CN212335272U - Horizontal vacuum evaporation rainbow film apparatus for producing - Google Patents

Horizontal vacuum evaporation rainbow film apparatus for producing Download PDF

Info

Publication number
CN212335272U
CN212335272U CN202021093817.5U CN202021093817U CN212335272U CN 212335272 U CN212335272 U CN 212335272U CN 202021093817 U CN202021093817 U CN 202021093817U CN 212335272 U CN212335272 U CN 212335272U
Authority
CN
China
Prior art keywords
evaporation
vacuum
rotating shaft
hollow rotating
main drum
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CN202021093817.5U
Other languages
Chinese (zh)
Inventor
刘思远
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hefei Huiyao Vacuum Material Co ltd
Original Assignee
Hefei Huiyao Vacuum Material Co ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hefei Huiyao Vacuum Material Co ltd filed Critical Hefei Huiyao Vacuum Material Co ltd
Priority to CN202021093817.5U priority Critical patent/CN212335272U/en
Application granted granted Critical
Publication of CN212335272U publication Critical patent/CN212335272U/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Landscapes

  • Physical Vapour Deposition (AREA)

Abstract

The utility model relates to the technical field of vacuum evaporation, in particular to a horizontal vacuum evaporation rainbow film production device; the device comprises a vacuum chamber, wherein an unwinding roller, a winding roller and a plurality of guide rollers are arranged in the vacuum chamber, an evaporation substrate is arranged on the unwinding roller, an evaporation chamber is arranged at the lower end of an inner cavity of the vacuum chamber, a color bar control plate is rotatably arranged in the evaporation chamber, the color bar control plate comprises a hollow rotating shaft, the axis direction of the hollow rotating shaft is parallel to the axis direction of a main drum, two flow isolating plates are uniformly arranged on the hollow rotating shaft, and one end of the hollow rotating shaft is connected with a driving motor for driving the color bar control plate to rotate; the utility model discloses a horizontal vacuum evaporation coating rainbow film apparatus for producing can improve the vacuum evaporation coating mode of traditional vertical rainbow film for the vacuum evaporation coating of horizontal rainbow strip, and it keeps off the flow effect through the rotation of coloured bar control panel to realize the different thickness of cladding material on the control coating by vaporization substrate edge rolling direction, its vacuum coating mode is novel, the effect is excellent.

