CN212363583U - Equipment for detecting leakage of vacuum cavity - Google Patents
Equipment for detecting leakage of vacuum cavity Download PDFInfo
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- CN212363583U CN212363583U CN202021141170.9U CN202021141170U CN212363583U CN 212363583 U CN212363583 U CN 212363583U CN 202021141170 U CN202021141170 U CN 202021141170U CN 212363583 U CN212363583 U CN 212363583U
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Abstract
The utility model provides a device for vacuum cavity leak detection belongs to vacuum product leak hunting technical field. The equipment for detecting the leakage of the vacuum cavity comprises a shell mechanism, a sealing mechanism and a negative pressure mechanism, wherein the shell mechanism comprises a box body, a first hydraulic cylinder, a driving assembly, a first fixing assembly, a second fixing assembly, an observation window and a first phenolphthalein bottle, and the driving assembly is installed on an output shaft of the first hydraulic cylinder. The utility model discloses a first pneumatic cylinder, box, second pneumatic cylinder, the second is dull and stereotyped, the sealing washer, the apron, the third through-hole, the negative pressure pump, first phenolphthalein bottle and the effect of second phenolphthalein bottle to reached the purpose of convenient to use, improved current leak detection equipment and be not convenient for use, often use vacuum leak detector and product direct connection to come to inspect, this kind of method is wasted time and energy, it is consuming time longer, to the higher problem of detection ring border requirement.
Description
Technical Field
The utility model relates to a vacuum product leak hunting field particularly, relates to an equipment for vacuum cavity leak testing.
Background
The vacuum cavity needs to be subjected to leakage detection when in production, the existing leakage detection equipment is inconvenient to use, a vacuum leak detector is often used to be directly connected with a product for inspection, the method is time-consuming and labor-consuming, the time-consuming time is long, and the requirement on detection environment is high.
SUMMERY OF THE UTILITY MODEL
In order to compensate the above deficiency, the utility model provides an equipment for vacuum cavity leakage detection aims at improving the problem of not being convenient for use.
The utility model discloses a realize like this:
the utility model provides an equipment for vacuum cavity leak detection, including shell mechanism, sealing mechanism and negative pressure mechanism.
The shell mechanism comprises a box body, a first hydraulic cylinder, a driving component, a first fixing component, a second fixing component, an observation window and a first phenolphthalein bottle, wherein the first hydraulic cylinder is connected to the inner wall of the box body, the driving component is installed on an output shaft of the first hydraulic cylinder, the first fixing component and the second fixing component are connected to the driving component in a sliding manner, the driving component can drive the first fixing component and the second fixing component to move, the observation window is embedded in one side of the box body, the first phenolphthalein bottle is connected to one side of the observation window, the observation window can observe the first phenolphthalein bottle, a third through hole is formed in one side of the box body, the sealing mechanism comprises a first flat plate, a second hydraulic cylinder, a second flat plate, a sealing ring and a cover plate, the first flat plate is installed on two sides of the box body, the second hydraulic cylinder is connected to one side of the first flat plate, the second flat plate is installed in the output shaft of second pneumatic cylinder, the apron connect in second flat plate one side, the sealing washer install in apron week side, the apron with third through-hole clearance fit, the sealing washer can seal the third through-hole with the apron, negative pressure mechanism includes negative pressure pump, first connecting pipe, second connecting pipe, check valve and second phenolphthalein bottle, the negative pressure pump install in box one side, the negative pressure pump pass through first connecting pipe with the box intercommunication, second phenolphthalein bottle connect in box one side, the negative pressure pump pass through the second connecting pipe with second phenolphthalein bottle intercommunication, the check valve install in the second connecting pipe.
In the utility model discloses an in the equipment embodiment for vacuum cavity leak testing, the second phenolphthalein bottle with all fill phenolphthalein solution in the first phenolphthalein bottle.
The utility model discloses an in the equipment embodiment for vacuum cavity leakage detection, drive assembly includes drive box, first conical gear, threaded rod, second conical gear and motor, the drive box connect in the output shaft of first pneumatic cylinder, the motor install in drive box inner wall, first conical gear connect in the output shaft of motor, second conical gear meshing connect in first conical gear, the threaded rod install in second conical gear's both sides.
The utility model discloses an in the equipment embodiment for vacuum cavity leakage detection, first fixed subassembly includes first stock and first chuck, first chuck connect in first stock one side, first screw hole has been seted up to first stock, first screw hole with threaded rod threaded connection.
