CN212429158U

CN212429158U - Asymmetric electrode and electromagnetic force preload out-of-plane actuating micropump

Info

Publication number: CN212429158U
Application number: CN202021224353.7U
Authority: CN
Inventors: 郭得雨; 孙景昱; 郭东杰
Original assignee: Zhengzhou University of Light Industry
Current assignee: Zhengzhou University of Light Industry
Priority date: 2020-06-29
Filing date: 2020-06-29
Publication date: 2021-01-29
Anticipated expiration: 2030-06-29

Abstract

The utility model discloses an asymmetric electrode and electromagnetic force preload off-plate actuating micropump, which comprises a housin, the casing both sides are equipped with inlet channel and outlet conduit, be equipped with the lamella valve on inlet channel and the outlet conduit, opening and being closed of synergism control water inlet and delivery port. The upper portion of the shell is provided with a dielectric elastomer, a cover plate is arranged above the dielectric elastomer, the dielectric elastomer and the cover plate are connected with the shell in a sealing mode, a soft magnet is arranged on one side, close to a cavity of the shell, of the dielectric elastomer, and an electromagnet is arranged at the position, corresponding to the soft magnet, of the bottom of the shell. The large-displacement out-of-plane actuation can be realized under the combined action of the asymmetric electrode and the electromagnetic force as the preload, and the micro pump can realize high-power pumping.

Description

Asymmetric electrode and electromagnetic force preload out-of-plane actuating micropump

Technical Field

The invention belongs to the technical field of micropumps, and particularly relates to an asymmetric electrode and electromagnetic force preload out-of-plane actuating micropump.

Background

Dielectric Elastomer (DEs) is an electromechanical transduction technology that has emerged in recent 20 years. Due to their high potential and versatility, i.e. in the united states, they can be used as actuators, sensors or generators. Compared with other electromechanical transduction technologies, the dynamic ultrasonic sensor has the advantages of large deformation, high power density, high energy efficiency, light weight, short response time, silent work and the like. Finally, DEs may be used as both an actuator and a sensor, taking advantage of the so-called self-sensing properties of the material. Self-sensing is attractive because it allows both driving and sensing tasks to be performed by a single sensor, thereby reducing size and cost. Potential applications for DEs as an actuator include pump and valve control units, as well as speakers, pressure sensors, strain sensors, and electrical actuators, according to recent literature.

One of the main features of the DE valve attraction for industrial applications is the relatively low power consumption, which is about milliwatts for low frequency operation. Furthermore, the operation of the DE valve is almost silent, thus producing significantly lower heat dissipation than a standard solenoid.

SUMMERY OF THE UTILITY MODEL

To the problem that exists among the prior art, the utility model provides an asymmetric electrode and electromagnetic force preload off-plate actuating micropump can realize big displacement off-plate actuating under the combined action of asymmetric electrode and electromagnetic force as the preload, and the micropump can realize high-power pumping.

In order to solve the technical problem, the utility model discloses a following technical scheme:

the asymmetric electrode and electromagnetic force preload out-of-plane actuating micropump comprises a shell, wherein a water inlet pipeline and a water outlet pipeline are arranged on two sides of the shell, and flap valves are arranged on the water inlet pipeline and the water outlet pipeline and are used for controlling the opening and closing of a water inlet and a water outlet in a synergistic effect. The upper portion of the shell is provided with a dielectric elastomer, a cover plate is arranged above the dielectric elastomer, the dielectric elastomer and the cover plate are connected with the shell in a sealing mode, a soft magnet is arranged on one side, close to a cavity of the shell, of the dielectric elastomer, and an electromagnet is arranged at the position, corresponding to the soft magnet, of the bottom of the shell.

Furthermore, a groove is formed in the position, corresponding to the soft magnet, of the bottom of the shell, and the electromagnet is arranged in the groove.

Further, the dielectric elastomer comprises a base film, and electrodes with different moduli are arranged on two sides of the base film.