Description

Horizontal vacuum evaporation rainbow film apparatus for producing
Technical Field
The utility model relates to a vacuum evaporation technical field, concretely relates to horizontal vacuum evaporation rainbow film apparatus for producing.
Background
The process of heating the target material to sublimate and plate the target material on the surface of the substrate in a vacuum environment is called vacuum coating. The vacuum coating is characterized in that a target material (such as zinc sulfide) is heated and sublimated to be coated on the surface of a rolled film material (a PTE film, a PP film, an OPP film, a light-reflecting plant film and the like) in a vacuum environment, and then the zinc sulfide layer on the rolled film material presents a color, so that the rolled film material is bright in appearance. Currently, the reflective films prepared by vacuum evaporation are classified into high-brightness single-color reflective films and multi-color reflective films (i.e., rainbow films). The thickness of the target material plated on the surface of the film rolling material is required to be uniform in the preparation process of the monochromatic highlight reflective film, so that a film surface with a single color is presented under light; the preparation of the rainbow film is just opposite to that of the highlight reflective film, and the thickness of a target material plated on the surface of a coiled material needs to be controlled to be non-uniform in the preparation process, and then the rainbow film presents with colorful film surfaces under the irradiation of light.
The coating by vaporization principle of traditional rainbow film is through the top of evaporating bath in vacuum chamber at the uniform velocity of a film material will be rolled up through a draw gear, because the interval and the dislocation set of a plurality of evaporation boats in its evaporating bath to be the state of dispersing during the target evaporation, thereby it is inhomogeneous to plate the thickness on rolling up the film material when making the target evaporate sublimation, and it is different to the interference of light in the target cladding material of different thickness, thereby demonstrate colorful membrane face on vertical. For example, the invention with the patent number of CN109468591A discloses a method for preparing a colorful reflective film by a vacuum evaporation process, which comprises the steps of loading a base film of a plant to be plated into an evaporation chamber, then carrying out low-temperature cooling on a main drum, placing molybdenum boats in evaporation tanks, wherein evaporation targets are arrayed, ensuring that the distances from each part of the evaporation targets to the bottom end of the central main drum are different, closing cover plates of the evaporation tanks, then sending the evaporation tanks into the evaporation chamber, and vacuumizing the evaporation chamber; the reflective colorful film obtained by evaporation through the method has excellent effect, but in the vacuum true plating process of the film rolling material, the obtained colorful film can only present rainbow strips in the longitudinal direction, and meanwhile, the application range of the obtained colorful film is limited due to the limited width of the film rolling material, and the obtained colorful film can only be used for short reflective strips on clothes and sports shoes, and can not be used for the fields of woven belts with long length and the like, so that the application field of the vacuum plated colorful film is greatly limited, and the economic value brought by the method is also greatly inhibited. Aiming at the defect that the existing vacuum coating can only carry out longitudinal evaporation, the design of production equipment capable of carrying out transverse vacuum evaporation on the rainbow film is a technical problem to be solved.
SUMMERY OF THE UTILITY MODEL
The utility model aims to solve the technical problem that a horizontal vacuum evaporation rainbow film apparatus for producing has been designed to solve current vacuum evaporation rainbow film technique and can only vertically evaporate the rainbow film, can't realize the not enough of horizontal evaporation rainbow film.
The utility model discloses a realize through following technical scheme:
a horizontal vacuum evaporation rainbow film production device comprises a vacuum bin, wherein an unwinding roller, a winding roller and a plurality of guide rollers are arranged in the vacuum bin, an evaporation substrate is arranged on the unwinding roller, a winding motor is arranged at one end of the winding roller, an evaporation chamber is arranged at the lower end of an inner cavity of the vacuum bin, a vacuumizing system is arranged outside the vacuum bin and communicated with the vacuum bin, a main drum is arranged in the vacuum bin, a control motor is arranged at one end of the main drum, a drum surface at the lower end of the main drum extends into the evaporation chamber, a hollow inner cavity of the main drum is connected with a cooling system, the evaporation substrate is sequentially wound on the winding roller through the guide rollers, the main drum and the guide rollers, a bottom wall of the evaporation chamber under the main drum is provided with the color bar control panel, and the color bar control panel is rotatably arranged inside the evaporation chamber between the main drum and an evaporation source, the color bar control panel comprises a hollow rotating shaft, the axis direction of the hollow rotating shaft is parallel to the axis direction of the main drum, a flow isolating plate is arranged on the hollow rotating shaft, one end of the hollow rotating shaft is connected with a driving motor used for driving the color bar control panel to rotate, and a heating device is arranged in an inner cavity of the hollow rotating shaft.
As a further arrangement of the scheme, the heating device is a heat conduction oil heating device, and high-temperature heat conduction oil in the heat conduction oil heating device is introduced into an inner cavity of the hollow rotating shaft; the heat conduction oil heating device leads external high-temperature heat conduction oil into the inner cavity of the hollow rotating shaft, and then the whole color bar control plate keeps high temperature under the action of heat conduction.
As a further arrangement of the above scheme, the heating device is a resistance heating device, and the resistance heating device is directly arranged in the inner cavity of the hollow rotating shaft; the resistance heating device can directly generate heat in the inner cavity of the middle idle shaft, and then the whole color bar control plate is kept at a high temperature through the action of heat conduction.
As a further arrangement of the above scheme, the evaporation source includes an evaporation tank, a first electrode column and a second electrode column are arranged in the evaporation tank, a plurality of evaporation boats continuously arranged side by side are arranged between the first electrode column and the second electrode column, and evaporation targets are placed in the evaporation boats.