The utility model discloses an in the equipment embodiment for vacuum cavity leakage detection, the first slider of first stock one end fixedly connected with, first spout has been seted up to the drive incasement wall, first spout with first slider sliding connection.
The utility model discloses an in the equipment embodiment for vacuum cavity leakage detection, first through-hole has been seted up to drive case one side, first stock with first through-hole clearance fit, first stock run through in first through-hole.
The utility model discloses an in the equipment embodiment for vacuum cavity leakage detection, the fixed subassembly of second includes second stock and second chuck, the second chuck connect in second stock one side, the second screw hole has been seted up to the second stock, the threaded rod screw thread run through in the second screw hole.
The utility model discloses an in the equipment embodiment for vacuum cavity leakage detection, second stock one end fixedly connected with second slider, the second spout has been seted up to the drive incasement wall, first spout with second slider sliding connection.
The utility model discloses an in the equipment embodiment for vacuum cavity leakage detection, the second through-hole has been seted up to drive case one side, the second stock run through in the second through-hole, the second stock with second through-hole clearance fit.
The utility model discloses an in the equipment embodiment for vacuum cavity leak detection, box one side is rotated and is connected with the walking wheel, the walking wheel sets up to four.
The utility model has the advantages that: the utility model discloses an equipment for vacuum cavity leakage detection through above-mentioned design obtains, when using, fill sulfur dioxide in the vacuum cavity at first, then control first pneumatic cylinder upwards to extend, first pneumatic cylinder can drive the drive case and upwards move, put the vacuum cavity on the drive case through the third through-hole, turn on the motor, the motor can drive first conical gear and rotate, first conical gear can drive second conical gear and rotate, second conical gear can drive the threaded rod and rotate, the screw thread direction of first screw hole and second screw hole is opposite, the threaded rod can drive first stock and second stock to inwards move through first screw hole and second screw hole, first stock and second stock can drive first chuck and second chuck inwards to move respectively, first chuck and second chuck can clamp the tight vacuum cavity of fixing, after clamping, control first pneumatic cylinder to shrink downwards, first pneumatic cylinder can drive the vacuum cavity and enter into the box inner chamber, then control second pneumatic cylinder shrink downwards, the second pneumatic cylinder can drive the second flat board and move down, the second flat board can drive sealing washer and apron move down, sealing washer and apron and third through hole can seal the box, open the negative pressure pump, the negative pressure pump can make the box form the negative pressure, if the vacuum cavity leaks, sulfur dioxide can come out from the vacuum cavity, sulfur dioxide reacts with the water in first phenolphthalein bottle and the second phenolphthalein bottle and generates H2SO3Red phenolphthalein solution is alkaline and meets H2SO3The neutralization reaction occurs, the solution is not alkaline, so the solution is not red, which is convenient to observe from the first phenolphthalein bottle, if the vacuum cavity does not leak, the first phenolphthalein bottle and the second phenolphthalein bottleThe liquid can appear red all the time to reach the purpose of convenient to use, improved current leak detection equipment and be not convenient for use, often used vacuum leak detector and product direct connection to come the inspection, this kind of method is wasted time and energy, and is consuming time longer, to the higher problem of detection ring border requirement.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings that are required to be used in the embodiments will be briefly described below, it should be understood that the following drawings only illustrate some embodiments of the present invention, and therefore should not be considered as limiting the scope, and for those skilled in the art, other related drawings can be obtained according to the drawings without inventive efforts.
Fig. 1 is a schematic structural diagram of an apparatus for detecting leakage of a vacuum chamber according to an embodiment of the present invention;
fig. 2 is a schematic structural diagram of a housing mechanism according to an embodiment of the present invention;
fig. 3 is a schematic structural diagram of a driving assembly according to an embodiment of the present invention;
fig. 4 is a schematic structural view of a first fixing assembly according to an embodiment of the present invention;
fig. 5 is a schematic structural view of a second fixing assembly according to an embodiment of the present invention;
fig. 6 is a schematic structural view of a sealing mechanism according to an embodiment of the present invention;
fig. 7 is a schematic structural view of a seal ring and a cover plate according to an embodiment of the present invention;
fig. 8 is a schematic structural view of a negative pressure mechanism according to an embodiment of the present invention.
