CN212432551U - Substrate surface pollutant sampling device - Google Patents
Substrate surface pollutant sampling device Download PDFInfo
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- CN212432551U CN212432551U CN202021248626.1U CN202021248626U CN212432551U CN 212432551 U CN212432551 U CN 212432551U CN 202021248626 U CN202021248626 U CN 202021248626U CN 212432551 U CN212432551 U CN 212432551U
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Abstract
The utility model provides a substrate surface pollutant sampling device, which comprises a containing cavity, a sealing component, a cover body, at least one ultrasonic transducer, a water inlet pipe and a water outlet pipe, wherein the water inlet pipe and the water outlet pipe are arranged on the cover body; the accommodating cavity comprises a base and a surrounding assembly, and the surrounding assembly is arranged on the base and surrounds the outer side of the base to define an accommodating space; the sealing assembly is arranged in the accommodating space in a surrounding mode and abuts against the inner wall of the surrounding assembly, and the sealing assembly defines a sub-opening for accommodating the substrate in the accommodating space; the cover body is used for covering the accommodating cavity to seal the accommodating cavity; the at least one ultrasonic transducer is arranged on the cover body and used for emitting ultrasonic waves towards the accommodating space of the accommodating cavity; the water inlet pipe is connected with an extraction liquid supply device, and the water outlet pipe is connected with an extraction liquid collecting device. The utility model provides a base plate surface pollutant sampling device's sample accuracy and sampling efficiency are all higher.
Description
Technical Field
The utility model relates to the field of semiconductor technology, in particular to substrate surface pollutant sampling device.
Background
During the manufacturing process of the wafer, contaminants, which generally include acid-base compounds, condensation, metal compounds, dopants, etc., are usually attached to the manufacturing surface of the wafer, and these contaminants affect the subsequent manufacturing process of the wafer. For example, these contaminants can corrode the wafer surface, affect etch rate variation, cause wafer adhesion failure, cause T-topping of the photoresist, cause inaccurate performance of the photolithography process, cause optical haze, degrade gate oxide integrity, affect cleaning performance, cause electrical leakage at the p-n junction of the device, corrode metal wires, and the like, thereby reducing the performance and reliability of the finally fabricated semiconductor device, and even cause failure of the semiconductor device. Therefore, in the manufacturing process of the wafer, it is usually required to sample the contaminant particles on a single surface (i.e., the manufacturing surface) of the wafer and perform concentration by using the ion chromatography to detect the particle content of the contaminant, so as to perform corresponding operations based on the detection result to prevent the contaminant from affecting the subsequent manufacturing process.
In the related art, the method for sampling the contaminants on the surface of the wafer mainly comprises the following steps:
the first method is to immerse the wafer in pure water for a period of time, so that the contaminant particles on the surface of the wafer are transferred from the surface of the wafer to the pure water, thereby extracting the contaminants on the surface of the wafer.
In the second method, a sampling apparatus as shown in fig. 1 is provided, and the wafer 110 is fixed on the wafer carrier 104 by the rotating handle 104a, and the surface of the wafer 110 to be sampled faces upward. Then, the extraction liquid is supplied from the extraction liquid supply device 108a to the extraction liquid spraying mechanism 106, and the extraction liquid is sprayed onto the surface of the wafer 110 by the extraction liquid spraying mechanism 106, so that the ions on the surface of the wafer 110 are dissolved into the extraction liquid on the surface of the wafer 110. When the extraction liquid on the surface of the wafer 110 increases to a certain extent, a portion of the extraction liquid flows along the inclined surface 110 of the wafer to the sampling chamber 102 and flows out from the extraction liquid collection port 102 to be collected in a sampling bottle (not shown in fig. 1), so as to extract the contaminants on the surface of the wafer.