As a further arrangement of the above scheme, the vacuum pumping system comprises a mechanical pump and a diffusion pump which are arranged outside the vacuum chamber, vacuum tubes are connected to the mechanical pump and the diffusion pump, valves are arranged on the vacuum tubes, and the ends of the vacuum tubes are connected with the vacuum chamber; the whole vacuum-pumping system can ensure that the pressure in the vacuum bin keeps close to a vacuum state in the vacuum evaporation process.
As a further arrangement of the scheme, the cooling system is a Freon forced refrigeration system which is connected with the hollow inner cavity of the main drum through a pipeline; the refrigerating effect of the Freon forced refrigerating system is obvious, and the refrigerating system in the device is preferred.
Traditional vertical rainbow film vacuum evaporation, mainly through a plurality of evaporation boat intervals in with the evaporation tank, dislocation set, then through positive negative electrode post to evaporation boat ohmic heating, the evaporation target (such as zinc sulfide, magnesium fluoride etc.) of placing in the evaporation boat sublimes under the high temperature effect, and be divergent state upward movement in following the evaporation tank, until move to evaporation coating substrate (such as PTE under the main drum) department on the periphery and attach to its surface, because evaporation coating target upward movement in-process is the state of dispersing, lead to appearing the part of mutual overlapping, thereby make the thickness on the evaporation coating target layer of attaching to the evaporation coating substrate inhomogeneous, and the target cladding material of different thickness is to having different interference effect to light, thereby make the face after the evaporation coating present multiple colour (refer to figure 3) in vertical. However, the width of the evaporation coating base material (such as a PTE film, an OPP film and the like) is limited and generally does not exceed 1200mm, so that the prepared rainbow film cannot be cut into longer woven tapes or filaments in specific application, the application field of the whole longitudinal rainbow film cannot be limited, and the whole rainbow film product is greatly limited.
And the horizontal vacuum evaporation rainbow film apparatus for producing of this application is when carrying out vacuum evaporation to the coating by vaporization substrate, its coating by vaporization target sets up in succession side by side, in the coating by vaporization target sublimation in-process, owing to receive the blocking effect of the various strip control panel of rotation state and the rolling transmission of coating by vaporization substrate self, make along the rolling direction (be horizontal) on the coating by vaporization substrate surface target cladding material thickness different, simultaneously because the axis direction of cavity pivot and the axis direction parallel arrangement of main drum, make same vertical coating by vaporization target thickness the same on the coating by vaporization substrate, thereby demonstrate horizontal rainbow strip (refer to figure 4). The application obtains horizontal coating by vaporization coating rainbow film when concrete application, because the length (the rolling length that the membrane was rolled up) of coating by vaporization substrate (like PTE, OPP membrane etc.) is longer, consequently can cut into extensive applications such as longer meshbelt, filament with it and other fields.
Has the advantages that:
1. the utility model discloses a horizontal vacuum evaporation rainbow film apparatus for producing can improve the vacuum evaporation plating mode of traditional vertical rainbow film for the vacuum evaporation plating of horizontal rainbow film, and it keeps off the flow effect through the rotation of various strip control panel to realize the different thickness of cladding material on the control coating by vaporization substrate edge rolling direction, its vacuum coating mode is novel, the effect is excellent.
2. The utility model discloses the horizontal rainbow film of preparation is the same at the vertical ascending colour in the face of membrane, and at the horizontal ascending multiple colour that presents of face of membrane, effectively solved the not enough of current vacuum evaporation plating machine can only produce vertical rainbow film, and the horizontal rainbow film of its preparation has effectively solved current vertical rainbow film and has leaded to the limited problem of its application because of the coating by vaporization substrate broad width is limited, can the horizontal rainbow film of large-scale production, makes the horizontal rainbow film of preparation have high economic value.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings used in the description of the embodiments will be briefly introduced below, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and it is obvious for those skilled in the art that other drawings can be obtained according to these drawings without creative efforts.
FIG. 1 is a plan view of the interior of a vacuum chamber according to the present invention;
FIG. 2 is a plan view of the interior of the evaporation chamber of the present invention;
FIG. 3 is a schematic diagram illustrating a vacuum evaporation principle of a conventional longitudinal rainbow film;
fig. 4 is a schematic plan view of the horizontal vacuum evaporation rainbow film prepared by the present invention.
Detailed Description
In order to make the technical solutions better understood by those skilled in the art, the technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the drawings in the embodiments of the present application, and it is obvious that the described embodiments are only partial embodiments of the present application, but not all embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present application.
It should be noted that the terms "first," "second," and the like in the description and claims of this application and in the drawings described above are used for distinguishing between similar elements and not necessarily for describing a particular sequential or chronological order. It should be understood that the data so used may be interchanged under appropriate circumstances such that embodiments of the application described herein may be used. Furthermore, the terms "comprises," "comprising," and "having," and any variations thereof, are intended to cover a non-exclusive inclusion, such that a process, method, system, article, or apparatus that comprises a list of steps or elements is not necessarily limited to those steps or elements expressly listed, but may include other steps or elements not expressly listed or inherent to such process, method, article, or apparatus.
In this application, the terms "upper", "lower", "left", "right", "front", "rear", "top", "bottom", "inner", "outer", "middle", "vertical", "horizontal", "lateral", "longitudinal", and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings. These terms are used primarily to better describe the invention and its embodiments, and are not intended to limit the indicated devices, elements or components to a particular orientation or to be constructed and operated in a particular orientation.
Moreover, some of the above terms may be used to indicate other meanings besides the orientation or positional relationship, for example, the term "on" may also be used to indicate some kind of attachment or connection relationship in some cases. The specific meaning of these terms in the present invention can be understood by those of ordinary skill in the art as appropriate.