In the figure: 10-a housing mechanism; 110-a box body; 120-a first hydraulic cylinder; 130-road wheels; 140-a drive assembly; 141-a drive box; 142-a first runner; 143-a first conical gear; 144-a threaded rod; 145-a first via; 146-a second conical gear; 147-a second via; 148-a second chute; 149-motor; 150-a first stationary component; 151-a first long rod; 152-a first slider; 153-a first threaded hole; 154-a first collet; 160-third via; 170-a second securing assembly; 171-a second long rod; 172-second slider; 173-a second threaded hole; 174-a second collet; 180-observation window; 190-a first phenolphthalein bottle; 20-a sealing mechanism; 210-a first plate; 220-second hydraulic cylinder; 230-a second plate; 240-sealing ring; 250-a cover plate; 30-a negative pressure mechanism; 310-a negative pressure pump; 320-a first connection tube; 330-a second connecting tube; 340-a one-way valve; 350-second phenolphthalein bottle.
Detailed Description
To make the objects, technical solutions and advantages of the embodiments of the present invention clearer, the drawings of the embodiments of the present invention are combined to clearly and completely describe the technical solutions of the embodiments of the present invention, and obviously, the described embodiments are some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.
Thus, the following detailed description of the embodiments of the present invention, presented in the accompanying drawings, is not intended to limit the scope of the invention, as claimed, but is merely representative of selected embodiments of the invention. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.
It should be noted that: like reference numbers and letters refer to like items in the following figures, and thus, once an item is defined in one figure, it need not be further defined and explained in subsequent figures.
In the description of the present invention, it is to be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are only for convenience of description and to simplify the description, but do not indicate or imply that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore should not be construed as limiting the present invention.
Furthermore, the terms "first", "second" and "first" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of the present invention, "a plurality" means two or more unless specifically limited otherwise.
In the present invention, unless otherwise expressly stated or limited, the terms "mounted," "connected," and "fixed" are to be construed broadly and may, for example, be fixedly connected, detachably connected, or integrally formed; either directly or indirectly through intervening media, either internally or in any other relationship. The specific meaning of the above terms in the present invention can be understood according to specific situations by those skilled in the art.
In the present disclosure, unless expressly stated or limited otherwise, the first feature "on" or "under" the second feature may comprise direct contact between the first and second features, or may comprise contact between the first and second features not directly. Also, the first feature being "on," "above" and "over" the second feature includes the first feature being directly on and obliquely above the second feature, or merely indicating that the first feature is at a higher level than the second feature. A first feature being "under," "below," and "beneath" a second feature includes the first feature being directly under and obliquely below the second feature, or simply meaning that the first feature is at a lesser elevation than the second feature.
Examples
Referring to fig. 1, the present invention provides an apparatus for detecting a vacuum chamber leakage, which includes a housing mechanism 10, a sealing mechanism 20 and a negative pressure mechanism 30.
The sealing mechanism 20 and the negative pressure mechanism 30 are both fixedly mounted on the housing mechanism 10, the housing mechanism 10 and the sealing mechanism 20 are used for forming a sealing structure and sealing a vacuum cavity, and the negative pressure mechanism 30 is used for forming negative pressure, so that gas in the vacuum cavity is leaked in the housing mechanism 10, and leakage detection is facilitated.
Referring to fig. 1 and 2, the housing mechanism 10 includes a box body 110, a first hydraulic cylinder 120, a driving assembly 140, a first fixing assembly 150, a second fixing assembly 170, an observation window 180, and a first phenolphthalein bottle 190, the first hydraulic cylinder 120 is connected to an inner wall of the box body 110, specifically, the first hydraulic cylinder 120 is fixedly connected to an inner wall of the box body 110 by a screw, the driving assembly 140 is installed on an output shaft of the first hydraulic cylinder 120, the first fixing assembly 150 and the second fixing assembly 170 are slidably connected to the driving assembly 140, the driving assembly 140 can drive the first fixing assembly 150 and the second fixing assembly 170 to move, the observation window 180 is embedded in one side of the box body 110, the first phenolphthalein bottle 190 is connected to one side of the observation window 180, specifically, the first phenolphthalein bottle 190 is fixedly connected to one side of the observation window 180 by gluing, the observation window 180 can observe the first phenolphthalein bottle 190, one side of the box body, the first hydraulic cylinder 120 is used for driving the vacuum cavity to move up and down, the driving assembly 140, the first fixing assembly 150 and the second fixing assembly 170 are used for clamping and fixing the vacuum cavity, and the observation window 180 and the first phenolphthalein bottle 190 are used for observing whether phenolphthalein solution changes color or not, so that whether leakage occurs or not is judged.
