CN212420826U - Grinding device with grinding depth capable of being automatically adjusted - Google Patents
Grinding device with grinding depth capable of being automatically adjusted Download PDFInfo
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- CN212420826U CN212420826U CN202020858496.7U CN202020858496U CN212420826U CN 212420826 U CN212420826 U CN 212420826U CN 202020858496 U CN202020858496 U CN 202020858496U CN 212420826 U CN212420826 U CN 212420826U
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Abstract
The utility model discloses a grinding device with automatically adjustable grinding depth, which comprises a grinding wheel and a driving piece of the grinding wheel, wherein the driving piece comprises a grinding wheel transmission motor and a driving wheel; the circumferential surface of the grinding wheel is provided with a supporting wheel, and the supporting wheel supports a product to be degummed so as to be matched with the grinding wheel for grinding and degumming; the supporting wheels are fixedly installed to support the product to be degummed, the product with degummed is provided with a laser height indicator, the laser height indicator monitors the height of the product to be degummed in real time, and monitored data are transmitted to a PLC (programmable logic controller) connected with the laser height indicator; the lifting mechanism is controlled by a PLC to drive the grinding wheel to do lifting motion, and the distance between the grinding wheel and the supporting wheel is adjusted to adapt to the height of the product with degumming; the grinding wheel transmission motor is an automatic control motor based on a PLC (programmable logic controller), and the PLC automatically controls the grinding wheel transmission motor to carry out grinding and degumming in real time based on data of the laser height gauge.
Description
Technical Field
The utility model relates to a belong to semiconductor integrated circuit technology technical field, concretely relates to but grinding depth automatically regulated ground grinder.
Background
With the high density of semiconductor devices, the importance of forming electrodes such as formation, insertion, and damascene of multilayer wirings and interlayer insulating films accompanying the multilayer wirings has increased. After the semiconductor product is subjected to plastic packaging, black plastic packaging glue overflow exists on the surface, and an electroplating blind area is easily formed, so that the glue overflow needs to be removed before electroplating. The existing degumming comprises automatic grinding degumming, sand blasting degumming and manual sand paper polishing degumming.
At present, the height of a grinding wheel for automatically grinding and removing glue is manually adjusted or automatically fixed in a height adjusting mode to match with glue overflowing and removing glue at different heights, height errors are easy to occur during manual adjustment, the grinding depth is easy to be uneven, and quality influence is caused on semiconductor products; the grinding wheel with the automatically fixed height is accurately adjusted to the corresponding height according to different products, but the height of the grinding wheel needs to be adjusted again when the products with different thicknesses are operated, batch processing needs to be carried out according to different products, and the grinding efficiency is influenced if the products are mistaken in batches and the risk of product abrasion is easily caused.
Therefore, there is a need in the semiconductor industry to provide a new polishing apparatus capable of automatically adjusting the height of the polishing wheel according to the glue overflow height, thereby improving the polishing efficiency and the product quality of the semiconductor product.
Disclosure of Invention
In order to solve the problem, the utility model provides a, but can realize two grinding miller simultaneous working, adjust grinding miller height, grinding miller degree of depth's grinding depth automatically regulated ground grinder in real time.
In order to achieve the purpose, the grinding device with the automatically adjustable grinding depth comprises a grinding wheel and a driving piece of the grinding wheel, wherein the driving piece comprises a grinding wheel transmission motor and a driving wheel;
the circumferential surface of the grinding wheel is provided with a supporting wheel, and the supporting wheel supports a product to be degummed so as to be matched with the grinding wheel for grinding and degumming;
the supporting wheels are fixedly installed with a supported product to be degummed, the product with degummed is provided with a laser height indicator, the laser height indicator monitors the height of the product to be degummed in real time and transmits monitored data to a PLC (programmable logic controller) connected with the laser height indicator;
the lifting mechanism is controlled by a PLC (programmable logic controller) to drive the grinding wheel to do lifting motion, and the distance between the grinding wheel and the supporting wheel is adjusted to adapt to the height of the product with the degumming function;
the grinding wheel transmission motor is an automatic control motor based on a PLC (programmable logic controller), and the PLC controls the grinding wheel transmission motor to carry out grinding and degumming in real time based on data of the laser height gauge.
Furthermore, the lifting mechanism comprises a lifting body and a lifting motor for driving the lifting body to do lifting motion, and the lifting motor is fixedly arranged on the screw fixing base;
the lifting body is fixedly arranged on a nut seat, the nut seat is rotatably arranged on a screw rod, and the nut seat is matched with the screw rod to form a spiral raceway;
the supporting wheel is fixedly arranged on the lifting body;
the lifting motor drives the screw rod to rotate, the screw rod and the nut seat do relative rotary motion, the nut seat drives the lifting body to rotate, the lifting body drives the grinding wheel to ascend or descend, and the distance between the grinding wheel and the supporting wheel is adjusted.