However, in the related art, when the first method is used to extract the contaminants on the surface of the wafer, since the wafer is entirely immersed in pure water, the measured contaminant content should be the contaminant content on the entire surface of the wafer, rather than the contaminant content on a single surface, which results in low sampling accuracy, and further affects the accuracy of subsequent detection of the contaminant content on the surface of the wafer. In addition, the extraction process of the first method requires manual operation, which is likely to cause artificial pollution, and also affects sampling accuracy and lowers sampling efficiency. When the second method is used for extracting the pollutants on the surface of the wafer, the extraction liquid cannot be ensured to be spread on the surface of the wafer, and meanwhile, the volume of the extraction liquid sprayed on the surface of the wafer cannot be accurately known, so that the total content and the concentration of the pollutant particles cannot be accurately calculated. In addition, the extraction liquid will contact with the air in a large area during the spraying process, and will dissolve the gaseous ions in the air into the extraction liquid, which will affect the sampling accuracy.
SUMMERY OF THE UTILITY MODEL
An object of the utility model is to provide a base plate surface contamination sampling device to solve the technical problem that relevant art base plate surface contamination sampling device's sample accuracy is low.
In order to solve the technical problem, the utility model provides a substrate surface pollutant sampling device, sampling device includes:
the accommodating cavity comprises a base and a surrounding component, wherein the surrounding component is arranged on the base and surrounds the outer side of the base to define an accommodating space;
a sealing assembly disposed in the receiving space and abutting against an inner wall of the surrounding assembly, wherein the sealing assembly defines a sub-opening in the receiving space for receiving a substrate;
the cover body is used for covering the accommodating cavity to seal the accommodating cavity;
at least one ultrasonic transducer arranged on the cover body and used for emitting ultrasonic waves towards the accommodating space of the accommodating cavity;
the water inlet pipe and the water outlet pipe are arranged on the cover body, wherein the water inlet pipe is connected with an extraction liquid supply device, and the water outlet pipe is connected with an extraction liquid collecting device.
Optionally, the sub-opening is circular, and a diameter of the sub-opening is smaller than or equal to a diameter of the substrate.
Optionally, the sealing assembly is an elastic member, and a diameter of the sub-opening defined by the elastic member is smaller than a diameter of the substrate.
Optionally, the thickness of the sealing assembly is greater than or equal to the thickness of the substrate.
Optionally, the sampling device further comprises a connecting piece connected with the cover body and the outer wall of the accommodating cavity, and the connecting piece is used for opening or closing the cover body; when the cover body is closed, the connecting piece locks the cover body and the accommodating cavity.
Optionally, the sampling device further comprises a support for supporting the receiving cavity; the bracket comprises a movable bracket and a fixed bracket, the movable bracket is arranged outside the accommodating cavity along the direction vertical to the outer wall of the surrounding assembly, and the movable bracket is also vertically connected to the fixed bracket which is used for supporting the movable bracket; wherein, through making the activity support rotation in order to drive hold the chamber synchronous revolution.
Optionally, the sampling device includes two movable supports and two fixed supports, the two movable supports are arranged oppositely, and each movable support is vertically connected to the fixed support.
Optionally, a first valve is arranged on the water inlet pipe, and the first valve is used for controlling the water inlet pipe to be switched on or switched off;
and the water outlet pipe is provided with a second valve, and the second valve is used for controlling the water outlet pipe to be switched on or switched off.
Optionally, the extract liquid supply device is located above the accommodating cavity, and the extract liquid collecting device is located below the accommodating cavity; and the connecting position of the water outlet pipe and the cover body is positioned at the top end of one side of the cover body far away from the containing cavity.
Optionally, a scale mark is arranged on the pipe wall of the water outlet pipe, and the scale mark is located between the connection position of the water outlet pipe and the cover body and the setting position of the second valve, and is used for measuring the volume of the extraction liquid conveyed to the containing cavity.
Optionally, the substrate includes a wafer.
To sum up, in the substrate surface contaminant sampling device provided by the present invention, the sealing component is around setting up in the accommodation space of the accommodation chamber, and support and lean on the inner wall around the component of the accommodation chamber, and, the sealing component is in a sub-opening for accommodating the substrate is defined in the accommodation space. The cover body is mainly used for covering the containing cavity to seal the containing cavity, a water inlet pipe and a water outlet pipe are further arranged on the cover body, the water inlet pipe is connected with the extraction liquid supply device, and the water outlet pipe is connected with the extraction liquid collecting device.