Referring to fig. 1, 6 and 7, the sealing mechanism 20 includes a first plate 210, a second hydraulic cylinder 220, a second plate 230, a sealing ring 240 and a cover plate 250, the first plate 210 is installed at two sides of the box body 110, specifically, the first plate 210 is installed at two sides of the box body 110 by welding, the second hydraulic cylinder 220 is connected to one side of the first plate 210, specifically, the second hydraulic cylinder 220 is fixedly connected to one side of the first plate 210 by screws, the second plate 230 is installed at an output shaft of the second hydraulic cylinder 220, specifically, the second plate 230 is installed at an output shaft of the second hydraulic cylinder 220 by welding, the cover plate 250 is connected to one side of the second plate 230, specifically, the cover plate 250 is fixedly connected to one side of the second plate 230 by welding, the sealing ring 240 is installed at a peripheral side of the cover plate 250, specifically, the sealing ring 240 is fixedly installed at a peripheral side of the cover plate 250 by gluing, the packing 240 can seal the third through-hole 160 and the cover plate 250, and the tank 110 can be sealed by the second hydraulic cylinder 220, the packing 240, and the cover plate 250.
Referring to fig. 1 and 8, the negative pressure mechanism 30 includes a negative pressure pump 310, a first connection pipe 320, a second connection pipe 330, a check valve 340 and a second phenolphthalein bottle 350, the negative pressure pump 310 is installed at one side of the box body 110, specifically, the negative pressure pump 310 is fixedly installed at one side of the box body 110 by welding, the negative pressure pump 310 is communicated with the box body 110 by the first connection pipe 320, the second phenolphthalein bottle 350 is connected to one side of the box body 110, specifically, the second phenolphthalein bottle 350 is fixedly connected to one side of the box body 110 by gluing, the negative pressure pump 310 is communicated with the second phenolphthalein bottle 350 by the second connection pipe 330, the check valve 340 is installed at the second connection pipe 330, the negative pressure pump 310, the first connection pipe 320, the second connection pipe 330 and the check valve 340 are used for forming negative pressure in the inner cavity of the box body 110.
Referring to fig. 2 and 8, the second phenolphthalein bottle 350 and the first phenolphthalein bottle 190 are filled with a phenolphthalein solution.
Referring to fig. 3, 4 and 5, the driving assembly 140 includes a driving box 141, a first conical gear 143, a threaded rod 144, a second conical gear 146 and a motor 149, the driving box 141 is connected to an output shaft of the first hydraulic cylinder 120, specifically, the driving box 141 is fixedly connected to the output shaft of the first hydraulic cylinder 120 by welding, the motor 149 is mounted on an inner wall of the driving box 141, specifically, the motor 149 is fixedly mounted on the inner wall of the driving box 141 by welding, the first conical gear 143 is connected to the output shaft of the motor 149, specifically, the first conical gear 143 is fixedly connected to the output shaft of the motor 149 by welding, the second conical gear 146 is engaged with the first conical gear 143, the threaded rod 144 is mounted on both sides of the second conical gear 146, specifically, the threaded rod 144 is fixedly mounted on both sides of the second conical gear 146 by welding, the first fixing assembly 150 includes a first long rod 151 and a first chuck 154, first chuck 154 is connected in first stock 151 one side, first screw hole 153 has been seted up to first stock 151, first screw hole 153 and threaded rod 144 threaded connection, first stock 151 one end fixedly connected with first slider 152, it is specific, first stock 151 one end is through the first slider 152 of welded fastening connected with, first spout 142 has been seted up to drive case 141 inner wall, first spout 142 and first slider 152 sliding connection, first through-hole 145 has been seted up to drive case 141 one side, first stock 151 and first through-hole 145 clearance fit, first stock 151 runs through in first through-hole 145, first conical gear 143, threaded rod 144, second conical gear 146 and motor 149 are used for driving first stock 151 and first chuck 154 removal, thereby press from both sides tight vacuum chamber.
In some embodiments, the second fixing assembly 170 includes a second long rod 171 and a second clamping head 174, the second clamping head 174 is connected to one side of the second long rod 171, in particular, the second clamping head 174 is fixedly connected to one side of the second long rod 171 by welding, the second long rod 171 is provided with a second threaded hole 173, the threaded rod 144 is threaded through the second threaded hole 173, one end of the second long rod 171 is fixedly connected with a second sliding block 172, in particular, one end of the second long rod 171 is fixedly connected with a second sliding block 172 by welding, the inner wall of the driving box 141 is provided with a second sliding slot 148, the inner wall of the driving box 141 is provided with a first sliding slot 142, the first sliding slot 142 is slidably connected with the second sliding block 172, one side of the driving box 141 is provided with a second through hole 147, the second long rod 171 is inserted through the second through hole 147, the second long rod 171 is in clearance fit with the second through hole 147, specifically, the four traveling wheels 130 are rotatably connected to one side of the case 110 through bearings, and the number of the traveling wheels 130 is four.
