100, and the slurry recovery assembly 500 is used for collecting used slurry on the liquid carrying tray 100.
Referring to fig. 1 and 3, fig. 3 is a cross-sectional view illustrating that the first power assembly of this embodiment is connected to the carrier liquid tray, as shown in the figure, the carrier liquid tray 100 is circular, the first power assembly 200 includes a motor 210, a driving wheel 220, a belt 230 and a driven wheel 240, the motor 210 is fixed on a base 700, the driven wheel 240 serves as an output end of the first power assembly 200, is rotatably connected to the base 700 through a bearing, and is connected to the driving wheel 220 fixed on a rotating shaft of the motor 210 through the belt 230, and the motor 210 rotates to drive the driven wheel 240 to rotate through the belt 230.
The upper end face of the driven wheel 240 is provided with a positioning hole 241 extending in the vertical direction, the bottom of the liquid carrying disc 100 extends to form a positioning column 110 extending in the vertical direction, the positioning hole 241 and the positioning column 110 are located at two positions, when the positioning column 110 is inserted into the positioning hole 241, the liquid carrying disc 100 can rotate synchronously with the driven wheel 240, and after the positioning column 110 is pulled out from the positioning hole 241 in the upward direction, the liquid carrying disc 100 is separated from the driven wheel 240, namely, the liquid carrying disc 100 can rotate synchronously with the liquid carrying disc 100 and can be separated from the liquid carrying disc 100 in the vertical upward direction.
Referring to fig. 1, 4 and 4, fig. 4 is a cross-sectional view illustrating the connection of the carrier liquid tray moving assembly of the present embodiment with the carrier liquid tray, and as shown in the figure, the carrier liquid tray moving assembly 600 includes a rotating base 610, two carrier liquid tray capturing devices 620 and a fourth power assembly. In this embodiment, a rotating shaft 611 extends from the bottom of the rotating base 610, two connecting arms 612 symmetrically extend from the top toward the horizontal direction, and the end of each connecting arm 612 is connected to a liquid carrying tray obtaining device 620. The fourth power assembly includes a rotary power device (not shown) for driving the rotary base 610 to rotate, and a lifting power device (not shown) for driving the rotary power device to lift in the vertical direction, i.e., the carrier liquid pan retrieving device 620 can rotate around the axis of the rotating shaft 611 and lift in the vertical direction.
Referring to fig. 1, the carrier liquid pan acquiring device 620 is a semicircular snap ring having a notch formed at one side thereof. Referring to fig. 4, the liquid bearing tray 100 further includes a bearing portion 120 and a connecting portion 130, the connecting portion 130 is located at the bottom of the bearing portion 120, and has a diameter smaller than that of the bearing portion 120, and the positioning column 110 is located at the bottom of the connecting portion 130. The width of the breach of snap ring is greater than connecting portion 130's maximum width (diameter), and the inner circle diameter of snap ring is greater than connecting portion 130's diameter simultaneously to be less than the diameter that bears portion 120, so, when the snap ring was located the high position such as with connecting portion 130, horizontal migration through the snap ring can make connecting portion 130 get into to the snap ring in, then the snap ring upward movement can lift carrier liquid dish 100.
Referring to fig. 1 and 5, fig. 5 is a cross-sectional view illustrating the connection of the slurry recovery assembly and the carrier liquid tray with the carrier liquid tray moving assembly according to the present embodiment, as shown in the figure, the slurry recovery assembly 500 includes an electromagnet 510, a third power assembly 520 and a recovery container (not shown in fig. 1 and 5), the third power assembly 520 includes a motor-screw driving device disposed in a horizontal direction, the electromagnet 510 is driven by the third power assembly 520 to horizontally slide, when the electromagnet 510 slides to above the carrier liquid tray 100, the electromagnet 510 is energized to suck the magnetic composite fluid on the carrier liquid tray 100, and when the electromagnet 510 slides to above the recovery container, the electromagnet 510 is de-energized, and the sucked magnetic composite fluid falls into the recovery container under the action of gravity.
