CN212363589U - Online detection device for sealing performance - Google Patents
Online detection device for sealing performance Download PDFInfo
- Publication number
- CN212363589U CN212363589U CN202021665985.7U CN202021665985U CN212363589U CN 212363589 U CN212363589 U CN 212363589U CN 202021665985 U CN202021665985 U CN 202021665985U CN 212363589 U CN212363589 U CN 212363589U
- Authority
- CN
- China
- Prior art keywords
- gas
- cavity
- cover plate
- tested
- sealing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Images
Abstract
The utility model provides a leakproofness on-line measuring device. The online tightness detection device is used for detecting the tightness of an element to be detected, and comprises: the device comprises a cover plate, a measuring device and a sealing element, wherein the element to be measured is arranged between the cover plate and the sealing element; the cover plate is arranged on the upper surface of the element to be tested, the cover plate is provided with a groove, and the groove and the element to be tested form a cavity; the cover plate is provided with at least one air inlet which is communicated with the cavity; the measuring device is connected with the air inlet through an air channel and is used for detecting the air pressure or the air flow of the cavity; the sealing piece is arranged on the edge of the lower surface of the element to be tested. The utility model discloses can effectively detect the leakproofness of the sealed component of single face, avoid the component because of sealed not tight waste and loss that causes.
Description
Technical Field
The utility model relates to a leakproofness on-line measuring device.
Background
In the field of semiconductor wafer electroplating, the cathode sealing effect of electroplating equipment has a great influence on the electroplating effect. In wafer plating, the wafer is used as the cathode for plating, one side of which is plated and the other side of which is hermetically protected from the plating solution.
In the prior art, the structure and design of a wafer electroplating sealing member (such as a sealing gasket and the like) are many, but a detection assembly for the sealing effect is not available. Therefore, in the wafer electroplating process, if the sealing effect is not good, the method of replacing or repairing the sealing assembly is generally adopted. Due to the lack of a detection and early warning device for the sealing effect, the problems of wafer waste and capacity loss caused by untight sealing in the wafer electroplating production are common. In addition, in other wafer wet process technologies besides electroplating, there is also a need for detecting the sealing effect on the single surface of the wafer. Therefore, it is a difficult problem to be solved in the art to develop an online detection method and device for single-side sealing performance of a wafer.
SUMMERY OF THE UTILITY MODEL
The to-be-solved technical problem of the utility model is to provide a leakproofness on-line measuring device in order to overcome the defect that the component that carries out single face seal lacks online effectual leakproofness on-line measuring method and device among the prior art, the utility model discloses can realize online, continuous, instant, timely, the effectual leakproofness that detects the component that the single face seals (for example wafer) the function, avoid the component because of sealed not tight and can't in time be detected the waste and the loss that cause by online, especially postpone to measure often lose great. The utility model discloses detection method is simple and convenient effective.
The utility model discloses an above-mentioned technical problem is solved through following technical scheme:
an aspect of the present invention provides an online sealing detection device for detecting the sealing of an element to be detected, which includes: the device comprises a cover plate, a measuring device and a sealing element, wherein the element to be measured is arranged between the cover plate and the sealing element;
the cover plate is arranged on the upper surface of the element to be tested, the cover plate is provided with a groove, and the groove and the element to be tested form a cavity;
the cover plate is provided with at least one air inlet which is communicated with the cavity;
the measuring device is connected with the air inlet through an air channel and is used for detecting the air pressure or the air flow of the cavity;
the sealing piece is arranged on the edge of the lower surface of the element to be tested.
Adopt the utility model discloses leakproofness on-line measuring device examines time measuring when examining the component to be measured, compresses tightly apron and the component upper surface that awaits measuring, ventilates to the cavity that forms through the air inlet, through the atmospheric pressure or the gas flow of measuring device monitoring cavity, and it is poor with the atmospheric pressure difference or the gas flow of air feed source to compare the cavity to realize the leakproofness on-line measuring of the component upper surface that awaits measuring.
The shape and size of the groove in the cover plate are not particularly limited, and the groove can form a cavity with an element to be tested, preferably, the contact surface area S1 of the cavity and the element to be tested is 5% -99% of the upper surface area S2 of the element to be tested; for example, 9% to 64%.
Preferably, the number of the air inlets is 1-3, such as 1; when the number of the air inlets is 1, the air inlets are arranged in the center of the cover plate.
The number of the gas passages corresponds to the number of the gas inlets. When there are multiple gas channels, each gas channel is combined into a main gas channel to reduce the number of channels.
Preferably, the gas passage is connected to the gas inlet via a joint. Such as a gas fitting (i.e., a gas tube fitting).
