CN219608365U - Ceramic product vacuum leakage detection device - Google Patents
Ceramic product vacuum leakage detection device Download PDFInfo
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- CN219608365U CN219608365U CN202223588598.XU CN202223588598U CN219608365U CN 219608365 U CN219608365 U CN 219608365U CN 202223588598 U CN202223588598 U CN 202223588598U CN 219608365 U CN219608365 U CN 219608365U
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Abstract
The utility model discloses a ceramic product vacuum leakage detection device, which comprises a device body, wherein a sealing area sealing assembly is arranged on the device body, the sealing area sealing assembly comprises a laser emission channel sealing assembly and an air hole sealing assembly, the laser emission channel sealing assembly is symmetrically arranged at two ends of the device body in a rotation adjustment mode, and the air hole sealing assembly is movably arranged in a compression joint mode. The ceramic product vacuum leakage detection device is convenient and quick to operate, has good universality, can be widely applied to cavity air tightness detection of nonstandard ceramic products for various specifications and types of laser equipment, and greatly improves detection efficiency and detection quality.
Description
Technical Field
The utility model belongs to the technical field of ceramic product detection, and particularly relates to a ceramic product vacuum leakage detection device suitable for large-scale laser equipment.
Background
With the increasing development of ceramic material properties and processing techniques, ceramic products are gradually developed from the earliest artware to the current special ceramics with various specific industrial properties. Compared with metal materials, ceramic materials have excellent properties such as high temperature resistance, wear resistance, corrosion resistance, high hardness, no metal contamination, insulation, etc., and exert excellent effects in various devices.
Along with the wide application of ceramic materials, more and more products are changed into ceramic materials, so that the structure and the size of the ceramic products are more diversified, and various requirements are gradually improved. According to the corrosion resistance of ceramics, a large number of ceramic materials are selected as core components in semiconductor laser equipment.
For the large-scale nonstandard ceramic product with a cavity, the air tightness of the cavity is required to be high, the air hole communicated with the cavity is arranged on the upper surface of the ceramic product, the air hole and the cavity are required to be sealed simultaneously by using a sealing ring and connected to a leakage tester in the leakage test, the operation difficulty in the test process is high, the test efficiency is seriously influenced, and because the ceramic product is a large-scale nonstandard ceramic product, a special leakage jig is required to be set according to the condition of the product so as to ensure the sealing inspection of the product, and each large-scale nonstandard ceramic product is required to be manufactured by the special inspection device, so that the production cost is increased, the universality is not realized, and meanwhile, the great inconvenience is brought to the inspection.
Disclosure of Invention
The utility model aims to solve the problems of high cavity air tightness detection difficulty, high cost, no universality and low detection efficiency of the existing large non-standard ceramic products, and provides the ceramic vacuum leakage detection device for the large laser equipment, which has the advantages of simple structure, convenience and rapidness in installation, high detection efficiency and good universality and can realize the air tightness detection of the large non-standard ceramic products with various specifications.
The technical scheme adopted by the utility model for achieving the aim of the utility model is as follows: the utility model provides a ceramic product vacuum leak detection device, includes the device body, the device body on be provided with sealed regional closure subassembly, sealed regional closure subassembly include laser emission passageway seal assembly and gas pocket seal assembly, laser emission passageway seal assembly be rotation regulation formula symmetry setting at the both ends of device body, the movable crimping formula setting of gas pocket seal assembly. This ceramic product vacuum leakage detection device through setting up a device body that is used for ceramic product to detect fixed usefulness, sets up sealing area closure assemblies such as laser emission passageway sealing component and gas pocket sealing component respectively on the device body, when detecting ceramic product vacuum leakage, only need place the ceramic product that waits to detect on the device body, realize sealing the laser emission passageway on the ceramic product through laser emission passageway sealing component, and be connected with the inflation inlet of leakage detection equipment through gas pocket sealing component and gas pocket, can realize the detection to ceramic product inner chamber vacuum degree, convenient operation is swift, and this detection device has good commonality moreover, can extensively be applicable to the cavity gas tightness detection of nonstandard ceramic product that various specification model laser equipment was used, very big improvement detection efficiency and detection quality.