Referring to fig. 1, the slurry adding assembly 400 includes a nozzle 410, a pump 420, a reservoir 430 and a pipe 440, the nozzle 410 and the pump 420 and the reservoir 430 are communicated through the pipe 440, and the nozzle 410 is located above the driven wheel 240 and can spray the magnetic composite fluid to the carrier plate 100 fixed on the driven wheel 240.
In addition, this embodiment still is provided with human-computer interaction interface, and the operating personnel of being convenient for carries out the control of polishing parameter.
Based on the above structure and referring to fig. 1, the work flow of this embodiment is:
firstly, an empty carrier liquid tray 100 (referred to as a first carrier liquid tray) is fixed on a driven wheel 240, magnetic composite fluid is sprayed onto the empty carrier liquid tray 100 through a slurry adding assembly 400, a workpiece to be processed is fixed at the bottom of an object stage through bonding and the like, the carrier liquid tray moving assembly 600 stays in a state shown in fig. 1, a first carrier liquid tray acquiring device 620 (referred to as a first carrier liquid tray acquiring device) on the left side of the carrier liquid tray moving assembly 600 is in an empty state, and an empty second carrier liquid tray 100 (referred to as a second carrier liquid tray, which is not shown in fig. 1) is fixed on a carrier liquid tray acquiring device 620 (referred to as a second carrier liquid tray acquiring device) on the right side of the carrier liquid tray moving assembly 600.
Then, the fifth power assembly 300 is started to drive the stage to move downwards, and the first power assembly 200 is started to drive the first carrier liquid disc to rotate until the workpiece to be processed is contacted with the magnetic composite fluid for polishing. After polishing for a certain time, the rotary power device of the liquid-carrying tray moving assembly 600 is started, the rotary base 610 is driven to rotate 90 degrees clockwise in fig. 1 until the connecting portion of the first liquid-carrying tray on the driven wheel 240 is clamped into the first liquid-carrying tray acquiring device, then the lifting power device of the liquid-carrying tray moving assembly 600 is started, the first liquid-carrying tray acquiring device drives the first liquid-carrying tray to move upwards to be separated from the driven wheel 240, then the rotary power device is started, the rotary base 610 is driven to rotate 180 degrees clockwise in fig. 1, the second liquid-carrying tray acquiring device drives the second liquid-carrying tray to move to the upper side of the driven wheel 240, then the lifting power device is started, the second liquid-carrying tray acquiring device drives the second liquid-carrying tray to move downwards until the second liquid-carrying tray is fixed on the driven wheel 240, then the second liquid-carrying tray acquiring device is reset upwards, the rotary power device is started to drive the rotary base 610 to rotate 90 degrees anticlockwise in fig. 1, the first liquid carrying tray acquisition device drives the first liquid carrying tray to move to the position below the electromagnet 510, the electromagnet 510 is electrified to absorb the magnetic composite fluid on the first liquid carrying tray, the first liquid carrying tray is in an empty state, then the electromagnet 510 moves to the position above the recovery container and is powered off, the absorbed magnetic composite fluid falls into the recovery container under the action of gravity, and the process is repeated to realize automatic replacement of the magnetic composite fluid. The embodiment can realize the synchronous operation of polishing work and recovery work, and is favorable for improving the polishing efficiency.
Second embodiment
The present embodiment is a modified embodiment of the first embodiment, referring to fig. 6, fig. 6 shows a cross-sectional view of the connection between the first power assembly and the liquid carrying tray in the present embodiment, as shown in the figure, the present embodiment further includes a second power assembly 800, the second power assembly 800 includes a motor 810, a magnet fixing seat 820, a coupling 830 and a bearing 840, the motor 810 is installed on the base 700, a driving shaft of the motor 810 is fixedly connected with a connecting shaft at the lower end of the magnet fixing seat 820 through the coupling 830, the magnet fixing seat 820 is rotatably connected to the base 700 through the bearing 840, the magnet 900 is installed on the upper end surface of the magnet fixing seat 820, and the magnet 900 deviates from the rotation axis of the magnet fixing seat 820, the rotation axis of the magnet fixing seat 820 in the present embodiment coincides with the rotation axis of the liquid carrying tray 100, that is, the.