In this embodiment, when the substrate is placed in the sub-opening, only one surface (i.e., a manufacturing surface) of the substrate may be exposed based on the sealing of the sealing assembly, and at this time, when the extraction liquid is conveyed into the accommodating cavity, the extraction liquid only contacts the manufacturing surface of the substrate and does not contact other surfaces of the substrate, so that particles attached to other surfaces of the substrate do not exist in the finally extracted extraction liquid, the sampling accuracy is ensured, the accuracy in the subsequent detection of the content of the contaminant ions is ensured, and the yield of the semiconductor device is ensured.
And, the utility model discloses in, mainly through the inlet tube to carry the extract in holding the chamber, and will through the outlet pipe the extract that holds in the chamber is extracted, then the extract is whole can not contact with external environment to the phenomenon that "gaseous form ion among the external environment dissolves to in the extract" can not appear, then has ensured the sample accuracy equally.
In addition, in this embodiment, the scale marks are arranged on the pipe wall of the water outlet pipe, so that the volume of the extraction liquid conveyed into the containing cavity can be accurately determined, and the total content and concentration of pollutant particles can be accurately calculated.
Furthermore, in the utility model discloses in, the lid is close to one side that holds the chamber still is provided with ultrasonic transducer. And before the substrate is placed into the accommodating cavity, the extraction liquid is conveyed into the accommodating cavity and the ultrasonic transducer is started to clean the accommodating cavity, so that the cleanliness of the accommodating cavity is ensured, and the influence of particles in the accommodating cavity on a sampling result is avoided. And after the substrate is placed in the accommodating cavity, when the extraction liquid is conveyed into the accommodating cavity to dissolve the pollutant particles on the manufacturing surface of the substrate, the ultrasonic transducer is also started, so that the pollutant particles on the manufacturing surface of the substrate can be completely dissolved out, and the sampling accuracy is ensured again.
Drawings
FIG. 1 is a schematic diagram of a substrate surface contaminant sampling device according to the related art;
fig. 2 is a schematic structural diagram of a substrate surface contaminant sampling device according to an embodiment of the present invention;
fig. 3 is a cross-sectional view of an accommodating chamber according to an embodiment of the present invention;
fig. 4 is a top view of an accommodating chamber provided in an embodiment of the present invention;
fig. 5 to fig. 8 are schematic structural views of a substrate surface contaminant sampling device provided in an embodiment of the present invention during a sampling process.
The reference numerals are explained below:
01-a containing cavity; 011-a base; 012-surrounding component; 02-a seal assembly; 03-a cover body; 04-a water inlet pipe; 05-water outlet pipe; 06-an extraction liquid supply device; 07-an extract liquid collecting device; 08-ultrasonic ring energy device; 09-a scaffold; 091-mobile stent; 092-fixed support; a-an accommodation space; b-sub-opening; c-a first valve; d-a second valve; e-the direction of rotation of the movable stent 091; f-a substrate; i-extract liquid.
Detailed Description
The substrate surface contaminant sampling device provided by the present invention will be described in further detail with reference to the accompanying drawings and specific embodiments. The advantages and features of the present invention will become more apparent from the following description. It should be noted that the drawings are in simplified form and are not to precise scale, and are provided for convenience and clarity in order to facilitate the description of the embodiments of the present invention.
Fig. 2 is a schematic structural diagram of a substrate surface contaminant sampling device according to an embodiment of the present invention, as shown in fig. 2, the sampling device may include:
A sealing assembly 02 (refer to fig. 3 and 4), the sealing assembly 02 is disposed in the accommodating space a in a surrounding manner, and abuts against an inner wall of the surrounding assembly 012, wherein the sealing assembly 012 defines a sub-opening B for accommodating the substrate in the accommodating space a, the substrate may be a wafer, and the material of the sealing assembly 02 may include a material with high compactness, for example, a material such as a silicone gasket.
A cover 03 (refer to fig. 2), the cover 03 covering the receiving cavity 01 to seal the receiving cavity 01.
At least one ultrasonic transducer 08 (see fig. 2, which is illustrated in fig. 2 by way of example as two ultrasonic transducers), is disposed on the cover 03, and is configured to emit ultrasonic waves toward the accommodating space a of the accommodating chamber 01.
The extraction liquid collecting device comprises a water inlet pipe 04 and a water outlet pipe 05 which are arranged on the cover body 03, wherein the water inlet pipe 04 is connected with an extraction liquid supplying device 06, and the water outlet pipe 05 is connected with an extraction liquid collecting device 07.