Preferably, the device body comprises a base and fixing blocks symmetrically fixed at two ends of the base, wherein the fixing blocks are provided with rotary adjusting holes along the horizontal direction, and a detection product positioning space is formed between the two fixing blocks on the base. The device body mainly comprises a base, the base is a horizontal plate which is horizontally arranged, two fixing blocks are respectively fixed at two ends of the upper surface of the base, the two fixing blocks are fixedly used for fixing the top of the laser emission channel sealing assembly, and meanwhile, the device body is also used for sealing laser emission channels of different specifications and models.
Preferably, the base where the product positioning space is located is provided with a guide piece, and the guide piece is arranged along the axis where the length direction of the base is located. The base where the positioning space of the detection product is located can be provided with a guide piece, and the guide piece is used for being matched with a bottom groove at the bottom of the ceramic product to limit the ceramic product, so that the sealing fit of a laser emission channel and a laser emission channel sealing assembly at two ends of the ceramic product is further protected, and the accuracy of vacuum detection is ensured.
Preferably, the laser emission channel sealing assembly comprises a push rod and a sealing top block, wherein the sealing top block comprises a top connection end and a sealing end, a top connection hole is formed in the top connection end, a top block sealing groove is formed in the end face of the sealing end, and a top block sealing piece is arranged in the top block sealing groove; the ejector rod comprises an integrally arranged operating end, a rotary thread section and an ejector rod jacking end, and the ejector rod jacking end is matched with the jacking hole. The laser emission channel sealing assembly comprises a push rod and a sealing push block, wherein the sealing push block comprises a push connecting end and a sealing end, a push connecting hole is formed in the push connecting end, the push rod on the push rod is convenient to push against the sealing push block to tightly push against a laser emission channel opening of a ceramic product through the push rod, so that sealing is achieved, the sealing end is used for sealing the laser emission channel opening, therefore, a push block sealing groove is formed in the sealing end, a push block sealing piece is arranged in the push block sealing groove, and the push block sealing piece is matched with a sealing area where the laser emission channel is located, so that sealing of the laser emission channel is achieved. The ejector rod is provided with an operation end for realizing the rotary jacking operation of the ejector rod, can be manually rotated or automatically rotated by power, and the rotary thread section is used for being matched with a rotary adjusting hole on the fixed block, so that the adjustment of the distance between the ejector rod and the laser emission channel end on the ceramic product is realized, namely, the sealing position and the sealing effect of the sealing ejector block are adjusted. The jacking rod jacking end is movably matched with the jacking hole on the sealing jacking block, so that the jacking rod can not drive the sealing jacking block to rotate in the rotating process, and meanwhile, jacking positioning after the sealing jacking block contacts with the end part of the ceramic product can be realized, and the sealing jacking block and the ceramic product are always in a jacking tight sealing state in the air extraction process.
Preferably, the air hole sealing assembly comprises a sealing connecting piece, the sealing connecting piece comprises a connecting seat and a connecting pipe, a connecting seat sealing groove is formed in the connecting seat, a connecting seat sealing piece is arranged in the connecting seat sealing groove, and an air cavity for communicating air holes and external leakage equipment is formed in the connecting pipe. The air hole sealing assembly preferably uses a sealing connecting piece, the sealing connecting piece can be integrally provided with a connecting seat and a connecting pipe, the connecting seat is used for pressing and sealing the air hole, and the connecting pipe is used for being connected with a pipeline, so that the connection between the inner cavity of the ceramic product and the air suction hole of the leakage detection equipment is realized. The connecting seat is provided with the connecting seat seal groove with the sealed one side of ceramic product hole cooperation, is provided with the connecting seat sealing member in the inside connecting seat seal groove, when using, presses the connecting seat to establish on the gas pocket, seals the periphery of gas pocket to guarantee the accuracy nature at vacuum leakage detection in-process.