Third embodiment
This embodiment is a modified embodiment of the first embodiment, since the liquid carrying tray 100 and the driven wheel 240 in the first embodiment are connected by using the positioning posts and the positioning holes, and the liquid carrying tray 100 is transplanted by the liquid carrying tray moving assembly 600, the position of the positioning column is relatively fixed, so that the butting of the liquid carrying disc 100 and the driven wheel 240 at fixed positions can be realized only by fixing the position of the positioning hole on the driven wheel 240, the embodiment provides a positioning mode of the driven wheel 240, a black line is arranged on the liquid carrying disc 100 as a trigger device, a black and white line sensor is fixed on the base 700, when the carrier liquid tray 100 has rotated a set number of turns, at which point it is deemed necessary to replace the magnetic composite fluid, and when the carrier liquid tray 100 is rotated again until the black line triggers the black and white line sensor, the driven wheel 240 stops rotating, since the black and white line sensor is fixed in position, the driven wheel 240 can be stationary at the same fixed position each time.
Fourth embodiment
This embodiment is a modified example of the first embodiment, and in order to make the volume of the magnetic composite fluid ejected each time constant, this embodiment controls the start and stop of the pump cycle through the single chip microcomputer, and it takes 2 seconds for 1ml of the magnetic composite fluid to be sucked into the suction port of the pump each time, and it takes 5 seconds for 1ml of the magnetic composite fluid to be ejected from the outlet of the pump. If the starting time of the pump is set to be 5 seconds, the magnetic composite fluid sucked by a suction port of the pump is more than 1ml, the excessive magnetic composite fluid is retained in the pipeline, and the magnetic composite fluid is deteriorated after a long time, so that the polishing effect is influenced. In order to solve the above problems, in this embodiment, a solenoid valve is added as a switch device on a pipeline between a suction port of the pump and the liquid storage container, the solenoid valve is set to cut off the pipeline at t1 after the pump is started, the pump is stopped at t2 after the pump is started, and t2 is later than t1, that is, after the magnetic composite fluid sucked by the pump reaches a required amount, the solenoid valve cuts off the pipeline, the pump stops sucking the magnetic composite fluid in the liquid storage container, and the pump continues to operate until all the magnetic composite fluid in the pipeline is completely sprayed, so that retention of the magnetic composite fluid can be avoided.
Fifth embodiment
This embodiment is a modified example of the first embodiment, and is different from the first embodiment in that the liquid storage container is a vibrating container, such as a vortex vibration meter, and the magnetic composite fluid in the liquid storage container is vibrated by the high-frequency vibration of the vortex vibration meter, so as to prevent the aggregation of the abrasive particles and the hydroxyl iron powder, and to maintain the good polishing performance of the magnetic composite fluid.
Sixth embodiment
The present embodiment is a modified embodiment of the first embodiment, and is different from the first embodiment in that the liquid storage container and the recovery container are communicated, and the magnetic composite fluid used in the recovery container flows back to the liquid storage container, so as to realize recycling of the magnetic composite fluid.
Seventh embodiment
This embodiment is an alternative embodiment of the first embodiment, and the difference between this embodiment and the first embodiment is that no carrier plate moving assembly is provided, and only one carrier plate 100 is provided, and when the magnetic composite fluid needs to be replaced, the electromagnet 510 moves directly above the carrier plate 100 to suck the used magnetic composite fluid.
The embodiments of the present invention have been described in detail, but the present invention is not limited to the embodiments, and those skilled in the art can make various equivalent modifications or substitutions without departing from the spirit of the present invention, and such equivalent modifications or substitutions are included in the scope of the present invention defined by the claims. Furthermore, the embodiments of the present invention and features of the embodiments may be combined with each other without conflict.
Claims (10)
1. A polishing apparatus, characterized by comprising
The object stage is used for bearing a workpiece to be processed;
the liquid carrying disc is connected to the output end of the first power assembly and can be driven by the first power assembly to rotate;
a magnet for generating a magnetic field for attaching a magnetic polishing liquid to the carrier plate;
a slurry addition assembly for delivering unused slurry to the carrier liquid tray;
and the slurry recovery assembly is used for collecting the slurry used on the liquid carrying tray, the slurry recovery assembly comprises an electromagnet, a third power assembly and a recovery container, the electromagnet is connected with the output end of the third power assembly and can be driven by the third power assembly to move between the liquid carrying tray and the recovery container, the electromagnet is powered on when moving to the top of the liquid carrying tray, and the electromagnet is powered off when moving to the top of the recovery container.