Furthermore, the terms "mounted," "disposed," "provided," "connected," and "sleeved" are to be construed broadly. For example, it may be a fixed connection, a removable connection, or a unitary construction; can be a mechanical connection, or an electrical connection; may be directly connected, or indirectly connected through intervening media, or may be in internal communication between two devices, elements or components. The specific meaning of the above terms in the present invention can be understood according to specific situations by those skilled in the art.
The present invention will be further described with reference to the accompanying fig. 1-2.
The utility model provides a device for producing horizontal vacuum evaporation rainbow film specially, refer to figure 1, its major structure includes a vacuum chamber 1, is provided with unwinding roller 2, wind-up roll 3 and a plurality of guide roll 4 in vacuum chamber 1. The unwinding roll 2 is provided with a deposition substrate 5, and the deposition substrate 5 is of a wide variety, and specifically, a PTE film, a PP film, an OPP film, a light-reflecting plant film, and the like can be selected, but the deposition substrate 5 is not limited to the above materials. A winding motor (not shown in the figure) is arranged at one end part of the winding roller 2, and the driving action of the winding motor plays a role in drawing the evaporation substrate 5.
The lower end of the inner cavity of the vacuum chamber 1 is provided with an evaporation chamber 6, and the outside of the vacuum chamber 1 is provided with a vacuum pumping system (not shown in the figure), because the vacuum pumping system in the vacuum evaporation machine is the prior art, the drawing is not shown here, the whole vacuum pumping system simply comprises a mechanical pump and a diffusion pump which are arranged outside the vacuum chamber 1, vacuum tubes are connected to the mechanical pump and the diffusion pump, valves are arranged on the vacuum tubes, the end parts of the vacuum tubes are connected with the vacuum chamber, and the pressure inside the vacuum chamber 1 in the vacuum evaporation process can be kept at 1.3 multiplied by 10 under the action of the mechanical pump and the diffusion pump0To 1.3X 10-4In the Pa range.
The vacuum chamber 1 is provided with a main drum 7, one end part of the main drum 7 is provided with a control motor (not shown in the figure), the lower end drum surface of the main drum 7 extends into the evaporation chamber 6, a hollow inner cavity of the main drum 7 is connected with a cooling system, the cooling system is also in the prior art and is not shown in the figure, particularly, the cooling system is a commonly used Freon forced refrigeration system, and the Freon forced refrigeration system is connected with the hollow inner cavity of the main drum 7 through a pipeline, so that the rapid cooling effect is achieved. In the vacuum coating process, the evaporation substrate 5 is sequentially wound on the winding roller 3 through the guide roller 4, the main drum 7 and the guide roller 4.
Referring to fig. 1 and 2, an evaporation source 8 is disposed on the bottom wall of the evaporation chamber 6 located right below the main drum 7, the evaporation source 8 is the same as a common vacuum evaporation monochromatic highlight film, and mainly includes an evaporation tank 801, a first electrode column 802 and a second electrode column 803 are disposed in the evaporation tank 801, a plurality of evaporation boats 804 continuously disposed side by side are disposed between the first electrode column 802 and the second electrode column 803, and then an evaporation target (not shown in the figure) is disposed in the evaporation boats 804, and the evaporation target is most commonly made of materials such as zinc sulfide, magnesium fluoride, tin oxide, silicon dioxide, tantalum pentoxide, and the like.
Referring to fig. 1 and 2, the key technical point of the present invention is that a color bar control plate 9 is disposed inside an evaporation chamber 6 between a main drum 7 and an evaporation source 8, and specifically, the color bar control plate 9 includes a hollow rotating shaft 901, and when the color bar control plate is disposed, it is necessary to notice that the axial direction of the idle shaft 901 is parallel to the axial direction of the main drum 7, and then a flow separation plate 902 is disposed on the hollow rotating shaft 901, and a driving motor 10 for driving the color bar control plate 9 to rotate is connected to one end of the hollow rotating shaft 902. The color bar control plate 9 arranged at the position can play a flow choking role on the vapor deposition target material which moves upwards in the sublimation and upward movement process of the vapor deposition target material. For example, when the flow divider 902 rotates to be vertical, the flow divider 902 cannot block the moving evaporation target, and the upward moving evaporation target can move upward and plate on the surface of the evaporation substrate 5; when the flow divider 902 is rotated to a non-vertical state, the flow divider 902 can block a portion of the evaporation target moving upward in the vertical direction, so that the thickness of the evaporation target on the surface of the evaporation substrate 5 is thinner than that of the evaporation target. According to the above principle, the deposition substrate 5 is subjected to the flow separation action of the flow separation plate 902 at different angles during the drawing process, so that the thickness of the plating layer along the drawing direction (i.e., the transverse direction) of the deposition substrate is not uniform, and the film surface is colored.
In addition, because the temperature is higher when the evaporation target material sublimes, easily condenses when running into the lower object of temperature to cause a large amount of evaporation target material extravagant, consequently this device still is provided with heating device (not drawn in the picture) in color bar control panel 9. The heating device has various implementation modes, and two modes, namely heat conduction oil heating and resistance heating, are exemplified here, but the actual process is not limited to the two modes.
Specifically, the first heating device is a heat conduction oil heating device (not shown in the figure), and when the first heating device is set, high-temperature heat conduction oil in the heat conduction oil heating device is introduced into the inner cavity of the hollow rotating shaft 901, and then the whole color bar control plate 9 is kept at a higher temperature through the effect of heat conduction. The second heating device is a resistance heating device, which directly sets a resistance heating device (such as a resistance heating wire) in the inner cavity of the hollow rotating shaft 901 when setting, and the resistance heating device can directly generate heat in the inner cavity of the hollow rotating shaft 901, and then the whole color bar control board 9 is kept at a high temperature by the action of heat conduction.
The above description is only exemplary of the present invention and should not be taken as limiting the scope of the present invention, as any modifications, equivalents, improvements and the like made within the spirit and principles of the present invention are intended to be included within the scope of the present invention.