Preferably, the air hole sealing assembly comprises a sealing connecting piece, the sealing connecting piece comprises a connecting seat and a connecting pipe, a sealing plug is arranged on one side, opposite to the connecting pipe, of the connecting seat, and a ventilation cavity for communicating air holes and external leakage equipment is formed in the connecting pipe. As another preferable scheme, the sealing connecting piece can be further provided with a sealing plug which is inserted and sealed with the air hole directly on the connecting seat, and when the sealing connecting piece is used, the sealing plug is directly inserted into the air hole to realize the sealing connection with the air hole, and is connected with an inflation inlet of external leakage detection equipment through the air hole to realize the vacuum leakage detection.
Preferably, the device further comprises a leakage point detection assembly, wherein the leakage point detection assembly comprises a detection needle cylinder and a leakage air pressure flowmeter, the detection needle cylinder is connected with the leakage air pressure flowmeter through an air pipe, and the leakage air pressure flowmeter is connected with external leakage equipment. The leakage point detection is carried out on the joint of the upper buckle plate and the lower buckle plate through the detection needle cylinder, the air pressure change is detected through the leakage air pressure flowmeter, the leakage value is finally displayed on external leakage equipment, and the leakage point can be sealed and remedied, so that the vacuum requirement of the inner cavity of the ceramic product is ensured.
The utility model has the beneficial effects that: the ceramic product vacuum leakage detection device is convenient and quick to operate, has good universality, can be widely applied to cavity air tightness detection of nonstandard ceramic products for various specifications and types of laser equipment, and greatly improves detection efficiency and detection quality.
Drawings
FIG. 1 is a schematic diagram of a ceramic product for a non-standard large scale laser device of the present utility model;
FIG. 2 is a cross-sectional view of a ceramic product for a non-standard large scale laser device of the present utility model;
FIG. 3 is a schematic view of a vacuum leak detection apparatus for a novel ceramic product of the present embodiment;
FIG. 4 is a schematic illustration of a seal connection of the present utility model;
FIG. 5 is a schematic view of a seal top block according to the present utility model;
FIG. 6 is a schematic view of the sealing top block of the present utility model at another angle;
FIG. 7 is a schematic view of a construction of the ejector pin of the present utility model;
FIG. 8 is a schematic diagram of an application structure of a ceramic product vacuum leak detection apparatus of the present utility model;
FIG. 9 is a schematic view showing a structure of a sealing joint according to embodiment 2 of the present utility model;
in the figure: 100. ceramic products, 101, upper pinch plates, 102, lower pinch plates, 103, inner cavities, 104, gradual change grooves, 105, laser emission channels, 106, air holes, 107, bottom grooves, 200 and leakage equipment;
300. 400 parts of the device body, 500 parts of the laser emission channel sealing assembly, 600 parts of the air hole sealing assembly, 600 parts of the detection product positioning space, 700 parts of the detection assembly of the leakage point;
1. a base, 2, a fixed block, 3, a push rod, 31, an operation end, 32, a rotary thread section, 33, a push rod top connection end, 4, a sealing top block, 41, a top connection end, 42, a sealing end, 43 and a top connection hole,
5. sealing grooves, 6, top block sealing parts, 7, guiding parts, 8, sealing connecting parts, 9, connecting seats, 10, connecting pipes, 11, connecting seat sealing grooves, 12, connecting seat sealing parts, 13, ventilation chambers, 14, rotation adjusting holes, 15, detection needle cylinders, 16 and leakage air pressure flow meters.
Detailed Description
The present utility model will now be described in detail with reference to the drawings and the specific embodiments thereof, wherein the exemplary embodiments and descriptions of the present utility model are provided for illustration of the utility model and are not intended to be limiting.
Example 1:
as shown in fig. 1 and 2, in this embodiment, a ceramic product 100 for a non-standard large-scale laser device is shown, the ceramic product 100 includes an upper buckle plate 101 and a lower buckle plate 102 that are connected in a sealed manner, the upper buckle plate 101 and the lower buckle plate 102 are buckled to form an inner cavity 103, the upper buckle plate 101 is provided with a concave gradual change groove 104, end surfaces at two ends of the upper buckle plate 101 and the lower buckle plate 102 are provided with laser emission channels 105, and an air hole 106 communicating with the inner cavity 103 is arranged on a plate surface of the upper buckle plate 101. The end part where the laser emission channel is located is set as an end sealing area, and the plate surface where the air hole is located is set as a surface sealing area. A bottom groove 107 with a gradual concave shape is arranged on the lower plate surface of the lower buckle plate. The ceramic product has various specifications and sizes, and a general vacuum detection device is specially designed for the ceramic product 100 for the nonstandard large-scale laser equipment.