The working principle of the equipment for detecting the leakage of the vacuum cavity comprises the following steps: when the vacuum pump is used, sulfur dioxide is filled into the vacuum cavity, the first hydraulic cylinder 120 is controlled to extend upwards, the first hydraulic cylinder 120 drives the driving box 141 to move upwards, the vacuum cavity is placed on the driving box 141 through the third through hole 160, the motor 149 is turned on, the motor 149 drives the first conical gear 143 to rotate, and the first conical gear 143 drives the second conical gear 146 to rotateThe second bevel gear 146 drives the threaded rod 144 to rotate, the thread directions of the first threaded hole 153 and the second threaded hole 173 are opposite, the threaded rod 144 drives the first long rod 151 and the second long rod 171 to move inwards through the first threaded hole 153 and the second threaded hole 173, the first long rod 151 and the second long rod 171 respectively drive the first chuck 154 and the second chuck 174 to move inwards, the first chuck 154 and the second chuck 174 clamp the fixed vacuum cavity, after clamping, the first hydraulic cylinder 120 is controlled to contract downwards, the first hydraulic cylinder 120 drives the vacuum cavity to enter the inner cavity of the box body 110, then the second hydraulic cylinder 220 is controlled to contract downwards, the second hydraulic cylinder 220 drives the second flat plate 230 to move downwards, the second flat plate 230 drives the sealing ring 240 and the cover plate 250 to move downwards, the sealing ring 240 and the cover plate 250 and the third threaded hole 160 seal the box body 110, and the negative pressure pump 310 is opened, the negative pressure pump 310 can make the box body 110 form negative pressure, if the vacuum cavity leaks, sulfur dioxide can come out of the vacuum cavity, and the sulfur dioxide reacts with water in the first phenolphthalein bottle 190 and the second phenolphthalein bottle 350 to generate H2SO3Red phenolphthalein solution is alkaline and meets H2SO3The neutralization reaction occurs, the solution is not alkaline, so the solution is not red, the observation from the first phenolphthalein bottle 190 is convenient, if the vacuum cavity is not leaked, the liquid of the first phenolphthalein bottle 190 and the second phenolphthalein bottle 350 is red all the time, the purpose of convenient use is achieved, the problems that the existing leakage detection equipment is inconvenient to use, a vacuum leak detector is often used for directly connecting with a product to check, the method is time-consuming, labor-consuming, long in time-consuming and high in detection environment requirement are solved.
It should be noted that the specific model specifications of the first hydraulic cylinder 120, the motor 149, the second hydraulic cylinder 220, and the negative pressure pump 310 need to be determined by type selection according to the actual specification of the device, and the specific type selection calculation method adopts the prior art, so detailed description is omitted.
The power supply of the first hydraulic cylinder 120, the motor 149, the second hydraulic cylinder 220 and the negative pressure pump 310 and the principle thereof will be apparent to those skilled in the art and will not be described in detail herein.
The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention, and various modifications and changes may be made by those skilled in the art. Any modification, equivalent replacement, or improvement made within the spirit and principle of the present invention should be included in the protection scope of the present invention.