Furthermore, two grinding wheels are fixedly connected to the lifting body, the grinding wheels comprise a first grinding wheel and a second grinding wheel, and the vertical projection and the horizontal projection of the first grinding wheel and the second grinding wheel are not staggered;
the first grinding wheel and the second grinding wheel are rotatably connected to the lifting body through a first bearing and a second bearing.
Further, the first grinding wheel and the second grinding wheel share a grinding wheel transmission motor for transmission;
the transmission wheel comprises a first grinding wheel transmission wheel and a second grinding wheel transmission wheel;
the grinding wheel transmission motor synchronously drives the first grinding wheel transmission wheel and the second grinding wheel transmission wheel through the motor transmission wheel to drive the first grinding wheel and the second grinding wheel to rotate.
Furthermore, the grinding wheel transmission motor is connected with a current detector in series, the current detector detects the current of the grinding wheel transmission motor in real time and transmits current data to the PLC, and the PLC controls the grinding depth of the grinding wheel through the current of the grinding wheel transmission motor.
Further, the supporting wheel and the laser height indicator are installed on a fixed position of the grinding device.
Compared with the prior art, the utility model discloses an advantage is with positive effect: the utility model utilizes the laser height measuring instrument to monitor the height of the products with degumming in real time, and utilizes the PLC controller to control the height of the grinding wheel in real time to adapt the products to be degummed for grinding and degumming; double grinding wheels are selected to improve the grinding and degumming efficiency; by using
Description of the drawings:
fig. 1 is a schematic structural diagram of the present invention;
in the drawings: a PLC controller 1; a product to be degummed 2; a laser altimeter 3; a first grinding wheel 5; a second grinding wheel 4; a first bearing 7; a second bearing 6; a lifting body 11; a nut seat 12; a screw rod 13; a screw fixing base 14; a lift motor 15; a grinding wheel drive motor 16; a motor drive wheel 17; a first grinding wheel transmission wheel 18; a second grinding wheel transmission wheel 19; a current detector 20; a first support wheel 22; a second support wheel 21.
Detailed Description
The present invention will be further explained with reference to the drawings and examples.
Example 1
As shown in fig. 1, the grinding device with automatically adjustable grinding depth of the present invention comprises a grinding wheel and a driving member of the grinding wheel, wherein the driving member of the grinding wheel comprises a grinding wheel transmission motor 16 and a transmission wheel, the grinding wheel transmission motor 16 drives the transmission wheel, and the transmission wheel drives the grinding wheel to rotate and grind;
the circumferential surface of the grinding wheel is provided with a supporting wheel, and the supporting wheel supports the product 2 to be degummed so as to be matched with the grinding wheel for grinding and degumming;
the supporting wheels are fixedly provided with a product 2 to be degummed which is to be supported, the product 2 to be degummed is provided with a laser altimeter 3, the laser altimeter 3 monitors the height of the product to be degummed in real time and transmits the monitored data to a PLC (programmable logic controller) 1 connected with the laser altimeter 3;
the lifting mechanism is controlled by the PLC 1 to drive the grinding wheel to do lifting motion, and the distance between the grinding wheel and the supporting wheel is adjusted to adapt to the height of the product with the degumming function;
the grinding wheel transmission motor 16 is an automatic control motor based on the PLC 1, and the PLC 1 controls the grinding wheel transmission motor 16 in real time based on the data of the laser altimeter 3 to carry out grinding and degumming.
The utility model discloses in, select for use laser altimeter 3 real time monitoring every height of waiting to remove gluey product, will wait to remove gluey product 2's high data real-time transfer to PLC controller 1, the data control elevating system of PLC controller 1 laser altimeter 3 monitoring, the interval between adjustment grinding miller and the supporting wheel, the product that comes unstuck in the area that is suitable for different thickness grinds it and comes unstuck. Meanwhile, the current of the grinding wheel transmission motor 16 is monitored, and the current is controlled, so that the grinding depth of the grinding wheel is controlled in real time, and the grinding requirement is met.
The utility model discloses make full use of laser altimeter 3, PLC controller 1 and elevating system and grinding miller drive motor 16, adjust the grinding miller height through elevator motor, in order to realize the automatic adjustment of grinding miller height, through 20 real time monitoring grinding miller drive motor 16 of current detector, and the adjustment grinding depth, the automatic different grinding depth that is suitable for, need not artifical adjustment grinding miller height, need not to select and be suitable for batch grinding same high product, just can automatic adjustment grinding miller height, realize grinding and remove glue, reduce the manual utilization rate, improve equipment utilization rate and remove glue efficiency.