In this embodiment, the external leakage apparatus 200 includes an air pump, a pneumatic pressure flow meter, and a leakage meter.
As shown in fig. 3, a ceramic product vacuum leakage detection device comprises a device body 300, wherein a sealing area sealing assembly is arranged on the device body 300, the sealing distinguishing sealing assembly comprises a laser emission channel sealing assembly 400 and an air hole sealing assembly 500, the laser emission channel sealing assembly 400 is symmetrically arranged at two ends of the device body 300 in a rotation adjusting mode, and the air hole sealing assembly 500 is movably arranged in a pressing mode. The device is widely applicable to detection of vacuum leakage of ceramic products of nonstandard large-scale laser equipment, and the detection device is made of aluminum alloy.
The device body 300 comprises a base 1 and fixing blocks 2 symmetrically fixed at two ends of the base, wherein the fixing blocks 2 are provided with rotary adjusting holes 14 along the horizontal direction, and a detection product positioning space 600 is formed between the two fixing blocks 2 on the base 1.
The laser emission channel sealing assembly 400 comprises a push rod 3 and a sealing top block 4, as shown in fig. 5 and 6, the sealing top block 4 comprises a top connection end 41 and a sealing end 42, the top connection end 41 is provided with a top connection hole 43, the end surface of the sealing end 42 is provided with a top block sealing groove 5, and a top block sealing piece 6 is arranged inside the top block sealing groove 5; as shown in fig. 7, the ejector rod 3 includes an integrally provided operating end 31, a rotary threaded section 32 and an ejector rod abutting end 33, and the ejector rod abutting end 33 is matched with an abutting hole 43.
Two fixed blocks 2 pass through bolt and base 1 fixed connection, ejector pin 3 level setting and remove regulation formula with fixed block 2 to be connected, adopt rotation type threaded connection in this embodiment, ejector pin 3 from the outside of fixed block 2 inwards set up, the operating end 31 is established in the outside of fixed block, and rotation screw thread section 32 and the rotation regulation hole 14 screw thread fit on the fixed block, and the ejector pin top is connected the end and is extended in the fixed block inboard and just to the top on the sealed ejector block 4 connect hole 43 setting, ejector pin top connect end and top connect hole movable fit, the sealed ejector block is not rotated along with the ejector pin in ejector pin rotation process. The sealing end 42 on the sealing top block 4 is provided with a top block sealing groove 5, a top block sealing piece 6 is arranged in the top block sealing groove 5, and the top block sealing piece 6 is matched with a laser emission channel area on a ceramic product to realize the sealing of the laser emission channel. The relative position between the ejector rod and the fixed block can be changed through rotating the adjusting ejector rod 3, namely the relative position between the ejector rod and the sealing ejector block is changed, so that the tight ejection sealing of the sealing ejector block can be realized, and the sealing device is used for sealing a laser emission channel during vacuum detection.
The guide piece 7 is arranged on the base 1 between the two fixed blocks 2 on the base 1 along the central axis of the length direction of the base, and the guide piece 7 is matched with the bottom groove 107 on the lower pinch plate of the ceramic product, and the length of the guide piece is smaller than that of the bottom groove. For realizing the limit of the ceramic product 100 in the detection process so as to ensure the accuracy of the detection effect. In this embodiment, the guide member 7 is a guide rail, and adopts the guide rail, uses sometimes, and the kerve lock on the ceramic product is on the guide rail, guarantees that the ceramic product can be in on the central axis of base length direction, guarantees that the sealed kicking block at both ends can effectively seal in the laser emission passageway.