Preferably, the measuring device is provided with a first air pressure meter or a first gas flow meter; the first air pressure meter is used for measuring the air pressure of the cavity, and the first gas flow meter is used for measuring the gas flow of the cavity. Wherein the arrangement of the first gas pressure gauge or the first gas flow gauge may be a conventional arrangement in the art, for example, at a position on the gas passage near the cavity, for example, the length of the pipe between the first gas pressure gauge or the first gas flow gauge and the gas inlet is L1, the length of the pipe between the gas inlet and the gas supply source is L2, and L1 is 1/3 of L2.
When the measuring device is used for detecting the air pressure of the cavity, preferably, the measuring device is further provided with a second barometer, the second barometer is used for measuring the air supply pressure of the air, and the tightness detection of the upper surface of the element to be detected is realized by comparing the air pressure difference value of the first barometer and the second barometer. The second barometer may be disposed in a conventional manner in the art, for example, at the supply gas source, and the specific location is not limited as long as the supply gas pressure of the gas can be measured.
When the measuring device is used for detecting the gas flow of the cavity, preferably, the measuring device is further provided with a second gas flow meter, the second gas flow meter is used for measuring the gas supply flow of the gas, and the tightness detection of the upper surface of the element to be detected is realized by comparing the gas flow difference values of the first gas flow meter and the second gas flow meter. The second gas flow meter may be disposed in a conventional manner in the art, for example, at the gas supply source, and the specific location is not limited as long as the gas supply flow rate can be measured.
Preferably, the material of the gas channel is an insulating material, such as PE (polyethylene plastic).
Preferably, the gas passage has a diameter of 1/8 inches. The size of the gas inlet corresponds to the diameter of the gas channel.
Preferably, the online tightness detecting device further comprises a clamping mechanism, wherein the clamping mechanism is used for clamping the cover plate, the element to be detected and the sealing element to fix the relative positions of the cover plate, the element to be detected and the sealing element; preferably, the clamping mechanism is further configured to electrically connect the device under test. The clamping mechanism is conventional in the art and generally comprises conventional structures such as a conductive ring assembly, a fixing member, a housing and a hanging frame, wherein the conductive ring assembly generally comprises conventional structures such as a conductive ring, a conductive rubber coating and a conductive metal block.
Preferably, the material of the sealing element is fluororubber.
Preferably, the material of the cover plate is plastic (such as PTFE Teflon plastic) or metal (such as aluminum).
Preferably, the device under test is a wafer, such as a 3-12 inch wafer, and more specifically, such as a 3 inch, a 4 inch, a 6 inch, an 8 inch, a 12 inch wafer, which is compatible with wafers of various sizes.
Preferably, the sealing element is coaxially arranged with the element to be tested, and the size of the sealing element is matched with that of the element to be tested. The sealing element may be a sealing element commonly used in the art, such as a wafer sealing ring, and preferably, the outer diameter of the wafer sealing ring is 90% to 100% (e.g., 94% to 95%) of the diameter of the device to be tested (e.g., a wafer), the difference between the inner diameter and the outer diameter is generally about 2mm, and the height is 1 to 1.5 mm. Preferably, the wafer sealing ring may further include other extension structures, such as an extension structure that may enhance the sealing effect, the supporting effect, or the filling effect.
The utility model discloses another aspect provides a leakproofness on-line measuring method, its utilize as before the leakproofness on-line measuring device go on, it includes following step:
s1: compressing the cover plate, the element to be tested and the sealing element, and introducing gas from the gas inlet to the formed cavity through the gas channel;
s2: and detecting the air pressure or the air flow of the cavity through the measuring device.
In the method for detecting the sealing performance on line, the sealing performance of the element to be detected is evaluated through the difference value between the air supply pressure and the air pressure of the cavity or the difference value between the air supply flow and the air flow of the cavity, the requirements of different application occasions and different users on the sealing performance of the element to be detected are slightly different, and generally speaking, when the difference value between the air supply pressure and the air pressure of the cavity is-10% of the air supply pressure, the sealing performance of the element to be detected is considered to be good. Or when the difference value between the air supply flow and the air flow of the cavity is-10% of the air supply flow, the sealing performance of the element to be measured is considered to be good.
Preferably, the air supply pressure is 0.1-0.5 MPa. For example, when the air pressure of the supplied air is 0.1MPa, and the air pressure of the cavity is 0.09MPa to 0.11MPa, the sealing property of the device under test is considered to be good.
Preferably, the supply air flow is 1-10cfm, for example 5 cfm. For example, when the gas supply flow is 5cfm and the gas flow of the cavity is 4.5cfm to 5.5cfm, the sealing performance of the device to be tested is considered to be good.