In this embodiment, the extraction liquid may include pure water, which is easily obtained, and the ion concentration content in the pure water is very low, so that the sampling accuracy is not affected.
And, it should be noted that the ultrasonic transducer 08 should be arranged to protrude from the outer side of the cover body, so as to ensure that the ultrasonic transducer 08 does not contact the extraction liquid in the containing cavity when the extraction liquid is subsequently conveyed into the containing cavity 01, and avoid that the pollutants on the ultrasonic transducer 08 are dissolved into the extraction liquid in the containing cavity to affect the sampling result.
To sum up, in the substrate surface contaminant sampling device provided by the present invention, the sealing component is around setting up in the accommodation space of the accommodation chamber, and support and lean on the inner wall around the component of the accommodation chamber, and, the sealing component is in a sub-opening for accommodating the substrate is defined in the accommodation space. The cover body is mainly used for covering the containing cavity to seal the containing cavity, a water inlet pipe and a water outlet pipe are further arranged on the cover body, the water inlet pipe is connected with the extraction liquid supply device, and the water outlet pipe is connected with the extraction liquid collecting device.
In this embodiment, when the substrate is placed in the sub-opening, only one surface (i.e., a manufacturing surface) of the substrate may be exposed based on the sealing of the sealing assembly, and at this time, when the extraction liquid is conveyed into the accommodating cavity, the extraction liquid only contacts the manufacturing surface of the substrate and does not contact other surfaces of the substrate, so that particles attached to other surfaces of the substrate do not exist in the finally extracted extraction liquid, the sampling accuracy is ensured, the accuracy in the subsequent detection of the content of the contaminant ions is ensured, and the yield of the semiconductor device is ensured.
And, the utility model discloses in, mainly through the inlet tube to carry the extract in holding the chamber, and will through the outlet pipe the extract that holds in the chamber is extracted, then the extract is whole can not contact with external environment to the phenomenon that "gaseous form ion among the external environment dissolves to in the extract" can not appear, then has ensured the sample accuracy equally.
And, in the utility model discloses, the lid is close to one side that holds the chamber still is provided with ultrasonic transducer. And before the substrate is placed into the accommodating cavity, the extraction liquid is conveyed into the accommodating cavity and the ultrasonic transducer is started to clean the accommodating cavity, so that the cleanliness of the accommodating cavity is ensured, and the influence of particles in the accommodating cavity on a sampling result is avoided. And after the substrate is placed in the accommodating cavity, when the extraction liquid is conveyed into the accommodating cavity to dissolve the pollutant particles on the manufacturing surface of the substrate, the ultrasonic transducer is also started, so that the pollutant particles on the manufacturing surface of the substrate can be completely dissolved out, and the sampling accuracy is ensured again.
The following describes the substrate surface contaminant sampling device provided by the embodiments of the present invention in detail.
In this embodiment, the outer peripheries of the accommodating cavity 01 and the sealing component 02 may be circular, and the shape of the sub-opening B may also be circular, so that a better match with a substrate may be achieved. Also, in this embodiment, the thickness of the sealing component 02 should be greater than or equal to that of the substrate, and the diameter of the sub-opening B should be less than or equal to that of the substrate, so as to ensure that when the substrate is placed in the sub-opening B, the top surface of the substrate is lower than the top surface of the sealing component 02, and the side surface of the substrate can interfere with the sealing component 02, so that only one surface (i.e., the manufacturing surface) of the substrate is exposed, and thus the sealing component 02 can achieve a better sealing effect.
And, it should be noted that, in this embodiment, the sealing component 02 may be an elastic member, and then, the diameter of the sub-opening B defined by the elastic member may be slightly smaller than the diameter of the substrate, for example, the diameter of the sub-opening B may be 1-5nm smaller than the diameter of the substrate. Thus, when the substrate is placed in the sub-opening B, based on the elasticity of the sealing assembly 02, the substrate can be clamped in the sub-opening B, so that no gap exists between the substrate and the sealing assembly 02, and when the extraction liquid is subsequently conveyed into the accommodating cavity 01, the phenomenon that the extraction liquid flows into the side surface of the substrate through the gap between the substrate and the sealing assembly to affect the sampling accuracy is avoided.