As shown in fig. 4, the vacuum leak detector further comprises a sealing connecting piece 8, the sealing connecting piece 8 comprises a connecting seat 9 and a connecting pipe 10, the connecting seat 9 is provided with a connecting seat sealing groove 11, a connecting seat sealing piece 12 is arranged inside the connecting seat sealing groove 11, the connecting seat sealing piece 12 is matched with an air hole 106 on a ceramic product 100, the air hole 103 is sealed during vacuum leak detection, and an air cavity 13 for communicating the air hole 103 with external leakage equipment 200 is arranged inside the connecting pipe 10. When the sealing connecting piece is used, the sealing connecting piece is connected with the upper buckle plate through a bolt and is connected on the upper buckle plate where the air hole is located in a sealing mode, and the sealing connecting piece is used for sealing the air hole. Of course, the sealing connection 8 can also be connected to the upper clip plate by means of adhesive.
As shown in fig. 3, the device further comprises a leakage point detection assembly 700, the leakage point detection assembly 700 comprises a detection needle cylinder 15 and a leakage air pressure flowmeter 16, the detection needle cylinder 15 is connected with the leakage air pressure flowmeter through an air pipe, the leakage air pressure flowmeter is connected with the external leakage equipment 200, when the leakage point needs to be detected, the detection needle cylinder moves along the joint of the upper buckle plate and the lower buckle plate, when air leaks, the air pressure flowmeter changes, and the air pressure value on the leakage equipment changes, which indicates that leakage exists.
As shown in fig. 8, the vacuum leak detection apparatus operates as follows: when the vacuum leakage of a large non-standard ceramic product is required to be detected, the ceramic product to be detected is horizontally placed on the base 1, meanwhile, the bottom groove 107 on the lower buckle plate is just covered on the guide piece 7, so that the ceramic product can be positioned at the central axis of the base, the laser emission channels at the two ends of the ceramic product are opposite to the sealing ejector blocks 4, then the ejector rods at the two ends are rotated, the sealing ejector blocks are driven to approach the laser emission channels through the ejector rods, after the sealing ejector blocks are abutted against the two ends of the ceramic product, the laser emission channels at the two ends of the ceramic product are sealed through the ejector block sealing piece on the sealing ejector blocks, and at the moment, the positions of the sealing ejector blocks can be guaranteed to be fixed due to the fact that the ejector rods are in rotary threaded connection, and the laser emission channels are always sealed. Finally, the sealing connecting piece is connected with the air hole to realize the sealing of the periphery of the air hole,
then the sealing connector is connected with the charging port of the leakage equipment 200, the inner cavity of the ceramic product is charged with nitrogen through the air pump, when the nitrogen is charged to be more than or equal to a set value, the set value is 1.02X10 generally －11 Pa·m 3 And/s, the vacuum degree of the inner cavity accords with the product requirement, so that the sealing test of the vacuum degree of the inner cavity of the ceramic product is realized. And when the nitrogen inflation quantity displayed on the leakage equipment is not up to a set value all the time, the vacuum sealing of the inner cavity of the ceramic product is not qualified. At this time, the leakage point testing component moves along the gap where the upper buckle plate and the lower buckle plate of the ceramic product are connected, and when the air pressure flow value in the leakage point detection component changes, the leakage point testing component indicates that the leakage point testing component is a leakage point, and then the leakage point testing component reseals the leakage point testing component, so that the leakage point testing component meets the set vacuum requirement.
Example 2:
in the embodiment shown in fig. 9, the technical scheme is basically the same as that of embodiment 1, except that: the sealing connector 8 comprises a connecting seat 9 and a connecting pipe 10, a sealing plug is arranged on one side, opposite to the connecting pipe 10, of the connecting seat 9, the sealing plug is matched with an air hole 106 in a ceramic product 100, the air hole 103 is sealed when vacuum leakage is detected, and an air cavity 13 for communicating the air hole 103 with external leakage equipment is arranged in the connecting pipe 10. In use, the sealing plug is inserted into the air hole 106 of the ceramic product to seal the air hole. The connecting pipe 10 is connected with an external leakage equipment inflation inlet through an air pipe and is used for vacuumizing the inner cavity of the ceramic product so as to perform vacuum leakage test.