In step S1, a person skilled in the art may use a conventional method to compress the cover plate, the device under test, and the sealing member, for example, to place the device under test on the sealing member, place the cover plate on the upper surface of the device under test, and apply a certain compression force to the device under test, so that the lower surface of the device under test is tightly attached to the sealing member.
In step S1, the amount of gas introduced may be fixed, so that the gas pressure of the supplied gas or the gas flow rate of the supplied gas is measured without using an additional gas pressure gauge or gas flow rate gauge.
In step S1, the gas introduction amount may not be fixed, and the gas supply pressure is measured by a second gas pressure meter, or the gas supply flow is measured by a second gas flow meter.
On the basis of no violating the general knowledge in the field, the above-mentioned preferred conditions can be combined arbitrarily, so as to obtain the preferred embodiments of the present invention.
The reagent and the raw material used in the utility model are available on the market.
The utility model discloses an actively advance the effect and lie in: the utility model discloses detection device can be used to the leakproofness of the sealed component of on-line measuring single face (for example wafer), simple structure, the utility model discloses only carry out simple transformation through clamping device and the relevant part to the wafer, just can make the device carry out the gas tightness simultaneously and detect on the basis of realizing former clamping function, detection method is simple and convenient effective, avoids the component because of sealed not tight and can't in time be checked the waste and the loss that cause by online, especially postpones to measure often to lose great.
Drawings
FIG. 1 is a schematic structural view of the online tightness detection device of the present invention;
fig. 2 is the structure schematic diagram of the cover plate in the online tightness detection device of the present invention.
Fig. 3 is a schematic structural diagram of the online tightness detection device of the present invention.
Description of reference numerals:
device under test 100
Main gas passage 202
Sealing element 30
Clamping mechanism 40
Detailed Description
The present invention is further illustrated by way of the following examples, which are not intended to limit the scope of the invention. The experimental methods without specifying specific conditions in the following examples were selected according to the conventional methods and conditions, or according to the commercial instructions.
In the description of the present invention, it is to be understood that the terms "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", and the like, indicate relative positional relationships, are used merely for convenience in describing the present invention and to simplify the description, and do not indicate or imply that the device or element being referred to must have a particular orientation, be constructed and operated in a particular orientation, unless the context clearly dictates otherwise.
Example 1
As shown in fig. 1-2, the present embodiment provides an online sealing performance testing apparatus for testing the sealing performance of a device under test 100, which includes: the device comprises a cover plate 10, a measuring device and a sealing element 30, wherein an element to be measured 100 is arranged between the cover plate 10 and the sealing element 30;
the cover plate 10 is arranged on the upper surface of the element to be tested 100, the cover plate 10 is provided with a groove, and the groove and the element to be tested 100 form a cavity 101; the shape and size of the groove in the cover plate 10 can be determined by those skilled in the art according to practical situations, for example, in this embodiment, a cylindrical or approximately cylindrical cavity 101 is formed, specifically, the diameter of the cavity 101 is 80mm, the height of the cavity 101 is 1.6mm, and the cavity 101 is coaxial with the element 100 to be measured. The size of the cylinder can be determined by those skilled in the art according to practical situations, for example, the diameter of the cylinder can be 1/5-19/20 of the diameter of the element to be measured, and the height can be 1.5 mm-2 mm.
The center of the cover plate 10 is provided with an air inlet 102, and the air inlet 102 is communicated with the cavity 101;
the measuring device is connected with the gas inlet 102 through a gas channel 201 and is used for detecting the gas pressure of the cavity 101;
the sealing member 30 is provided at the edge of the lower surface of the device under test 100,
when the cover plate 10 presses the upper surface of the device under test 100, the sealing member 30 presses the lower surface of the device under test 100, so that the lower surface of the device under test 100 is tightly attached to the sealing member 30, and the sealing member is used for sealing the upper surface of the device under test 100 and preventing the upper surface of the device under test 100 from contacting the plating solution and the like.
The number of the air inlets 102 can be selected within the range of 1-3 according to actual conditions; the number of gas passages 201 corresponds to the number of gas inlets 102. The dimensions of the gas channel 201 correspond to the dimensions of the gas inlet.
The gas channel 201 is connected to the gas inlet 102 by a connector (not shown), the diameter of the gas channel 201 is 1/8 inches, the material of the gas channel 201 is PE, and can be specifically configured as a PE gas tube with a diameter of 1/8 inches, and the gas tube is sealed and airtight.