Claims (6)

1. A horizontal vacuum evaporation rainbow film production device comprises a vacuum bin, wherein an unwinding roller, a winding roller and a plurality of guide rollers are arranged in the vacuum bin, an evaporation substrate is arranged on the unwinding roller, a winding motor is arranged at one end of the winding roller, an evaporation chamber is arranged at the lower end of an inner cavity of the vacuum bin, a vacuum pumping system is arranged outside the vacuum bin and communicated with the vacuum bin, a main drum is arranged in the vacuum bin, a control motor is arranged at one end of the main drum, a drum surface at the lower end of the main drum extends into the evaporation chamber, a hollow inner cavity of the main drum is connected with a cooling system, the evaporation substrate is sequentially wound on the winding roller through the guide rollers, the main drum and the guide rollers, an evaporation source is arranged on the bottom wall of the evaporation chamber under the main drum, and the horizontal vacuum evaporation rainbow film production device is characterized in that an evaporation chamber between the main drum and the evaporation source is rotatably provided with a colorful strip control panel, the color bar control panel comprises a hollow rotating shaft, the axis direction of the hollow rotating shaft is parallel to the axis direction of the main drum, a flow isolating plate is arranged on the hollow rotating shaft, one end of the hollow rotating shaft is connected with a driving motor used for driving the color bar control panel to rotate, and a heating device is arranged in an inner cavity of the hollow rotating shaft.
2. The device for producing rainbow film by vacuum evaporation according to claim 1, wherein: the heating device is a heat conduction oil heating device, and high-temperature heat conduction oil in the heat conduction oil heating device is introduced into the inner cavity of the hollow rotating shaft.
3. The device for producing rainbow film by vacuum evaporation according to claim 1, wherein: the heating device is a resistance heating device which is directly arranged in the inner cavity of the hollow rotating shaft.
4. The device for producing rainbow film by vacuum evaporation according to claim 1, wherein: the evaporation source comprises an evaporation tank, a first electrode column and a second electrode column are arranged in the evaporation tank, a plurality of evaporation boats which are continuously arranged side by side are arranged between the first electrode column and the second electrode column, and evaporation targets are placed in the evaporation boats.
5. The device for producing rainbow film by vacuum evaporation according to claim 1, wherein: the vacuum pumping system comprises a mechanical pump and a diffusion pump which are arranged outside the vacuum bin, vacuum tubes are connected to the mechanical pump and the diffusion pump, valves are arranged on the vacuum tubes, and the end portions of the vacuum tubes are connected with the vacuum bin.
6. The device for producing rainbow film by vacuum evaporation according to claim 1, wherein: the cooling system is a Freon forced refrigeration system which is connected with the hollow inner cavity of the main drum through a pipeline.
CN202021093817.5U 2020-06-15 2020-06-15 Horizontal vacuum evaporation rainbow film apparatus for producing Active CN212335272U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202021093817.5U CN212335272U (en) 2020-06-15 2020-06-15 Horizontal vacuum evaporation rainbow film apparatus for producing