The vacuum leakage detection device for the ceramic products, which is shown in the embodiment, can be widely applied to vacuum leakage detection of ceramic products for various nonstandard large-scale laser equipment, is simple in structure, convenient and practical, has good universality and can well solve the problem of sealing detection of the ceramic products of the large-scale laser equipment.
Claims (8)
1. A ceramic product vacuum leak detection device comprising a device body (300), characterized in that: the device is characterized in that a sealing area sealing assembly is arranged on the device body (300), the sealing distinguishing sealing assembly comprises a laser emission channel sealing assembly (400) and an air hole sealing assembly (500), the laser emission channel sealing assembly (400) is symmetrically arranged at two ends of the device body (300) in a rotation adjusting mode, and the air hole sealing assembly (500) is movably arranged in a pressing mode.
2. The ceramic product vacuum leak detection apparatus of claim 1, wherein: the device body (300) comprises a base (1) and fixing blocks (2) symmetrically fixed at two ends of the base, wherein rotation adjusting holes (14) are formed in the fixing blocks (2) along the horizontal direction, and a detection product positioning space (600) is formed between the two fixing blocks (2) on the base (1).
3. The ceramic product vacuum leak detection apparatus of claim 2, wherein: the base where the detection product positioning space (600) is located is provided with a guide piece (7), and the guide piece (7) is arranged along the axis where the length direction of the base is located.
4. The ceramic product vacuum leak detection apparatus of claim 1, wherein: the laser emission channel sealing assembly (400) comprises a push rod (3) and a sealing top block (4), the sealing top block (4) comprises a top connection end (41) and a sealing end (42), a top connection hole (43) is formed in the top connection end (41), a top block sealing groove (5) is formed in the end face of the sealing end (42), and a top block sealing piece (6) is arranged inside the top block sealing groove (5).
5. The ceramic product vacuum leak detection apparatus as defined in claim 4, wherein: the ejector rod (3) comprises an integrally arranged operating end (31), a rotary threaded section (32) and an ejector rod jacking end (33), and the ejector rod jacking end (33) is matched with the jacking hole (43).
6. The ceramic product vacuum leak detection apparatus according to any one of claims 1 to 5, wherein: the air hole sealing assembly (500) comprises a sealing connecting piece (8), the sealing connecting piece (8) comprises a connecting seat (9) and a connecting pipe (10), a connecting seat sealing groove (11) is formed in the connecting seat (9), a connecting seat sealing piece (12) is arranged in the connecting seat sealing groove (11), and a ventilation cavity (13) for communicating an air hole (103) and external leakage equipment is formed in the connecting pipe (10).
7. The ceramic product vacuum leak detection apparatus according to any one of claims 1 to 5, wherein: the air hole sealing assembly (500) comprises a sealing connecting piece (8), the sealing connecting piece (8) comprises a connecting seat (9) and a connecting pipe (10), a sealing plug is arranged on one side, opposite to the connecting pipe (10), of the connecting seat (9), and an air cavity (13) for communicating an air hole (103) with external leakage equipment is formed in the connecting pipe (10).
8. The ceramic product vacuum leak detection apparatus according to any one of claims 1 to 5, wherein: the leakage point detection device is characterized by further comprising a leakage point detection assembly (700), wherein the leakage point detection assembly (700) comprises a detection needle cylinder (15) and a leakage air pressure flowmeter (16), the detection needle cylinder (15) is connected with the leakage air pressure flowmeter (16) through an air pipe, and the leakage air pressure flowmeter (16) is connected with external leakage equipment.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202223588598.XU CN219608365U (en) | 2022-12-29 | 2022-12-29 | Ceramic product vacuum leakage detection device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202223588598.XU CN219608365U (en) | 2022-12-29 | 2022-12-29 | Ceramic product vacuum leakage detection device |
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| Publication Number | Publication Date |
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| CN219608365U true CN219608365U (en) | 2023-08-29 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
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| CN202223588598.XU Active CN219608365U (en) | 2022-12-29 | 2022-12-29 | Ceramic product vacuum leakage detection device |
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| CN (1) | CN219608365U (en) |
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2022
- 2022-12-29 CN CN202223588598.XU patent/CN219608365U/en active Active
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