The lifting mechanism comprises a lifting body 11 and a lifting motor 15 for driving the lifting body 11 to do lifting motion, and the lifting motor 15 is fixedly arranged on the screw fixing base 14;
the lifting body 11 is fixedly arranged on a nut seat 12, the nut seat 12 is rotatably arranged on a screw rod 13, and the nut seat 12 and the screw rod 13 are matched to form a spiral raceway;
the supporting wheel 21 is fixedly arranged on the lifting body 11;
the lifting motor 15 drives the screw rod 13 to rotate, the screw rod 13 and the nut seat 12 make relative rotation movement, the nut seat 12 drives the lifting body 11 to rotate, the lifting body 11 drives the grinding wheel 5 to ascend or descend, and the distance between the grinding wheel 5 and the supporting wheel 21 is adjusted.
The utility model discloses a but grinding depth automatically regulated ground grinder through the 15 drive lifting body 11 of elevator motor, grinding miller drive motor 16 rises or descends to the interval of adjustment grinding miller and supporting wheel, be suitable for not co-altitude to wait to grind the product.
The utility model discloses in, grinding miller and grinding miller transmission motor simultaneous up-down motion, grinding miller grinding structure is comparatively stable.
The lifting body 11 is fixedly connected with two grinding wheels, the grinding wheels comprise a first grinding wheel 5 and a second grinding wheel 4, and the vertical projection and the horizontal projection of the first grinding wheel 5 and the second grinding wheel 4 are not staggered;
one end of the first grinding wheel 5 and one end of the second grinding wheel 4 are rotatably connected with the lifting body 11 through a first bearing 7 and a second bearing 6, and the other end of the first grinding wheel 5 and the other end of the second grinding wheel 4 are connected with the grinding wheel transmission wheel through a first bearing 10 and a second bearing 9.
The utility model discloses in, select for use two grinding miller simultaneous workings, improved the efficiency that grinds the degumming. Through setting up the lifting body 11, through the setting of the lifting body 11, can conveniently connect first bearing 7 and second bearing 6, through the 11 elevating movement of drive lifting body on the elevator motor 15, drive the elevating movement of first grinding miller 5 and second grinding miller 4, realize two grinding miller grinds to remove glue, improved grinding efficiency.
The first grinding wheel 5 and the second grinding wheel 4 share a grinding wheel transmission motor 16 for grinding and removing glue;
the transmission wheels comprise a first grinding wheel transmission wheel 18, a second grinding wheel transmission wheel 19 and a motor transmission wheel 17;
the grinding wheel transmission motor 16 synchronously drives the first grinding wheel transmission wheel 18 and the second grinding wheel transmission wheel 19 through the motor transmission wheel 17 to drive the first grinding wheel 5 and the second grinding wheel 4 to rotate, grind and remove the glue.
The grinding wheel transmission motor 16 is connected with a current detector 20 in series, the current detector 20 detects the current of the grinding wheel transmission motor 16 in real time and transmits the current data to the PLC controller 1, and the PLC controller 1 controls the grinding depth of the grinding wheel through the current of the grinding wheel transmission motor 16.
The utility model discloses in through current detector 20, dispose PLC controller 1, send the current data of current detector 20 monitoring to PLC controller 1 in real time, the grinding depth of PLC controller 1 through the current control grinding miller of control grinding miller transmission motor 16.
The supporting wheel and the laser altimeter 3 are arranged on the fixed position of the grinding device, and the supporting wheel 21 is fixedly arranged to match with the grinding wheel. The laser altimeter 3 is fixed at a fixed position so as to be matched with the lifting motor 15 and fixedly arranged at a fixed position on the whole frame.
The utility model discloses in, the supporting wheel cooperation the grinding miller sets up two, including first supporting wheel 22 and second supporting wheel 21, two supporting wheels set up respectively at grinding miller vertical projection's lower extreme for support and treat the product of grinding, two grinding miller of cooperation grind except that glue.
It is obvious to a person skilled in the art that the invention is not restricted to details of the above-described exemplary embodiments, but that it can be implemented in other specific forms without departing from the spirit or essential characteristics of the invention. The present embodiments are therefore to be considered in all respects as illustrative and not restrictive, the scope of the invention being indicated by the appended claims rather than by the foregoing description, and all changes which come within the meaning and range of equivalency of the claims are therefore intended to be embraced therein. Any reference sign in a claim should not be construed as limiting the claim concerned.
Furthermore, it should be understood that although the present description refers to embodiments, not every embodiment may contain only a single embodiment, and such description is for clarity only, and those skilled in the art should integrate the description, and the embodiments may be combined as appropriate to form other embodiments understood by those skilled in the art.