Further, in this embodiment, the sampling device may further include a connecting member (not shown) connected to the outer walls of the cover 03 and the accommodating cavity 01 (e.g., the outer wall of the surrounding assembly 012 or the outer wall of the base 011), wherein the connecting member (e.g., a hinge) is mainly used for opening or closing the cover, and when the cover is closed, the connecting member locks the cover and the accommodating cavity.
And, as shown with reference to fig. 2, the sampling device may further include a holder 09 for supporting the receiving chamber 01.
Among other things, the stent 09 may include a movable stent 091 and a fixed stent 092. The movable carriers 091 are disposed outside the accommodating chamber 01 in a direction perpendicular to the outer wall of the surrounding member 012, and each movable carrier 091 is also perpendicularly connected to a fixed carrier 092, and the fixed carrier 092 is used to support the movable carrier 091. The movable holder 091 is movably connected to the fixed holder 092, the movable holder 091 can rotate, for example, the movable holder 091 can rotate along the direction E shown in fig. 2, and the movable holder 091 can rotate to drive the accommodating cavity 01 to rotate synchronously.
For example, as shown in fig. 2, the sampling device may include two movable stents 091 and two fixed stents 092, and the two movable stents 091 are oppositely disposed, and each of the movable stents 091 is vertically connected to one of the fixed stents 092.
On this basis, referring again to fig. 2, in the present embodiment, the extraction liquid supply device 06 may be located at an upper position of the accommodating chamber 01, and the extraction liquid collection device 07 may be located at a lower position of the accommodating chamber 01. Simultaneously, can also be provided with first valve C on the inlet tube 04, first valve C can be used for the control the inlet tube switches on or ends. The water outlet pipe 05 can be further provided with a second valve D, and the second valve D is used for controlling the on/off of the water outlet pipe 05.
In this way, when the extraction liquid in the extraction liquid supply device 06 is conveyed into the accommodating cavity 01, by rotating the movable support 091 to make the cover body 03 face the extraction liquid supply device 06 (i.e. make the cover body 03 be located above the accommodating cavity 01) and make the first valve C be in an open state, the extraction liquid in the extraction liquid supply device 06 flows into the accommodating cavity 01 through the water inlet pipe 04 under the action of gravity.
And when the extraction liquid in the accommodating cavity 01 is conveyed into the extraction liquid collecting device 07, the cover body 03 faces the extraction liquid collecting device 07 by rotating the movable support 091 (that is, the cover body 03 is positioned below the accommodating cavity 01), and the second valve D is in an open state, and at this time, the extraction liquid in the accommodating cavity 01 flows into the extraction liquid collecting device 07 through the water outlet pipe 05 under the action of gravity.
It should be noted that in this embodiment, when the movable support 091 is rotated to make the cover 03 face the extraction liquid collecting device 07, a part of the extraction liquid in the accommodating cavity 01 flows into the water inlet pipe 04 and is located between the setting position of the first valve C and the connection position of the water inlet pipe 04 and the cover, at this time, the extraction liquid flowing into the water inlet pipe 04 cannot flow out through the water outlet pipe 05, and the extraction liquid in the accommodating cavity 01 cannot completely flow out into the extraction liquid collecting device 07, which affects sampling accuracy.
In this respect, in this embodiment, the first valve C of the water inlet pipe 04 should be disposed as close as possible to the connection position of the water inlet pipe 04 and the cover 3, or the first valve C may be disposed directly at the connection position of the water inlet pipe 04 and the cover 3, so that when the movable support 091 is rotated to make the cover 03 face the extraction fluid collecting device 07, the extraction fluid in the accommodating cavity 01 does not flow into the water inlet pipe 04 or flows into the extraction fluid collecting device 07 in a small amount, and the extraction fluid in the accommodating cavity 01 can flow out into the extraction fluid collecting device 07 as completely as possible, thereby ensuring the sampling accuracy.
In addition, in this embodiment, the connection position of the water outlet pipe 05 and the cover 03 may be located at the top end of the side of the cover 03 away from the accommodating cavity 01. Therefore, when the cover 03 is positioned below the cavity 01 by rotating the movable support 02, the connection position of the water outlet pipe 05 and the cover 03 is lower than the cavity 01 and lower than the extraction liquid in the accommodating cavity 01, and at this time, the extraction liquid in the cavity 01 can be ensured to completely flow out through the water outlet pipe 05.