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202021093817.5U CN212335272U (en) 2020-06-15 2020-06-15 Horizontal vacuum evaporation rainbow film apparatus for producing

Publications (1)

Publication Number Publication Date
CN212335272U true CN212335272U (en) 2021-01-12

Family

ID=74077542

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202021093817.5U Active CN212335272U (en) 2020-06-15 2020-06-15 Horizontal vacuum evaporation rainbow film apparatus for producing

Country Status (1)

Country Link
CN (1) CN212335272U (en)

Similar Documents

Publication Publication Date Title
CN111501008B (en) Horizontal vacuum evaporation rainbow film production device and film coating process thereof
WO2022047947A1 (en) Multi-roller vacuum coating device
CN101768726A (en) Continuous winding magnetic control sputtering vacuum coating device
CN212199409U (en) Double-sided deposition magnetic control vacuum winding coating equipment
CN212335272U (en) Horizontal vacuum evaporation rainbow film apparatus for producing
CN201326012Y (en) A continuous winding-type magnetron sputtering vacuum plating equipment
CN108624860A (en) A kind of two-sided round-trip continuous vacuum coating equipment
CN108642470A (en) A kind of band multicell continuous vacuum plasma coating system
CN112877670A (en) Bead-planted film vacuum evaporation equipment with crucible as evaporation source and film coating process
CN104862650A (en) Flexible substrate vacuum evaporation device and vacuum evaporation method
CN111501009A (en) Production device for vacuum evaporation of rainbow film with various textures and film coating process thereof
CN214572197U (en) Take coiling formula vacuum coating machine of cryrogenic main roll
CN112795895B (en) Vacuum film penetrating mechanism for winding type vacuum film plating machine
CN109355634A (en) The vacuum deposition apparatus of two-sided continuous coating
CN114411111A (en) Flexible substrate coating device and coating method
US3895129A (en) Method for metallizing plastic film
CN114086147B (en) Winding type vacuum coating equipment for preparing photonic crystal film
CN212335279U (en) Transverse rainbow film production device with regular prism-shaped main drum
CN111501007B (en) Transverse rainbow film production device with regular prism-shaped main drum and film coating process thereof
CN212335271U (en) Various line vacuum evaporation rainbow film apparatus for producing
EP3491161A1 (en) Deposition apparatus
CN214572211U (en) Vacuum film penetrating mechanism for winding type vacuum film coating machine
CN209584358U (en) A kind of roll-to-roll vacuum coating equipment of continuity
CN104674180A (en) Quick target-exchange double-sided reciprocating continuous-coating magnetron sputtering winding coating machine
KR102228228B1 (en) Rotatable plane evaporation source for high resolution OLED fabracation

Legal Events

Date Code Title Description
GR01 Patent grant
GR01 Patent grant