Claims (10)
1. An apparatus for leak detection of a vacuum chamber, comprising
The shell mechanism (10), the shell mechanism (10) comprises a box body (110), a first hydraulic cylinder (120), a driving component (140), a first fixing component (150), a second fixing component (170), an observation window (180) and a first phenolphthalein bottle (190), the first hydraulic cylinder (120) is connected to the inner wall of the box body (110), the driving component (140) is installed on an output shaft of the first hydraulic cylinder (120), the first fixing component (150) and the second fixing component (170) are slidably connected to the driving component (140), the driving component (140) can drive the first fixing component (150) and the second fixing component (170) to move, the observation window (180) is embedded on one side of the box body (110), the first phenolphthalein bottle (190) is connected to one side of the observation window (180), and the first phenolphthalein bottle (190) can be observed by the observation window (180), a third through hole (160) is formed in one side of the box body (110);
a sealing mechanism (20), wherein the sealing mechanism (20) comprises a first flat plate (210), a second hydraulic cylinder (220), a second flat plate (230), a sealing ring (240) and a cover plate (250), the first flat plate (210) is installed on two sides of the box body (110), the second hydraulic cylinder (220) is connected to one side of the first flat plate (210), the second flat plate (230) is installed on an output shaft of the second hydraulic cylinder (220), the cover plate (250) is connected to one side of the second flat plate (230), the sealing ring (240) is installed on the periphery side of the cover plate (250), the cover plate (250) is in clearance fit with the third through hole (160), and the sealing ring (240) can seal the third through hole (160) and the cover plate (250);
negative pressure mechanism (30), negative pressure mechanism (30) include negative pressure pump (310), first connecting pipe (320), second connecting pipe (330), check valve (340) and second phenolphthalein bottle (350), negative pressure pump (310) install in box (110) one side, negative pressure pump (310) pass through first connecting pipe (320) with box (110) intercommunication, second phenolphthalein bottle (350) connect in box (110) one side, negative pressure pump (310) pass through second connecting pipe (330) with second phenolphthalein bottle (350) intercommunication, check valve (340) install in second connecting pipe (330).
2. The apparatus for vacuum chamber leak detection according to claim 1, wherein the second phenolphthalein bottle (350) and the first phenolphthalein bottle (190) are both filled with a phenolphthalein solution.
3. The apparatus for vacuum chamber leakage detection according to claim 1, wherein the driving assembly (140) comprises a driving box (141), a first conical gear (143), a threaded rod (144), a second conical gear (146) and a motor (149), the driving box (141) is connected to the output shaft of the first hydraulic cylinder (120), the motor (149) is installed on the inner wall of the driving box (141), the first conical gear (143) is connected to the output shaft of the motor (149), the second conical gear (146) is engaged and connected to the first conical gear (143), and the threaded rod (144) is installed on two sides of the second conical gear (146).
4. The apparatus for vacuum chamber leakage detection according to claim 3, wherein the first fixing assembly (150) comprises a first long rod (151) and a first clamping head (154), the first clamping head (154) is connected to one side of the first long rod (151), the first long rod (151) is provided with a first threaded hole (153), and the first threaded hole (153) is in threaded connection with the threaded rod (144).
5. The device for detecting the leakage of the vacuum cavity according to claim 4, wherein a first sliding block (152) is fixedly connected to one end of the first long rod (151), a first sliding groove (142) is formed in the inner wall of the driving box (141), and the first sliding groove (142) is slidably connected with the first sliding block (152).
6. The apparatus for detecting the leakage of the vacuum chamber according to claim 5, wherein a first through hole (145) is formed at one side of the driving box (141), the first long rod (151) is in clearance fit with the first through hole (145), and the first long rod (151) penetrates through the first through hole (145).
7. The apparatus for detecting the leakage of the vacuum chamber according to claim 6, wherein the second fixing assembly (170) comprises a second long rod (171) and a second clamping head (174), the second clamping head (174) is connected to one side of the second long rod (171), the second long rod (171) is provided with a second threaded hole (173), and the threaded rod (144) is threaded through the second threaded hole (173).
8. The device for detecting the leakage of the vacuum cavity according to claim 7, wherein one end of the second long rod (171) is fixedly connected with a second sliding block (172), a second sliding groove (148) is formed in the inner wall of the driving box (141), and the first sliding groove (142) is slidably connected with the second sliding block (172).
9. The apparatus for detecting the leakage of the vacuum cavity according to claim 8, wherein a second through hole (147) is opened at one side of the driving box (141), the second long rod (171) penetrates through the second through hole (147), and the second long rod (171) is in clearance fit with the second through hole (147).
10. The apparatus for detecting the leakage of the vacuum chamber according to claim 1, wherein the box body (110) is rotatably connected with four walking wheels (130) on one side, and the number of the walking wheels (130) is four.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202021141170.9U CN212363583U (en) | 2020-06-18 | 2020-06-18 | Equipment for detecting leakage of vacuum cavity |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202021141170.9U CN212363583U (en) | 2020-06-18 | 2020-06-18 | Equipment for detecting leakage of vacuum cavity |
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| CN212363583U true CN212363583U (en) | 2021-01-15 |
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| CN202021141170.9U Active CN212363583U (en) | 2020-06-18 | 2020-06-18 | Equipment for detecting leakage of vacuum cavity |
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