Further, the soft magnet is fixedly connected with the dielectric elastomer in a bonding mode, a silicon rubber film is arranged on one side, provided with the soft magnet, of the dielectric elastomer, and the dielectric elastomer and the soft magnet are packaged as a whole through the silicon rubber film.

Further, the electrode is connected with a high-voltage pulse power supply through a lead.

The utility model discloses a dielectric elastomer off-plate actuator arouses the increase of the inside volume of cavity under high-voltage electric field's effect, and the cavity resumes initial volume when removing the signal of telecommunication. The electromagnetic force preload is provided by an electromagnetic force generated by a magnetic field generated by an electromagnet interacting with a soft magnet fixed at a central position of the dielectric elastomer.

The invention has the following beneficial effects: 1. asymmetric electrodes on two sides of the dielectric elastomer have different mechanical properties, and out-of-plane actuation is realized under the excitation of an electric field signal. 2. The electromagnetic force has nonlinearity, and the existence and the strength of a magnetic field can be controlled by controlling the electrification and the current, so that the electromagnetic force has good controllability. 3. The large-displacement out-of-plane actuation can be realized under the combined action of the asymmetric electrode and the electromagnetic force as the preload, and the micro pump can realize high-power pumping.

Drawings

In order to illustrate the embodiments of the present invention more clearly, the drawings that are needed in the description of the embodiments will be briefly described below, and it is obvious that the drawings in the description below are only some embodiments of the present invention, and that other drawings can be obtained by those skilled in the art without inventive work.

FIG. 1 is a cross-sectional view of a micro pump in a water-absorbing state;

FIG. 2 is a sectional view of a micro pump in a drainage state;

in the figure: 1. dielectric elastomer, 2, soft magnet, 3, shell, 4, flap valve, 5, electro-magnet.

Detailed Description

The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without any creative effort belong to the protection scope of the present invention.

As shown in fig. 1 and 2, an asymmetric electrode and electromagnetic force preload out-of-plane actuation micropump comprises a shell 3, wherein the shell 3 is made of engineering plastics; and a water inlet pipeline and a water outlet pipeline are arranged on two sides of the shell 3, and flap valves 4 are arranged on the water inlet pipeline and the water outlet pipeline and are used for controlling the opening and closing of the water inlet and the water outlet under the synergistic action. The upper portion of the shell 3 is provided with a dielectric elastomer 1, a cover plate is arranged above the dielectric elastomer 1, the dielectric elastomer 1 and the cover plate are in sealing connection with the shell 3, soft magnets 2 are arranged on one side, close to a cavity of the shell, of the dielectric elastomer 1, electromagnets 5 are arranged at positions, corresponding to the positions of the soft magnets 2, of the bottom of the shell 3, specifically, the soft magnets 2 are arranged at the center of the dielectric elastomer 1, grooves are arranged at positions, corresponding to the positions of the soft magnets 2, of the bottom of the shell 3, and the electromagnets 5 are arranged in the grooves.

The utility model discloses a dielectric elastomer includes the basement membrane, the basement membrane both sides are equipped with the electrode of different moduli, the electrode passes through the wire and is connected with high-voltage pulse power supply. The soft magnet is fixedly connected with the dielectric elastomer in a bonding mode, a silicon rubber film is arranged on one side, provided with the soft magnet, of the dielectric elastomer, and the dielectric elastomer and the soft magnet are packaged as a whole through the silicon rubber film, so that the influence of liquid in a cavity of the shell on the dielectric elastomer and the soft magnet is avoided.

The working process of the utility model is as follows: electrifying the electromagnet to generate prestress, wherein the prestress is the acting force of a magnetic field generated after the electromagnet is electrified on the soft magnet on the dielectric elastomer, applying prestress on the dielectric elastomer by using the electromagnet and applying a high-voltage pulse signal to the dielectric elastomer, and the period of the prestress provided by the electromagnet is consistent with the period of the high-voltage pulse signal, so that the out-of-plane actuation of the dielectric elastomer is realized; the out-of-plane actuation method is realized by the dual functions of pre-stress and asymmetric electrodes. The utility model discloses a dielectric elastomer off-plate actuator arouses the increase of the inside volume of cavity under high-voltage electric field's effect, and the cavity resumes initial volume when removing the signal of telecommunication. The electromagnetic force preload is provided by an electromagnetic force generated by a magnetic field generated by an electromagnet interacting with a soft magnet fixed at a central position of the dielectric elastomer.