For example, as shown in fig. 2, the cover 03 may be shaped as a cone, and the connection position of the outlet pipe 05 and the cover 03 may be located at the vertex of the cone.
In addition, in this embodiment, the sampling device may further include a water pump (not shown), and the water pump is connected to the water outlet pipe 05 and may be configured to pump the liquid in the accommodating cavity 01 to the extraction liquid collecting device 07. Therefore, when the extraction liquid in the accommodating cavity 01 is conveyed to the extraction liquid collecting device 07, the water pump can be turned on without rotating the movable support 092, so that the extraction liquid in the accommodating cavity 01 can be directly pumped to the extraction liquid collecting device 07 by the water pump.
In this embodiment, a calibration line (not shown) may be disposed on a pipe wall of the water outlet pipe 05, and the calibration line may be specifically located between a connection position of the water outlet pipe 05 and the cover 03 and a setting position of the second valve D, so as to measure a volume of the extraction liquid delivered to the sampling device.
Next, the specific method for using the substrate surface contamination sampling device provided in this embodiment will be described in detail with reference to the above. Fig. 5 to 8 are cross-sectional views of a substrate surface contaminant sampling device provided in an embodiment of the present invention during a sampling process.
Specifically, referring to fig. 5, before a substrate is placed into the receiving cavity 01, the cover body 03 is controlled to be closed, the cover body 03 and the receiving cavity 01 are locked by the connecting member, the movable support 091 is rotated to make the cover body 03 face the extraction liquid supply device 06, and at the same time, the first valve C is opened, so that the extraction liquid supply device 06 supplies extraction liquid I into the receiving cavity 01 through the water inlet pipe 04 until the extraction liquid I fills the space in the receiving cavity 01 and the cover body 03. At this time, the ultrasonic transducer 08 is started to emit ultrasonic waves toward the accommodating space a of the accommodating chamber 01, so as to clean the cavity of the accommodating chamber 01 and the cover 02 and ensure the cleanliness of the cavity of the accommodating chamber 01 and the cover 02.
It should be noted that, in the process of cleaning the accommodating cavity 01, the first valve C and the second valve D are both kept in an open state, so that the extraction liquid in the accommodating cavity 01 continuously overflows through the water outlet pipe 05, and meanwhile, the extraction liquid supply device 06 continuously supplies extraction liquid to the accommodating cavity 01, so as to ensure that the extraction liquid in the sampling device is always in a full state.
Then, when the cleaning of the sampling device is completed, referring to fig. 6, the ultrasonic transducer 08 and the first valve C are closed, the supply of the extraction liquid into the accommodating cavity 01 is stopped, at the same time, the second valve D is kept open, and the cover 03 is moved toward the extraction fluid collection device 07 by rotating the movable holder 091, the extraction liquid in the containing cavity 01 can naturally flow into the extraction liquid collecting device 07 under the action of gravity at this time, and, after the extraction liquid in the accommodating cavity 01 completely flows out to the extraction liquid collecting device 07, considering that the extraction liquid collected by the extraction liquid collecting device 07 at this time is the extraction liquid after cleaning the accommodating cavity 01, which is not the sampled extraction liquid to be detected subsequently, the extraction liquid collected by the extraction liquid collection device 07 is discharged from the extraction liquid collection device 07 at this time.
Thereafter, referring to fig. 7, by rotating the movable holder 091 so that the cover 03 faces the extraction fluid supply device 06 and opening the cover 03, a substrate F is put into the housing chamber 01 so that the non-manufacturing surface of the substrate F faces the base 011, thereby exposing only the manufacturing surface of the substrate F, and then closing the cover 03 and locking the cover 03 and the housing chamber 01. And then opening the first valve C, and closing the second valve D, so that the extraction liquid in the extraction liquid supply device 04 flows into the accommodating cavity 01 through the water inlet pipe 04 under the action of gravity to fill the space in the accommodating cavity 01 and the cover body 03, and closing the first valve C and stopping conveying the extraction liquid into the accommodating cavity 01 until the level of the extraction liquid I in the accommodating cavity 01 rises to the scale mark of the water outlet pipe 05. It should be noted that in this embodiment, the level of the extraction liquid I in the sampling device needs to be controlled to be higher than the connection position between the water outlet pipe 05 and the cover 03 and lower than the setting position of the second valve D, and at this time, the volume v (l) of the extraction liquid in the sampling device can be determined by reading the scale position corresponding to the level.