Claims (6)
1. The utility model provides a but grinding depth automatically regulated ground grinder, includes grinding wheel and grinding wheel's driving piece which characterized in that: the driving piece comprises a grinding wheel driving motor and a driving wheel, the grinding wheel driving motor drives the driving wheel, and the driving wheel drives the grinding wheel to rotate and grind;
the circumferential surface of the grinding wheel is provided with a supporting wheel, and the supporting wheel supports a product to be degummed so as to be matched with the grinding wheel for grinding and degumming;
the supporting wheels are fixedly installed with a to-be-degummed product to be supported, and the to-be-degummed product is provided with a laser height indicator which monitors the height of the to-be-degummed product in real time and transmits monitored data to a PLC (programmable logic controller) connected with the laser height indicator;
the lifting mechanism is controlled by a PLC (programmable logic controller) to drive the grinding wheel to do lifting motion, and the distance between the grinding wheel and the supporting wheel is adjusted to adapt to the height of the product with the degumming function;
the grinding wheel transmission motor is an automatic control motor based on a PLC (programmable logic controller), and the PLC controls the grinding wheel transmission motor to carry out grinding and degumming in real time based on data of the laser height gauge.
2. The grinding apparatus of claim 1, wherein the grinding depth is automatically adjustable: the lifting mechanism comprises a lifting body and a lifting motor for driving the lifting body to do lifting motion, and the lifting motor is fixedly arranged on the screw fixing base;
the lifting body is fixedly arranged on a nut seat, the nut seat is rotatably arranged on a screw rod, and the nut seat is matched with the screw rod to form a spiral raceway;
the supporting wheel is fixedly arranged on the lifting body;
the lifting motor drives the screw rod to rotate, the screw rod and the nut seat do relative rotary motion, the nut seat drives the lifting body to rotate, the lifting body drives the grinding wheel to ascend or descend, and the distance between the grinding wheel and the supporting wheel is adjusted.
3. The grinding apparatus of claim 2, wherein the grinding depth is automatically adjustable: the lifting body is fixedly connected with two grinding wheels, the grinding wheels comprise a first grinding wheel and a second grinding wheel, and the vertical projection and the horizontal projection of the first grinding wheel and the second grinding wheel are not staggered;
the first grinding wheel and the second grinding wheel are rotatably connected to the lifting body through a first bearing and a second bearing.
4. A grinding apparatus with an automatically adjustable grinding depth as set forth in claim 3, wherein: the first grinding wheel and the second grinding wheel share a grinding wheel transmission motor for grinding and removing glue;
the transmission wheel comprises a first grinding wheel transmission wheel, a second grinding wheel transmission wheel and a motor transmission wheel;
the grinding wheel transmission motor synchronously drives the first grinding wheel transmission wheel and the second grinding wheel transmission wheel through the motor transmission wheel to drive the first grinding wheel and the second grinding wheel to rotate.
5. The automatically adjustable grinding depth of any one of claims 1 to 4 wherein: the grinding wheel transmission motor is connected with a current detector in series, the current detector detects the current of the grinding wheel transmission motor in real time and transmits current data to the PLC, and the PLC controls and adjusts the grinding depth of the grinding wheel through the current of the grinding wheel transmission motor.
6. The automatically adjustable grinding depth of any one of claims 1 to 4 wherein: the supporting wheel and the laser altimeter are arranged on the fixed position of the grinding device.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202020858496.7U CN212420826U (en) | 2020-05-20 | 2020-05-20 | Grinding device with grinding depth capable of being automatically adjusted |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202020858496.7U CN212420826U (en) | 2020-05-20 | 2020-05-20 | Grinding device with grinding depth capable of being automatically adjusted |
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| Publication Number | Publication Date |
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| CN212420826U true CN212420826U (en) | 2021-01-29 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN202020858496.7U Active CN212420826U (en) | 2020-05-20 | 2020-05-20 | Grinding device with grinding depth capable of being automatically adjusted |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112917307A (en) * | 2021-02-06 | 2021-06-08 | 河南永祥特检科技有限公司 | Ball valve grinder |
| CN113451177A (en) * | 2021-06-16 | 2021-09-28 | 昆山海碧维克机械制造有限公司 | Device and method for removing glue overflow of packaged semiconductor by automatic pressure-regulating brushing |
| CN115431130A (en) * | 2022-08-25 | 2022-12-06 | 山西光兴光电科技有限公司 | Correcting device for glass grinding equipment and glass grinding equipment |
-
2020
- 2020-05-20 CN CN202020858496.7U patent/CN212420826U/en active Active
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112917307A (en) * | 2021-02-06 | 2021-06-08 | 河南永祥特检科技有限公司 | Ball valve grinder |
| CN113451177A (en) * | 2021-06-16 | 2021-09-28 | 昆山海碧维克机械制造有限公司 | Device and method for removing glue overflow of packaged semiconductor by automatic pressure-regulating brushing |
| CN115431130A (en) * | 2022-08-25 | 2022-12-06 | 山西光兴光电科技有限公司 | Correcting device for glass grinding equipment and glass grinding equipment |
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