CN212409456U - Double-layer efficient hydrogen fluoride gas heater utilizing waste heat - Google Patents
Double-layer efficient hydrogen fluoride gas heater utilizing waste heat Download PDFInfo
- Publication number
- CN212409456U CN212409456U CN202020418165.1U CN202020418165U CN212409456U CN 212409456 U CN212409456 U CN 212409456U CN 202020418165 U CN202020418165 U CN 202020418165U CN 212409456 U CN212409456 U CN 212409456U
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- pipe
- hydrogen fluoride
- gas
- fluoride gas
- air inlet
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- 239000007789 gas Substances 0.000 title claims abstract description 74
- 229910000040 hydrogen fluoride Inorganic materials 0.000 title claims abstract description 41
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 title claims abstract description 40
- 239000002918 waste heat Substances 0.000 title claims abstract description 11
- 238000010438 heat treatment Methods 0.000 claims abstract description 39
- 238000011084 recovery Methods 0.000 claims abstract description 6
- 239000007921 spray Substances 0.000 claims abstract description 6
- PNEYBMLMFCGWSK-UHFFFAOYSA-N Alumina Chemical compound [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 abstract description 9
- WNROFYMDJYEPJX-UHFFFAOYSA-K aluminium hydroxide Chemical compound [OH-].[OH-].[OH-].[Al+3] WNROFYMDJYEPJX-UHFFFAOYSA-K 0.000 abstract description 5
- 238000004519 manufacturing process Methods 0.000 abstract description 5
- 238000000034 method Methods 0.000 abstract description 5
- 229910021502 aluminium hydroxide Inorganic materials 0.000 abstract description 3
- 230000009257 reactivity Effects 0.000 abstract description 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 5
- 229910000975 Carbon steel Inorganic materials 0.000 description 2
- 239000010962 carbon steel Substances 0.000 description 2
- IRPGOXJVTQTAAN-UHFFFAOYSA-N 2,2,3,3,3-pentafluoropropanal Chemical compound FC(F)(F)C(F)(F)C=O IRPGOXJVTQTAAN-UHFFFAOYSA-N 0.000 description 1
- KLZUFWVZNOTSEM-UHFFFAOYSA-K Aluminum fluoride Inorganic materials F[Al](F)F KLZUFWVZNOTSEM-UHFFFAOYSA-K 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005485 electric heating Methods 0.000 description 1
- 238000005265 energy consumption Methods 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 229920006395 saturated elastomer Polymers 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
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- Heat-Exchange Devices With Radiators And Conduit Assemblies (AREA)
Abstract
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CN202020418165.1U CN212409456U (en) | 2020-03-27 | 2020-03-27 | Double-layer efficient hydrogen fluoride gas heater utilizing waste heat |
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CN202020418165.1U CN212409456U (en) | 2020-03-27 | 2020-03-27 | Double-layer efficient hydrogen fluoride gas heater utilizing waste heat |
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CN212409456U true CN212409456U (en) | 2021-01-26 |
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CN202020418165.1U Active CN212409456U (en) | 2020-03-27 | 2020-03-27 | Double-layer efficient hydrogen fluoride gas heater utilizing waste heat |
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Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN113606966A (en) * | 2021-08-12 | 2021-11-05 | 东部超导科技(苏州)有限公司 | Tail gas cooling device of MOCVD equipment |
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2020
- 2020-03-27 CN CN202020418165.1U patent/CN212409456U/en active Active
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN113606966A (en) * | 2021-08-12 | 2021-11-05 | 东部超导科技(苏州)有限公司 | Tail gas cooling device of MOCVD equipment |
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Legal Events
Date | Code | Title | Description |
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GR01 | Patent grant | ||
GR01 | Patent grant | ||
CB03 | Change of inventor or designer information |
Inventor after: Kang Wenpeng Inventor after: Ling Xiaoqiang Inventor after: Song Dexiong Inventor after: Liu Yibao Inventor after: Hu Kanbo Inventor after: Wu Zhijing Inventor before: Kang Wenpeng Inventor before: Ling Xiaoqiang Inventor before: Song Dexiong Inventor before: Liu Yibao Inventor before: Hu Kanbo Inventor before: Wu Zhijing |
|
CB03 | Change of inventor or designer information |