In this embodiment, the device 100 to be measured is a 4-inch wafer, and correspondingly, the sealing element 30 is a wafer sealing ring, the wafer sealing ring and the wafer are coaxially arranged, the outer diameter of the sealing ring is 96.6mm, the inner diameter of the sealing ring is 94.6mm, and the height of the sealing ring is 1 mm.
In this embodiment, the measuring device is provided with a first barometer and a second barometer (not shown in the figure), the first barometer is used for measuring the air pressure of the cavity 101, and is also used as an air outlet of the cavity 101 and can be installed at a position of the air channel 201 close to the air inlet 102; the second barometer is used for measuring the supply air pressure of the gas and can be installed at the supply air source. For example, if the gas supply source supplies gas to the chamber 101 through a pipeline with a length of 3m (the second barometer is installed at the gas supply source), the length of the pipeline between the first barometer and the chamber 101 is 1-1.5m (for example, 1 m).
The online tightness detection device further comprises a clamping mechanism 40, wherein the clamping mechanism 40 is used for clamping the cover plate 10, the element to be detected 100 and the sealing element 30, so that the relative positions of the clamping cover plate 10, the element to be detected 100 and the sealing element 30 are fixed, and the clamping mechanism 40 is also used for electrically conducting the element to be detected 100. Specifically, the clamping mechanism 40 generally comprises a conductive ring assembly, a fixture, a housing, a hanger, and the like, wherein the conductive ring assembly generally comprises a conductive ring, a conductive encapsulation, and a conductive metal block.
In the clamping mechanism 40, except the conductive ring and the conductive metal block are made of conductive metal materials, the other parts are made of insulating materials, such as PVDF (polyvinylidene fluoride) plastic.
The material of the sealing member 30 is fluororubber.
The cover plate 10 is made of PTFE Teflon plastic.
Example 2
This example provides an online sealing performance measuring apparatus, which replaces the first gas pressure gauge of example 1 with a first gas flow gauge and replaces the second gas pressure gauge of example 1 with a second gas flow gauge, compared to example 1, and thus the measuring apparatus detects the gas flow rate of the chamber 101. The remaining components are the same as in example 1.
Example 3
As shown in fig. 3, this embodiment provides an online tightness testing device, compared with embodiment 1, the online tightness testing device has 2 gas inlets 102, and correspondingly, there are 2 gas channels 201, the 2 gas channels 201 are finally combined into 1 main gas channel 202 to reduce the number of channels, the same gas supply source supplies gas, and the first gas pressure gauge and the second gas pressure gauge are both arranged on the combined main gas channel 202, and the rest parts are the same as those in embodiment 1.
Example 4
The embodiment provides an online sealing performance detection method, which is performed by using the online sealing performance detection device in embodiment 1, and comprises the following steps:
s1: the cover plate 10, the element to be detected 100 and the sealing element 30 are pressed tightly, gas is continuously introduced into the formed cavity 101 from the gas inlet 102 through the gas channel 201, the gas supply pressure is 0.1MPa, and the gas supply pressure is detected through a second barometer;
s2: detecting the air pressure of the cavity 101 through a first air pressure meter;
if the air pressure difference value detected by the first air pressure gauge and the second air pressure gauge is-10% to 10% of the air pressure detected by the second air pressure gauge, the sealing performance of the device 100 to be tested is considered to be better, for example: if the air pressure detected by the second barometer is 0.1MPa and the air pressure detected by the first barometer is 0.09 MPa-0.11 MPa, the sealing performance of the element to be tested 100 is considered to be better; on the contrary, if the air pressure detected by the first air pressure gauge is not within the range, the sealing performance of the dut 100 may be considered to be poor.
The utility model discloses leakproofness on-line measuring device can carry out the gas tightness in horizontal electroplating or perpendicular electroplating process to the upper surface of element to be measured 100 and detect, and sealing member 30 is used for keeping apart plating solution and the upper surface of element to be measured 100, prevents that the upper surface of element to be measured 100 from contacting the plating solution. When the other side of the dut 100 needs to be plated, the dut 100 is turned over.
Claims (10)
1. An online sealing performance detection device for detecting the sealing performance of a component to be detected, the online sealing performance detection device comprising: the device comprises a cover plate, a measuring device and a sealing element, wherein the element to be measured is arranged between the cover plate and the sealing element;
the cover plate is arranged on the upper surface of the element to be tested, the cover plate is provided with a groove, and the groove and the element to be tested form a cavity;
the cover plate is provided with at least one air inlet which is communicated with the cavity;
the measuring device is connected with the air inlet through an air channel and is used for detecting the air pressure or the air flow of the cavity;
the sealing piece is arranged on the edge of the lower surface of the element to be tested.