2. The polishing apparatus as recited in claim 1, further comprising a second power assembly, wherein the magnet is connected to an output end of the second power assembly and is capable of being driven by the second power assembly to revolve around an axis of rotation of the liquid-carrying tray.
3. The polishing apparatus according to claim 1, further comprising a carrier tray moving assembly, and at least two carrier trays, wherein the carrier tray moving assembly includes carrier tray acquiring means corresponding to the number of the carrier trays, and a fourth power assembly for driving the carrier tray acquiring means to move, and one of the carrier tray acquiring means is capable of separating the carrier trays located on the output side of the first power assembly, and the other carrier tray acquiring means is capable of transporting the other carrier tray to the output side of the first power assembly, in accordance with the driving of the fourth power assembly.
4. A polishing apparatus according to claim 3, wherein said carrier liquid disk is detachable from said carrier liquid disk in a vertically upward direction, said carrier liquid disk moving assembly further comprises a rotary base to which said carrier liquid disk is sequentially connected in a rotation direction of said rotary base, and said fourth power assembly comprises a rotary power device for driving said rotary base to rotate and a lifting power device for driving said rotary power device to lift and lower in a vertical direction.
5. The polishing apparatus as recited in claim 4, wherein the output end of the first power assembly has a positioning hole extending in a vertical direction, the carrier liquid plate includes a bearing portion, a connecting portion and a positioning post, the connecting portion is disposed at a bottom of the bearing portion and has a smaller diameter than the bearing portion, the positioning post is disposed at a bottom of the connecting portion and extends in the vertical direction, the carrier liquid plate rotates synchronously with the output end of the first power assembly when the positioning post is inserted into the positioning hole, the carrier liquid plate separates from the output end of the first power assembly after the positioning post is pulled out of the positioning hole in the vertical upward direction, the carrier liquid plate acquiring device includes a snap ring having a notch, the notch has a width larger than a maximum width of the connecting portion, and an inner ring of the snap ring has a diameter larger than a diameter of the connecting portion, and is smaller than the diameter of the bearing part.
6. The polishing apparatus as claimed in claim 4, further comprising a sensor, wherein the output end of the first power assembly is provided with a triggering device and a positioning hole extending in the vertical direction, the liquid-carrying tray extends with a positioning column extending in the vertical direction, the triggering device triggers the sensor after rotating for a set number of turns and rotating to a set position, so that the output end of the first power assembly stops at a current state, and the liquid-carrying tray moves in the vertical direction relative to the output end of the first power assembly, so that the positioning column is inserted into the positioning hole, or the positioning column is pulled out of the positioning hole.
7. The polishing apparatus as recited in claim 1, further comprising a fifth power assembly, wherein the carrier is coupled to an output of the fifth power assembly, and wherein the carrier is disposed above the carrier plate and is vertically movable relative to the carrier plate by the fifth power assembly.
8. The polishing apparatus according to claim 1, wherein the slurry adding assembly comprises a reservoir, a switching device, a pump and a pipe, and a suction port of the pump communicates with the reservoir through the pipe.
9. The polishing apparatus as recited in claim 8, wherein the pump performs on and off operations cyclically, and the switching means cuts off the pipe at a time t1 after the pump is turned on, the pump being stopped at a time t2 after being turned on, t2 being later than t 1.
10. The polishing apparatus of claim 1, wherein the slurry addition assembly comprises a vibratable reservoir.
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CN202021309282.0U CN212444366U (en) | 2020-07-06 | 2020-07-06 | Polishing device |
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Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
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CN113070531A (en) * | 2021-05-19 | 2021-07-06 | 无锡市星达石化配件有限公司 | Circumferential flange end face machining equipment |
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Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
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CN113070531A (en) * | 2021-05-19 | 2021-07-06 | 无锡市星达石化配件有限公司 | Circumferential flange end face machining equipment |
CN113070531B (en) * | 2021-05-19 | 2021-12-21 | 无锡市星达石化配件有限公司 | Circumferential flange end face machining equipment |
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