The basement membrane of the embodiment adopts a modified graphene oxide/silicon rubber basement membrane disclosed in application number 2019108198174 entitled "electronic artificial muscular electric actuator, preparation method thereof and application thereof in finger driving devices".

Manufacture of asymmetric electrodes

Adding graphite powder into a silicon rubber solution, adding n-heptane and a curing agent, and uniformly stirring for later use; wherein the mass ratio of the graphite powder, 186 silicon rubber, the cross-linking agent and n-heptane is 5:10:1: 8.

Weighing 2g of commercial electrode component A, adding 3.75g of diluent, and mixing and stirring uniformly for later use; weighing 2g of commercial electrode component B, adding 3.75g of diluent, and mixing and stirring uniformly for later use; mixing the diluted electrode components A and B together, and uniformly stirring for later use.

Assembling dielectric elastomers

The graphite electrode is coated on one side of the basement membrane through a mask to be used as a hard electrode, and moreover, a blank is left at the position of the center of the basement membrane to facilitate bonding of soft magnetic iron. A commercial electrode was painted on the other side of the base film as a soft electrode.

Out-of-plane actuation test

The test device mainly comprises a signal generating unit and a signal amplifying unit. The hardware of the signal generating unit consists of a 6024E multifunctional data acquisition card of NI company; the software is programmed by LABVIEW; the signal amplification unit is composed of a power amplification chip OPA548 by the company TI. The displacement data was collected using a laser beam generated by a laser displacement sensor (Keyence LK3001A, japan) with a sensitivity of 0.1 μm irradiated perpendicularly to the dielectric elastomer at a suitable position from the central portion.

And (3) testing the electric actuating performance: dielectric elastomers with electrodes of different modulus were tested for actuation displacement at different voltages and frequencies using a test apparatus, with the results shown in the following table:

the present invention is not exhaustive and is well known to those skilled in the art.

The above description is only a preferred embodiment of the present invention, and should not be taken as limiting the invention, and any modifications, equivalent replacements, improvements, etc. made within the spirit and principle of the present invention should be included in the protection scope of the present invention.

Claims

1. An asymmetric electrode and electromagnetic force preload out-of-plane actuation micropump is characterized in that: including casing (3), casing (3) both sides are equipped with inlet channel and outlet conduit, be equipped with lamella valve (4) on inlet channel and the outlet conduit, casing upper portion is equipped with dielectric elastomer (1), and dielectric elastomer (1) top is equipped with the apron, and dielectric elastomer and apron and casing sealing connection, dielectric elastomer is close to casing cavity one side and is equipped with soft magnet (2), casing (3) bottom and soft magnet (2) position department of correspondence are equipped with electro-magnet (5).

2. The asymmetric electrode and electromagnetic force preload out-of-plane actuation micropump of claim 1, wherein: the bottom of the shell (3) is provided with a groove corresponding to the position of the soft magnet, and the electromagnet (5) is arranged in the groove.

3. The asymmetric electrode and electromagnetic force preload out-of-plane actuation micropump of claim 1, wherein: the dielectric elastomer (1) comprises a base film, and electrodes with different moduli are arranged on two sides of the base film.

4. The asymmetric electrode and electromagnetic force preload out-of-plane actuation micropump of claim 1, wherein: the soft magnet (2) is fixedly connected with the dielectric elastomer in a bonding mode, a silicon rubber film is arranged on one side, provided with the soft magnet, of the dielectric elastomer (1), and the dielectric elastomer and the soft magnet are packaged as a whole through the silicon rubber film.

5. The asymmetric electrode and electromagnetic force preload out-of-plane actuation micropump of claim 3, wherein: the electrode is connected with a high-voltage pulse power supply through a lead.