Then, the ultrasonic transducer 08 is turned on to enable substrate surface ions to be completely dissolved into the extraction liquid I, and after the predetermined time, which may be between 30-50min, for example, may be 40min, is reached, the ultrasonic transducer 08 is turned off and the second valve D is turned on, and meanwhile, the cover 03 is turned towards the extraction liquid collecting device 07 by rotating the movable support 091, so that the extraction liquid in the sampling device completely flows out to the extraction liquid collecting device 07 under the action of gravity. Finally, the extract in the extract collecting device 07 is subjected to concentration analysis by an ion chromatography to detect the ion species of the contaminant in the extract collecting device 07 and the ion concentration W (Ug/L) of each species. Based on the volume V of the extracted liquid, the ion concentration W of each species, and the area A (cm) of the production surface of the substrate2) Can accurately calculate the ion content C of each kinds(Ug/cm2) Wherein, Cs＝(W×V)/A。
Finally, the cover 03 is turned toward the extraction liquid supply device 06 by rotating the movable support 091, the cover 03 is opened, and the substrate F is taken out for subsequent operations.
In addition, in this embodiment, the liquid in the containing cavity may not flow out to the extraction liquid collecting device 07 by rotating the movable bracket 092. The liquid in the accommodating cavity 01 can also be pumped out to the extraction liquid collecting device 07 by directly utilizing a water pump connected with the water outlet pipe 05.
To sum up, in the substrate surface contaminant sampling device provided by the present invention, the sealing component is around setting up in the accommodation space of the accommodation chamber, and support and lean on the inner wall around the component of the accommodation chamber, and, the sealing component is in a sub-opening for accommodating the substrate is defined in the accommodation space. The cover body is mainly used for covering the containing cavity to seal the containing cavity, a water inlet pipe and a water outlet pipe are further arranged on the cover body, the water inlet pipe is connected with the extraction liquid supply device, and the water outlet pipe is connected with the extraction liquid collecting device.
In this embodiment, when the substrate is placed in the sub-opening, only one surface (i.e., a manufacturing surface) of the substrate may be exposed based on the sealing of the sealing assembly, and at this time, when the extraction liquid is conveyed into the accommodating cavity, the extraction liquid only contacts the manufacturing surface of the substrate and does not contact other surfaces of the substrate, so that particles attached to other surfaces of the substrate do not exist in the finally extracted extraction liquid, the sampling accuracy is ensured, the accuracy in the subsequent detection of the content of the contaminant ions is ensured, and the yield of the semiconductor device is ensured.
In addition, in this embodiment, when the extraction liquid is conveyed into the sampling device, the extraction liquid fills the space surrounded by the accommodating cavity and the cover, so that the extraction liquid can be ensured to completely contact the whole manufacturing surface of the substrate, and the sampling accuracy is further ensured.
Further, the utility model discloses in, mainly through the inlet tube to carry the extract in holding the chamber, and will through the outlet pipe the extract that holds in the chamber is extracted, then the extract is whole can not contact with external environment to the phenomenon that "gaseous form ion in the external environment dissolves to in the extract" can not appear, then has ensured the sample accuracy equally.
In addition, in this embodiment, the scale marks are arranged on the pipe wall of the water outlet pipe, so that the volume of the extraction liquid conveyed into the containing cavity can be accurately determined, and the total content and concentration of pollutant particles can be accurately calculated.
Furthermore, in the utility model discloses in, the lid is close to one side that holds the chamber still is provided with ultrasonic transducer. And before the substrate is placed into the accommodating cavity, the extraction liquid is conveyed into the accommodating cavity and the ultrasonic transducer is started to clean the accommodating cavity, so that the cleanliness of the accommodating cavity is ensured, and the influence of particles in the accommodating cavity on a sampling result is avoided. And after the substrate is placed in the accommodating cavity, when the extraction liquid is conveyed into the accommodating cavity to dissolve the pollutant particles on the manufacturing surface of the substrate, the ultrasonic transducer is also started, so that the pollutant particles on the manufacturing surface of the substrate can be completely dissolved out, and the sampling accuracy is ensured again.