2. The online tightness detection device according to claim 1, wherein the number of the air inlets is 1-3; the number of the gas channels corresponds to the number of the gas inlets;
the gas channel is connected with the gas inlet through a joint;
the area S1 of the contact surface of the cavity and the element to be tested is 5-99% of the area S2 of the upper surface of the element to be tested.
3. The online leakproofness detecting device according to claim 2, wherein the number of said air inlets is 1;
the area S1 of the contact surface of the cavity and the element to be tested is 9-64% of the area S2 of the upper surface of the element to be tested.
4. The online tightness detection device according to claim 1, wherein the measuring device is provided with a first air pressure gauge or a first gas flow gauge; the first air pressure gauge is used for measuring the air pressure of the cavity and is arranged at the air channel;
the first gas flow meter is used for measuring the gas flow of the cavity and is arranged at the gas channel.
5. The online tightness detection device according to claim 4, wherein when the measuring device is used for detecting the gas pressure of the cavity, the measuring device is further provided with a second gas pressure gauge, the second gas pressure gauge is used for measuring the gas supply pressure of the gas and is arranged at the gas supply source;
when the measuring device is used for detecting the gas flow of the cavity, the measuring device is also provided with a second gas flow meter which is used for measuring the gas supply flow of the gas and is arranged at a gas supply source.
6. The online tightness detection device according to claim 1, wherein the material of the gas channel is an insulating material;
the gas passage had a diameter of 1/8 inches.
7. The online leakproofness detecting device according to claim 6, wherein the material of the gas channel is polyethylene plastic.
8. The device of claim 1, further comprising a clamping mechanism for clamping the cover plate, the device under test and the sealing member.
9. The device for on-line detecting tightness according to claim 8, wherein said clamping mechanism is further used for electrically connecting said element to be tested;
the sealing element is made of fluororubber;
the cover plate is made of plastic or metal;
the element to be tested is a wafer;
the sealing element is a wafer sealing ring, the outer diameter of the wafer sealing ring is 90% -100% of the diameter of the element to be tested, the difference between the inner diameter and the outer diameter is 2mm, and the height is 1-1.5 mm.
10. The online leakproofness detecting device of claim 9, wherein the cover plate is made of PTFE teflon plastic or aluminum.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202021665985.7U CN212363589U (en) | 2020-08-11 | 2020-08-11 | Online detection device for sealing performance |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202021665985.7U CN212363589U (en) | 2020-08-11 | 2020-08-11 | Online detection device for sealing performance |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN212363589U true CN212363589U (en) | 2021-01-15 |
Family
ID=74132413
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202021665985.7U Active CN212363589U (en) | 2020-08-11 | 2020-08-11 | Online detection device for sealing performance |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN212363589U (en) |
-
2020
- 2020-08-11 CN CN202021665985.7U patent/CN212363589U/en active Active
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN105675231B (en) | A kind of negative-pressure sealing detection device | |
| CN101191754A (en) | Checking apparatus for checking product sealing performance and checking method | |
| CN212363589U (en) | Online detection device for sealing performance | |
| CN111811753A (en) | Online tightness detection device and method | |
| CN109282949B (en) | Special-shaped wire holder air tightness inspection device | |
| CN116511082A (en) | Online detection equipment and method for baking battery cells | |
| CN214583901U (en) | Novel airtightness detection device | |
| CN215178593U (en) | Rubber seal airtightness detection device | |
| CN209570307U (en) | It is a kind of for detecting the air pressure monitor station of standard position air-tightness | |
| CN210834052U (en) | Expiratory valve air tightness test system | |
| CN114593878A (en) | Air tightness testing device | |
| CN210243116U (en) | Airtightness detection equipment | |
| CN113390586B (en) | Airtight check out test set for manometer | |
| CN112697354A (en) | Valve helium leak detection tool and leak detection method | |
| CN111156315A (en) | Sealing device | |
| CN219608365U (en) | Ceramic product vacuum leakage detection device | |
| CN116337712B (en) | Special test equipment of high pressure hydrogen separation | |
| CN217878212U (en) | Leakage detection device for insulating flange | |
| CN111122072A (en) | Wearable product waterproof function detection device and detection method | |
| CN212807483U (en) | Quick intelligent connector | |
| CN214952722U (en) | Train blast pipe pressurization test device | |
| CN214224466U (en) | Leakage standard sample for air tightness detection | |
| CN216669156U (en) | Electrode holder leak hunting device | |
| CN210464840U (en) | Air tightness detection device of air valve | |
| JP4427164B2 (en) | Diaphragm valve leak detection sensor |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant |