CN113606966A - Tail gas cooling device of MOCVD equipment - Google Patents
Tail gas cooling device of MOCVD equipment Download PDFInfo
- Publication number
- CN113606966A CN113606966A CN202110923152.9A CN202110923152A CN113606966A CN 113606966 A CN113606966 A CN 113606966A CN 202110923152 A CN202110923152 A CN 202110923152A CN 113606966 A CN113606966 A CN 113606966A
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- CN
- China
- Prior art keywords
- pipe
- tail gas
- cooling cylinder
- cooling device
- liquid outlet
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
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- 238000001816 cooling Methods 0.000 title claims abstract description 49
- 238000002488 metal-organic chemical vapour deposition Methods 0.000 title claims abstract description 15
- 239000007788 liquid Substances 0.000 claims abstract description 56
- 238000007789 sealing Methods 0.000 claims abstract description 15
- 239000011229 interlayer Substances 0.000 claims abstract description 13
- 239000000463 material Substances 0.000 claims abstract description 10
- 230000000149 penetrating effect Effects 0.000 claims description 3
- 238000000034 method Methods 0.000 abstract description 7
- 238000004939 coking Methods 0.000 abstract description 4
- 238000012545 processing Methods 0.000 abstract description 2
- 239000007789 gas Substances 0.000 description 15
- 239000002826 coolant Substances 0.000 description 7
- 238000012423 maintenance Methods 0.000 description 5
- 238000004519 manufacturing process Methods 0.000 description 4
- WYURNTSHIVDZCO-UHFFFAOYSA-N Tetrahydrofuran Chemical compound C1CCOC1 WYURNTSHIVDZCO-UHFFFAOYSA-N 0.000 description 2
- 239000012159 carrier gas Substances 0.000 description 2
- 238000004140 cleaning Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000003466 welding Methods 0.000 description 2
- 229910000838 Al alloy Inorganic materials 0.000 description 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 229910052788 barium Inorganic materials 0.000 description 1
- DSAJWYNOEDNPEQ-UHFFFAOYSA-N barium atom Chemical compound [Ba] DSAJWYNOEDNPEQ-UHFFFAOYSA-N 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 229910052741 iridium Inorganic materials 0.000 description 1
- GKOZUEZYRPOHIO-UHFFFAOYSA-N iridium atom Chemical compound [Ir] GKOZUEZYRPOHIO-UHFFFAOYSA-N 0.000 description 1
- 239000010410 layer Substances 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229920000642 polymer Polymers 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 239000010865 sewage Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- YLQBMQCUIZJEEH-UHFFFAOYSA-N tetrahydrofuran Natural products C=1C=COC=1 YLQBMQCUIZJEEH-UHFFFAOYSA-N 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
Images
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F28—HEAT EXCHANGE IN GENERAL
- F28D—HEAT-EXCHANGE APPARATUS, NOT PROVIDED FOR IN ANOTHER SUBCLASS, IN WHICH THE HEAT-EXCHANGE MEDIA DO NOT COME INTO DIRECT CONTACT
- F28D7/00—Heat-exchange apparatus having stationary tubular conduit assemblies for both heat-exchange media, the media being in contact with different sides of a conduit wall
- F28D7/10—Heat-exchange apparatus having stationary tubular conduit assemblies for both heat-exchange media, the media being in contact with different sides of a conduit wall the conduits being arranged one within the other, e.g. concentrically
- F28D7/103—Heat-exchange apparatus having stationary tubular conduit assemblies for both heat-exchange media, the media being in contact with different sides of a conduit wall the conduits being arranged one within the other, e.g. concentrically consisting of more than two coaxial conduits or modules of more than two coaxial conduits
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/4412—Details relating to the exhausts, e.g. pumps, filters, scrubbers, particle traps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F28—HEAT EXCHANGE IN GENERAL
- F28F—DETAILS OF HEAT-EXCHANGE AND HEAT-TRANSFER APPARATUS, OF GENERAL APPLICATION
- F28F1/00—Tubular elements; Assemblies of tubular elements
- F28F1/10—Tubular elements and assemblies thereof with means for increasing heat-transfer area, e.g. with fins, with projections, with recesses
- F28F1/12—Tubular elements and assemblies thereof with means for increasing heat-transfer area, e.g. with fins, with projections, with recesses the means being only outside the tubular element
- F28F1/34—Tubular elements and assemblies thereof with means for increasing heat-transfer area, e.g. with fins, with projections, with recesses the means being only outside the tubular element and extending obliquely
- F28F1/36—Tubular elements and assemblies thereof with means for increasing heat-transfer area, e.g. with fins, with projections, with recesses the means being only outside the tubular element and extending obliquely the means being helically wound fins or wire spirals
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Mechanical Engineering (AREA)
- Physics & Mathematics (AREA)
- Thermal Sciences (AREA)
- General Engineering & Computer Science (AREA)
- General Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Geometry (AREA)
Abstract
A tail gas cooling device of MOCVD equipment belongs to the technical field of high-temperature superconducting material processing equipment. The tail gas cooling device of the MOCVD equipment comprises a cooling cylinder with openings at two ends; an inner pipe is axially arranged in the cooling cylinder, and a vortex blade is fixed on the inner pipe; the inner liquid inlet pipe and the inner liquid outlet pipe penetrate through the wall of the cooling cylinder and are in sealing connection with the wall of the cooling cylinder; the cooling cylinder is sleeved with an outer pipe outside the cylinder wall, an outer liquid inlet pipe and an outer liquid outlet pipe are arranged on the outer pipe, an interlayer is formed between the outer pipe and the cooling cylinder, and the outer liquid inlet pipe and the outer liquid outlet pipe are respectively communicated with the interlayer. According to the invention, the initial temperature of the transport gas before entering the pump is reduced by additionally arranging the cooling device, so that the coking phenomenon of the process tail gas is avoided.
Description
Technical Field
The invention relates to a technology in the field of high-temperature superconducting material processing equipment, in particular to a tail gas cooling device of MOCVD equipment.
Background
In the second generation high temperature superconducting thin film manufacturing process, if the production equipment of the MOCVD process route is adopted, tetrahydrofuran is required to be used as a process material carrier, the material can generate polymers with other materials (iridium, barium, copper, oxygen and the like) in the process, and meanwhile, because the MOCVD process needs high temperature heating of the substrate, the carrier gas material also has certain temperature, and higher temperature can be generated when the carrier gas material passes through a DV5000 Laibao vacuum pump, so that the coking phenomenon occurs, the material has strong viscosity, the operation of vacuum equipment is further influenced, the long-term stable operation of the equipment is caused, the equipment maintenance difficulty is increased, and the service life of the vacuum pump is reduced.
The present invention has been made to solve the above-mentioned problems occurring in the prior art.
Disclosure of Invention
Aiming at the defects in the prior art, the invention provides the tail gas cooling device of the MOCVD equipment, and the initial temperature of the transport gas before entering the pump is reduced by additionally arranging the cooling device, so that the gas coking phenomenon is avoided.
The invention comprises a cooling cylinder with two open ends, which is used for cooling tail gas;
an inner pipe is axially arranged in the cooling cylinder, a vortex blade is fixed on the inner pipe, an inner liquid inlet pipe and an inner liquid outlet pipe are arranged at two ends of the inner pipe, the inner liquid inlet pipe and the inner liquid outlet pipe are arranged on the cylinder wall of the cooling cylinder in a penetrating way and are in sealing connection with the cylinder wall of the cooling cylinder;
the cooling cylinder is sleeved with an outer pipe outside the cylinder wall, an outer liquid inlet pipe and an outer liquid outlet pipe are arranged on the outer pipe, an interlayer is formed between the outer pipe and the cooling cylinder, and the outer liquid inlet pipe and the outer liquid outlet pipe are respectively communicated with the interlayer.
Preferably, the inner pipe is provided with openings at two ends, and a pollution discharge plug is arranged corresponding to the openings; in production, the opening is plugged by a pollution discharge plug, so that liquid in the inner pipe is prevented from leaking; when maintenance is needed, the pollution discharge plug is taken down, and pollution discharge and cleaning are carried out on the inner pipe.
Technical effects
Compared with the prior art, the invention has the following technical effects:
1) the tail gas enters and exits from openings at two ends of the cooling cylinder, and low-temperature liquid can be introduced into the inner pipe and the interlayer to cool the tail gas in the cooling cylinder, so that the coking phenomenon of the process tail gas is avoided, the service environment and the service life of the vacuum pump are improved, the process stability of the vacuum pump is improved, and the equipment failure rate is reduced;
2) the design of the vortex blade provides a vortex channel for the movement of the tail gas in the cooling cylinder, so that the heat exchange time and the heat exchange area are increased, the temperature of the tail gas is favorably reduced, and the structure is compact.
Drawings
FIG. 1 is a schematic view of the entire structure of embodiment 1;
FIG. 2 is a schematic cross-sectional view showing the structure of example 1;
FIG. 3 is a schematic structural view of a swirl vane in embodiment 1;
FIG. 4 is a schematic view of the structure of an inner liquid inlet pipe in embodiment 1;
in the figure: the device comprises a cooling cylinder 1, a tail gas inlet 11, a tail gas outlet 12, a boss 13 and a sealing ring 14;
an outer pipe 2, an outer liquid inlet pipe 21, an outer liquid outlet pipe 22 and an interlayer 23;
the inner pipe 3, the inner liquid inlet pipe 31, the round table 311, the inner liquid outlet pipe 32, the joint 33 and the pollution discharge plug 34;
swirl vanes 4.
Detailed Description
The invention is described in detail below with reference to the drawings and the detailed description.
Example 1
As shown in fig. 1, fig. 2 and fig. 3, the present embodiment includes a cooling cylinder 1 with two open ends, one open end being an exhaust gas inlet 11 and the other open end being an exhaust gas outlet 12.
The outer pipe 2 is sleeved outside the wall of the cooling cylinder 1, the outer pipe 2 is provided with an outer liquid inlet pipe 21 and an outer liquid outlet pipe 22, an interlayer 23 is formed between the outer pipe 2 and the cooling cylinder 1, the outer liquid inlet pipe 21 and the outer liquid outlet pipe 22 are respectively communicated with the interlayer 23, a low-temperature cooling medium is introduced into the interlayer 23 through the outer liquid inlet pipe 21, and the cooling medium after heat exchange is discharged through the outer liquid outlet pipe 22; the outer layer liquid outlet pipe adopts a downward-in and upward-out mode, so that the cooling medium in the interlayer fully flows along the cylinder wall to take away heat.
An inner pipe 3 is axially arranged in the cooling cylinder 1, a vortex blade 4 is fixed on the inner pipe 3, and the outer edge of the vortex blade 4 is abutted against the inner wall of the cooling pipe. The inner tube 3 and the swirl vane 4 are preferably made of high thermal conductivity material, such as metal, aluminum alloy, etc., and are integrally connected by welding or cast.
An inner liquid inlet pipe 31 and an inner liquid outlet pipe 32 are respectively arranged at two ends of the inner pipe 3; preferably, the inner liquid inlet pipe 31 and the inner liquid outlet pipe 32 are hermetically connected with the inner pipe, so that the disassembly, assembly and maintenance are convenient, and the inner pipe can be fixed into a whole by adopting welding and other modes, so that the maintenance convenience can be lost; the inner liquid inlet pipe 31 and the inner liquid outlet pipe 32 are arranged on the wall of the cooling cylinder in a penetrating way and are respectively sealed with the wall of the cooling cylinder. The inner tube 3 is introduced with low-temperature cooling medium through the inner liquid inlet tube 31, the cooling medium after heat exchange is discharged through the inner liquid outlet tube 32, and the cooling medium in the inner tube can be the same as or different from the cooling medium in the interlayer.
Specifically, as for the inner liquid inlet pipe 31 and the inner liquid outlet pipe 32, baffles are arranged on the inner liquid inlet pipe 31 and the inner liquid outlet pipe 32, a boss 13 is arranged on the cooling cylinder 1, a sealing groove is arranged on the upper surface of the boss 13, a sealing ring 14 is arranged in the sealing groove, and the baffles abut against the boss and are sealed by pressing the sealing ring; for the inner liquid inlet pipe 31 and the inner liquid outlet pipe 32, the inner pipe is provided with a joint 33, and the inner liquid inlet pipe and the inner liquid outlet pipe are respectively inserted into the joints and sealed by threads; for example, as shown in fig. 4, the end of the inner liquid inlet pipe is provided with a circular truncated cone 311, which is provided with threads in the circumferential direction to perform a sealing function; double sealing is achieved.
The inner tube 3 is provided with openings at both ends, and a sewage discharge plug 34 is provided corresponding to the openings. The end part of the pollution discharge plug preferably adopts a round platform structure, and threads are arranged on the round platform in the circumferential direction to play a role in sealing and sealing. In production, the opening is plugged by a pollution discharge plug, so that liquid in the inner pipe is prevented from leaking; when maintenance is needed, the pollution discharge plug is taken down, and pollution discharge and cleaning are carried out on the inner pipe.
It is to be emphasized that: the above embodiments are only preferred embodiments of the present invention, and are not intended to limit the present invention in any way, and all simple modifications, equivalent changes and modifications made to the above embodiments according to the technical spirit of the present invention are within the scope of the technical solution of the present invention.
Claims (7)
1. The tail gas cooling device of the MOCVD equipment is characterized by comprising a cooling cylinder with openings at two ends;
an inner pipe is axially arranged in the cooling cylinder, and a vortex blade is fixed on the inner pipe; the inner liquid inlet pipe and the inner liquid outlet pipe penetrate through the wall of the cooling cylinder and are in sealing connection with the wall of the cooling cylinder;
the cooling cylinder is sleeved with an outer pipe outside the cylinder wall, an outer liquid inlet pipe and an outer liquid outlet pipe are arranged on the outer pipe, an interlayer is formed between the outer pipe and the cooling cylinder, and the outer liquid inlet pipe and the outer liquid outlet pipe are respectively communicated with the interlayer.
2. The MOCVD equipment tail gas cooling device according to claim 1, wherein the inner tube is provided with openings at both ends, and pollution discharge plugs are arranged corresponding to the openings.
3. The MOCVD equipment tail gas cooling device of claim 1, wherein the cooling cylinder is provided with a sealing boss, and the inner liquid inlet pipe and the inner liquid outlet pipe are respectively arranged in the sealing boss in a penetrating way and are connected with the cooling cylinder in a sealing way.
4. The MOCVD equipment tail gas cooling device according to claim 1, wherein the inner pipe is provided with a joint, and the inner liquid inlet pipe and the inner liquid outlet pipe are respectively inserted into the joint and sealed through threads.
5. The MOCVD equipment tail gas cooling device according to claim 1, wherein the vortex blade is welded and connected with the inner pipe.
6. The MOCVD equipment tail gas cooling device according to claim 1, wherein the outer edge of the vortex blade abuts against the inner wall of the cooling pipe.
7. The MOCVD equipment tail gas cooling device according to claim 1, wherein the inner tube and the swirl vanes are made of materials with high thermal conductivity.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110923152.9A CN113606966A (en) | 2021-08-12 | 2021-08-12 | Tail gas cooling device of MOCVD equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110923152.9A CN113606966A (en) | 2021-08-12 | 2021-08-12 | Tail gas cooling device of MOCVD equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN113606966A true CN113606966A (en) | 2021-11-05 |
Family
ID=78340456
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202110923152.9A Pending CN113606966A (en) | 2021-08-12 | 2021-08-12 | Tail gas cooling device of MOCVD equipment |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN113606966A (en) |
Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5653113A (en) * | 1995-04-07 | 1997-08-05 | Rigaku Corporation | Cooling system |
| JP2001152218A (en) * | 1999-11-29 | 2001-06-05 | Kobe Steel Ltd | Cooling cylinder in blast furnace body |
| CN104355071A (en) * | 2014-09-29 | 2015-02-18 | 山东理工大学 | Semi coke waste heat recovery type spiral conveyer |
| CN105157452A (en) * | 2015-08-26 | 2015-12-16 | 武汉钢铁(集团)公司 | Efficient heat exchanger for non-self-preheating gas burner type radiation pipe |
| CN105600509A (en) * | 2016-03-16 | 2016-05-25 | 沙洋裕农机械有限公司 | Material cooling machine |
| CN106540764A (en) * | 2016-10-17 | 2017-03-29 | 平湖迈柯罗新材料有限公司 | A kind of condenser pipe for viscoelastic fluid |
| CN207976019U (en) * | 2018-03-23 | 2018-10-16 | 洛阳腾腾金属加工液有限公司 | A kind of cooling device for producing metal working fluid |
| CN212409456U (en) * | 2020-03-27 | 2021-01-26 | 白银中天化工有限责任公司 | Double-layer efficient hydrogen fluoride gas heater utilizing waste heat |
-
2021
- 2021-08-12 CN CN202110923152.9A patent/CN113606966A/en active Pending
Patent Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5653113A (en) * | 1995-04-07 | 1997-08-05 | Rigaku Corporation | Cooling system |
| JP2001152218A (en) * | 1999-11-29 | 2001-06-05 | Kobe Steel Ltd | Cooling cylinder in blast furnace body |
| CN104355071A (en) * | 2014-09-29 | 2015-02-18 | 山东理工大学 | Semi coke waste heat recovery type spiral conveyer |
| CN105157452A (en) * | 2015-08-26 | 2015-12-16 | 武汉钢铁(集团)公司 | Efficient heat exchanger for non-self-preheating gas burner type radiation pipe |
| CN105600509A (en) * | 2016-03-16 | 2016-05-25 | 沙洋裕农机械有限公司 | Material cooling machine |
| CN106540764A (en) * | 2016-10-17 | 2017-03-29 | 平湖迈柯罗新材料有限公司 | A kind of condenser pipe for viscoelastic fluid |
| CN207976019U (en) * | 2018-03-23 | 2018-10-16 | 洛阳腾腾金属加工液有限公司 | A kind of cooling device for producing metal working fluid |
| CN212409456U (en) * | 2020-03-27 | 2021-01-26 | 白银中天化工有限责任公司 | Double-layer efficient hydrogen fluoride gas heater utilizing waste heat |
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| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| RJ01 | Rejection of invention patent application after publication | ||
| RJ01 | Rejection of invention patent application after publication |
Application publication date: 20211105 |