Finally, adopt the utility model provides a when sampling device takes a sample, sampling efficiency is also higher.
The embodiments in the present description are described in a progressive manner, each embodiment focuses on differences from other embodiments, and the same and similar parts among the embodiments are referred to each other. For the system disclosed by the embodiment, the description is relatively simple because the system corresponds to the method disclosed by the embodiment, and the relevant points can be referred to the method part for description.
The above description is only for the preferred embodiment of the present invention and is not intended to limit the scope of the present invention, and any modification and modification made by those skilled in the art according to the above disclosure are all within the scope of the claims.
Claims (11)
1. A substrate surface contaminant sampling device, the sampling device comprising:
the accommodating cavity comprises a base and a surrounding component, wherein the surrounding component is arranged on the base and surrounds the outer side of the base to define an accommodating space;
a sealing assembly disposed in the receiving space and abutting against an inner wall of the surrounding assembly, wherein the sealing assembly defines a sub-opening in the receiving space for receiving a substrate;
the cover body is used for covering the accommodating cavity to seal the accommodating cavity;
at least one ultrasonic transducer arranged on the cover body and used for emitting ultrasonic waves towards the accommodating space of the accommodating cavity;
the water inlet pipe and the water outlet pipe are arranged on the cover body, wherein the water inlet pipe is connected with an extraction liquid supply device, and the water outlet pipe is connected with an extraction liquid collecting device.
2. The substrate surface contaminant sampling device of claim 1, wherein the sub-opening is circular in shape and has a diameter less than or equal to a diameter of the substrate.
3. The substrate surface contaminant sampling device of claim 2, wherein the seal assembly is a resilient member defining the sub-opening with a diameter less than a diameter of the substrate.
4. The substrate surface contaminant sampling device of claim 1, wherein the seal assembly has a thickness greater than or equal to a thickness of the substrate.
5. The substrate surface contaminant sampling device of claim 1, further comprising a connector coupled to the cover and an outer wall of the receiving cavity for opening or closing the cover; when the cover body is closed, the connecting piece locks the cover body and the accommodating cavity.
6. The substrate surface contaminant sampling device of claim 1, further comprising a holder for supporting the containment chamber; the bracket comprises a movable bracket and a fixed bracket, the movable bracket is arranged outside the accommodating cavity along the direction vertical to the outer wall of the surrounding assembly, and the movable bracket is also vertically connected to the fixed bracket which is used for supporting the movable bracket; wherein, through making the activity support rotation in order to drive hold the chamber synchronous revolution.
7. The substrate surface contaminant sampling device of claim 6, wherein the sampling device comprises two of the movable supports and two of the fixed supports, the two movable supports being disposed opposite one another, each of the movable supports being perpendicularly connected to the fixed support.
8. The substrate surface contaminant sampling device of claim 6,
the water inlet pipe is provided with a first valve, and the first valve is used for controlling the conduction or the stop of the water inlet pipe;
and the water outlet pipe is provided with a second valve, and the second valve is used for controlling the water outlet pipe to be switched on or switched off.
9. The substrate surface contaminant sampling device of claim 8, wherein the extraction fluid supply means is located above the receiving chamber and the extraction fluid collection means is located below the receiving chamber; and the connecting position of the water outlet pipe and the cover body is positioned at the top end of one side of the cover body far away from the containing cavity.
10. The substrate surface contaminant sampling device of claim 8,
and scale marks are arranged on the pipe wall of the water outlet pipe and are positioned between the connecting position of the water outlet pipe and the cover body and the setting position of the second valve, and the scale marks are used for measuring the volume of the extraction liquid conveyed to the containing cavity.
11. The substrate surface contaminant sampling device of any one of claims 1 to 10, wherein the substrate comprises a wafer.
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| CN202021248626.1U CN212432551U (en) | 2020-06-30 | 2020-06-30 | Substrate surface pollutant sampling device |
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